Boat feeding device and coating equipment

Abstract

The utility model provides a boat feeding device and coating equipment, and the boat feeding device comprises a moving module; the supporting paddle is arranged on the moving module, the moving module can drive the supporting paddle to move in the axial direction of the supporting paddle, a graphite boat is borne on the supporting paddle, a containing cavity is formed in the supporting paddle, and a first opening communicated with the containing cavity is formed in one end of the supporting paddle; the sealing assembly is arranged at one end of the supporting slurry and seals and covers the first opening, and a via hole is formed in the sealing assembly; and the heating assembly is arranged in the containing cavity, and one end of the heating assembly sequentially penetrates through the first opening and the via hole and extends out of the containing cavity. According to the boat conveying device, the heating time can be shortened, and the production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of silicon wafer coating, and more particularly to a boat feeding device and a coating equipment. BACKGROUND

[0002] The PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment is a common coating equipment, which mainly uses low-temperature plasma as an energy source, places a silicon wafer into a reaction furnace, uses discharge to heat the silicon wafer to a predetermined temperature, and then introduces an appropriate amount of reaction gas, so that the gas forms a solid thin film on the silicon wafer after plasma reaction.

[0003] In the related art, the PECVD equipment includes a boat feeding device, a graphite boat loaded with silicon wafers is placed on a support column of the boat feeding device, the support column drives the graphite boat into the reaction furnace to perform a coating process, and when the silicon wafer coating is completed, the support column drives the graphite boat out of the reaction furnace.

[0004] Since the support column takes away part of the heat in the process of entering and leaving the reaction furnace, and the support column is greatly cooled in the external environment before the next process boat enters, and is re-heated and heated when entering the reaction furnace again, the temperature in the reaction furnace is reduced, and when the required temperature is reached again, the heating time is increased, and the production efficiency is reduced. CONTENT OF THE INVENTION

[0005] The embodiment of the application provides a boat feeding device, which can shorten the heating time and improve the production efficiency.

[0006] The technical scheme adopted by the embodiment of the application is as follows: a boat feeding device is provided, which comprises:

[0007] a moving module;

[0008] a support column arranged on the moving module, the moving module being capable of driving the support column to move along the axial direction of the support column, a graphite boat being carried on the support column, the support column being provided with a receiving cavity, and one end of the support column being provided with a first opening in communication with the receiving cavity;

[0009] a sealing assembly arranged at one end of the support column and covering the first opening, the sealing assembly being provided with a through hole; and

[0010] a heating assembly arranged in the receiving cavity, and one end of the heating assembly sequentially penetrating through the first opening, the through hole and extending out of the receiving cavity.

[0011] Further, the sealing assembly comprises a front cover plate and a rear cover plate covering the front cover plate, the front cover plate is provided with a second opening, the rear cover plate is provided with a groove, the second opening is communicated with the groove, the through hole is provided on the rear cover plate and communicated with the groove, and one end of the support stem passes through the second opening and extends into the groove.

[0012] Further, the sealing assembly further comprises a first sealing ring, the first sealing ring is arranged between the front cover plate and the rear cover plate and annularly arranged on the outer circumferential side of the groove.

[0013] Further, the sealing assembly further comprises a limiting ring, the outer wall of the support stem is provided with a limiting groove, the limiting ring is arranged in the limiting groove, and the outer side of the limiting ring is in abutment with the front cover plate.

[0014] Further, the boat conveying device further comprises a support cylinder and a locking assembly,

[0015] The support cylinder is connected with the moving module, the support cylinder is sleeved outside the support stem, the front cover plate is in abutment with the support cylinder, and the locking assembly is arranged on the heating assembly and in abutment with the rear cover plate.

[0016] Further, the front cover plate is provided with a first step, the rear cover plate is provided with a second step, the first step is in abutment with the rear end surface of the support cylinder, and the second step is in abutment with the front end surface of the locking assembly.

[0017] Further, the locking assembly comprises:

[0018] a sleeve, sleeved outside the heating assembly, the front end surface of the sleeve is in abutment with the rear cover plate; and

[0019] a locking piece, detachably connected with the sleeve.

