Novel ion source vacuum cavity

Abstract

The utility model discloses a novel ion source vacuum cavity. The novel ion source vacuum cavity comprises a cavity body, a high vacuum system arranged outside the cavity body, and a single-axis motion platform, a sample loading platform, a positioning unit and a sample feeding and discharging mechanism which are arranged inside the cavity body, the high vacuum system communicates with the interior of the cavity body and is used for keeping the vacuum degree in the cavity body; the sample loading platform is connected with the single-axis motion platform, the single-axis motion platform is used for driving the sample loading platform to reciprocate in the cavity body, the sample loading platform is used for loading a sample, the sample feeding and discharging mechanism is used for feeding the sample into or discharging the sample out of the cavity body, and the positioning unit is used for ensuring movement collimation of the single-axis motion platform and the sample loading platform. The device has the advantages that unbiased sampling work of samples at a plurality of continuous point positions can be realized by only needing one power without position compensation, meanwhile, the vacuum volume of the instrument is minimized by adopting a multi-mechanism motor driving mode under the condition that the ion flight time distance is not shortened, and meanwhile, the cost of the instrument is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of ion source vacuum cavity, and especially relates to a novel ion source vacuum cavity. BACKGROUND

[0002] The mass spectrometer is also called mass spectrometer, and the mass spectrometer takes ion source, mass analyzer and ion detector as the core. The ion source is a device for ionizing sample molecules under high vacuum conditions. The ionized molecules will further fragment into a plurality of fragment ions and neutral particles of smaller mass due to the received energy. They obtain the same average kinetic energy under the action of the acceleration electric field and enter the mass analyzer. The mass analyzer is a device for separating ions of different masses entering it at the same time according to the mass-to-charge ratio m / e. The separated ions enter the ion detector in turn, collect and amplify the ion signal, and are processed by the computer to draw a mass spectrum. The ion source vacuum cavity of the mass spectrometer is a device for moving the sample forward and backward under high vacuum conditions. The mass analyzer and the ion detector also need the sample to be printed on the detection channel. Mass spectrometer engineering technology is the technology closely related to human beings today and in the future.

[0003] Due to the principle of high-speed flight of charged particles in an electromagnetic field, the ions are bombarded by energy and fly upward to the detector. The flight channel does not need to move and change. Different position samples rely on the coordinate movement of the motion platform to realize different position printing. The existing sample motion platform of the mass spectrometer mainly uses a double-motor motion platform. Two power sources move the XY position between multiple rows of targets for printing. Position deviation compensation is realized through double-shaft or multi-shaft linkage. The XY cross-motion mechanism needs two sets of guide mechanisms to cooperate in two directions, which affects the target plate movement precision. Two sets of guide mechanisms occupy a large space, making the vacuum chamber containing the motion mechanism larger, affecting the vacuum efficiency, and making the overall height and volume of the instrument larger. The ions enter the field-free region from the acceleration region and fly into the ion detector, which occupies a large height and length-width size, and the cost of motor manufacturing and use is higher. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a novel ion source vacuum cavity to solve the foregoing problems in the prior art.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0006] The new ion source vacuum cavity comprises a cavity body, a high vacuum system arranged outside the cavity body, a single-axis motion platform, a sample loading platform, a positioning unit and a sample in-out mechanism arranged inside the cavity body; the high vacuum system is in communication with the inside of the cavity body for maintaining the vacuum degree inside the cavity body; the sample loading platform is connected with the single-axis motion platform, the single-axis motion platform is used to drive the sample loading platform to move back and forth in the cavity body, the sample loading platform is used to carry a sample, the sample in-out mechanism is used to send the sample into or out of the cavity body, and the positioning unit is used to ensure the movement alignment of the single-axis motion platform and the sample loading platform to ensure the accuracy of the optimal position of laser excitation ion flight.

[0007] Preferably, the high vacuum system comprises a turbo molecular pump, a first vacuum sealing connection device, a vacuum switching flange and a second vacuum sealing connection device; the outlet end of the turbo molecular pump is connected with one end of the first vacuum sealing connection device, the other end of the first vacuum sealing connection device is connected with the large port of the vacuum switching flange, the small port of the vacuum switching flange is connected with one end of the second vacuum sealing connection device, and the other end of the second vacuum sealing connection device is sealingly connected with the cavity body.

[0008] The large port of the vacuum switching flange and the turbo molecular pump are locked by a locking buckle; and the small port of the vacuum switching flange and the cavity body are pressed by a vacuum pressing block.

