Vertical heating furnace and coating equipment

Abstract

The utility model discloses a vertical heating furnace and coating equipment, which comprises a furnace body, the furnace body adopts a split type design and can be cut into a plurality of modular furnace bodies along the horizontal and / or vertical and / or inclined direction, and an electric heating body is independently wound on the inner wall of each modular furnace body; the cutting sides of any two adjacent modular furnace bodies are detachably connected through at least one connecting structure so as to be spliced to form the sealed furnace body. When damaged elements in the vertical heating furnace need to be replaced, maintenance personnel can specifically disassemble the modular furnace body with the damaged elements from the whole vertical heating furnace so as to facilitate replacement and maintenance, time and manpower needed by replacement are greatly reduced, and the maintenance cost of the vertical heating furnace is reduced; and the electric heating body is independently wound on the inner wall of each modular furnace body, so that the temperature of each modular furnace body is independently controlled, the temperature uniformity of the furnace bodies is better ensured, and the service life of the vertical heating furnace is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor device technical field especially relates to a vertical heating furnace and coating equipment. BACKGROUND

[0002] The current photovoltaic industry has two types of vertical furnace and horizontal furnace for diffusion, oxidation, annealing, doping, PECVD, LPCVD and other process production, the furnace body structure of the two types needs to put the silicon wafer or wafer in the specific carrier into the reaction cavity in the furnace body to carry out the process, through heating the reaction cavity and passing into the specific reaction gas, thereby realizing the specific coating, diffusion, oxidation and thin film deposition process of the silicon wafer or wafer.

[0003] At present, the design of vertical heating furnace basically adopts the overall structure of cylinder, and with the continuous development of photovoltaic industry, the process route is also constantly updated, with the popularization of new process route, and under the background of cost reduction and efficiency increase, the production capacity and the shape size of the equipment are increasing, and the furnace body pipe diameter of the vertical heating furnace is also increasing, and at the same time, the process temperature is also increasing, which will greatly reduce the service life of the furnace body, and each component in the reaction chamber also faces the situation of frequent replacement. When the reaction chamber fails, it is not convenient to enter the reaction chamber for maintenance and replacement, which causes time and labor consumption in the replacement process, increases the human and material resources, and increases the maintenance cost of the equipment. UTILITY MODEL CONTENTS

[0004] The utility model provides a vertical heating furnace and coating equipment for solving the problems of service life reduction, time and labor consumption in the process of replacing components and increasing maintenance cost in the prior art.

[0005] The technical scheme of the utility model is a vertical heating furnace, which comprises:

[0006] The furnace body adopts a split type design and can be cut into a plurality of modular furnace bodies along the horizontal and / or vertical and / or inclined directions, and the inner wall of each modular furnace body is independently wound with an electric heating body;

[0007] The cutting sides of any two adjacent modular furnace bodies are detachably connected through at least one connecting structure to splice to form a sealed furnace body.

[0008] Further, the cutting sides of all the modular furnace bodies are provided with a sealing heat preservation layer.

[0009] When all the modular furnace bodies are spliced to form the furnace body through the connecting structure, the sealing heat preservation layers of the adjacent cutting sides are closely attached.

[0010] Further, the shape of the cutting side of the modular furnace body is any one of straight line, curve and broken line.

[0011] Further, the electric heating body on the modular furnace body can be wound in horizontal and / or vertical and / or inclined directions.

[0012] Further, the electric heating body on each modular furnace body is wound uniformly in a circumferential direction.

[0013] Further, the detachable connection includes any one of a bolt connection, a fitting connection and a riveting connection.

[0014] Further, the modular furnace body includes a heat preservation fixed inner container, and an outer wall of each modular furnace body is matched and covered with the heat preservation fixed inner container, and the heat preservation fixed inner container is used for preventing heat inside the furnace body from leaking outward.

[0015] Further, the modular furnace body further includes a heat preservation layer, and an outer wall of the heat preservation fixed inner container is matched and covered with the heat preservation layer, and the heat preservation layer is used for preventing heat inside the furnace body from leaking outward.