[0020] Further, the locking assembly further comprises a second sealing ring, the second sealing ring is arranged between the sleeve and the heating assembly.

[0021] Further, the heating assembly comprises a sleeve pipe and a heating pipe, one end of the sleeve pipe is provided with a third opening, and the other end is a closed structure,

[0022] the sleeve pipe is arranged in the accommodating cavity, one end of the sleeve pipe passes through the first opening, the through hole and extends out of the accommodating cavity, the heating pipe is arranged in the sleeve pipe, and one end of the heating pipe passes through the third opening and extends out of the sleeve pipe.

[0023] The application further provides a coating equipment, comprising a reaction furnace, a furnace door and the boat conveying device.

[0024] The boat conveying device provided by the application has the beneficial effects that the boat conveying device of the application is provided with a support stem on a moving module, the support stem is provided with a receiving cavity, one end of the support stem is provided with a first opening in communication with the receiving cavity, a sealing assembly is arranged at one end of the support stem and covers the first opening, a through hole is formed in the sealing assembly, and a heating assembly is arranged in the receiving cavity, one end of the heating assembly sequentially passes through the first opening, the through hole and extends out of the receiving cavity. When coating is needed to be performed on the graphite boat on the support stem, the support stem can be preheated by the heating assembly, and the support stem can be continuously heated after the moving module drives the support stem to enter the reaction furnace along the axial direction of the support stem, so that the required temperature in the reaction furnace can be reached more quickly, thereby shortening the heating time and improving the production efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0026] Figure 1 The three-dimensional structure schematic diagram of the boat conveying device provided by the application is shown in the figure.

[0027] Figure 2 The three-dimensional structure schematic diagram of the boat conveying device provided by the application is shown in the figure.

[0028] Figure 3 The partial enlarged schematic diagram of the Figure 2

[0029] Figure 4 The exploded structure schematic diagram of the Figure 3

[0030] Figure 5 The sectional structure diagram of the Figure 2

[0031] Figure 6 The three-dimensional structure schematic diagram of the coating equipment provided by the application is shown in the figure.

[0032] In the figure, various reference signs are as follows:

[0033] ​​​100, boat conveying device; 10, moving module; 11, connecting seat; 12, driving assembly; 20, support column; 21, accommodating cavity; 22, first opening; 23, limiting groove; 30, sealing assembly; 31, via hole; 32, front cover plate; 321, second opening; 322, first step; 33, rear cover plate; 331, groove; 332, second step; 34, first sealing ring; 35, limiting ring; 40, heating assembly; 41, sleeve; 411, third opening; 42, heating pipe; 50, support cylinder; 60, locking assembly; 61, sleeve; 62, locking piece; 63, second sealing ring; 200, reaction furnace; 300, furnace door; 400, graphite boat. DETAILED DESCRIPTION

[0034] In order to make the technical problems, technical solutions and beneficial effects of the present application clearer, the present application will be further described in detail below in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the present application.

[0035] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0036] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0037] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0038] Please refer to Figure 1 and Figure 2 , the boat conveying device 100 provided by the embodiments of the present application will be described. The boat conveying device 100 provided by the embodiments of the present application comprises a moving module 10, a support column 20, a sealing assembly 30 and a heating assembly 40.

[0039] The support slurry 20 is arranged on the moving module 10, and the moving module 10 can drive the support slurry 20 to move along the axial direction of the support slurry 20, so that the support slurry 20 can enter and exit the reaction furnace 200. Specifically, the support slurry 20 can be a silicon carbide slurry. The graphite boat 400 is carried on the support slurry 20, and the moving module 10 drives the support slurry 20 to move along the axial direction of the support slurry 20, thereby driving the graphite boat 400 to move along the axial direction of the support slurry 20, so that the graphite boat 400 can enter and exit the reaction furnace 200.

