Detection production line

Abstract

The utility model belongs to the technical field of semiconductor material detection, and discloses a detection production line which comprises a feeding mechanism, a detection line mechanism and a sorting and discharging mechanism which are sequentially and continuously arranged. The feeding mechanism can sequentially move a plurality of material sheets in a feeding material frame to the starting end of the detection line mechanism. The detection line mechanism can convey the multiple material pieces to the sorting and discharging mechanism in sequence and detect the material pieces in the conveying process of the material pieces. And the sorting and discharging mechanism can be used for sorting and discharging the qualified material sheets and the unqualified material sheets after detection. The detection production line can accurately and efficiently detect and sort semiconductor materials, and labor force is saved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor material detection, especially relates to a detection production line. BACKGROUND

[0002] In the detection process of semiconductor wafers and other materials, offline detection is generally used to detect the materials, and after detection, unqualified products need to be sorted manually, resulting in waste of manual labor and affecting detection efficiency.

[0003] At the same time, the continuity of the feeding step, the detection step and the discharging and sorting step is poor in the above detection process, affecting the detection efficiency.

[0004] Therefore, there is an urgent need for a detection production line to solve the above problems. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a detection production line, which can accurately and efficiently detect and sort semiconductor materials, saving manual labor.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] The detection production line comprises:

[0008] A feeding mechanism, a detection line mechanism and a sorting and discharging mechanism are sequentially and continuously arranged;

[0009] The feeding mechanism can sequentially move multiple wafers in a feeding wafer frame to the starting end of the detection line mechanism;

[0010] The detection line mechanism can sequentially transport multiple wafers to the sorting and discharging mechanism and detect the wafers during transportation;

[0011] The sorting and discharging mechanism can sort and discharge qualified wafers and unqualified wafers after detection.

[0012] As a preferred scheme of the detection production line provided by the utility model, the starting end of the detection line mechanism is located above the feeding mechanism in the Z direction, the feeding mechanism comprises a wafer frame fixing module and a wafer lifting module, the wafer frame can be positioned on the wafer frame fixing module, and the wafer lifting module can sequentially push multiple wafers in the feeding wafer frame out of the feeding wafer frame along the Z direction;

[0013] The Z direction is parallel to the direction of gravity.

[0014] As a preferred scheme of the detection production line provided by the utility model, the feeding mechanism further comprises a sheet carrying module, the sheet carrying module is movably arranged at the starting end of the detection line mechanism, can grab the sheet pushed out of the feeding frame by the sheet lifting module, drive the sheet to move in the Y direction, and place the sheet at the starting end of the detection line mechanism.

[0015] The Y direction is perpendicular to the Z direction.

[0016] As a preferred scheme of the detection production line provided by the utility model, the feeding mechanism further comprises a frame guiding module, the frame guiding module forms an import opening towards the frame fixing module in the Z direction, the feeding frame can extend into the frame guiding module from the import opening, so that the sheet pushing opening of the feeding frame is adjusted to be perpendicular to the Z direction, and the sheet carrying module can grab the sheet from the sheet pushing opening.

[0017] As a preferred scheme of the detection production line provided by the utility model, the detection line mechanism comprises a transplanting line body, a ray source and a detector, the transplanting line body is arranged between the feeding mechanism and the sorting and discharging mechanism along the X direction, can transport the sheet from the feeding mechanism to the sorting and discharging mechanism.

[0018] The ray source and the detector are respectively located on both sides of the transplanting line body in the Z direction, and can move along the X direction synchronously with the sheet, the ray source can emit a detection ray to the detector, and the detector can receive the detection ray.

[0019] The X direction, the Y direction and the Z direction are perpendicular to each other.

[0020] As a preferred scheme of the detection production line provided by the utility model, the detection line mechanism further comprises a sheet shaping module, the sheet shaping module comprises two groups of abutting shaping structures, the two groups of abutting shaping structures are respectively arranged on both sides of the transplanting line body in the Y direction with adjustable spacing, the two groups of abutting shaping structures abut opposite sides of the sheet, and can adjust the sheet to a detection state.

[0021] As a preferred scheme of the detection production line provided by the utility model, the detection line mechanism further comprises a code scanning module, the code scanning module is arranged above the transplanting line body and is located upstream of the ray source and the detector, and can scan the code of the sheet to be detected.

