Boat structure and diffusion equipment

Abstract

The utility model provides a boat structure and diffusion equipment, the boat structure comprises a boat rack and a slide boat placed on the boat rack and used for loading battery pieces, two ends of the slide boat are provided with support member groups, each support member group is composed of a plurality of first support members, and two sides of the boat rack are provided with support grooves in contact with the support member groups; according to the utility model, the stability of the slide glass boat arranged on the boat frame can be improved, and the problem that the diffusion quality of battery pieces in the slide glass boat is influenced due to the shaking of the slide glass boat in the boat frame is avoided, so that the conversion efficiency of the battery pieces is improved, and meanwhile, the bearing capacity of the slide glass boat is better, and the stress is more stable.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of solar photovoltaic cell manufacturing, more specifically, relate to a boat structure and diffusion equipment. BACKGROUND

[0002] With the continuous development and popularization of solar photovoltaic cell technology, the corresponding cell piece (or silicon piece) equipment manufacturing industry has also made rapid progress. At present, the solar cell field presents the route of a hundred schools of thought, PERC (passivated emitter and rear cell), TOPCON (tunnel oxide passivated contact), HJT (heterojunction cell), BC (heterojunction cell) and other cell lines are self-contained, but at present, the above several lines, diffusion equipment is an important link, is one of the indispensable core processes. Among them, in the cell piece equipment manufacturing process, including cleaning texturing, boron diffusion, phosphorus diffusion, annealing oxidation and other CVD (chemical vapor deposition) processes, the above processes need to be carried out in the reaction furnace tube.

[0003] At present, in the related technology, the boat structure in the reaction furnace tube is provided with a boat frame and a piece boat, process gas is introduced into the reaction furnace tube to process the cell piece in the piece boat, and with the long time use and multiple processing of the boat frame and the piece boat, and the material of the piece boat and the boat frame is generally quartz, which belongs to fragile material, so that the stability of the boat structure for diffusing the cell piece is too low, thereby affecting the diffusion quality of the cell piece in the piece boat. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a kind of boat structure and diffusion equipment, to solve the stability of the boat structure for diffusing the cell piece in the related technology is too low, affect the problem of the diffusion quality of cell piece in piece boat.

[0005] To achieve the above object, the technical scheme adopted by the utility model is as follows:

[0006] The utility model provides a kind of boat structure first, including boat frame, and the piece boat for loading cell piece placed on boat frame, its characterized in that, the both ends of piece boat are provided with support group, support group is formed by multiple first support, and the both sides of boat frame are provided with support groove in contact with support group.

[0007] Further, the first support includes support portion penetrating the support groove and limiting portion arranged at one end of the support portion close to the body of the piece boat.

[0008] Further, the shape of the support portion and the limiting portion is cylindrical or elliptical cylindrical.

[0009] Further, the shape of the support portion is cylindrical, and the diameter of the support portion ranges from 16 to 30 mm.

[0010] Further, the diameter of the support part is 20mm.

[0011] Further, the boat frame comprises two side plates and two blocking plates which jointly enclose a containing space, the top of the side plate is provided with a plurality of support grooves along the length direction, and a plurality of slide plates are placed in the containing space.

[0012] Further, the slide plate comprises two end plates arranged oppositely, and four slot rods connected with the two end plates, the slot rod is provided with a plurality of clamping grooves corresponding to the plurality of battery plates along the axial direction, and the end plate is provided with two first support parts in contact with the support grooves.

[0013] Further, the side plate is provided with a plurality of through holes along the length direction.

[0014] Further, the blocking plate is provided with a second support part for grabbing the boat structure.

[0015] Further, the boat frame further comprises a plurality of support plates which are arranged at intervals along the length direction and connected with the bottom of the two side plates, and the support plate and the blocking plate are provided with support feet.

[0016] The utility model also provides a diffusion equipment, including diffusion furnace with reaction cavity, and the boat structure as recorded in the foregoing text, the boat structure is placed in the reaction cavity.

[0017] Compared with the related art, the boat structure and the diffusion equipment have the beneficial effects that: the two ends of the slide plate are provided with a support part group, the first support part in the support part group is matched with and contacts the corresponding support groove of the boat frame, the stability of the slide plate arranged on the boat frame is increased, the slide plate is prevented from shaking in the boat frame, and the diffusion quality of the battery plate in the slide plate is affected, and the conversion efficiency of the battery plate is improved; meanwhile, the bearing capacity of the slide plate is better, and the stress is more stable; and when one of the first support parts in the support part group is damaged, the other first support part can replace the damaged first support part, the single first support part is prevented from being damaged to cause the slide plate to fall from the boat frame, and the battery plate in the slide plate is prevented from being damaged. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme in the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiments or related technical description, and obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can be obtained according to these drawings without paying the creativity labor.