[0040] Referring to Figure 4 and Figure 5 , the support slurry 20 is arranged on the moving module 10, and the moving module 10 can drive the support slurry 20 to move along the axial direction of the support slurry 20, so that the support slurry 20 can enter and exit the reaction furnace 200. Specifically, the support slurry 20 can be a silicon carbide slurry. The graphite boat 400 is carried on the support slurry 20, and the moving module 10 drives the support slurry 20 to move along the axial direction of the support slurry 20, thereby driving the graphite boat 400 to move along the axial direction of the support slurry 20, so that the graphite boat 400 can enter and exit the reaction furnace 200.

[0041] Referring to Figure 4 and Figure 5 , the sealing assembly 30 is arranged at one end of the support slurry 20 and covers the first opening 22, and the sealing assembly 30 is provided with a through hole 31. The sealing assembly 30 can seal the first opening 22, so that the accommodation cavity 21 is not in communication with the external gas.

[0042] Referring to Figure 4 and Figure 5 , the heating assembly 40 is arranged in the accommodation cavity 21, and one end of the heating assembly 40 sequentially passes through the first opening 22, the through hole 31 and extends out of the accommodation cavity 21. By arranging the heating assembly 40 in the accommodation cavity 21, the support slurry 20 can be heated.

[0043] When the graphite boat 400 needs to be coated, first, the moving module 10 drives the support slurry 20 to move out of the reaction furnace 200; then the graphite boat 400 is placed on the support slurry 20, at this time the heating assembly 40 can preheat the support slurry 20; then the moving module 10 drives the support slurry 20 to enter the reaction furnace 200, when the graphite boat 400 enters the preset position of the reaction furnace 200, the graphite boat 400 can be coated, and the heating assembly 40 can continuously heat the support slurry 20.

[0044] The boat conveying device 100 provided by the embodiment of the present application, the support stem 20 is arranged on the moving module 10, the support stem 20 is provided with a containing cavity 21, one end of the support stem 20 is provided with a first opening 22 communicated with the containing cavity 21, the sealing assembly 30 is arranged on one end of the support stem 20 and covers the first opening 22, the through hole 31 is arranged on the sealing assembly 30, and the heating assembly 40 is arranged in the containing cavity 21, one end of the heating assembly 40 passes through the first opening 22, the through hole 31 in sequence and extends out of the containing cavity 21, when the graphite boat 400 on the support stem 20 needs to be coated, the support stem 20 can be preheated by the heating assembly 40, and after the moving module 10 drives the support stem 20 to enter the reaction furnace 200 along the axial direction of the support stem 20, the support stem 20 can be continuously heated, so that the required temperature in the reaction furnace 200 can be reached faster, thereby shortening the heating time and improving the production efficiency.

[0045] Please refer to Figure 4 and Figure 5 , the sealing assembly 30 can include a front cover plate 32 and a rear cover plate 33 covering the front cover plate 32. The second opening 321 is arranged on the front cover plate 32, the recess 331 is arranged on the rear cover plate 33, the second opening 321 is communicated with the recess 331, the through hole 31 is arranged on the rear cover plate 33 and communicated with the recess 331, and one end of the support stem 20 passes through the second opening 321 and extends into the recess 331. Through the cooperation of the front cover plate 32 and the rear cover plate 33, one end of the support stem 20 provided with the first opening 22 can be sealed in the recess 331, so that the containing cavity 21 of the support stem 20 is prevented from being communicated with the external gas.

[0046] Please refer to Figure 4 and Figure 5 , the sealing assembly 30 can further include a first sealing ring 34, the first sealing ring 34 is arranged between the front cover plate 32 and the rear cover plate 33 and annularly arranged on the outer circumferential side of the recess 331. Through the arrangement of the first sealing ring 34, air leakage between the front cover plate 32 and the rear cover plate 33 can be avoided, and the sealing effect is improved.

[0047] Please refer to Figure 4 and Figure 5 , the sealing assembly 30 can further include a limiting ring 35, the outer wall of the support stem 20 is provided with a limiting groove 23, the limiting ring 35 is arranged in the limiting groove 23, and the outer side of the limiting ring 35 abuts against the front cover plate 32. Through the arrangement of the limiting ring 35, the support stem 20 can be limited in the direction close to the reaction furnace 200.