[0016] Further, an outer wall of the heat preservation layer is matched and covered with a protective shell body, an inner wall of the protective shell body is provided with a plurality of support columns, the support columns are all penetrated and fixed into the heat preservation fixed inner container, and the protective shell body is arranged in a spaced manner with the heat preservation layer.

[0017] The utility model also proposes a coating equipment, the coating equipment includes the vertical heating furnace of above.

[0018] Compared with the prior art, the utility model has at least the following beneficial effects:

[0019] The furnace body is cut into a plurality of modular furnace bodies through the split type design, when there is a damaged element in the vertical heating furnace and the damaged element needs to be replaced, a maintenance personnel can replace and maintain the damaged element according to the position and size of the damaged element through the connecting structure, so that the time and manpower required for replacement are greatly reduced, the maintenance cost of the vertical heating furnace is reduced, and the temperature of each modular furnace body is independently wound with the electric heating body, so that the temperature of each modular furnace body can be controlled individually, the temperature uniformity of the furnace body is better guaranteed, and the service life of the vertical heating furnace is prolonged. BRIEF DESCRIPTION OF DRAWINGS

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used in the specification herein is for describing particular embodiments only and is not intended to be limiting of the application; the present application is well suited to carry out the objects and to attain the ends specified herein above with respect to the description of the application owing to the interdependence of the terms and combinations of them with respect to one another and the inherent flexibility of the described compositions and methods, the terms defined herein have like definition throughout the specification and claims unless otherwise specified; the terms "comprising," "having," "including," and "containing" are to be construed as open-ended terms (i.e., meaning "including, but not limited to,") unless otherwise noted; the terms "substantial" and "substantially" are to be construed as leaving adequate room for error and variation (i.e., that the term provides flexibility with respect to a given recitation and does not mean "unwavering" or "absolute," even though the term can be "substantial").

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0022] Figure 1 A sectional view of the modular furnace body proposed by the present application;

[0023] Figure 2 A Figure 1 An enlarged schematic view of reference sign A in the above figure;

[0024] Figure 3 A front view of the vertical heating furnace proposed by the present application.

[0025] Reference signs:

[0026] 1, furnace body;

[0027] 11, modular furnace body;

[0028] 12, electric heating body; 121, first electric heating body; 122, second electric heating body; 123, third electric heating body; 124, fourth electric heating body;

[0029] 13, heat preservation fixed inner container;

[0030] 14, heat preservation layer;

[0031] 15, protective shell;

[0032] 16, support column;

[0033] 17, heat preservation cotton ring;

[0034] 18, fixed end plate. DETAILED DESCRIPTION

[0035] In order to make the technical problems, technical solutions and beneficial effects of the utility model clearer, the utility model will be further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model. Therefore, one feature mentioned in the specification is used to explain one feature of one embodiment of the utility model, and it is not implied that each embodiment of the utility model must have the explained feature. In addition, it should be noted that the specification describes many features. Although certain features can be combined together to show possible system designs, these features can also be used in other combinations that are not explicitly described. Therefore, unless otherwise stated, the described combination is not intended to be limiting.

[0036] The principle and structure of the utility model will be described in detail below in combination with the drawings and embodiments.

[0037] In some embodiments, as shown in Figure 1 and 3 The utility model provides a vertical heating furnace, comprising:

[0038] The furnace body 1 adopts a split design and can be cut into a plurality of modular furnace bodies 11 in the horizontal and / or vertical and / or inclined direction, and the inner wall of each modular furnace body 11 is independently wound with an electric heating body 12.

[0039] The cutting sides of any two adjacent modular furnace bodies 11 are detachably connected by at least one connecting structure (not shown, the same throughout the text) to splice to form a sealed furnace body 1.

[0040] It can be understood that, as shown in Figure 1 and 3 The vertical direction in the embodiment is the A direction in the figure, the horizontal direction is the B direction in the figure, and the inclined direction is the C direction in the figure.

