Column type image measuring instrument

Abstract

The utility model relates to a column type image measuring instrument, and relates to the technical field of imagers. The stand column type image measuring instrument comprises a workbench, a lens and a light source, the workbench comprises a base, a stand column, a movement assembly and an objective table, the movement assembly is installed on the base, and the objective table is installed on the side, opposite to the base, of the movement assembly. The lens is installed on the stand column and can be controlled to move in the third direction. The light source is arranged on the side, connected with the moving assembly, of the base. The moving assembly comprises a first driving mechanism, a second driving mechanism and a transition plate, the first driving mechanism is installed on the base, the two sides of the transition plate are flexibly connected with the first driving mechanism and the second driving mechanism correspondingly, and the first driving mechanism can drive the transition plate to move in the first direction; the objective table is arranged on the side, opposite to the transition plate, of the second driving mechanism and can be driven by the second driving mechanism to move in the second direction. According to the invention, the problem of poor measurement result caused by jittering when position deviation occurs in hard connection can be avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of image measuring instruments, in particular to a column type image measuring instrument. BACKGROUND

[0002] The column type image measuring instrument can scan a workpiece to obtain image features of the workpiece. An operator can perform image comparison to intuitively determine possible deviations in the measurement results.

[0003] In the process of measuring a large workpiece, the lens of the column type image measuring instrument needs to capture different parts of the workpiece, at which time the workbench needs to be moved horizontally and captured. However, the motion system in the related art is difficult to guarantee the control accuracy and motion straightness during movement, which directly leads to poor measurement results. CONTENT OF THE UTILITY MODEL

[0004] Therefore, it is necessary to provide a column type image measuring instrument to solve the problem of poor measurement results during movement of the column type image measuring instrument.

[0005] To achieve the above-mentioned purpose, the technical solution adopted by the present application is as follows:

[0006] The present application provides a column type image measuring instrument, comprising:

[0007] a workbench, a column, a motion assembly, and a worktable, the motion assembly is installed on the base, the worktable is installed on the side of the motion assembly away from the base, the column is arranged above the base along a third direction and is fixed to one end of the base;

[0008] a lens, which is installed on the column and can be controlled to move along the third direction;

[0009] a light source, which is arranged on the side of the base connected with the motion assembly;

[0010] The motion assembly comprises a first driving mechanism, a second driving mechanism, and a transition plate, the first driving mechanism is installed on the base, the transition plate is flexibly connected with the first driving mechanism and the second driving mechanism on both sides, the first driving mechanism can drive the transition plate to move along a first direction, the worktable is arranged on the side of the second driving mechanism away from the transition plate and can move along a second direction under the driving of the second driving mechanism;

[0011] Any two of the first direction, the second direction, and the third direction are perpendicular to each other.

[0012] In one of the embodiments of the first aspect, the light source comprises a light emitting element and a mounting bracket, the light emitting element is fixed to the mounting bracket, the mounting bracket is mounted to the side of the base connected with the movement assembly, and the mounting bracket is provided with a first sliding groove and a second sliding groove;

[0013] The base is provided with a first limiting pin and a second limiting pin, the first limiting pin is arranged in the first sliding groove, and the second limiting pin is arranged in the second sliding groove, the first sliding groove is arranged in the first direction, and the second sliding groove is arranged in the second direction.

[0014] In one of the embodiments of the first aspect, the stage is provided with a light transmission hole, the light transmission hole is covered with a glass plate, the light transmission hole is arranged above the light source in the third direction, so that the emitted light of the light source can penetrate the glass plate, and the lens is arranged above the stage in the third direction.

[0015] In one of the embodiments of the first aspect, the first driving mechanism comprises a first motor, a first screw rod and a first nut, the output end of the first motor is connected with the first screw rod, the first screw rod is arranged in parallel with the first direction, the first nut is threadedly connected with the first screw rod, and the transition plate is connected with the first nut.