[0009] Preferably, the single-axis motion platform comprises a motor, a shaft coupling, a vacuum lead screw and a lead screw nut; the motor is connected to the outside of the cavity body through a motor mounting plate, the output shaft of the motor is connected with one end of the vacuum lead screw through the shaft coupling, the shaft coupling is locked by two groups of 90° intersecting top wire holes, the other end of the vacuum lead screw horizontally extends into the cavity body and is connected with the cavity body, the lead screw nut is engaged with the vacuum lead screw, and the lead screw nut is connected with the sample loading platform through a fixed block.

[0010] Alternatively, the single-axis motion platform comprises a motor, a first bevel gear, a second bevel gear, a vacuum lead screw and a lead screw nut; the motor is connected to the outside of the cavity body through a motor mounting plate, the output shaft of the motor is engaged with the second bevel gear through the first bevel gear, the first bevel gear and the second bevel gear are respectively locked by two groups of 90° intersecting top wire holes at the output end of the motor and one end of the vacuum lead screw, the other end of the vacuum lead screw horizontally extends into the cavity body and is connected with the cavity body, the lead screw nut is engaged with the vacuum lead screw, and the lead screw nut is connected with the sample loading platform through a fixed block.

[0011] Preferably, the single-axis motion platform further comprises a first holding structure, a second holding structure, a first photoelectric switch and a second photoelectric switch; opposite sides inside the cavity body are respectively provided with the first holding structure and the second holding structure, and two ends of the vacuum lead screw are respectively connected with the first holding structure and the second holding structure, so that the vacuum lead screw is horizontally arranged inside the cavity body.

[0012] The first photoelectric switch and the second photoelectric switch are respectively mounted on the side wall of the cavity body at two ends of the vacuum lead screw through corresponding supports.

[0013] Preferably, the first holding structure and the second holding structure are respectively mounted inside the cavity body through a first transmission support and a second transmission support; the first holding structure is provided with a first transmission bearing groove and a fixing ring, the first transmission bearing groove is provided with a first transmission bearing, the fixing ring is coaxially arranged on one side of the first transmission bearing, and one end of the vacuum lead screw sequentially passes through the first transmission bearing and the fixing ring; the second holding structure is provided with a second bearing groove and a clamping spring, the second transmission bearing groove is provided with a second transmission bearing; the clamping spring is coaxially arranged on one side of the second transmission bearing, and the other end of the vacuum lead screw sequentially passes through the second transmission bearing and the clamping spring.

[0014] Preferably, the sample loading platform comprises a horizontal support seat, a vacuum guide rail sliding block assembly, an insulating support column, a target positioning column, a conductive sheet, a sample target groove and a sample target plate; the horizontal support seat is connected with a lead screw nut through a fixing block, two sides of the bottom of the horizontal support seat are respectively connected with the cavity body through a vacuum guide rail sliding block assembly, and the two vacuum guide rail sliding block assemblies are respectively arranged in parallel on two sides of the vacuum lead screw; the top of the horizontal support seat is connected with the sample target groove through the insulating support column and the target positioning column; the lower end of the insulating support column is connected with the horizontal support seat, the upper end of the insulating support column is connected with the lower end of the target positioning column through the conductive sheet, the upper end of the target positioning column is connected with the sample target groove, and the sample target plate is loaded on the sample target groove.

[0015] The insulating support column and the target positioning column are both height-adjustable, and a guide mechanism for auxiliary height adjustment is arranged between the target positioning column and the sample target groove.

[0016] Preferably, the positioning unit comprises a first X positioning, a second X positioning, a first Y positioning and a second Y positioning; two groups of the vacuum guide rail slider assemblies are respectively installed on the positioning surfaces of the first Y positioning and the second Y positioning, and the first Y positioning and the second Y positioning provide a unified Y-axis to ensure that the positions of the sample points on the sample target plate are on the central axis of the optimal sampling position during the forward and backward movement of the lateral support seat.

[0017] Preferably, the vacuum cavity further comprises a dynamic sealing system, the cavity body is provided with a stepped mounting hole, the dynamic sealing system is arranged in the mounting hole, and one end of the vacuum lead screw connected with the motor penetrates the dynamic sealing system and extends into the cavity body.

