Heat exchange device and vacuumizing equipment
By designing a closed-loop system in the vacuum pump and using the heat from the exhaust gas to preheat the nitrogen, the condensation phenomenon caused by nitrogen condensation is solved, thereby improving the nitrogen purging efficiency and the service life of the vacuum pump.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-28
- Publication Date
- 2026-03-27
AI Technical Summary
When nitrogen enters a vacuum pump at ambient temperature, it creates a temperature difference between the low-temperature point and the surrounding higher-temperature area, leading to condensation. This increases the workload of the pump, affects its normal operation, and may even shorten its service life.
Design a heat exchange device that preheats nitrogen gas using the exhaust heat from a vacuum pump by forming a closed-loop system. The device includes a heat exchanger source and first and second heat exchange pipelines, thereby maximizing heat recovery and reuse and avoiding condensation.
Improve nitrogen purging efficiency to ensure normal operation of the vacuum pump and extend its service life.
Smart Images
Figure CN224051107U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a vacuum technology field, specifically, relates to a heat exchange device and vacuumizing equipment. BACKGROUND
[0002] Nitrogen purge technology is an effective means of internal cooling and cleaning of vacuum pumps. Specifically, nitrogen purge technology can effectively reduce the temperature inside the vacuum pump, ensure that the correct gap is maintained between moving parts and stationary parts, thereby avoiding the phenomenon of jamming caused by thermal expansion. In addition, nitrogen purge can also remove process materials inside the pump, dilute harmful gases, especially for dynamic sealing part, the cooling effect is remarkable, ensuring its normal operation under the condition of high-speed relative motion.
[0003] However, in the actual application process, it is found that when the temperature in the pump is high, the nitrogen enters the pump at ambient temperature, and a low temperature point is formed at the entrance position. The temperature difference between this low temperature point and the surrounding high temperature area will cause condensation phenomenon, so that some gases will condense into liquid after contacting the low temperature point, and even further crystallize into solid powder. These condensates not only increase the working burden of the pump, but also seriously affect the normal operation of the pump, and even shorten the service life of the pump. UTILITY MODEL CONTENTS
[0004] In view of the above problems, the purpose of the utility model is to provide a heat exchange device and vacuumizing equipment, which can absorb and utilize the heat of the gas discharged from the vacuum pump, and use the heat to heat the nitrogen entering the vacuum pump, that is, to fully recycle the heat generated during the operation of the vacuum pump, and to improve the nitrogen purge efficiency, ensure the normal operation of the vacuum pump, and improve the service life of the vacuum pump.
[0005] Therefore, the utility model embodiment provides a heat exchange device and vacuumizing equipment, comprising:
[0006] A heat exchange agent source is used to store a heat exchange agent;
[0007] A first heat exchange pipeline has an input end in communication with an output end of the heat exchange agent source, and is used for heat exchange with an exhaust pipe of a vacuum pump;
[0008] A second heat exchange pipeline has an input end in communication with an output end of the first heat exchange pipeline, and an output end in communication with an input end of the heat exchange agent source, and is used for heat exchange with a nitrogen supply pipe of the vacuum pump.
[0009] The heat exchange device provided by the embodiment of the present application comprises a first heat exchange pipeline, a second heat exchange pipeline and a heat exchange agent source, and forms a closed circulation system, so that the exhaust heat which is originally wasted is converted into useful energy when the heat exchange agent flows in the circulation system, and the energy is maximally recycled and reused. BRIEF DESCRIPTION OF DRAWINGS
[0010] In order to more clearly illustrate the technical scheme of the embodiment of the present application, the drawings used in the embodiment will be briefly introduced as follows, and it should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope, and for those skilled in the art, other related drawings can also be obtained on the basis of the drawings without creative labor.
[0011] Figure 1 The structure schematic diagram of the heat exchange device provided by the embodiment is shown in the figure.
[0012] Figure 2 The flow direction schematic diagram of the heat exchange agent in the heat exchange device provided by the embodiment is shown in the figure.
[0013] Figure 3 The structure schematic diagram of the vacuumizing equipment provided by the embodiment is shown in the figure.
[0014] Figure 4 The flow direction schematic diagram of the gas in the vacuumizing equipment provided by the embodiment is shown in the figure.