[0016] The second driving mechanism comprises a second motor, a second screw rod and a second nut, the output end of the second motor is connected with the second screw rod, the second screw rod is arranged in parallel with the second direction, the second nut is threadedly connected with the second screw rod, and the stage is connected with the second nut.

[0017] In one of the embodiments of the first aspect, the movement assembly further comprises two connecting blocks, the first nut and the second nut are each provided with an insertion plate, one side of each insertion plate is provided with a top pin, each connecting block is provided with a groove, each insertion plate is inserted into the groove, and each top pin abuts against the side wall of the corresponding groove.

[0018] In one of the embodiments of the first aspect, at least one elastic element is arranged in each groove, and both ends of each elastic element abut against a corresponding group of groove side walls and the insertion plate.

[0019] In one of the embodiments of the first aspect, the movement assembly further comprises at least one first guide rail and at least one second guide rail, each first guide rail is provided with at least one slidingly matched first guide block, each second guide rail is provided with at least one slidingly matched second guide block, the first guide block is connected with the transition plate, and the second guide block is connected with the transition plate.

[0020] In one of the embodiments of the first aspect, two first guide rails are provided, and the first driving mechanism is arranged between the two first guide rails.

[0021] In one of the embodiments of the first aspect, two second guide rails are provided, and the second driving mechanism is arranged on one side of one of the second guide rails away from the other second guide rail, and the second driving mechanism is connected to the side of the object table.

[0022] In one of the embodiments of the first aspect, the motion assembly further comprises a first anti-rotation guide rail, a first anti-rotation sliding block, a second anti-rotation guide rail, and a second anti-rotation sliding block. The first anti-rotation guide rail is mounted on one side of the transition plate close to the base. The first anti-rotation sliding block is mounted on the first nut and is in sliding cooperation with the first anti-rotation guide rail. The second anti-rotation guide rail is mounted on the side of the object table. The second anti-rotation sliding block is mounted on the second nut and is in sliding cooperation with the second anti-rotation guide rail.

[0023] Compared with the related art, the application has the following beneficial effects: the application provides a column type image measuring instrument, which comprises a workbench, a lens, and a light source. The workbench comprises a base, a column, a motion assembly, and an object table. A workpiece to be measured is placed on the object table. The light source is located below the object table and irradiates the workpiece. The lens is installed on the column and located above the object table to measure the image of the workpiece. The motion assembly comprises a first driving mechanism, a second driving mechanism, and a transition plate. The transition plate is flexibly connected to the first driving mechanism and the second driving mechanism. In this way, during the movement of the object table, the flexible connection of the transition plate effectively reduces the running noise of the motion system and avoids the occurrence of position deviation of the hard connection, thereby avoiding the problem of poor measurement results caused by shaking. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the application, and for those skilled in the art, other drawings can also be obtained without creative labor based on these drawings.

[0025] Figure 1 FIG. 1 is a schematic diagram of the axial structure of the column type image measuring instrument in some embodiments of the application;

[0026] Figure 2 FIG. 2 is a top view of the first driving mechanism in some embodiments of the application;

[0027] Figure 3 FIG. 3 is a top view of the column type image measuring instrument in some embodiments of the application;

[0028] Figure 4 A schematic view of a top structure of a second driving mechanism in some embodiments of the present application;

[0029] Figure 5 A schematic view of a structure of a connecting block in some embodiments of the present application;

[0030] Figure 6 A schematic view of a structure of a second anti-rotation guide rail in some embodiments of the present application;

[0031] Figure 7 A schematic view of a structure of a light source in some embodiments of the present application.