[0018] Preferably, the dynamic sealing system comprises a packing ring and a sealing assembly, the side wall of the large-diameter section of the mounting hole is provided with an internal thread, and the inner diameter of the small-diameter section of the mounting hole is matched with the outer diameter of the vacuum lead screw; the packing ring has a stepped structure, the small-diameter section of the packing ring coaxially extends into the large-diameter section of the mounting hole and is screwed with the large-diameter section, the large-diameter section of the packing ring abuts against the outer wall of the cavity body, and one end of the vacuum lead screw coaxially penetrates the small-diameter section of the mounting hole and the small-diameter section of the packing ring in sequence; and the sealing structure is sleeved on the vacuum lead screw and located in the small-diameter section of the mounting hole.

[0019] Preferably, the sealing structure comprises an extrusion washer, an upper sealing ring, an extrusion sleeve and a lower sealing ring arranged in sequence; the extrusion sleeve is provided with annular oil storage grooves on the inner and outer sides, the annular oil storage groove on the outer side of the extrusion sleeve is correspondingly connected with an oil injection channel, the oil injection channel is located in the cavity body and its communication end with the atmosphere is sealed by a sealing bolt.

[0020] Alternatively, the sealing structure comprises one or more groups of cross-arranged sealing rings and washers, the washers are provided with annular oil storage grooves on the inner and outer sides, the annular oil storage groove on the outer side of the washer is correspondingly connected with an oil injection channel, and the oil injection channel is located in the cavity body and its communication end with the atmosphere is sealed by a sealing bolt.

[0021] The utility model discloses a beneficial effect is: 1, the utility model discloses a single power source realizes the reciprocating movement and the sample of proofing, high accuracy positioning motion structure combination, the cumulative deviation is little. 2, the utility model discloses single motor dynamic sealing transmission, get rid of the restriction of motor size to vacuum cavity, greatly reduce the vacuum volume, motor can apply conventional motor transmission, and the cost is lower, and the maintenance is convenient. 3, the utility model discloses single axle ion source height is small, and the restriction influence of excluding motion platform to volume and height, and the vacuum volume is small, uses low -power molecular pump and fore pump, and the noise is small, and the cost is low. 4, the utility model discloses sample sample reaches the time of proofing high vacuum threshold value and needs short, can realize the target of entering and proofing, and there is no waiting time. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is the structure schematic diagram of vacuum cavity in the utility model embodiment;

[0023] Figure 2 It is the structure schematic diagram of high vacuum system in the utility model embodiment;

[0024] Figure 3 It is the first form structure diagram of single axle motion platform in the utility model embodiment;

[0025] Figure 4 It is the second form structure diagram of single axle motion platform in the utility model embodiment;

[0026] Figure 5 It is the setting schematic diagram of photoelectric switch in the single axle motion platform in the utility model embodiment;

[0027] Figure 6 It is the structure diagram of sample carrying platform in the utility model embodiment;

[0028] Figure 7 It is the structure diagram of positioning unit in the utility model embodiment;

[0029] Figure 8 It is the schematic diagram of best proofing position in the utility model embodiment;

[0030] Figure 9 It is the first form structure diagram of dynamic sealing system in the utility model embodiment;

[0031] Figure 10 It is the second form structure diagram of dynamic sealing system in the utility model embodiment.

[0032] In the diagram: Ⅰ. High vacuum system; Ⅱ. Single-axis motion platform; Ⅲ. Sample carrying platform; Ⅳ. Positioning unit; Ⅴ. Sample in / out mechanism; Ⅵ. Dynamic sealing system; 1. Turbomolecular pump; 2. First vacuum sealing connection device; 3. Vacuum adapter flange; 4. Locking buckle; 5. Second vacuum sealing connection device; 6. Vacuum pressure block; 7. Cavity body; 8. Motor; 9. Motor mounting plate; 10. Coupling; 11. Set screw hole; 12. Vacuum screw; 13. First transmission support; 14. First transmission bearing groove; 15. Fixing ring; 16. Screw nut; 17. Fixing block; 18. Second transmission support; 19. Second transmission bearing; 20. Snap ring; 21. First photoelectric switch; 22. Second photoelectric switch; 23. Bracket; 24. Vacuum guide rail slider assembly; 25. Lateral support base; 26. Insulating support column; 27. Conductive electrode plate; 28. Target positioning column; 29. ​​Sample target plate; 30. Sample target groove; 31. First X positioning; 32. Second X positioning; 33. First Y positioning; 34. Second Y positioning; 35. First bevel gear; 36. Second bevel gear; B. Tightening ring; C. Washer; C-1. Extrusion washer; C-2. Extrusion collar; D. Sealing ring; D-1. Upper sealing ring; D-2. Lower sealing ring; E. Annular oil reservoir; F. Oil injection channel; G. Sealing bolt. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the scope of the present utility model.