[0048] Please refer to Figure 4 and Figure 5The sending boat device 100 can further include a support cylinder 50 and a locking assembly 60. The support cylinder 50 is connected with the moving module 10, the support cylinder 50 is sleeved outside the support column 20, the front cover plate 32 abuts against the support cylinder 50, and the locking assembly 60 is arranged on the heating assembly 40 and abuts against the rear cover plate 33. By connecting the support cylinder 50 with the moving module 10, the moving module 10 can drive the support cylinder 50 to move along the axial direction of the support column 20, thereby driving the support column 20 to move along the axial direction of the support column 20. Since the front cover plate 32 abuts against the support cylinder 50 and the locking assembly 60 abuts against the rear cover plate 33, the sealing assembly 30 can be installed and fixed. Specifically, the support cylinder 50 can be a metal piece.

[0049] Referring to Figure 5 The first step 322 can be arranged on the front cover plate 32, and the second step 332 can be arranged on the rear cover plate 33. The first step 322 abuts against the rear end surface of the support cylinder 50, and the second step 332 abuts against the front end surface of the locking assembly 60. By arranging the first step 322, the front cover plate 32 can better abut against the support cylinder 50. By arranging the second step 332, the locking assembly 60 can better abut against the rear cover plate 33, thereby achieving the abutting and fixing of the front cover plate 32 and the rear cover plate 33.

[0050] Referring to Figure 4 and Figure 5 The locking assembly 60 can include a sleeve 61 and a locking piece 62. The sleeve 61 is sleeved outside the heating assembly 40, and the front end surface of the sleeve 61 abuts against the rear cover plate 33. The locking piece 62 is detachably connected with the sleeve 61. By detachable connection between the locking piece 62 and the sleeve 61, the front cover plate 32 and the rear cover plate 33 can be locked and fixed. Specifically, the locking piece 62 and the sleeve 61 can be detachably connected through threads, that is, external threads are arranged outside the sleeve 61, and internal threads are arranged on the locking piece 62. The detachable connection is achieved by screwing the external threads and the internal threads. Of course, the detachable connection can also be achieved by clamping.

[0051] Referring to Figure 4 and Figure 5 The locking assembly 60 can further include a second sealing ring 63 arranged between the sleeve 61 and the heating assembly 40. By arranging the second sealing ring 63, the connection between the sleeve 61 and the heating assembly 40 can be sealed, thereby improving the sealing effect.

[0052] Referring to Figure 4 and Figure 5The heating assembly 40 can include a sleeve 41 and a heating pipe 42. The sleeve 41 has a third opening 411 at one end and a closed structure at the other end. The sleeve 41 is arranged in the accommodating cavity 21, and one end of the sleeve 41 passes through the first opening 22, the through hole 31 and extends out of the accommodating cavity 21 in sequence. The heating pipe 42 is arranged in the sleeve 41, and one end of the heating pipe 42 passes through the third opening 411 and extends out of the sleeve 41. One end of the heating pipe 42 passes through the third opening 411 and extends out of the sleeve 41, and can be electrically connected with an external power supply to realize the electric heating of the heating pipe 42. By arranging the third opening 411 at one end of the sleeve 41 and the closed structure at the other end, when the heating assembly 40 enters the reaction furnace 200, the sleeve 41 can be prevented from being communicated with the reaction furnace 200, and the vacuum sealing of the reaction furnace 200 is realized.

[0053] Referring to Figure 1 The moving module 10 can include a connecting seat 11 and a driving assembly 12. The support column 20 is arranged on the connecting seat 11. The connecting seat 11 is connected with the driving assembly 12. The connecting seat 11 is driven to move along the axial direction of the support column 20 by the driving assembly 12, so as to drive the support column 20 to move along the axial direction of the support column 20.