[0032] Explanation of reference signs:

[0033] 100, a column type image measuring instrument; 110, a workbench; 111, a base; 1111, a first limit pin; 1112, a second limit pin; 112, a motion assembly; 1121, a first driving mechanism; 11211, a first motor; 11212, a first nut; 11213, a first screw rod; 1122, a transition plate; 11221, a through hole; 1123, a first guide slider; 1124, a first guide rail; 1125, a first anti-rotation guide rail; 1126, a second driving mechanism; 11261, a second motor; 11262, a second nut; 112621, an insertion plate; 11263, a second screw rod; 11264, a second anti-rotation slider; 1127, a second guide rail; 1128, a second guide slider; 1129, a second anti-rotation guide rail; 11210, a connecting block; 112101, a groove; 112102, a top pin; 112103, an elastic member; 113, a sample stage; 114, a column; 115, a glass plate; 120, a lens; 130, a light source; 131, a light emitting member; 132, a mounting bracket; 1321, a first sliding groove; 1322, a second sliding groove;

[0034] x, a second direction; y, a first direction; z, a third direction. DETAILED DESCRIPTION

[0035] In order to make the above objectives, features and advantages of the present application more apparent, specific embodiments of the present application are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in a number of ways beyond the specific embodiments described and claimed herein. It is therefore intended that the present application not be limited in scope to the specific embodiments disclosed but rather that the scope of the present application be measured by the broadest permissible interpretation of the claims that follow. It is to be understood that the features mentioned hereinabove and illustrated in the accompanying drawings are intended to be merely exemplary and are therefore to be interpreted in a non-limiting and illustrative manner.

[0036] In the description of the present application, it should be understood that, if there are terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0037] In addition, if the term "and / or" appears, "and / or" only describes the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B, which can represent three cases of A existing alone, A and B existing together, and B existing alone. In addition, the character " / " herein generally represents that the front and rear associated objects have an "or" relationship. If the terms "first", "second" appear, these terms are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, if the term "multiple" appears, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise explicitly specified and limited.

[0038] In the present application, unless otherwise explicitly specified and limited, if the terms "mounting", "connecting", "connecting", "fixing" and the like appear, these terms should be understood in a broad sense. For example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0039] In the present application, unless otherwise explicitly specified and limited, if the first feature appears "on" or "under" the second feature or similar description, the meaning can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" of the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" of the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0040] It is to be noted that when an element is referred to as being "on" or "connected to" another element, it can be directly on or connected to the other element or intervening elements can be present. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0041] Referring to Figure 1 As shown, the embodiment of the present application provides a column type image measuring instrument 100, which is also used for image scanning detection of a workpiece, and guarantees the measurement effect during the movement of the workpiece.

[0042] Referring to Figure 1 Specifically, the column type image measuring instrument 100 includes a workbench 110, a lens 120 and a light source 130. The light source 130 is installed on the top surface of the workbench 110 to illuminate the workpiece and highlight the edge or image features of the workpiece after the workpiece is placed on the workbench 110. The lens 120 is arranged above the workpiece and can move up and down relative to the workbench 110 to adjust the height of image acquisition of the workpiece.

[0043] Further, the workbench 110 includes a base 111, a movement assembly 112 and a stage 113. The base 111 is in contact with the ground and provides support for the movement assembly 112 and the stage 113. The movement assembly 112 is installed on the base 111, and the stage 113 is installed on the side of the movement assembly 112 away from the base 111 and can move along a first direction y and a second direction x under the driving of the movement assembly 112. In this way, after the workpiece is placed on the stage 113, the adjustment of the shooting position of the workpiece is realized according to the position movement of the stage 113.

[0044] Further, the lens 120 is installed on the side of the base 111 where the stage 113 is provided and can be controlled to move along a third direction z.

[0045] Specifically, the top of the base 111 is provided with a column 114, which is located on one side of the base 111, and the lens 120 is installed on the column 114. A sliding rail structure can be correspondingly arranged on the column 114 to enable the lens 120 to move up and down relative to the column 114. In this way, the shooting end of the lens 120 can be adjusted up and down according to the user's needs when acquiring the image of the workpiece, so as to realize the relative movement of the workpiece and the lens 120 in the first direction y, the second direction x and the third direction z respectively, in combination with the movement assembly 112, so as to reach the best shooting angle of the workpiece.

[0046] It can be understood that any two of the first direction y, the second direction x and the third direction z are perpendicular to each other.