[0034] like Figure 1 As shown, this embodiment provides a novel ion source vacuum chamber, including a chamber body 7, a high vacuum system I disposed outside the chamber body 7, and a single-axis motion platform II, a sample carrying platform III, a positioning unit IV, and a sample entry / exit mechanism V disposed inside the chamber body 7. The high vacuum system I is connected to the interior of the chamber body 7 to maintain the vacuum level inside the chamber body 7. The sample carrying platform III is connected to the single-axis motion platform II, and the single-axis motion platform II is used to drive the sample carrying platform III to reciprocate within the chamber body 7. The sample carrying platform III is used to carry the sample. The sample entry / exit mechanism V is used to send the sample into or out of the chamber body 7. The positioning unit IV is used to ensure the alignment of the single-axis motion platform II and the sample carrying platform III to ensure the accuracy of the optimal position for laser-excited ion flight.

[0035] I. High Vacuum System

[0036] like Figure 2As shown, the high vacuum system I includes a turbo molecular pump 1, a first vacuum sealing connecting device 2, a vacuum adapter flange 3 and a second vacuum sealing connecting device 5; an outlet end of the turbo molecular pump 1 is connected with one end of the first vacuum sealing connecting device 2, the other end of the first vacuum sealing connecting device 2 is connected with a large port of the vacuum adapter flange 3, a small port of the vacuum adapter flange 3 is connected with one end of the second vacuum sealing connecting device 5, and the other end of the second vacuum sealing connecting device 5 is sealingly connected with the cavity body 7.

[0037] In this embodiment, the large port of the vacuum adapter flange 3 and the turbo molecular pump 1 are locked by the locking buckles 4; and the small port of the vacuum adapter flange 3 and the cavity body 7 are locked and pressed by the vacuum pressing blocks 6. Specifically, four groups of the locking buckles 4 are evenly spaced along the large port of the vacuum adapter flange 3. Four groups of the vacuum pressing blocks 6 are evenly arranged along the small port of the vacuum adapter flange 3.

[0038] II. Single-axis motion platform II

[0039] As shown in the first figure of Figure 3 , the single-axis motion platform II includes a motor 8, a shaft coupling 10, a vacuum lead screw 12 and a lead screw nut 16. The motor 8 is connected to the outside of the cavity body 7 through a motor mounting plate 9, the output shaft of the motor 8 is connected to one end of the vacuum lead screw 12 through the shaft coupling 10, the shaft coupling 10 is cross-locked by two groups of 90° intersecting top pin holes 11, the other end of the vacuum lead screw 12 horizontally extends into the cavity body 7 and is connected thereto, the lead screw nut 16 is engaged with the vacuum lead screw 12, and the lead screw nut 16 is connected to the sample loading platform III through a fixing block 17.

[0040] In this embodiment, the single-axis motion platform II also has another form, and the motor 8 outside the cavity body 7 can also be used as power by being arranged above the cross space. The motor 8 is connected to the cavity body 7 through the motor mounting plate 9, and the output shaft is engaged and driven by the first bevel gear 35 and the second bevel gear 36 to convert the vertical motion into horizontal motion. The first bevel gear 35 and the second bevel gear 36 are cross-locked at the output shaft of the motor 8 and one end of the vacuum lead screw 12 by two groups of 90° intersecting top pin holes 11, respectively.

[0041] The motor 8 arranged above can greatly save height space. The motor 8 is arranged outside in this direction, and the dynamic sealing system VI is used for transmission, so that the height of the single-axis motion platform II and the sample loading platform III in the cavity is reduced to the minimum, the influence of the motor height on the overall height inside the cavity is eliminated, and the vacuum volume inside the cavity is reduced, the vacuum time is reduced, and the size of the instrument in the height direction is minimized. At the same time, the motor 8 can also be directly arranged inside the cavity body 7 (as shown in the first figure of Figure 4 ), at this time, the motor 8 should use a vacuum motor.

[0042] In this embodiment, the single-axis motion platform II uses a motor 8 installed at the rear end of the cavity body 7 as power. The motor 8 can be a common stepper motor, servo motor or other common motor, which does not need to operate in a high vacuum environment.