[0015] Figure legend: 1-vacuumizing equipment; 10-heat exchange device; 30-vacuum pump; 31-pump body; 33-nitrogen supply pipe; 35-exhaust pipe; 41-third temperature sensor; 43-fourth temperature sensor; 45-nitrogen flow meter; 100-first heat exchange pipeline; 110-first spiral part; 130-circulating pump; 150-flow control valve; 200-connection pipeline; 210-second temperature sensor; 300-second heat exchange pipeline; 310-second spiral part; 330-first temperature sensor; 400-cooler; 500-heat exchange agent source. DETAILED DESCRIPTION
[0016] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.
[0017] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.
[0018] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.
[0019] In the description of the present application, it should be noted that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship of the product of the present application when it is usually placed, which is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.
[0020] In addition, if the terms "first", "second" and the like appear, they are only used to distinguish the description and cannot be understood as indicating or implying relative importance.
[0021] It should be noted that the features in the embodiments of the present application can be combined with each other without conflict.
[0022] The overall structure, working principle and technical effects of the heat exchange device 10 and the vacuumizing equipment 1 provided by the present application will be described in detail below through embodiments and in conjunction with the drawings.
[0023] Please refer to Figure 1 and Figure 2 , Figure 1 the structural schematic view of the heat exchange device 10 provided for the present embodiment, Figure 2The heat exchange device 10 provided by the embodiment is a heat exchange device 10 applied to a vacuumizing equipment 1, which can fully recycle heat generated during operation of a vacuum pump 30, improve nitrogen purging efficiency, ensure normal operation of the vacuum pump 30 and prolong service life of the vacuum pump 30.
[0024] The heat exchange device 10 comprises a heat exchange agent source 500, a first heat exchange pipeline 100 and a second heat exchange pipeline 300. Figure 2
[0025] In addition, the first heat exchange pipeline 100 is used for heat exchange with an exhaust pipe 35 of the vacuum pump 30, that is, the heat exchange agent in the first heat exchange pipeline 100 absorbs waste heat released by the exhaust pipe 35.
[0026] Based on the above, the first heat exchange pipeline 100, the second heat exchange pipeline 300 and the heat exchange agent source 500 form a closed circulation system, so that the heat exchange agent flowing in the circulation system converts the exhaust heat originally wasted into useful energy, realizes maximum recovery and reuse of energy, and thus improves nitrogen purging efficiency, ensures normal operation of the vacuum pump 30 and prolongs service life of the vacuum pump 30.
[0027] In some embodiments, if directly into the first heat exchange pipeline 100, the heat to the circulating heat transfer agent exists fluctuations, which can cause the heat exchange efficiency unstable, and even reduce the waste heat absorption effect. Based on this, the heat exchange device 10 provided by the application further comprises a cooler 400. And the cooler 400 is arranged between the first heat exchange pipeline 100 and the heat transfer agent source 500, for cooling the heat transfer agent, so as to ensure that the heat transfer agent entering the first heat exchange pipeline 100 is always in a stable low temperature state, has greater temperature difference potential, and can more efficiently absorb the waste heat in the exhaust gas of the vacuum pump 30.
[0028] Please refer again to Figure 1 and Figure 2 , the first heat exchange pipeline 100 is provided with a first spiral part 110, and the first spiral part 110 is used for sleeving the exhaust pipe 35 of the vacuum pump 30, so that the heat transfer agent exchanges heat with the process gas in the exhaust pipe 35. It is easy to understand that, on the one hand, the first spiral part 110 greatly increases the contact area between the heat transfer agent and the exhaust pipe 35 through its unique spiral shape; on the other hand, the spiral shape of the first spiral part 110 makes the flow path of the heat transfer agent in the pipe longer, prolongs the heat exchange time, and further improves the sufficiency and efficiency of heat exchange.
[0029] In order to make the heat transfer agent in the second heat exchange pipeline 300 also achieve effective heat release, so as to preheat the nitrogen supply pipe 33 sufficiently, similarly, the second heat exchange pipeline 300 is provided with a second spiral part 310, and the second spiral part 310 is used for sleeving the nitrogen supply pipe 33 of the vacuum pump 30, so that the heat transfer agent exchanges heat with the nitrogen supply pipe 33. It should be noted that the application effect and application principle of the second spiral part 310 are as described above, which will not be repeated here.