[0047] Further, the light source 130 is arranged on the side where the base 111 is connected with the motion assembly 112. For example, the light source 130 can include coaxial light, bottom light, etc., and can penetrate the motion assembly 112 to irradiate light on the workpiece on the object table 113, so as to facilitate image capture of the lens 120.

[0048] Continuing to refer to Figure 2 , Figure 3 and Figure 4 , on the basis of the above embodiments, the motion assembly 112 includes a first driving mechanism 1121, a second driving mechanism 1126 and a transition plate 1122. Among them, the first driving mechanism 1121 is installed on the base 111, and the transition plate 1122 is flexibly connected with the first driving mechanism 1121 and the second driving mechanism 1126 respectively. The first driving mechanism 1121 can drive the transition plate 1122 to move along the first direction y, and one side of the object table 113 is connected with the second driving mechanism 1126 and can move along the second direction x under the driving of the second driving mechanism 1126.

[0049] In this way, the transition plate 1122 indirectly connects the first driving mechanism 1121 and the second driving mechanism 1126, the first driving mechanism 1121 can drive the transition plate 1122 and the second driving mechanism 1126 to move along the first direction y, and further drive the object table 113 and the workpiece placed on the object table 113 to move along the first direction y. The second driving mechanism 1126 can drive the object table 113 to move along the second direction x, and further drive the workpiece to adjust along the second direction x, realize the image shooting angle adjustment of the workpiece, and guarantee the subsequent measurement result.

[0050] Further, through the flexible connection of the transition plate 1122 with the first driving mechanism 1121 and the second driving mechanism 1126, the running noise of the motion assembly 112 is reduced, and the jitter generated in the running process of the rigid connection is effectively buffered, the shooting stability of the workpiece in the moving process is guaranteed, and the measurement accuracy is ensured.

[0051] Again referring to Figure 3 , in some embodiments, the object table 113 is provided with a light-transmitting hole, and a glass plate 115 is arranged on the light-transmitting hole. The light-transmitting hole is arranged above the light source 130 along the third direction z, so that the emitted light of the light source 130 can penetrate the glass plate 115, and the lens 120 is arranged above the object table 113 along the third direction z.

[0052] It can be understood that, since the workpiece needs to be placed on the stage 113, and the light source 130 is arranged below the stage 113, a light transmission hole is arranged in the middle of the stage 113 for light transmission, so that the light source 130 can illuminate the workpiece. At the same time, by covering the glass plate 115 on the light transmission hole of the stage 113, the workpiece can be stably placed on the glass plate 115 while the light source 130 can illuminate the workpiece.

[0053] Referring again to Figure 2 and Figure 4 In some embodiments, the first driving mechanism 1121 includes a first motor 11211, a first screw rod 11213 and a first nut 11212. The output end of the first motor 11211 is connected with the first screw rod 11213, the first screw rod 11213 is arranged in parallel with the first direction y, and the first nut 11212 is threadedly connected with the first screw rod 11213. The transition plate 1122 is connected with the first nut 11212, preferably by a flexible connection as described later. The second driving mechanism 1126 includes a second motor 11261, a second screw rod 11263 and a second nut 11262. The output end of the second motor 11261 is connected with the second screw rod 11263, the second screw rod 11263 is arranged in parallel with the second direction x, and the second nut 11262 is threadedly connected with the second screw rod 11263. One side of the stage 113 is connected with the second nut 11262, so as to move along the second direction x following the second nut 11262 under the driving of the second screw rod 11263.

[0054] Specifically, the first screw rod 11213 extends along the first direction y and rotates under the driving of the first motor 11211. The first nut 11212 cannot rotate following the first screw rod 11213, so as to move along the first direction y during the rotation of the first screw rod 11213, thereby driving the transition plate 1122 and the second driving mechanism 1126 to move along the first direction y. The second screw rod 11263 extends along the second direction x and rotates under the driving of the second motor 11261. The second nut 11262 cannot rotate following the second screw rod 11263, so as to move along the second direction x during the rotation of the second screw rod 11263, thereby driving the stage 113 and the workpiece to move along the second direction x.