[0043] In this embodiment, the single-axis motion platform II further comprises two sets of transmission retaining structures, namely a first retaining structure and a second retaining structure. The first retaining structure and the second retaining structure are respectively arranged on the opposite sides inside the cavity body 7, and the two ends of the vacuum lead screw 12 are respectively connected to the first retaining structure and the second retaining structure, so that the vacuum lead screw 12 is horizontally arranged inside the cavity body 7. Specifically, the first retaining structure and the second retaining structure are respectively installed inside the cavity body 7 through a first transmission support 13 and a second transmission support 18. The first retaining structure is provided with a first transmission bearing groove 14 and a fixing ring 15, the first transmission bearing groove 14 is provided with a first transmission bearing, and the fixing ring 15 is coaxially arranged on one side of the first transmission bearing. One end of the vacuum lead screw 12 sequentially passes through the first transmission bearing and the fixing ring 15. The second retaining structure is provided with a second bearing groove and a clamping spring 20, and the second transmission bearing groove is provided with a second transmission bearing 19. The clamping spring 20 is coaxially arranged on one side of the second transmission bearing 19, and the other end of the vacuum lead screw 12 sequentially passes through the second transmission bearing 19 and the clamping spring 20. The first transmission bearing groove 14 and the fixing ring 15 are used to ensure the stable rotation of the first transmission bearing. The second transmission bearing groove and the clamping spring 20 are used to ensure the stable action of the second transmission bearing 19, and the clamping spring 20 can play a blocking and limiting role. The first transmission bearing and the second transmission bearing 19 are both high-precision ball bearings.

[0044] As shown in Figure 5 In this embodiment, a first photoelectric switch 21 and a second photoelectric switch 22 are arranged in the cavity body 7, and the first photoelectric switch 21 and the second photoelectric switch 22 are respectively installed on the side wall of the cavity body 7 at the two ends of the vacuum lead screw 12 through corresponding brackets 23. The photoelectric switch provides start and in-place feedback, and the motor 8 provides micron-level power through precise calculation and precise transmission of the vacuum lead screw 12.

[0045] In this embodiment, the lead screw nut 16 is made of polyether ether ketone and tetrafluoroethylene composite material, which provides a small amount of gas release in a vacuum environment, accelerates the vacuum pumping speed, and is maintenance-free under the condition of continuous operation for 10,000 times for a long time, saving manual maintenance and lubrication period.

[0046] III. Sample loading platform III

[0047] As shown in Figure 6As shown, the sample platform III includes a transverse support base 25, a vacuum guide rail slider assembly 24, an insulating support column 26, a target positioning column 28, a conductive electrode plate 27, a sample target groove 30, and a sample target plate 29. The transverse support base 25 is connected to the lead screw nut 16 via a fixing block 17. The bottom sides of the transverse support base 25 are respectively connected to the cavity body 7 via a vacuum guide rail slider assembly 24. The two vacuum guide rail slider assemblies 24 are respectively arranged parallel to each other on both sides of the vacuum lead screw 12. The top of the transverse support base 25 is connected to the sample target groove 30 via the insulating support column 26 and the target positioning column 28. The lower end of the insulating support column 26 is connected to the transverse support base 25, and the upper end of the insulating support column 26 is connected to the lower end of the target positioning column 28 via the conductive electrode plate 27. The upper end of the target positioning column 28 is connected to the sample target groove 30, and the sample target groove 30 carries the sample target plate 29. The sample target plate 29 is used to place the sample. Both the insulating support column 26 and the target positioning column 28 are height-adjustable, and an auxiliary height adjustment guide mechanism is provided between the target positioning column 28 and the sample target groove 30 to ensure that the direction will not be deviated during height adjustment.

[0048] IV. Positioning Unit IV

[0049] like Figure 7 As shown, the positioning unit IV includes a first X positioning 31, a second X positioning 32, a first Y positioning 33, and a second Y positioning 34; the two sets of vacuum guide rail slider assemblies 24 are respectively installed on the positioning surfaces of the first Y positioning 33 and the second Y positioning 34. The first Y positioning 33 and the second Y positioning 34 provide a unified Y-axis to ensure that during the forward and backward movement of the transverse support 25, the position of the sample point on the sample target plate 29 is on the central axis of the optimal sampling position; the first holding structure and the second holding structure are respectively installed on the positioning surfaces of the first X positioning 31 and the second X positioning 32. The first X positioning 31 and the second X positioning 32 are used to ensure the alignment of the motor 8 in the X direction.