[0019] Figure 1 It is the schematic view of the boat structure loaded with the battery plate in the utility model;

[0020] Figure 2It is the schematic view of the wafer boat loaded with battery piece in the utility model;

[0021] Figure 3 It is the schematic view of the wafer boat upper support piece group and the contact of the support groove on the boat frame in the utility model;

[0022] Figure 4 It is the schematic view of the wafer boat in the utility model;

[0023] Figure 5 It is the schematic view of the boat frame in the utility model;

[0024] Among them, the main marks of each figure in the drawing are:

[0025] 1, boat frame;2, wafer boat;3, battery piece;

[0026] 11, support groove;12, side plate;13, baffle;14, second support piece;15, connecting rod;16, support plate;17, support foot;18, through hole;

[0027] 21, first support piece;22, end plate;23, groove bar;

[0028] 211, support part;212, limiting part. DETAILED DESCRIPTION

[0029] In order to make the technical problems, technical schemes and beneficial effects to be solved in the utility model more clear and obvious, the utility model is further described in detail in the following with the help of the drawings and examples. It should be understood that the specific examples described here are only used to explain the utility model, and are not used to limit the utility model.

[0030] Please refer to Figures 1 to 5 The boat structure includes boat frame 1 and wafer boat 2 for loading battery piece 3, and the wafer boat 2 is placed on the boat frame 1. The both ends of the wafer boat 2 are provided with a support piece group, the support piece group is composed of a plurality of first support pieces 21, and the both sides of the boat frame 1 are provided with support grooves 11 in contact with the support piece group.

[0031] The utility model discloses a wafer boat 2 both ends are provided with the support piece group, and the first support piece 21 in the support piece group is matched and contacted with the support groove 11 of the corresponding boat frame 1, which increases the stability of the wafer boat 2 arranged on the boat frame 1, avoids the wafer boat 2 to sway in the boat frame 1, influences the battery piece 3 diffusion quality in the wafer boat 2, thereby improves the conversion efficiency of the battery piece 3;At the same time, the bearing capacity of the wafer boat 2 is better, and the stress is more stable.

[0032] In addition, the carrier boat 2 is made of quartz material as a whole, that is, the first support 21 is made of quartz material, which is a fragile material. Since the carrier boat 2 is provided with the support group at both ends, when one of the first supports 21 of the support group is damaged, the other first support 21 can replace the damaged first support 21, so that the damage of a single first support 21 does not cause the carrier boat 2 to fall from the boat rack 1, thereby damaging the battery sheet 3 in the carrier boat 2.

[0033] Further, as shown in Figure 3 , Figure 4 , the first support 21 comprises a support part 211 penetrating the support groove 11 and a limiting part 212 arranged at one end of the support part 211 close to the carrier boat body.

[0034] The utility model also can set up first support 21 is composed of support part 211 and limiting part 212, through the support part 211 of first support 21 and support groove 11 are contacted and are matched, and at the same time through the limiting part 212 of first support 21 when carrier boat 2 is placed in boat rack 1, play the limiting action, make carrier boat 2 place in boat rack 1 more stable, also can effectively avoid the problem that carrier boat 2 is produced in boat rack 1 skew.

[0035] Further, the shape of the support part 211 and the limiting part 212 of the first support 21 is cylindrical or elliptical cylindrical. The first support 21 with each section being cylindrical or elliptical cylindrical can better contact the two sides of the boat rack 1, has wider compatibility, and makes the carrier boat 2 placed in the boat rack 1 more stable.

[0036] It should be understood that in other optional embodiments, the shape of the support part 211 can also be semi-cylindrical or irregular, and the shape of the limiting part 212 can also be quadrangular prism, triangular prism or irregular. Regardless of the shape of the support part 211, it can be ensured that the support part 211 is in good contact with the support groove 11; regardless of the shape of the limiting part 212, it can be ensured that the limiting part 212 can play a limiting role.

[0037] Further, as shown in Figure 4 , the shape of the support part 211 and the limiting part 212 is cylindrical, the diameter of the limiting part 212 is greater than the diameter of the support part 211, and the diameter of the support part 211 ranges from 16 to 30 mm. By selecting the support part 211 and the limiting part 212 within a certain diameter range, the volume of the first support 21 as a whole is minimized on the basis of supporting the carrier boat 2 filled with battery sheets 3, the first support 21 with too large volume cannot be placed in the boat rack 1 is avoided, and the manufacturing cost of the first support 21 is reduced, unnecessary material loss is saved.