[0055] Referring again to Figure 5 In some embodiments, the motion assembly 112 further includes two connecting blocks 11210. The first nut 11212 and the second nut 11262 are each provided with a plug 112621, and one side of each plug 112621 is provided with a top pin 112102. Each connecting block 11210 is provided with a groove 112101, each plug 112621 is inserted into the groove 112101, and each top pin 112102 abuts against the side wall of the corresponding groove 112101.

[0056] For example, the connecting block 11210 is fixed on the transition plate 1122, one end of the top pin 112102 is connected with the insertion plate 112621, and the other end protrudes from the surface of the insertion plate 112621 and abuts against the connecting block 11210, so that the connecting block 11210 and the insertion plate 112621 are point-connected, the first driving mechanism 1121 and the second driving mechanism 1126 are connected with the transition plate 1122, the processing and assembly difficulty is reduced, and the stability of the motion assembly 112 is improved.

[0057] Preferably, the end of the top pin 112102 abutting against the connecting block 11210 is a spherical surface structure, so as to reduce the hard wear of the connecting block 11210.

[0058] Further, at least one elastic member 112103 is arranged in each groove 112101, and two ends of each elastic member 112103 abut against the side wall of the corresponding group of grooves 112101 and the insertion plate 112621 respectively.

[0059] For example, one end of the elastic member 112103 is a spherical surface structure and is arranged on the side of the insertion plate 112621 away from the top pin 112102. In this way, since the insertion plate 112621 and the connecting block 11210 are point-contacted, the insertion plate 112621 and the connecting block 11210 are abutted against each other by the elastic force of the elastic member 112103, and the relative movement of the insertion plate 112621 and the groove 112101 within a certain range is allowed. Even if the first nut 11212 or the second nut 11262 deviates or shakes in a direction other than the set direction, the movement of the object table 113 relative to the transition plate 1122 in the set direction will not be affected, and the processing precision requirement of the insertion plate 112621 and the groove 112101 is reduced.

[0060] The set direction in the embodiment refers to that the first nut 11212 should move in the first direction y during the rotation of the first screw rod 11213, and the second nut 11262 should move in the second direction x during the rotation of the second screw rod 11263. Through the arrangement of the elastic member 112103, even if the first nut 11212 shakes in the second direction x during the movement, and the second nut 11262 shakes in the first direction y during the movement, the cooperative shaking of the first nut 11212 and the second nut 11262 during the operation can be effectively buffered, and the measurement precision of the workpiece is improved.

[0061] Preferably, there are two elastic members 112103 in each groove 112101, and the top pin 112102 is located between the two elastic members 112103 when viewed in the set direction after the insertion plate 112621 is inserted into the groove 112101, so as to strengthen the strength of the insertion plate 112621 and the connecting block 11210.

[0062] Further, the motion assembly 112 further comprises at least one first guide rail 1124 and at least one second guide rail 1127. Each of the first guide rails 1124 is provided with at least one slidingly fitted first guide block 1123, and each of the second guide rails 1127 is provided with at least one slidingly fitted second guide block 1128. The first guide blocks 1123 are connected to the transition plate 1122, and the second guide blocks 1128 are connected to the transition plate 1122.

[0063] Specifically, the first guide rails 1124 are arranged along the first direction y, and when the transition plate 1122 is driven by the first driving mechanism 1121 to move along the first direction y, the sliding fit between the first guide rails 1124 and the first guide blocks 1123 avoids the transition plate 1122 from deviating during the movement. The second guide rails 1127 are arranged along the second direction x, and when the object table 113 is driven by the second driving mechanism 1126 to move along the second direction x, the sliding fit between the second guide rails 1127 and the second guide blocks 1128 avoids the object table 113 from deviating during the movement.