[0030] Further, in order to provide sufficient pressure and ensure uniform flow of the heat transfer agent in the first spiral part 110, a circulating pump 130 is further arranged between the first heat exchange pipeline 100 and the heat transfer agent source 500. The circulating pump 130 is used to make the heat transfer agent enter the first heat exchange pipeline 100 from the heat transfer agent source 500, so as to ensure that the heat transfer agent enters the first heat exchange pipeline 100 from the heat transfer agent source 500 at a constant flow rate, and avoid flow fluctuations caused by natural flow.
[0031] In order to ensure that the heat exchange process is always in the optimal state according to the actual needs, a flow control valve 150 is further arranged between the first heat exchange pipeline 100 and the heat transfer agent source 500. The flow control valve 150 is used to adjust the flow of the heat transfer agent delivered to the first heat exchange pipeline 100, so as to avoid the problems of energy waste caused by excessive flow of the heat transfer agent, or the influence of the heat exchange effect caused by insufficient flow, and ensure the balance and efficiency of the heat exchange process.
[0032] Further, the first temperature sensor 330 is arranged between the second heat exchange pipeline 300 and the heat exchange agent source 500, and is used to obtain the temperature of the heat exchange agent after being exchanged with the nitrogen gas supply pipe 33.
[0033] Correspondingly, the heat exchange device 10 further comprises a connecting pipeline 200 and a second temperature sensor 210, wherein the connecting pipeline 200 connects the output end of the first heat exchange pipeline 100 and the input end of the second heat exchange pipeline 300, so as to ensure that the heat exchange agent can be smoothly and continuously transferred from one heat exchange stage to the next heat exchange stage; and the second temperature sensor 210 is arranged in the connecting pipeline 200 and is used to obtain the temperature of the heat exchange agent after being exchanged with the exhaust pipe 35.
[0034] In addition, Figure 3 A structure schematic diagram of the vacuumizing equipment 1 provided in the embodiment is shown in the following figure, Figure 4 A gas flow direction schematic diagram of the vacuumizing equipment 1 provided in the embodiment is shown in the following figure, wherein, Figure 4 The arrows in the figure indicate the gas flow direction. Figure 3 and Figure 4 The utility model also provides a vacuumizing equipment 1, it includes vacuum pump 30 and the heat exchange device 10 in preceding embodiment, therefore, this vacuumizing equipment 1 can also in the heat of recycling the heat of vacuum pump 30 operation process produced simultaneously, reach the beneficial effect of improving nitrogen gas purging efficiency, guarantee vacuum pump 30 normal operation, promote the service life of vacuum pump 30.
[0035] Corresponding to the heat exchange device 10 in the preceding embodiment, the vacuum pump 30 comprises a pump body 31, a nitrogen gas supply pipe 33 and an exhaust pipe 35, wherein the exhaust pipe 35 is communicated with the pump body 31 and is exchanged with the first heat exchange pipeline 100, so that the heat exchange agent can absorb the waste heat in the exhaust gas, effectively reduce the exhaust gas temperature, and avoid the damage caused by high temperature to the pump body 31; the nitrogen gas supply pipe 33 is communicated with the pump body 31 and is exchanged with the second heat exchange pipeline 300, so that the nitrogen gas entering the vacuum pump 30 is preheated, avoiding the formation of low temperature point after the cold nitrogen gas enters the pump body 31, thereby improving the nitrogen gas purging efficiency.
[0036] Further, the vacuumizing device 1 further comprises a third temperature sensor 41 and a fourth temperature sensor 43 arranged on the nitrogen supply pipe 33. The third temperature sensor 41 is arranged upstream of the second spiral portion 310 and is configured to obtain the temperature of the nitrogen before heat exchange with the heat exchange agent in the second heat exchange pipe 300, so as to provide the initial temperature data of the nitrogen entering the second spiral portion 310. The fourth temperature sensor 43 is arranged downstream of the second spiral portion 310 and is configured to obtain the temperature of the nitrogen after heat exchange with the heat exchange agent in the second heat exchange pipe 300, so as to ensure that the preheating process is sufficient and effective.