[0038] At the same time, as shown inFigure 3 As shown, the two groove side walls of the support groove 11 are arranged in an arc shape, which can make the contact between the first support 21 and the support groove 11 more conformable.

[0039] Further preferably, the diameter of the support part 211 is 20 mm. The support part 211 with this diameter can withstand the full battery piece 3 loaded carrier boat 2 loaded in the boat rack 1, avoiding that the local volume of the first support 21 is too small to support the full battery piece 3 loaded carrier boat 2 loaded in the boat rack 1.

[0040] Further, as shown in Figures 1 to 2 , Figures 4 to 5 The boat rack 1 includes two side plates 12 and two baffle plates 13 that jointly enclose a containing space, the top of the side plate 12 is provided with a plurality of support grooves 11 along the length direction, and a plurality of carrier boats 2 are placed in the containing space.

[0041] The carrier boat 2 includes two end plates 22 arranged oppositely, and four groove rods 23 connected with the two end plates 22, the groove rod 23 is provided with a plurality of clamping grooves corresponding to the plurality of battery pieces 3 along the axial direction, and the end plate 22 is provided with two first supports 21 in contact with the support groove 11.

[0042] It should be understood that the carrier boat 2 can be loaded with a plurality of battery pieces 3 at a time, and the plurality of carrier boats 2 loaded with battery pieces 3 are sequentially loaded into the boat rack 1, so that the boat rack 1 can load a plurality of carrier boats 2 at a time. After the carrier boat 2 is placed on the boat rack 1, the support piece groups at both ends of the carrier boat 2 are in corresponding contact with the support grooves 11 on both sides of the boat rack 1, and at the same time, the four groove rods 23 in the carrier boat 2 are arranged horizontally or approximately horizontally in the boat rack 1, so that the battery pieces 3 loaded in the carrier boat 2 are arranged vertically or approximately vertically in the boat rack 1, so that the arrangement direction of the battery pieces 3 is the same as the flow direction of the process gas, and the process gas can flow more smoothly into the battery pieces 3 in the carrier boat 2, thereby improving the uniformity of the process gas diffusion to the battery pieces 3.

[0043] In addition, compared with the horizontal insertion method in the related art, the battery pieces 3 are arranged vertically or approximately vertically in the boat rack 1 through the carrier boat 2, and this vertical or approximately vertical insertion method allows the carrier boat 2 to insert more battery pieces 3 (about 2 times), which can increase the amount of battery pieces 3 that the carrier boat 2 can accommodate and improve the production yield of the boat structure.

[0044] In addition, the larger number of battery pieces 3 inserted into the carrier boat 2 requires higher stability of the support structure of the carrier boat 2 on the boat rack 1, and the corresponding contact between the support piece groups at both ends of the carrier boat 2 and the support grooves 11 on both sides of the boat rack 1 can meet the stability requirement of the vertical or approximately vertical insertion method of the battery pieces 3.

[0045] Further, as shown in Figure 5 The side plates 12 are provided with a plurality of through holes 18 along the length direction thereof. The shape of the through holes 18 can be square, circular or other shapes. By providing a plurality of through holes 18 on the two side plates 12 of the boat frame 1, on the one hand, the weight of the boat frame 1 can be reduced, and the convenience of the boat frame 1 in the movement process can be improved; on the other hand, the circulation of the process gas can also be assisted, the process gas can be conveniently in and out of the boat frame 1, and the uniformity of the film plating of the process gas on the battery piece 3 can be improved.

[0046] Further, as shown in Figure 5 The baffle plate 13 is provided with a second support 14 for grabbing the boat structure. The shape of the second support 14 can be an elliptical cylinder, a circle or other shapes. By providing a second support 14 on the two baffle plates of the boat frame 1, the boat frame 1 can be grabbed by the mechanical hand, and the problem that the boat frame 1 or the carrier boat 2 slips off due to unstable grabbing of the boat frame 1, thereby damaging the battery piece 3 in the carrier boat 2, can be avoided.

[0047] Further, as shown in Figure 5 The baffle plate 13 is a solid plate. Compared with the baffle plate 13 in the related art which is provided with a large hole, the baffle plate 13 with a solid structure can avoid a large amount of process gas in the boat frame 1 from leaking out from the baffle plates 13 at both ends of the boat frame 1, thereby affecting the diffusion efficiency and quality of the battery piece 3. At the same time, when the boat structure is heated, the heating time can be reduced, and the heating efficiency of the boat structure can be improved.

