Multilayer film reflector calibration mechanism for photoetching machine

Abstract

The utility model relates to the field of optical devices, and discloses a multilayer film reflector calibration mechanism for a photoetching machine, which comprises a slide rail seat, an adjusting screw rod is movably connected in the slide rail seat, a screw rod sliding sleeve is mounted outside the adjusting screw rod, a support plate is fixedly connected to the top end of the screw rod sliding sleeve, and a support is fixedly connected to the top end of the support plate. And a mounting base is fixedly mounted at the top end of the supporting plate, a reserved groove is formed in the mounting base, a second motor is mounted in the reserved groove, and a supporting shaft is mounted at the output end of the second motor. According to the multilayer film reflector calibration mechanism for the photoetching machine, the third motor can drive the screw rod sliding sleeve on the sliding rail seat to move so as to drive the calibration plate to horizontally adjust left and right, the first motor can adjust the longitudinal rotation angle of the calibration plate, and the second motor can drive the transverse rotation angle of the calibration plate; the capacitance sensor can accurately detect the adjusting angle and position of the calibration plate, and the problem that the calibration effect is poor is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to optical device technical field, concretely is a multilayer film mirror calibration mechanism for photoetching machine. BACKGROUND

[0002] Photoetching machine is common optical device, and photoetching machine is the machine that prints target structure pattern to substrate such as silicon wafer, and the mirror calibration mechanism of photoetching machine is the core component of ensuring optical system precision.

[0003] The mirror calibration mechanism of photoetching machine can calibrate the position during processing by the optical principle of mirror, and the common calibration mechanism has the situation that calibration precision is not good and calibration angle is insufficient, thereby the stability and flexibility of the mirror calibration mechanism of photoetching machine are used.

[0004] The mirror calibration mechanism for photoetching machine is urgently needed to solve the technical defects in the above-mentioned technology. UTILITY MODEL CONTENTS

[0005] The utility model discloses a mirror calibration mechanism for photoetching machine to solve the problem of poor calibration effect in the above-mentioned background technology.

[0006] To achieve the above object, the utility model provides the following technical scheme: a mirror calibration mechanism for photoetching machine, including slide rail seat, the inside movable joint of slide rail seat has the adjusting screw rod, the outside installation of adjusting screw rod has screw rod slip cover, the top fixed connection of screw rod slip cover has the support plate, the top fixed mounting of support plate has the mounting seat, the inside of mounting seat is provided with the reserved slot, the inside installation of reserved slot has the second motor, the output of second motor installs the support shaft, the top fixed connection of support shaft has the mounting flange, the top installation of mounting flange has the support frame, the inside movable installation of support frame has the calibration plate, the inside installation of calibration plate has the mirror piece, the top installation of calibration plate has the electric capacity sensor, the right side installation of support frame has the first motor, the both sides fixed connection of slide rail seat has the mounting plate, the third motor is installed on the mounting plate.

[0007] As a further technical scheme of the utility model, the output of the first motor is connected with the right side of the calibration plate.

[0008] As a further technical scheme of the utility model, the output of the third motor is connected with the adjusting screw rod, and the screw rod slip cover is screw-jointed with the adjusting screw rod.

[0009] As a further technical scheme of the utility model, the mounting plate is provided with two groups, and two groups of mounting bolts are arranged on the mounting plate.

[0010] As a further technical scheme of the utility model, the two sides of the reflecting lens are fixedly connected with connecting clamping blocks, the two sides of the front end of the calibration plate are provided with connecting clamping grooves, and the top end and the bottom end of the connecting clamping groove are movably connected with limiting stop strips.

[0011] As a further technical scheme of the utility model, the connecting clamping blocks are embedded in the interiors of the connecting clamping grooves and are limited by the limiting stop strips.

[0012] As a further technical scheme of the utility model, the bottom end of the supporting frame is provided with a mounting groove, the mounting flange is provided with a fixing bolt, the mounting flange is embedded in the interior of the mounting groove and is fixed by the fixing bolt.

[0013] As a further technical scheme of the utility model, the interior of the calibration plate is fixedly connected with a sealing ring, and the outer wall of the reflecting lens is closely attached to the sealing ring.

[0014] Compared with the prior art, the utility model has the advantages that the multi-layer film reflecting mirror calibration mechanism for the photoetching machine not only realizes the functions of enhancing calibration effect, facilitating replacement of the lens and facilitating installation and use.

[0015] (1) The calibration plate can drive the reflecting lens to calibrate and adjust, the third motor can drive the lead screw sleeve on the slide rail seat to move and thus drive the calibration plate to horizontally adjust left and right, the first motor can adjust the longitudinal rotation angle of the calibration plate, the second motor can drive the transverse rotation angle of the calibration plate, and when the calibration plate is displaced and the angle is adjusted, the capacitance sensor can accurately detect the adjustment angle and position of the calibration plate, and the structure realizes the function of facilitating enhancement of calibration effect.