[0022] As a preferred scheme of the detection production line provided by the utility model, the sorting and discharging mechanism comprises a discharging and grabbing module, a qualified product caching module and an unqualified product caching module, the discharging and grabbing module is arranged at the rear end of the detection line mechanism, the qualified product caching module and the unqualified product caching module are respectively located at both sides of the discharging and grabbing module in the Y direction, the qualified product caching module is configured to receive the qualified material sheet, and the unqualified product caching module is configured to receive the unqualified material sheet.

[0023] As a preferred scheme of the detection production line provided by the utility model, the sorting and discharging mechanism further comprises a discharging and marking module, the discharging and marking module is arranged at the rear end of the detection line mechanism and below the discharging and grabbing module in the Z direction, and can mark the unqualified material sheet after detection.

[0024] As a preferred scheme of the detection production line provided by the utility model, the qualified product caching module comprises a first material frame fixing device and a first material sheet receiving device, the first material frame fixing device can fix a first receiving material frame, and the first material sheet receiving device can extend into the first receiving material frame and move along the Z direction to sequentially receive the qualified material sheets after detection.

[0025] The unqualified product caching module comprises a second material frame fixing device and a second material sheet receiving device, the second material frame fixing device can fix a second receiving material frame, and the second material sheet receiving device can extend into the second receiving material frame and move along the Z direction to sequentially receive the unqualified material sheets after detection.

[0026] The utility model discloses a beneficial effect:

[0027] The detection production line provided by the utility model comprises a feeding mechanism, a detection line mechanism and a sorting and discharging mechanism arranged continuously. The feeding mechanism can move the multiple material sheets in the feeding material frame to the starting end of the detection line mechanism in sequence. The detection line mechanism can transport the multiple material sheets to the sorting and discharging mechanism in sequence and detect the material sheets in the transportation process. The sorting and discharging mechanism can sort and discharge the qualified material sheets and the unqualified material sheets after detection respectively. Through the above-mentioned continuously arranged feeding mechanism, detection line mechanism and sorting and discharging mechanism, the feeding, detection and sorting and discharging of the material sheets and other semiconductor materials can be continuously carried out. The accuracy and efficiency of the detection of semiconductor materials are improved, and manual labor can be saved. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 It is the front view of the detection production line provided by the utility model embodiment;

[0029] Figure 2is a structure schematic diagram of the detection production line provided by the embodiment of the utility model Figure One ;

[0030] Figure 3 is Figure 2 the partial enlarged view of structure marked as A in the figure

[0031] Figure 4 is Figure 2 the partial enlarged view of structure marked as B in the figure

[0032] Figure 5 is a structure schematic diagram of the detection production line provided by the embodiment of the utility model Figure Two .

[0033] In the figure:

[0034] 10, the material frame of loading; 20, the material sheet; 30, the first material frame of bearing; 40, the second material frame of bearing;

[0035] 100, the material loading mechanism; 110, the material frame fixing module; 120, the material sheet lifting module; 130, the material sheet carrying module; 140, the material frame guiding module; 141, the guiding block;

[0036] 200, the detection line mechanism; 210, the transplanting line body; 220, the ray source; 230, the detector; 240, the material sheet regularizing module; 241, the abutting regularizing structure; 250, the code scanning module;

[0037] 300, the sorting and discharging mechanism; 310, the discharging grabbing module; 320, the qualified product buffer module; 321, the first material frame fixing device; 322, the first material sheet bearing device; 330, the unqualified product buffer module; 331, the second material frame fixing device; 332, the second material sheet bearing device; 340, the discharging marking module. DETAILED DESCRIPTION

[0038] The utility model will be further explained in detail below by combining with the drawings and embodiments. It can be understood that the specific embodiments described here are only used to explain the utility model, and not limit the utility model. In addition, it needs to be explained that in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.

[0039] In the description of the utility model, unless another definite provision and limitation, the term "link", "connect", "fix" should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or be integrated;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through the intermediate medium, can be two elements inside the communication or two element's mutual action relation.For the ordinary skill in the art, the above-mentioned terms can be understood according to the specific meaning of the utility model.

[0040] In the utility model, unless another definite provision and limitation, the first feature is "on" or "under" the second feature can include the first and second features direct contact, also can include the first and second features are not direct contact but contact through the additional feature between them.Moreover, the first feature is "on", "above" and "on" the second feature includes the first feature is directly above and obliquely above the second feature, or just indicates that the first feature horizontal height is higher than the second feature.The first feature is "under", "below" and "under" the second feature includes the first feature is directly below and obliquely below the second feature, or just indicates that the first feature horizontal height is less than the second feature.