[0041] In this way, when the furnace body 1 is divided into a plurality of modular furnace bodies 11 in the horizontal and / or vertical and / or inclined direction, when there is a damaged element (such as an electric heating body 12) in the vertical heating furnace that needs to be replaced, the maintenance personnel can according to the position and size of the damaged element, and replace and maintain the modular furnace body 11 with the damaged element from the entire vertical heating furnace through the connecting structure, greatly reducing the time and manpower required for replacement, and reducing the maintenance cost of the vertical heating furnace.

[0042] The inner wall of each modular furnace body 11 is independently wound with an electric heating body 12, so that the electric heating body 12 of each modular furnace body 11 is controlled individually, the temperature of each modular furnace body 11 can be controlled individually, the maximum current passing through each modular furnace body 11 is reduced, the process temperature of each modular furnace body 11 is prevented from being too high, the temperature uniformity of the furnace body 1 is better ensured, and the service life of the vertical heating furnace is prolonged.

[0043] It can be understood that the detachable connection in the embodiment includes any one of bolt connection, fitting connection and riveting connection. Of course, the detachable connection can also be other connection modes which are convenient to disassemble and resistant to high temperature, and the connection modes are not limited herein.

[0044] In some embodiments, in order to ensure that the heat of the electric heating body 12 can be better uniformly distributed in the furnace body 1 and improve the heating efficiency, the electric heating body 12 on the modular furnace body 11 can be wound in a horizontal and / or vertical and / or inclined direction. The distribution mode of the heating body 12 can also make full use of the internal space of the furnace body 1 and improve the space utilization.

[0045] In some embodiments, in order to ensure that the heat of the electric heating body 12 can be better uniformly distributed in the furnace body 1 and further improve the heating efficiency, the electric heating body 12 on each modular furnace body 11 is uniformly distributed and wound in a circumferential direction.

[0046] In some embodiments, in order to ensure that the furnace body 1 formed by splicing all the modular furnace bodies 11 has good sealing performance and prevents heat from leaking outward, the cut side of each modular furnace body 11 is provided with a sealing and heat preservation layer (not shown, the same below).

[0047] When all the modular furnace bodies 11 are spliced into the furnace body 1 through the connecting structure, the sealing and heat preservation layers of the adjacent cut sides are tightly attached.

[0048] The cut side of the modular furnace body 11 can be in any one of a straight line, a curve and a broken line. Of course, the shape of the cut side can also be other irregular shapes, which are not limited herein, as long as the damaged elements in the vertical heating furnace can be conveniently taken out and replaced with new elements in time.

[0049] In some embodiments, in order to reduce the heat loss of the furnace body 1 formed by splicing all the modular furnace bodies 11, as shown in Figures 1-2 The modular furnace body 11 includes a heat preservation fixed inner container 13, and the outer wall of each modular furnace body 11 is matched and covered with the heat preservation fixed inner container 13. The heat preservation fixed inner container 13 is used to prevent the heat inside the furnace body 1 from leaking outward.

[0050] In some embodiments, in order to further reduce the heat loss of the entire furnace body 1 formed by splicing, as shown in Figure 2As shown, the modular furnace body 11 further comprises an insulation layer 14, the outer walls of the insulation fixed inner can 13 are all matched and covered with the insulation layer 14, and the insulation layer 14 is used to prevent the heat inside the furnace body 1 from leaking outwards.

[0051] It can be understood that the insulation layer 14 proposed in the embodiment is preferably thermal insulation cotton, and of course, the insulation layer 14 can also be made of other materials with thermal insulation properties, which are not limited here.

[0052] In some embodiments, in order to improve the protection performance of the vertical heating furnace, for example, Figure 2 As shown, the outer walls of the insulation layer 14 are all matched and covered with a protective shell 15, the inner wall of the protective shell 15 is provided with a plurality of support columns 16, the ends of the support columns 16 all extend into the corresponding insulation fixed inner can 13 after penetrating through the corresponding insulation layer 14 for fixed connection, and the protective shell 15 is spaced apart from the insulation layer 14.