[0016] (2) The reflecting lens on the calibration plate can be replaced according to the use requirement, the limiting stop strip on the calibration plate is first rotated and moved away, then the reflecting lens is taken off from the calibration plate, the connecting clamping block on the reflecting lens is moved out of the interior of the connecting clamping groove, and the structure realizes the function of facilitating replacement of the lens.

[0017] (3) The calibration mechanism can be installed on the photoetching machine equipment for use, the mounting plate and the mounting bolt on the slide rail seat can be used for fixed installation when the calibration mechanism is installed, the supporting frame can be installed on the mounting seat, the mounting flange is embedded in the interior of the mounting groove at the bottom of the supporting frame and is fixed by the fixing bolt, and the structure realizes the function of facilitating installation and use. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1The front view structure schematic diagram of the utility model;

[0019] Figure 2 The front view structure schematic diagram of the utility model's calibration plate;

[0020] Figure 3 The utility model discloses Figure 1 The enlarged structure schematic diagram of A place in the middle;

[0021] Figure 4 The front view structure schematic diagram of the utility model's mounting seat.

[0022] In the drawing: 1, slide rail seat; 2, adjusting screw rod; 3, support plate; 4, mounting seat; 5, support frame; 6, calibration plate; 7, connecting clamping groove; 8, reflecting mirror piece; 9, electric capacity sensor; 10, first motor; 11, mounting flange; 12, second motor; 13, screw rod sliding sleeve; 14, mounting plate; 15, mounting bolt; 16, limit baffle; 17, connecting clamping block; 18, sealing ring; 19, support shaft; 20, mounting groove; 21, fixed bolt; 22, reserved slot; 23, third motor. DETAILED DESCRIPTION

[0023] The technical scheme in the embodiments of the utility model will be described clearly and completely below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative work belong to the scope of protection of the utility model.

[0024] Please refer to Figures 1-4 The utility model provides an embodiment: a kind of multilayer film reflecting mirror calibration mechanism for photoetching machine, including slide rail seat 1, adjusting screw rod 2 is movably connected in the inside of slide rail seat 1, screw rod sliding sleeve 13 is installed on the outside of adjusting screw rod 2, the top of screw rod sliding sleeve 13 is fixedly connected with support plate 3, support plate 3's top is fixedly installed with mounting seat 4, and mounting seat 4 is provided with reserved slot 22 in the inside, second motor 12 is installed in the inside of reserved slot 22, support shaft 19 is installed on the output of second motor 12, mounting flange 11 is fixedly connected on the top of support shaft 19, support frame 5 is installed on the top of mounting flange 11, calibration plate 6 is movably installed in the inside of support frame 5, reflecting mirror piece 8 is installed in the inside of calibration plate 6, electric capacity sensor 9 is installed on the top of calibration plate 6, first motor 10 is installed on the right side of support frame 5, and mounting plate 14 is fixedly connected on the both sides of slide rail seat 1, third motor 23 is installed on mounting plate 14;

[0025] The output end of the first motor 10 is connected with the right side of the calibration plate 6, the output end of the third motor 23 is connected with the adjusting screw rod 2, the screw rod sleeve 13 is screw-jointed with the adjusting screw rod 2, the sealing ring 18 is fixedly connected inside the calibration plate 6, and the outer wall of the reflecting mirror 8 is tightly combined with the sealing ring 18.

[0026] Specifically, as shown in Figure 1 and Figure 2 , the calibration plate 6 can drive the reflecting mirror 8 to calibrate and adjust, the third motor 23 can drive the screw rod sleeve 13 on the slide rail seat 1 to move so as to drive the calibration plate 6 to horizontally adjust left and right, the first motor 10 can adjust the longitudinal rotation angle of the calibration plate 6, and the second motor 12 can drive the calibration plate 6 to horizontally rotate.

[0027] The two sides of the reflecting mirror 8 are fixedly connected with the connecting clamping blocks 17, the two sides of the front end of the calibration plate 6 are provided with the connecting clamping grooves 7, the top end and the bottom end of the connecting clamping grooves 7 are movably connected with the limiting stop strips 16, the connecting clamping blocks 17 are embedded inside the connecting clamping grooves 7 and are limited by the limiting stop strips 16.

[0028] Specifically, as shown in Figure 1 and Figure 3 , the reflecting mirror 8 on the calibration plate 6 can be replaced according to the use requirement, the limiting stop strips 16 on the calibration plate 6 are rotated and moved away first, then the reflecting mirror 8 is taken off from the calibration plate 6, and the connecting clamping blocks 17 on the reflecting mirror 8 are moved out of the inside of the connecting clamping grooves 7.

[0029] The bottom end of the supporting frame 5 is provided with the mounting groove 20, the mounting flange 11 is provided with the fixing bolts 21, the mounting flange 11 is embedded inside the mounting groove 20 and is fixed by the fixing bolts 21, and the mounting plate 14 is provided with two groups, and the mounting plate 14 is provided with two groups of mounting bolts 15.