[0041] In the description of the embodiment, the terms "on", "under", "right", "left" and other orientation or position relationship are based on the orientation or position relationship shown in the drawing, only for the convenience of description and simplification operation, and not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore cannot be understood as a limitation on the utility model.In addition, the terms "first", "second" are only used to distinguish in the description, and have no special meaning.

[0042] Figure 1 The main view of the detection production line provided by the utility model embodiment is shown; Figure 2 The structure diagram of the detection production line provided by the utility model embodiment is shown Figure One In the drawing, the X direction, Y direction and Z direction are perpendicular to each other, and the Z direction is parallel to the direction of gravity.Referring to Figure 1 And Figure 2 The utility model provides a kind of detection production line, which includes feeding mechanism 100, detection line mechanism 200 and sorting and discharging mechanism 300 successively arranged in X direction.

[0043] The feeding mechanism 100 can sequentially move multiple wafers 20 from the feeding frame 10 to the starting end of the inspection line mechanism 200. The inspection line mechanism 200 can sequentially transport the multiple wafers 20 to the sorting and unloading mechanism 300, and inspect the wafers 20 during transportation. The sorting and unloading mechanism 300 can sort and unload the qualified wafers 20 and the unqualified wafers 20 respectively after inspection. Through the continuous arrangement of the feeding mechanism 100, the inspection line mechanism 200 and the sorting and unloading mechanism 300, the continuous feeding, inspection and sorting of semiconductor materials such as wafers 20 can be realized, thereby improving the accuracy and efficiency of semiconductor material inspection and saving manual labor.

[0044] Specifically, the starting end of the detection line mechanism 200 is located above the feeding mechanism 100 in the Z direction. The feeding mechanism 100 includes a material frame fixing module 110 and a material piece lifting module 120. The feeding material frame 10 can be positioned on the material frame fixing module 110, and the material piece lifting module 120 can sequentially push multiple material pieces 20 in the feeding material frame 10 out of the feeding material frame 10 in the Z direction from the bottom of the feeding material frame 10. The material frame fixing module 110 can specifically be two clamping block structures spaced apart in the X direction, and the feeding material frame 10 can be clamped between the two clamping block structures.

[0045] More specifically, the feeding mechanism 100 also includes a sheet material handling module 130. This module is located above the material frame fixing module 110 in the Z direction and is movably disposed at the starting end of the detection line mechanism 200. It can grasp the sheet material 20 pushed out of the feeding frame 10 by the sheet material lifting module 120, move the sheet material 20 in the Y direction, and place it at the starting end of the detection line mechanism 200. In this embodiment, the sheet material handling module 130 can specifically be a soft-touch gripper or a suction cup to prevent damage to the sheet material 20. Through the sheet material handling module 130, the sheet material 20 can be automatically aligned with the starting end of the detection line mechanism 200.

[0046] Figure 3 Show Figure 2 A magnified view of the structure marked A in the middle. (Refer to...) Figure 2 and Figure 3The feeding mechanism 100 further comprises a frame guiding module 140. The frame guiding module 140 forms a leading opening in the Z direction towards the frame fixing module 110, the feeding frame 10 can extend into the frame guiding module 140 from the leading opening, so as to adjust the sheet pushing opening of the feeding frame 10 to be perpendicular to the Z direction, and the sheet carrying module 130 can grab the sheet 20 from the sheet pushing opening. Through the frame guiding module 140, the placement state of the feeding frame 10 can be regularized, so as to facilitate the sheet carrying module 130 to grab the sheet 20 in the feeding frame 10.

[0047] Specifically, the frame guiding module 140 specifically comprises four guiding blocks 141, which are arranged in a rectangular array and are spaced apart from each other to form a guiding space, the guiding blocks 141 are inclined guiding surfaces towards one side of the guiding space, and the size of the guiding space in the Y direction gradually increases in the direction away from the frame fixing module 110 in the Z direction. During the process of the feeding frame 10 extending into the guiding space, the side of the feeding frame 10 can move along the inclined guiding surface, and then the placement state of the feeding frame 10 is guided by the guiding blocks 141.

[0048] Figure 5 The structure of the detection line provided by the embodiment of the utility model is shown Figure Two . Referring to Figure 1 , Figure 2 and Figure 5 , the detection line mechanism 200 comprises a transplanting line body 210, a ray source 220 and a detector 230. The transplanting line body 210 is arranged between the feeding mechanism 100 and the sorting and discharging mechanism 300 in the X direction, and can transport the sheet 20 from the feeding mechanism 100 to the sorting and discharging mechanism 300. The ray source 220 and the detector 230 are respectively located on both sides of the transplanting line body 210 in the Z direction, and can move in the X direction synchronously with the sheet 20, the ray source 220 can emit detection rays to the detector 230, and the detector 230 can receive the detection rays. In the embodiment, the ray source 220 can specifically emit X rays, and through the action between the ray source 220 and the detector 230, the detection of the sheet 20 can be realized.