[0064] Preferably, the first guide rails 1124 are two, and the first driving mechanism 1121 is arranged between the two first guide rails 1124. By arranging the two first guide rails 1124, the two first guide rails 1124 are respectively connected to the two opposite sides of the transition plate 1122, and each first guide rail 1124 is matched with two first guide blocks 1123 to ensure the balance of the guide on both sides of the transition plate 1122. It can be understood that, in order to enable the light of the light source 130 to pass through the transition plate 1122 and irradiate on the object table 113, a through hole 11221 is formed in the middle of the transition plate 1122. Therefore, the first driving mechanism 1121 is arranged between the two first guide rails 1124, but deviates from the center of the transition plate 1122, so as to avoid the first driving mechanism 1121 from blocking the light of the light source 130.

[0065] Continuing to refer to Figure 6 Preferably, the second guide rails 1127 are two, and each second guide rail 1127 is matched with a second guide block 1128, so that the two second guide rails 1127 are respectively connected to the two opposite sides of the object table 113 to ensure the balance of the guide on both sides of the object table 113. The second driving mechanism 1126 is arranged on the side of one of the second guide rails 1127 away from the other second guide rail 1127, and the second nut 11262 is connected to the side of the object table 113, so as to reduce the overall thickness of the motion assembly 112 and reduce the interference with the light source 130.

[0066] In some embodiments, the motion assembly 112 further comprises a first anti-rotation guide rail 1125, a first anti-rotation sliding block, a second anti-rotation guide rail 1129 and a second anti-rotation sliding block 11264. The first anti-rotation guide rail 1125 is mounted on the transition plate 1122 near one side of the base 111, the first anti-rotation sliding block is mounted on the first nut 11212 and is in sliding fit with the first anti-rotation guide rail 1125. The second anti-rotation guide rail 1129 is mounted on the side of the object table 113, and the second anti-rotation sliding block 11264 is mounted on the second nut 11262 and is in sliding fit with the second anti-rotation guide rail 1129.

[0067] Specifically, the first nut 11212 is effectively restricted from rotating with the first screw rod 11213 through the sliding fit of the first anti-rotation guide rail 1125 and the first anti-rotation sliding block, and the second nut 11262 is effectively restricted from rotating with the second screw rod 11263 through the sliding fit of the second anti-rotation guide rail 1129 and the second anti-rotation sliding block 11264, so as to ensure that the workpiece can move steadily in the first direction y and the second direction x.

[0068] Continuing to refer to Figure 7 As shown, in some embodiments, the light source 130 comprises a light emitting element 131 and a mounting bracket 132, the light emitting element 131 is fixed to the mounting bracket 132, the mounting bracket 132 is mounted on the side of the base 111 connected with the motion assembly 112, and the mounting bracket 132 is provided with a first sliding groove 1321 and a second sliding groove 1322. The base 111 is provided with a first limiting pin 1111 and a second limiting pin 1112, the first limiting pin 1111 penetrates the first sliding groove 1321, the second limiting pin 1112 penetrates the second sliding groove 1322, the first sliding groove 1321 is arranged in extension along the first direction y, and the second sliding groove 1322 is arranged in extension along the second direction x.

[0069] Specifically, the light emitting element 131 can emit corresponding light in the energized state. The first sliding groove 1321 and the second sliding groove 1322 are both in the structure of a waist-shaped groove, the extension direction of the first sliding groove 1321 is parallel to the first direction y, and the extension direction of the second sliding groove 1322 is parallel to the second direction x. In this way, through the guidance and limitation of the first limiting pin 1111 and the second limiting pin 1112, the position of the light source 130 in the first direction y and the second direction x can be adjusted, the accumulated error possibly existing in the light source 130 can be reduced, and the measurement accuracy can be ensured.

[0070] The technical features of the above-described embodiments can be combined in any manner. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described, but as long as the combinations of the technical features do not exist contradictions, they should be considered as the scope of the present disclosure.