[0030] Specifically, as shown in Figure 1 and Figure 4 , the calibration mechanism can be installed on the photoetching machine equipment for use, the mounting plate 14 and the mounting bolts 15 on the slide rail seat 1 can be used for fixed installation when installation, the supporting frame 5 can be installed on the mounting seat 4, the mounting flange 11 is embedded inside the mounting groove 20 at the bottom of the supporting frame 5 and is fixedly installed by the fixing bolts 21.

[0031] Working principle: the calibration mechanism can be installed on the photoetching machine equipment, when installing, the mounting plate 14 and the mounting bolt 15 on the slide rail seat 1 can be used for fixed installation, the supporting frame 5 can be installed on the mounting seat 4, the calibration plate 6 can drive the mirror piece 8 to calibrate and adjust, the third motor 23 can drive the lead screw sleeve 13 on the slide rail seat 1 to move so as to drive the calibration plate 6 to adjust horizontally, the first motor 10 can adjust the longitudinal rotation angle of the calibration plate 6, the second motor 12 can drive the transverse rotation angle of the calibration plate 6, when the calibration plate 6 is displaced and the angle is adjusted, the capacitance sensor 9 can accurately detect the adjustment angle and position of the calibration plate 6, the mirror piece 8 on the calibration plate 6 can be replaced according to the use requirement, when replacing, first, the limiting baffle 16 on the calibration plate 6 is rotated and moved away, then the mirror piece 8 is taken off from the calibration plate 6, the connecting clamping block 17 on the mirror piece 8 is moved out from the inside of the connecting clamping groove 7, the structure realizes the function of replacing the mirror piece conveniently.

[0032] It is apparent for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, but can be implemented in other concrete forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be considered in all aspects as exemplary and not restrictive, and the scope of the present application is defined by the appended claims rather than the above description, and all changes falling within the meaning and range of the equivalent elements of the claims are intended to be embraced in the present application. Any reference signs in the claims should not be considered as limiting the claims involved.

Claims

1. A multi-layer film mirror calibration mechanism for a lithography machine, comprising a slide rail base (1), characterized in that: The inside of the sliding rail seat (1) is movably connected with an adjusting lead screw (2), the outside of the adjusting lead screw (2) is provided with a lead screw sleeve (13), the top end of the lead screw sleeve (13) is fixedly connected with a supporting plate (3), the top end of the supporting plate (3) is fixedly provided with a mounting seat (4), the inside of the mounting seat (4) is provided with a reserved groove (22), the inside of the reserved groove (22) is provided with a second motor (12), the output end of the second motor (12) is provided with a supporting shaft (19), the top end of the supporting shaft (19) is fixedly connected with a mounting flange (11), the top end of the mounting flange (11) is provided with a supporting frame (5), the inside of the supporting frame (5) is movably provided with a calibration plate (6), the inside of the calibration plate (6) is provided with a reflecting lens (8), the top end of the calibration plate (6) is provided with a capacitive sensor (9), the right side of the supporting frame (5) is provided with a first motor (10), both sides of the sliding rail seat (1) are fixedly provided with a mounting plate (14), and the mounting plate (14) is provided with a third motor (23).

2. The multi-layer film mirror calibration mechanism for a photolithography machine according to claim 1, characterized in that: The output end of the first motor (10) is connected with the right side of the calibration plate (6).

3. The multi-layer film mirror calibration mechanism for a photolithography machine according to claim 1, characterized in that: The output end of the third motor (23) is connected with the adjusting lead screw (2), and the lead screw sleeve (13) is spirally sleeved with the adjusting lead screw (2).

4. The multi-layer film mirror calibration mechanism for a photolithography machine according to claim 1, characterized in that: The mounting plate (14) is provided with two groups, and the mounting plate (14) is provided with two groups of mounting bolts (15).

5. The multi-layer film mirror alignment mechanism for a photolithography machine according to claim 1, wherein: The both sides of the reflecting lens (8) are fixedly connected with connecting clamping blocks (17), the both sides of the front end of the calibration plate (6) are provided with connecting clamping grooves (7), and the top end and the bottom end of the connecting clamping grooves (7) are movably connected with limiting stop strips (16).

6. The multi-layer film mirror alignment mechanism for a photolithography machine according to claim 5, wherein: The connecting clamping blocks (17) are embedded in the inside of the connecting clamping grooves (7) and are limited by the limiting stop strips (16).

7. The multi-layer film mirror calibration mechanism for a photolithography machine according to claim 1, wherein: The bottom end of the supporting frame (5) is provided with a mounting groove (20), the mounting flange (11) is provided with a fixing bolt (21), the mounting flange (11) is embedded in the inside of the mounting groove (20) and is fixed by the fixing bolt (21).

8. The multi-layer film mirror calibration mechanism for a photolithography machine according to claim 1, wherein: The inside of the calibration plate (6) is fixedly connected with a sealing ring (18), and the outer wall of the reflecting lens (8) is closely attached to the sealing ring (18).

Images