[0049] Figure 4 The partial enlarged view of structure marked as B in Figure 2 is shown. Referring to Figure 2 and Figure 4The detection line mechanism 200 further comprises a sheet rule module 240, which comprises two sets of abutting rule structures 241, which are respectively arranged on both sides of the transplanting line body 210 in the Y direction, and can abut against the opposite sides of the sheet 20 to adjust the placement state of the sheet 20 in the XY plane, so as to adjust to the state to be detected, thereby improving the accuracy of detection of the sheet 20. In the embodiment, each set of abutting rule structures 241 is two, and the two abutting rule structures 241 in the same set are arranged in the X direction. When the transplanting line body 210 moves the sheet 20 into the action range of the sheet rule module 240, the two sets of abutting rule structures 241 are close to each other to abut against the opposite sides of the sheet 20. In the embodiment, the abutting rule structure 241 can be a plate-shaped structure, and a cylinder or a hydraulic cylinder can be used as a power source.

[0050] With reference to Figure 1 , Figure 2 and Figure 5 , the detection line mechanism 200 further comprises a code scanning module 250, which is arranged above the transplanting line body 210 and upstream of the ray source 220 and the detector 230, and can scan the code of the sheet 20 to be detected. The code scanning module 250 can select a code scanning gun in the prior art to obtain the information of the sheet 20 to be detected, so as to monitor the detection process of different sheets 20.

[0051] With reference to Figure 1 , Figure 2 and Figure 5 , the sorting and discharging mechanism 300 comprises a discharging grabbing module 310, a qualified product buffer module 320 and an unqualified product buffer module 330. The discharging grabbing module 310 is arranged at the rear end of the detection line mechanism 200, and the qualified product buffer module 320 and the unqualified product buffer module 330 are respectively arranged on both sides of the discharging grabbing module 310 in the Y direction. The qualified product buffer module 320 is configured to receive the qualified sheet 20, and the unqualified product buffer module 330 is configured to receive the unqualified sheet 20. In the embodiment, the discharging grabbing module 310 can be in the form of a soft touch gripper or a suction cup.

[0052] Specifically, the sorting and discharging mechanism 300 further comprises a discharging marking module 340, which is arranged at the rear end of the transplanting line body 210 and below the discharging grabbing module 310 in the Z direction, and can mark the unqualified sheet 20 after detection.

[0053] In detail, the qualified product buffer module 320 comprises a first frame fixing device 321 and a first piece receiving device 322. The first frame fixing device 321 can fix the first receiving frame 30, and the first piece receiving device 322 can extend into the first receiving frame 30 and move downward along the Z direction to sequentially receive the qualified pieces 20 after detection, and ensure the sequential arrangement of the pieces 20 in the first receiving frame 30. In the embodiment, the first frame fixing device 321 can be two first clamping blocks arranged at intervals along the X direction, and the first receiving frame 30 can be clamped between the two first clamping blocks. The first piece receiving device 322 can be an L-shaped supporting flat plate structure capable of moving along the first column in the Z direction to stably receive the pieces 20.

[0054] Similarly, the unqualified product buffer module 330 comprises a second frame fixing device 331 and a second piece receiving device 332. The second frame fixing device 331 can fix the second receiving frame 40, and the second piece receiving device 332 can extend into the second receiving frame 40 and move along the Z direction to sequentially receive the unqualified pieces 20 after detection, and ensure the sequential arrangement of the pieces 20 in the second receiving frame 40. In the embodiment, the second frame fixing device 331 can be two second clamping blocks arranged at intervals along the X direction, and the second receiving frame 40 can be clamped between the two second clamping blocks. The second frame fixing device 331 can be an L-shaped supporting flat plate structure capable of moving along the second column in the Z direction to stably receive the pieces 20.