[0050] like Figure 8 As shown, the positioning unit IV, serving as the carrier for the central axis and optimal laser prototyping position of the single-axis motion platform II, is mounted on the cavity body 7. The high-precision vacuum guide rail slider assembly 24 is mounted on the left positioning surface of the first Y positioning 33, the first holding structure is mounted on the lower positioning surface of the first X positioning 31, and the second holding structure is close to the positioning plane of the second X positioning 32 to ensure the alignment of the motor 8 in the X direction. The left positioning surface of the transverse support 25 cooperates with the left side of the slider of the vacuum guide rail slider assembly 24. The first Y positioning 33 and the second Y positioning 34 provide the unification of the central axis in the Y direction. The slider slides back and forth to keep the position of the sample point on the sample target plate 29 loaded on the sample target slot 30 on the central axis when entering and exiting the target. The coordinates of each sample point are the same in the optimal position for laser-excited ion flight.

[0051] The positioning units IV are cooperated with each other to ensure the accuracy of the sample point on the sample target plate 29 in the sample target slot 30 in the central axis and the optimal position of laser excitation ion flight in the cavity body 7, and ensure the accuracy of the direction of ion entering the flight tube from the ion source.

[0052] Five, sample in and out mechanism V

[0053] The sample can be replaced by driving the sample out of the sample in and out mechanism V, and the new sample can be used to realize different batches of sample printing by the sample in and out mechanism V.

[0054] Six, dynamic sealing system VI

[0055] In order to ensure that the vacuum lead screw 12 is sealed and installed on the cavity body 7, the dynamic sealing system VI is arranged. The cavity body 7 is provided with a stepped mounting hole, the dynamic sealing system VI is arranged in the mounting hole, and the end of the vacuum lead screw 12 connected with the motor 8 penetrates into the cavity body 7 through the dynamic sealing system VI.

[0056] The dynamic sealing system VI includes a tight ring B and a sealing assembly, the side wall of the large diameter section of the mounting hole is provided with an internal thread, the inner diameter of the small diameter section of the mounting hole is matched with the outer diameter of the vacuum lead screw 12; the tight ring B is in a stepped structure, the small diameter section of the tight ring B is coaxially inserted into the large diameter section of the mounting hole and is screwed with it, the large diameter section of the tight ring B abuts against the outer wall of the cavity body 7, and one end of the vacuum lead screw 12 is coaxially sleeved with the small diameter section of the mounting hole and the small diameter section of the tight ring B in sequence; the sealing structure is sleeved on the vacuum lead screw 12 and located in the small diameter section of the mounting hole.

[0057] As Figure 9As shown, in the embodiment, the sealing structure comprises, in sequence, the extrusion washer C-1, the upper sealing ring D-1, the extrusion collar C-2 and the lower sealing ring D-2; the top surface and the bottom surface of the extrusion washer C-1 are both flat structures, while the thickness of the extrusion collar C-2 gradually increases from the inside to the outside so that the top surface and the bottom surface of the extrusion collar C-2 both constitute inclined end surfaces. Generally, the taper of the inclined end surfaces of the extrusion collar C-2 is 5-15°; the extrusion collar C-2 is provided with annular oil storage grooves E on both the inner side and the outer side; the annular oil storage grooves E on the outer side of the extrusion collar C-2 correspond to and communicate with an oil injection channel F; the oil injection channel F is located in the cavity body 7 and its communication end with the atmosphere is sealed by a sealing bolt G. The vacuum lead screw 12 is inserted into the mounting hole, and then the lower sealing ring D-2, the extrusion collar C-2, the upper sealing ring D-1, the extrusion washer C-1 and the jacking ring B are sequentially sleeved on the vacuum lead screw 12; sealing grease is injected into the annular oil storage grooves E of the extrusion collar C-2; then the jacking ring B is screwed; the upper sealing ring D-1 and the lower sealing ring D-2 are extruded and deformed and tightly adhere to the vacuum lead screw 12 to form a sealing structure, so that the vacuum lead screw 12 is always in sealing contact with the upper sealing ring D-1 and the lower sealing ring D-2 during rotation, thereby ensuring the vacuum degree in the flight tube.

[0058] In the embodiment, the sealing grease can fully fill the small gaps between the sealing ring D and the vacuum lead screw 12, and at the same time provide lubrication, so as to avoid excessive wear of the sealing ring D caused by sliding friction between the vacuum lead screw 12 and the sealing ring D, thereby affecting the sealing effect.

[0059] As shown in the drawings, Figure 10 In the embodiment, the dynamic sealing system VI can also be a combination of the sealing ring D and the washer C in sealing contact with the vacuum lead screw 12 to realize sealing transmission. Alternatively, a plurality of sealing rings D and a plurality of washers C are cross-placed and combined to realize sealing transmission.