[0048] It should be noted that, as described above, compared with the horizontal insertion piece method in the related art, the battery piece 3 is vertically or approximately vertically arranged in the boat frame 1 through the carrier boat 2. By adopting this vertical or approximately vertical insertion piece method, the baffle plate 13 does not need to be replaced with different width sizes, so that the boat structure can accommodate battery pieces 3 of multiple specifications on the basis that the width size of the baffle plate 13 remains unchanged. For example, the specifications of the battery piece 3 are: 182x182mm 2 , 210x210mm 2 .

[0049] Further, as shown in Figure 5 The boat frame 1 further includes a plurality of connecting rods 15 which are arranged at intervals along the length direction thereof and connected to the side portions of the two side plates 12. By connecting a plurality of connecting rods 15 between the two side plates 12 of the boat frame 1, the relative displacement of the two side plates 12 can be avoided, the overall stability of the boat frame 1 can be improved, and the boat frame 1 itself from deforming to cause the carrier boat 2 to fall off from the boat frame 1 can also be avoided.

[0050] Further, as shown in Figure 5As shown, the boat frame 1 further comprises a plurality of support plates 16 arranged at intervals along the length direction thereof and connected with the bottom of the two side plates 12, and the support plates 16 and the baffle plates 13 are provided with support feet 17.

[0051] The diffusion equipment provided by the utility model comprises a diffusion furnace with a reaction cavity and a boat structure, the boat structure is placed in the reaction cavity, and the specific structure of the boat structure is described in the foregoing, which will not be repeated here.

[0052] The boat structure and the diffusion equipment provided by the utility model have the following advantages: the first support member in the support member set arranged at the two ends of the wafer boat in the boat structure is matched with and contacts the support groove corresponding to the boat frame, thereby increasing the stability of the wafer boat arranged on the boat frame, the wafer boat is prevented from shaking in the boat frame, and the diffusion quality of the battery pieces in the wafer boat is affected; in addition, the battery pieces are arranged vertically or approximately vertically in the boat frame through the wafer boat, the diffusion uniformity of the process gas on the battery pieces is prevented from being affected when the battery pieces are arranged horizontally in the wafer boat, and the number of the battery pieces that can be loaded in the wafer boat is reduced; in addition, the two baffle plates of the boat frame are provided with the second support members, the two ends of the boat frame are prevented from being difficult to be gripped; in addition, the baffle plates in the solid structure can prevent the process gas in the boat frame from leaking out of the baffle plates at the two ends of the boat frame in a large amount, and the problem that the hollow baffle plate affects the diffusion efficiency of the diffusion equipment is solved.

[0053] The above merely describes the preferred embodiments of the utility model and is not used to limit the utility model, and any modification, equivalent replacement and improvement made within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A boat structure comprising a boat rack, and a carrier boat placed on the boat rack for loading a battery piece, characterized by, The slide boat is provided with support groups at both ends, the support groups are composed of a plurality of first supports, and support grooves are formed in both sides of the boat frame and in contact with the support groups; The first support comprises a support part penetrating the support groove and a limiting part sleeved on the support part near one end of the slide boat body; the support part is in a cylindrical or elliptical cylindrical shape, the support groove is provided with an arc-shaped groove wall matched with the support part, and the limiting part is in abutment with the inner side of the boat frame.

2. The boat structure of claim 1, wherein The support part is in a cylindrical shape, and the diameter of the support part ranges from 16 to 30 mm.

3. The boat structure of any one of claims 1 to 2, wherein, The boat frame comprises two side plates and two baffle plates which jointly define a containing space, the top of the side plate is provided with a plurality of support grooves along the length direction, and a plurality of slide boats are placed in the containing space.

4. The boat structure of any one of claims 1 to 2, wherein, The slide boat comprises two end plates arranged oppositely and four slot rods connected with the two end plates, the slot rods are provided with a plurality of clamping grooves corresponding to the plurality of battery pieces along the axial direction, and the end plates are provided with two first supports in contact with the support grooves.

5. The boat structure of claim 3, wherein The side of the side plate is provided with a plurality of through holes along the length direction.

6. The boat structure of claim 3, wherein The baffle plate is provided with a second support for grabbing the boat structure.

7. The boat structure of claim 3, wherein The boat frame further comprises a plurality of support plates spaced apart along the length direction and connected with the bottom of the two side plates, and the support plates and the baffle plate are provided with support feet.

8. Diffusion apparatus, characterized in that The diffusion furnace comprises a diffusion furnace with a reaction cavity, and a boat structure as claimed in any one of claims 1 to 7, which is placed in the reaction cavity.

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