[0037] Further, the vacuumizing device 1 further comprises a nitrogen flow meter 45 arranged on the nitrogen supply pipe 33. The nitrogen flow meter 45 is configured to obtain the flow of the nitrogen entering the nitrogen supply pipe 33. It is to be understood that the nitrogen flow meter 45 can help to detect whether the flow of the nitrogen is appropriate, so as to avoid energy waste caused by excessive flow or insufficient purging effect caused by insufficient flow, and ensure that the purging process is efficient.
[0038] In addition, in combination with the intelligent control system, a heat balance equation Q 放 = Q 吸 = c1 x m1 x ΔT1 = c2 x m2 x ΔT2 is introduced, so as to accurately calculate and control the data collected by the nitrogen flow meter 45, the first temperature sensor 330, the second temperature sensor 210, the third temperature sensor 41 and the fourth temperature sensor 43. Based on this, the vacuumizing system provided by the present application can also intelligently control and adjust the working state of the components such as the flow control valve 150 and the circulating pump 130, so as to improve the intelligent level.
[0039] It is to be noted that c1 is the specific heat capacity of the heat exchange agent, c2 is the specific heat capacity of the nitrogen, m1 is the flow mass of the heat exchange agent based on the adjustment of the flow control valve 150, and m2 is the flow mass of the nitrogen measured by the nitrogen flow meter 45. ΔT1 is the difference between the temperature T1 of the heat exchange agent obtained by the first temperature sensor 330 and the temperature T2 of the heat exchange agent obtained by the second temperature sensor 210, and ΔT2 is the difference between the temperature T3 of the nitrogen obtained by the third temperature sensor 41 and the actual required preheating temperature T4.
[0040] On the basis, namely, the heat released by the heat transfer agent is: Q release = c1 x m1 x (T1-T2) ; the heat absorbed by the nitrogen supply pipe 33 is: Q absorption = c2 x m2 x (T4-T3). Wherein, c1, c2, m2, T1, T2 and T3 are known quantities, and T4 is the set preheating temperature. The above formula and numerical value are input into the control system, and the flow mass m1 of the heat transfer agent can be calculated. The control system can dynamically adjust the operating state of the flow control valve 150 and the circulating pump 130 according to the measured value of m1, to ensure that the flow of the heat transfer agent is moderate. In addition, in order to ensure that the nitrogen temperature T5 obtained by the third temperature sensor 41 is consistent with the actual required preheating temperature T4, the control system can also dynamically adjust the operating state of the cooler 400 according to the actual operating state.
[0041] The working principle and process of the vacuumizing equipment 1 provided in the embodiments of the present application are as follows:
[0042] In the state that the vacuum pump 30 is running, the circulating pump 130 and the flow control valve 150 are controlled to enter the working state, so that the heat transfer agent is pumped out from the heat transfer agent source 500 and input into the first spiral part 110 in the first heat exchange pipeline 100 after being adjusted by the flow control valve 150. At this time, the heat transfer agent absorbs the waste heat released by the exhaust pipe 35. Then, the heat transfer agent after being heated enters the second heat exchange pipeline 300 and preheats the nitrogen about to enter the vacuum pump 30 when flowing through the second spiral part 310. After the preheating is completed, the heat transfer agent returns to the heat transfer agent source 500 and enters the first heat exchange pipeline 100 again after being cooled by the cooler 400, and circulates repeatedly.
[0043] In summary, the embodiments of the present application provide a heat exchange device 10 and a vacuumizing equipment 1. The heat exchange device 10 includes a heat transfer agent source 500, a first heat exchange pipeline 100 and a second heat exchange pipeline 300. The first heat exchange pipeline 100, the second heat exchange pipeline 300 and the heat transfer agent source 500 form a closed circulation system, so that the heat transfer agent converts the exhaust heat originally wasted into useful energy when flowing in the circulation system, and realizes the maximum recovery and reuse of energy. Specifically, the first heat exchange pipeline 100 is used for heat exchange with the exhaust pipe 35 of the vacuum pump 30, that is, the heat transfer agent therein absorbs the waste heat released by the exhaust pipe 35. The second heat exchange pipeline 300 is used for heat exchange with the nitrogen supply pipe 33 of the vacuum pump 30, that is, the heat transfer agent after being heated enters the second heat exchange pipeline 300 to preheat the nitrogen about to enter the vacuum pump 30. It is easy to understand that the preheated nitrogen can avoid forming a low temperature point when entering the vacuum pump 30, prevent the condensation phenomenon from occurring, and further improve the nitrogen purging efficiency, ensure the normal operation of the vacuum pump 30 and improve the service life of the vacuum pump 30.