[0060] The above dynamic sealing transmission system can effectively reduce the vacuum volume inside the cavity body 7 and the cavity size, and at the same time, the motor is external, so that an ordinary motor can be used, and the dependence on high-cost high-vacuum motors is eliminated.

[0061] By adopting the above technical scheme of the utility model, the following beneficial effects are obtained:

[0062] The utility model provides a novel ion source vacuum cavity, realizes single -shank drive with mass spectrometer motion platform drive, changes existing complex double -shank linkage structure, reduces personnel debugging, reduces the interference of artificial factor, increases the selectability of use, adopts new material screw nut motion part maintenance free. Solve the motion platform of prior art, the size of cavity length width height is big, the volume of vacuumizing is big, the overall weight and the occupied space are big, the cost of high vacuum motor is high, can not one direction movement different target point accurate sample problem. External ordinary motor, maintenance is convenient, reduce the volume of vacuumizing, increase the efficiency of vacuumizing, eliminate customer sample waiting vacuum time, realize the target and sample that go in, that is, sample. Adopt single -shank dynamic seal transmission, only keep sample platform and the vacuum volume of sample mechanism, make the size of instrument to minimum, reduce the size of instrument XYZ direction to minimum, reduce the cost of manufacture, liberate laboratory space, the instrument changes from many people to lift to single -person holds up and walks, solve the difficult predicament of hospital instrument movement.

[0063] The above is only the preferred embodiment of the utility model, it should be pointed out that, for ordinary skilled person in the art, without departing from the principle of the utility model, can make a number of improvements and refinements, these improvements and refinements also should be regarded as the protection scope of the utility model.

Claims

1. A novel ion source vacuum chamber characterized by: The application relates to a high-vacuum system and a single-shaft motion platform, and relates to a high-vacuum system and a single-shaft motion platform for a laser ionization time-of-flight mass spectrometer.

2. The novel ion source vacuum chamber of claim 1, wherein: The high-vacuum system comprises a turbo molecular pump, a first vacuum sealing connecting device, a vacuum switching flange and a second vacuum sealing connecting device; the outlet end of the turbo molecular pump is connected with one end of the first vacuum sealing connecting device; the other end of the first vacuum sealing connecting device is connected with the large port of the vacuum switching flange; the small port of the vacuum switching flange is connected with one end of the second vacuum sealing connecting device; and the other end of the second vacuum sealing connecting device is sealingly connected with the cavity body. The large port of the vacuum switching flange is locked with the turbo molecular pump by a locking buckle; and the small port of the vacuum switching flange is locked with the cavity body by a vacuum pressing block.

3. The novel ion source vacuum chamber of claim 1, wherein: The single-shaft motion platform comprises a motor, a shaft coupling, a vacuum lead screw and a lead screw nut; the motor is connected with the outside of the cavity body through a motor mounting plate; the output shaft of the motor is connected with one end of the vacuum lead screw through the shaft coupling; the shaft coupling is locked by two groups of 90-degree intersecting top pin holes; the other end of the vacuum lead screw horizontally extends into the cavity body and is connected with the cavity body; the lead screw nut is engaged with the vacuum lead screw; and the lead screw nut is connected with the sample loading platform through a fixing block. Alternatively, the single-shaft motion platform comprises a motor, a first bevel gear, a second bevel gear, a vacuum lead screw and a lead screw nut; the motor is connected with the outside of the cavity body through a motor mounting plate; the output shaft of the motor is engaged with the second bevel gear through the first bevel gear; the first bevel gear and the second bevel gear are respectively locked with the output end of the motor and one end of the vacuum lead screw through two groups of 90-degree intersecting top pin holes; the other end of the vacuum lead screw horizontally extends into the cavity body and is connected with the cavity body; the lead screw nut is engaged with the vacuum lead screw; and the lead screw nut is connected with the sample loading platform through a fixing block.

4. The novel ion source vacuum chamber of claim 3, wherein: The single-shaft motion platform further comprises a first retaining structure, a second retaining structure, a first photoelectric switch and a second photoelectric switch; the opposite sides in the cavity body are respectively provided with the first retaining structure and the second retaining structure; and the two ends of the vacuum lead screw are respectively connected with the first retaining structure and the second retaining structure, so that the vacuum lead screw is horizontally arranged in the cavity body. The first photoelectric switch and the second photoelectric switch are respectively mounted on the side walls of the cavity body through corresponding brackets.