[0053] It can be understood that when all the modular furnace bodies 11 are spliced to form a cylindrical furnace body 1, the insulation fixed inner can 13, the insulation layer 14 and the protective shell 15 on the modular furnace body 11 will all be spliced to form a cylindrical structure, and the outer side wall of the furnace body 1 is sequentially attached with the insulation fixed inner can 13 and the insulation layer 14. The cutting sides of the insulation fixed inner can 13, the insulation layer 14 and the protective shell 15 are all provided with a sealing insulation layer.

[0054] In some embodiments, for example, Figure 1 As shown, when all the modular furnace bodies 11 are spliced to form a cylindrical furnace body 1, the two ends of the entire furnace body 1 are respectively sleeved with thermal insulation cotton rings 17 for providing additional thermal insulation effect; at the same time, a fixed end plate 18 is also arranged at each end of the entire furnace body 1 for reinforcing the furnace body 1 and ensuring the stability thereof; and at this time, the protective shell 15 in a cylindrical shape will surround or wrap the entire furnace body 1, and the entire furnace body 1 can be fixed with the entire protective shell 15 as a whole structure through the thermal insulation cotton rings 17 and the fixed end plates 18 at both ends thereof, so as to enhance the overall rigidity and stability of the vertical heating furnace.

[0055] And the interior of the whole furnace body 1 is also provided with a sealed reaction chamber (not shown, the same below) for reaction, which is quartz tube or SIC tube, etc. It can be understood that the sealed reaction chamber is also divided along the horizontal and / or vertical and / or inclined direction of the furnace body 1, and is separated into a plurality of modular sealed reaction chambers along with the disassembly of the furnace body 1. When the furnace body 1 is disassembled along the cutting direction, the sealed reaction chamber is disassembled into a plurality of modular sealed reaction chambers, so that the maintenance personnel can replace the damaged elements in the sealed reaction chamber, greatly reducing the time and manpower required for replacement, and reducing the maintenance cost of the vertical heating furnace. Of course, when the sealed reaction chamber is divided into a plurality of modular sealed reaction chambers, the cutting side of each modular sealed reaction chamber is also provided with a sealed heat preservation layer, and any two adjacent modular sealed reaction chambers are detachably connected by at least one high-temperature-resistant and corrosion-resistant connecting structure, thereby splicing to form a cylindrical sealed reaction chamber.

[0056] The protective shell 15 is also provided with a lead-out wire connected to an external power supply, and the lead-out wire is electrically connected to each modular furnace body 11. In this way, the electric heater 12 can be powered to operate, thereby achieving the purpose of heating the furnace body 1.

[0057] In some embodiments, when the vertical heating furnace is only cut into two modular furnace bodies 11 along the vertical direction, if the electric heater 12 in the vertical heating furnace is damaged, the maintenance personnel can pull the two modular furnace bodies 11 outward along the vertical direction, which greatly facilitates the replacement or maintenance of the maintenance personnel, reduces the disassembly time of the vertical heating furnace, and after the two modular furnace bodies 11 are pulled outward, the maintenance personnel can also conveniently maintain the sealed reaction chamber in the middle of the vertical heating furnace.

[0058] In some embodiments, when the vertical heating furnace is cut into four modular furnace bodies 11 along the horizontal and vertical directions, when the electric heater 12 of a certain modular furnace body 11 is detected to be damaged to cause temperature abnormalities, the vertical heating furnace can be disassembled according to the specific damage position of the electric heater 12 to remove the damaged electric heating element 12 at the disassembly position, and install a new electric heater 12 at the disassembly position, thereby more conveniently replacing the damaged electric heating element 12 and timely maintaining the vertical heating furnace, solving the problem that when the elements in the vertical heating furnace are damaged due to the large height and pipe diameter of the vertical heating furnace, the damaged elements cannot be conveniently replaced in time.