[0044] The above merely illustrates the specific implementation of the present application, but the protection scope of the present application is not limited to this, any person skilled in the art can easily think of the changes or replacements within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.
Claims
1. A heat exchange device, characterized in that, include: A heat exchanger source (500) for storing heat exchanger; The first heat exchange pipeline (100) has its input end connected to the output end of the heat exchange agent source (500) and is used for heat exchange with the exhaust pipe (35) of the vacuum pump (30). The second heat exchange pipeline (300) has its input end connected to the output end of the first heat exchange pipeline (100), and its output end connected to the input end of the heat exchange agent source (500), and is used for heat exchange with the nitrogen supply pipe (33) of the vacuum pump (30).
2. The heat exchange device according to claim 1, characterized in that, The first heat exchange pipeline (100) is provided with a first spiral part (110), which is used to be sleeved on the exhaust pipe (35) of the vacuum pump (30) so that the heat exchanger exchanges heat with the exhaust pipe (35).
3. The heat exchange device according to claim 1, characterized in that, A circulation pump (130) and a flow control valve (150) are also provided between the first heat exchange pipeline (100) and the heat exchange agent source (500).
4. The heat exchange device according to any one of claims 1 to 3, characterized in that, The heat exchange device (10) further includes a cooler (400), which is located between the first heat exchange pipeline (100) and the heat exchanger source (500) for cooling the heat exchanger.
5. The heat exchange device according to any one of claims 1 to 3, characterized in that, The second heat exchange pipeline (300) is provided with a second spiral section (310), which is used to be fitted onto the nitrogen supply pipe (33) of the vacuum pump (30) so that the heat exchanger exchanges heat with the nitrogen supply pipe (33).
6. The heat exchange device according to claim 5, characterized in that, A first temperature sensor (330) is provided between the second heat exchange pipeline (300) and the heat exchanger source (500).
7. The heat exchange device according to any one of claims 1 to 3, characterized in that, The heat exchange device (10) further includes a connecting pipe (200) and a second temperature sensor (210); wherein the connecting pipe (200) connects the output end of the first heat exchange pipe (100) and the input end of the second heat exchange pipe (300), and the second temperature sensor (210) is located in the connecting pipe (200) to obtain the temperature of the heat exchanger after heat exchange with the exhaust pipe (35).
8. A vacuum pumping device, characterized in that, It includes a vacuum pump (30) and a heat exchange device (10) as described in any one of claims 1 to 7; wherein the vacuum pump (30) includes a pump body (31), a nitrogen supply pipe (33) and an exhaust pipe (35), the exhaust pipe (35) is connected to the pump body (31) and exchanges heat with the first heat exchange pipeline (100), the nitrogen supply pipe (33) is connected to the pump body (31) and exchanges heat with the second heat exchange pipeline (300).
9. The vacuum pumping device according to claim 8, characterized in that, The vacuum pumping device (1) further includes a third temperature sensor (41) and a fourth temperature sensor (43) disposed on the nitrogen supply pipe (33); wherein, the third temperature sensor (41) is used to obtain the temperature of nitrogen before heat exchange with the heat exchanger in the second heat exchange pipeline (300), and the fourth temperature sensor (43) is used to obtain the temperature of nitrogen after heat exchange with the heat exchanger in the second heat exchange pipeline (300).
10. The vacuum pumping device according to claim 8, characterized in that, The vacuum pumping device (1) also includes a nitrogen flow meter (45) installed on the nitrogen supply pipe (33), which is used to obtain the nitrogen flow rate entering the nitrogen supply pipe (33).