5. The novel ion source vacuum chamber of claim 4, wherein: The first holding structure and the second holding structure are respectively mounted inside the cavity body through first transmission support and second transmission support; the first holding structure is provided with first transmission bearing groove and fixed ring, the first transmission bearing groove is provided with first transmission bearing, the fixed ring is coaxially arranged on one side of the first transmission bearing, one end of the vacuum screw rod passes through the first transmission bearing and the fixed ring in sequence; the second holding structure is provided with second bearing groove and snap spring, the second bearing groove is provided with second transmission bearing; the snap spring is coaxially arranged on one side of the second transmission bearing, the other end of the vacuum screw rod passes through the second transmission bearing and the snap spring in sequence.

6. The novel ion source vacuum chamber of claim 5, wherein: The sample loading platform comprises a transverse support seat, a vacuum guide rail sliding block assembly, an insulating support column, a target positioning column, a conductive electrode sheet, a sample target slot and a sample target plate; the transverse support seat is connected with the screw nut through a fixing block, the bottom of the transverse support seat is connected with the cavity body through a vacuum guide rail sliding block assembly on each side, and the two vacuum guide rail sliding block assemblies are arranged in parallel on the two sides of the vacuum screw rod; the top of the transverse support seat is connected with the sample target slot through the insulating support column and the target positioning column; the lower end of the insulating support column is connected with the transverse support seat, the upper end of the insulating support column is connected with the lower end of the target positioning column through the conductive electrode sheet, the upper end of the target positioning column is connected with the sample target slot, and the sample target slot carries the sample target plate. The insulating support column and the target positioning column are both height-adjustable, and a guide mechanism for auxiliary height adjustment is arranged between the target positioning column and the sample target slot.

7. The novel ion source vacuum chamber of claim 6, wherein: The positioning unit comprises a first X positioning unit, a second X positioning unit, a first Y positioning unit and a second Y positioning unit; two groups of vacuum guide rail sliding block assemblies are respectively arranged on the positioning surfaces of the first Y positioning unit and the second Y positioning unit, the first Y positioning unit and the second Y positioning unit provide a unified Y-axis to ensure that the positions of sample points on the sample target plate are on the central axis of the optimal sampling position during the forward and backward movement of the transverse support seat; the first holding structure and the second holding structure are respectively arranged on the positioning surfaces of the first X positioning unit and the second X positioning unit, and the first X positioning unit and the second X positioning unit are used to ensure the alignment of the motor movement in the X direction.

8. The novel ion source vacuum chamber according to any one of claims 1 to 7, characterized in that: The vacuum cavity further comprises a dynamic sealing system, the cavity body is provided with a stepped mounting hole, the dynamic sealing system is arranged in the mounting hole, and one end of the vacuum screw rod connected with the motor penetrates the dynamic sealing system and extends into the cavity body.

9. The novel ion source vacuum chamber of claim 8, wherein: The dynamic sealing system comprises a packing ring and a sealing assembly, the side wall of the large-diameter section of the mounting hole is provided with an internal thread, and the inner diameter of the small-diameter section of the mounting hole is matched with the outer diameter of the vacuum screw rod; the packing ring has a stepped structure, the small-diameter section of the packing ring is coaxially inserted into the large-diameter section of the mounting hole and is screwed with the same, the large-diameter section of the packing ring abuts against the outer wall of the cavity body, and one end of the vacuum screw rod is coaxially sleeved with the small-diameter section of the mounting hole and the small-diameter section of the packing ring in sequence; the sealing system is sleeved on the vacuum screw rod and located in the small-diameter section of the mounting hole.

10. The novel ion source vacuum chamber of claim 9, wherein: The sealing system comprises, in sequence, a compression gasket, an upper sealing ring, a compression collar and a lower sealing ring; annular oil storage grooves are formed on the inner and outer sides of the compression collar, an oil injection channel corresponding to the annular oil storage groove on the outer side of the compression collar is in communication, the oil injection channel is located in the cavity body and its communication end with the atmosphere is sealed by a sealing bolt; Alternatively, the sealing system comprises one or more groups of intersecting sealing rings and gaskets, annular oil storage grooves are formed on the inner and outer sides of the gasket, an oil injection channel corresponding to the annular oil storage groove on the outer side of the gasket is in communication, the oil injection channel is located in the cavity body and its communication end with the atmosphere is sealed by a sealing bolt.

Images