[0059] Specifically, the electric heating body 12 in the embodiment is divided into a first electric heating body 121, a second electric heating body 122, a third electric heating body 123 and a fourth electric heating body 124 from top to bottom, and when the third electric heating body 123 located on the right side is damaged, the horizontal direction dismounting position can be: the position at the upper end or the lower end of the third electric heating body 123 along the circumferential direction of the vertical heating furnace; the vertical direction dismounting position can be: the position in the middle of the left side and the right side of the third electric heating body 123 along the height direction of the vertical heating furnace. After the horizontal direction dismounting position and the vertical direction dismounting position are determined, the vertical heating furnace is dismounted in the horizontal direction and the vertical direction, so that the damaged third electric heating body 123 can be taken out at the dismounting position, and the damaged third electric heating body 123 can be replaced in time.

[0060] In some embodiments, the utility model also proposes a kind of coating equipment, and coating equipment includes the vertical heating furnace described above.

[0061] Obviously, the above-described embodiments are only part of the embodiments of the utility model, not all embodiments, and the preferred embodiments of the utility model are given in the drawings, but do not limit the patent scope of the utility model. The utility model can be realized in many different forms, and conversely, the purpose of providing these embodiments is to make the understanding of the disclosure of the utility model more thorough and comprehensive. Although the utility model is described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing specific embodiments or make equivalent replacement to part of technical features. Any equivalent structure made by using the contents of the utility model specification and drawings, directly or indirectly applied in other related technical fields, is also within the patent protection scope of the utility model.

Claims

1. A vertical heating furnace, characterized in that, include: The furnace body (1) adopts a split design and can be cut into multiple modular furnace bodies (11) along the horizontal and / or vertical and / or inclined directions. Each modular furnace body (11) has an electric heating element (12) independently wound around its inner wall. Any two adjacent modular furnace bodies (11) are detachably connected to each other via at least one connecting structure to form a sealed furnace body (1).

2. The vertical heating furnace according to claim 1, characterized in that, All modular furnace bodies (11) have a sealed insulation layer on the cutting side; When all the modular furnace bodies (11) are spliced ​​together through the connecting structure to form the furnace body (1), the sealing and heat preservation layers of the adjacent cutting sides are tightly fitted together.

3. The vertical heating furnace according to claim 2, characterized in that, The shape of the cut side of the modular furnace body (11) can be any one of a straight line, a curve, or a broken line.

4. The vertical heating furnace according to claim 1, characterized in that, The heating element (12) on the modular furnace body (11) can be wound in a horizontal and / or vertical and / or inclined direction.

5. The vertical heating furnace according to claim 1, characterized in that, The heating elements (12) on each of the modular furnace bodies (11) are evenly distributed and wound around the periphery.

6. The vertical heating furnace according to any one of claims 1-5, characterized in that, The detachable connection includes any one of bolted connection, interlocking connection and riveted connection.

7. The vertical heating furnace according to claim 1, characterized in that, The modular furnace body (11) includes an insulated and fixed inner liner (13). The outer wall of each modular furnace body (11) is covered with an insulated and fixed inner liner (13). The insulated and fixed inner liner (13) is used to prevent the heat inside the furnace body (1) from leaking outward.

8. The vertical heating furnace according to claim 7, characterized in that, The modular furnace body (11) also includes a heat insulation layer (14), and the outer wall of the heat insulation fixed inner liner (13) is covered with a heat insulation layer (14). The heat insulation layer (14) is used to prevent the heat inside the furnace body (1) from leaking outward.

9. The vertical heating furnace according to claim 8, characterized in that, The outer wall of the insulation layer (14) is covered with a protective shell (15). The inner wall of the protective shell (15) is provided with multiple support columns (16). The support columns (16) all penetrate and are fixed inside the insulation fixing liner (13). The protective shell (15) and the insulation layer (14) are spaced apart.

10. A coating apparatus, characterized in that, The coating equipment includes the vertical heating furnace as described in any one of claims 1-9.

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