[0054] Referring to Figure 6 The application also provides a coating equipment. The coating equipment includes the reaction furnace 200, the furnace door 300 and the boat conveying device 100 in any of the above embodiments. The furnace door 300 is arranged on the support column 20 of the boat conveying device 100 and abuts against the reaction furnace 200 to seal the reaction furnace 200. When the support column 20 drives the graphite boat 400 to move to the preset position of the reaction furnace 200, the furnace door 300 abuts against the reaction furnace 200, so as to realize the sealing of the reaction furnace 200.

[0055] The coating equipment provided by the application has the beneficial effects of the boat conveying device 100 in any of the above embodiments, which will not be repeated here.

[0056] The coating equipment can be a PECVD equipment or a CVD equipment or other coating equipment.

[0057] The above only describes the preferred embodiments of the application and is not used to limit the application. Any modification, equivalent replacement and improvement made within the spirit and principle of the application should be included in the protection scope of the application.

Claims

1. A boat delivery device characterized by comprising: The application relates to a graphite boat conveying device. The graphite boat conveying device comprises a moving module, a support cylinder arranged on the moving module, the support cylinder being capable of moving along the axial direction of the support cylinder, a graphite boat being arranged on the support cylinder, a containing cavity being arranged in the support cylinder, and a first opening being arranged at one end of the support cylinder and being communicated with the containing cavity. A sealing assembly is arranged at one end of the support cylinder and covers the first opening, and a through hole is arranged on the sealing assembly. A heating assembly is arranged in the containing cavity, and one end of the heating assembly sequentially passes through the first opening, the through hole and extends out of the containing cavity. The sealing assembly comprises a front cover plate and a rear cover plate covering the front cover plate, a second opening is arranged on the front cover plate, a groove is arranged on the rear cover plate, the second opening is communicated with the groove, the through hole is arranged on the rear cover plate and is communicated with the groove, and one end of the support cylinder passes through the second opening and extends into the groove.

2. The boat delivery apparatus according to claim 1, wherein The sealing assembly further comprises a first sealing ring arranged between the front cover plate and the rear cover plate and arranged around the outer periphery of the groove.

3. The boat delivery apparatus of claim 2, wherein, The sealing assembly further comprises a limiting ring, a limiting groove is arranged on the outer wall of the support cylinder, the limiting ring is arranged in the limiting groove, and the outer side of the limiting ring is in abutment with the front cover plate.

4. The boat delivery apparatus of claim 2, wherein The graphite boat conveying device further comprises a support cylinder and a locking assembly.

5. The boat delivery apparatus of claim 2, wherein The support cylinder is connected with the moving module, the support cylinder is sleeved on the outside of the support cylinder, the front cover plate is in abutment with the support cylinder, and the locking assembly is arranged on the heating assembly and is in abutment with the rear cover plate. A first step is arranged on the front cover plate, a second step is arranged on the rear cover plate, the first step is in abutment with the rear end surface of the support cylinder, and the second step is in abutment with the front end surface of the locking assembly.

6. The boat delivery apparatus of claim 5, wherein, The locking assembly comprises:

7. The boat delivery apparatus of claim 5, wherein A sleeve is sleeved on the outside of the heating assembly, and the front end surface of the sleeve is in abutment with the rear cover plate; and A locking piece is detachably connected with the sleeve. The locking assembly further comprises a second sealing ring arranged between the sleeve and the heating assembly.

8. The boat delivery apparatus of claim 7, wherein, The heating assembly comprises a sleeve pipe and a heating pipe, one end of the sleeve pipe is provided with a third opening, and the other end is a closed structure.

9. The boat delivery apparatus according to any one of claims 1 to 8, wherein The sleeve pipe is arranged in the containing cavity, one end of the sleeve pipe sequentially passes through the first opening and the through hole and extends out of the containing cavity, the heating pipe is arranged in the sleeve pipe, and one end of the heating pipe passes through the third opening and extends out of the sleeve pipe. The graphite boat conveying device is arranged on the support cylinder of the graphite boat conveying device and is in abutment with the reaction furnace to seal the reaction furnace.

10. A coating apparatus, characterized by, ​

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