[0071] The above embodiments only express several implementation ways of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation to the patent scope of the application. It should be pointed out that for ordinary skilled persons in the art, several modifications and improvements can be made without departing from the concept of the present application, which all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A column-type image measuring instrument, characterized in that, include: A workbench includes a base, a column, a motion assembly, and a platform. The motion assembly is mounted on the base, and the platform is mounted on the side of the motion assembly facing away from the base. The column is disposed above the base along a third direction and fixed to one end of the base. The lens is mounted on the column and is controllably movable in a third direction; A light source is disposed on the side where the base connects to the motion component; The motion assembly includes a first drive mechanism, a second drive mechanism, and a transition plate. The first drive mechanism is mounted on the base. The two sides of the transition plate are flexibly connected to the first drive mechanism and the second drive mechanism, respectively. The first drive mechanism can drive the transition plate to move along a first direction. The platform is disposed on the side of the second drive mechanism opposite to the transition plate and can move along a second direction under the drive of the second drive mechanism. Any two of the first direction, the second direction, and the third direction are perpendicular to each other.

2. The column-type image measuring instrument according to claim 1, characterized in that, The light source includes a light-emitting element and a mounting bracket. The light-emitting element is fixed to the mounting bracket. The mounting bracket is installed on the side of the base connected to the motion component. The mounting bracket has a first groove and a second groove. The base is provided with a first limiting pin and a second limiting pin. The first limiting pin passes through the first sliding groove, and the second limiting pin passes through the second sliding groove. The first sliding groove extends along the first direction, and the second sliding groove extends along the second direction.

3. The column-type image measuring instrument according to claim 1, characterized in that, The stage has a light-transmitting hole, which is covered by a glass plate. The light-transmitting hole is positioned above the light source along the third direction so that the emitted light from the light source can penetrate the glass plate. The lens is positioned above the stage along the third direction.

4. The column-type image measuring instrument according to claim 1, characterized in that, The first driving mechanism includes a first motor, a first screw, and a first nut. The output end of the first motor is connected to the first screw. The first screw is arranged parallel to the first direction. The first nut is threadedly connected to the first screw. The transition plate is connected to the first nut. The second drive mechanism includes a second motor, a second screw, and a second nut. The output end of the second motor is connected to the second screw. The second screw is arranged parallel to the second direction. The second nut is threadedly connected to the second screw. The platform is connected to the second nut.

5. The column-type image measuring instrument according to claim 4, characterized in that, The motion component also includes two connecting blocks. Both the first nut and the second nut are provided with insert plates. Each insert plate has a top pin on one side. Each connecting block has a groove. Each insert plate is inserted into the groove, and each top pin abuts against the side wall of a corresponding groove.

6. The column-type image measuring instrument according to claim 5, characterized in that, Each of the grooves is provided with at least one elastic element, and the two ends of each elastic element abut against the corresponding set of groove sidewalls and the insert plate.

7. The column-type image measuring instrument according to claim 1, characterized in that, The motion component further includes at least one first guide rail and at least one second guide rail. Each first guide rail is provided with at least one slidingly engaged first guide slider, and each second guide rail is provided with at least one slidingly engaged second guide slider. The first guide slider is connected to the transition plate, and the second guide slider is connected to the transition plate.

8. The column-type image measuring instrument according to claim 7, characterized in that, There are two first guide rails, and the first drive mechanism is disposed between the two first guide rails.

9. The column-type image measuring instrument according to claim 7, characterized in that, The second guide rail is provided in two parts, and the second drive mechanism is located on one side of the second guide rail away from the other second guide rail, and the second drive mechanism is connected to the side of the platform.

10. The column-type image measuring instrument according to claim 4, characterized in that, The motion assembly further includes a first anti-rotation guide rail, a first anti-rotation slider, a second anti-rotation guide rail, and a second anti-rotation slider. The first anti-rotation guide rail is installed on the side of the transition plate near the base. The first anti-rotation slider is installed on the first nut and slides in cooperation with the first anti-rotation guide rail. The second anti-rotation guide rail is installed on the side of the platform. The second anti-rotation slider is installed on the second nut and slides in cooperation with the second anti-rotation guide rail.

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