[0055] Obviously, the above embodiments of the present application are only examples for clearly illustrating the present application, and are not intended to limit the embodiments of the present application. For those skilled in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present application. Here, it is unnecessary and impossible to enumerate all the embodiments. Any modification, equivalent substitution and improvement within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A detection line, characterized in that The application relates to a material sheet sorting device. The device comprises a feeding mechanism (100), a detection line mechanism (200) and a sorting and discharging mechanism (300) arranged in sequence. The feeding mechanism (100) can sequentially move a plurality of material sheets (20) in a feeding material frame (10) to the starting end of the detection line mechanism (200). The detection line mechanism (200) can sequentially transport the plurality of material sheets (20) to the sorting and discharging mechanism (300) and detect the material sheets (20) during the transportation. The sorting and discharging mechanism (300) can sort and discharge the qualified material sheets (20) and the unqualified material sheets (20) respectively. The sorting and discharging mechanism (300) comprises a discharging grabbing module (310), a qualified product buffer module (320) and an unqualified product buffer module (330). The discharging grabbing module (310) is arranged at the rear end of the detection line mechanism (200). The qualified product buffer module (320) and the unqualified product buffer module (330) are respectively located on the two sides of the discharging grabbing module (310) in the Y direction. The qualified product buffer module (320) is configured to receive the qualified material sheets (20), and the unqualified product buffer module (330) is configured to receive the unqualified material sheets (20). The qualified product buffer module (320) comprises a first material frame fixing device (321) and a first material sheet receiving device (322). The first material frame fixing device (321) can fix a first receiving material frame (30). The first material sheet receiving device (322) can extend into the first receiving material frame (30) and move along the Z direction to sequentially receive the qualified material sheets (20) after detection. The unqualified product buffer module (330) comprises a second material frame fixing device (331) and a second material sheet receiving device (332). The second material frame fixing device (331) can fix a second receiving material frame (40). The second material sheet receiving device (332) can extend into the second receiving material frame (40) and move along the Z direction to sequentially receive the unqualified material sheets (20) after detection.

2. The inspection line of claim 1, wherein, The starting end of the detection line mechanism (200) is located above the feeding mechanism (100) in the Z direction. The feeding mechanism (100) comprises a material frame fixing module (110) and a material sheet lifting module (120). The feeding material frame (10) can be positioned on the material frame fixing module (110). The material sheet lifting module (120) can sequentially push the material sheets (20) in the feeding material frame (10) out of the feeding material frame (10) along the Z direction. The Z direction is parallel to the direction of gravity.

3. The inspection line of claim 2, wherein, The feeding mechanism (100) further comprises a sheet carrying module (130) movably arranged at the starting end of the detection line mechanism (200), which can grab the sheet (20) pushed out of the feeding frame (10) by the sheet lifting module (120), drive the sheet (20) to move in the Y direction, and place the sheet (20) at the starting end of the detection line mechanism (200). The Y direction is perpendicular to the Z direction.

4. The inspection line of claim 3, wherein, The feeding mechanism (100) further comprises a frame guiding module (140) forming an inlet opening in the Z direction towards the frame fixing module (110), the feeding frame (10) can extend into the frame guiding module (140) from the inlet opening, so as to adjust the sheet pushing opening of the feeding frame (10) to be perpendicular to the Z direction, and the sheet carrying module (130) can grab the sheet (20) from the sheet pushing opening.

5. The inspection line of claim 1, wherein, The detection line mechanism (200) comprises a transplanting line body (210), a ray source (220) and a detector (230), the transplanting line body (210) is arranged between the feeding mechanism (100) and the sorting and discharging mechanism (300) in the X direction, which can transport the sheet (20) from the feeding mechanism (100) to the sorting and discharging mechanism (300). The ray source (220) and the detector (230) are respectively located on both sides of the transplanting line body (210) in the Z direction, and can move synchronously with the sheet (20) in the X direction, the ray source (220) can emit detection rays to the detector (230), and the detector (230) can receive the detection rays. The X direction, the Y direction and the Z direction are perpendicular to each other.

6. The inspection line of claim 5, wherein, The detection line mechanism (200) further comprises a sheet shaping module (240), the sheet shaping module (240) comprises two groups of abutting shaping structures (241), two groups of the abutting shaping structures (241) are respectively arranged on both sides of the transplanting line body (210) in the Y direction with adjustable spacing, and two groups of the abutting shaping structures (241) abut opposite sides of the sheet (20), which can adjust the sheet (20) to a detection state.

7. The inspection line of claim 5, wherein, The detection line mechanism (200) further comprises a code scanning module (250), the code scanning module (250) is arranged above the transplanting line body (210) and located upstream of the ray source (220) and the detector (230), which can scan the code of the sheet (20) to be detected.

8. The inspection line of claim 1, wherein, The sorting and discharging mechanism (300) further comprises a discharging marking module (340), the discharging marking module (340) is arranged at the rear end of the detection line mechanism (200) and located below the discharging grabbing module (310) in the Z direction, which can mark the unqualified sheet (20) after detection.

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