Efficient target automatic welding device

Abstract

The utility model discloses an efficient target material automatic welding device which comprises a working table, two material carrying platforms installed on the working table, a welding flux coating mechanism and a mechanical arm, heating areas are arranged in the middles of the two material carrying platforms, and meanwhile positioning mechanisms are installed on the two material carrying platforms. The positioning mechanism is used for positioning the back plate placed on the material carrying platforms in a heating area, one material carrying platform is used for carrying out stepped heating on the back plate so that welding flux on the back plate can be melted, and the other material carrying platform is used for carrying out stepped cooling on the back plate so that the welding flux on the back plate can be solidified; the solder coating mechanism is erected on the workbench, and the solder coating mechanism is used for uniformly coating molten solder on the back plate; the mechanical arm is used for grabbing the target material and the back plate to conduct feeding and discharging operation and further used for transferring the target material and the back plate from one material carrying platform to the other material carrying platform. The welding precision and the production efficiency can be improved.

Description

Technical Field

[0001] This utility model relates to the field of target material technology, and in particular to a high-efficiency automatic target material welding device. Background Technology

[0002] In the field of modern materials preparation and processing, sputtering targets, as key materials, are widely used in many high-tech industries such as semiconductors, flat panel displays, and solar cells. Welding the sputtering target to the backplane is a crucial step in ensuring the stable performance of the sputtering target during use. However, existing sputtering target-backplane welding technologies have many shortcomings, severely hindering the development of related industries.

[0003] In the early days, manual welding was a common method. However, manual welding is not only inefficient, but the weld quality also largely depends on the worker's skill level and operational stability. Different workers have different operating habits and skill levels, resulting in inconsistent weld quality and poor product consistency. For example, in the solder coating process, manual operation makes it difficult to ensure that the solder is evenly coated on the backing plate, which may lead to uneven bonding strength in the welded area and affect the overall performance of the target material.

[0004] With technological advancements, automated target welding equipment has emerged, but these devices still suffer from several shortcomings. Firstly, the welding process between the target and backing plate requires a gradual, step-by-step temperature increase and decrease to prevent rapid heating and cooling from generating significant thermal and residual stresses in the welding area, which could lead to cracks and deformation. This results in a prolonged welding cycle, with traditional welding equipment experiencing extended waiting times during heating and cooling, severely impacting welding efficiency and failing to meet the demands of large-scale production. Secondly, traditional welding equipment lacks precise and effective positioning mechanisms, leading to inaccurate backing plate placement, affecting welding precision. Furthermore, the uniform application of solder to the backing plate can cause wobbling and deviations, further reducing welding quality. Therefore, it is necessary to improve existing technologies to overcome these deficiencies. Utility Model Content

[0005] The problem to be solved by this utility model is to provide a high-efficiency automatic target welding device to overcome the defects of low production efficiency and poor welding accuracy of existing target welding equipment.

[0006] The technical solution adopted by this utility model to solve its technical problem is: a high-efficiency automatic target welding device for welding target materials onto a back plate, comprising: a worktable, two material-carrying platforms mounted on the worktable, a solder coating mechanism, and a robot arm. A heating zone is provided in the middle of each of the two material-carrying platforms, and a positioning mechanism is installed on each of the two material-carrying platforms. The positioning mechanism is used to position the back plate placed on the material-carrying platform within the heating zone. One material-carrying platform is used to perform stepped heating of the back plate to melt the solder on the back plate, and the other material-carrying platform is used to perform stepped cooling of the back plate to solidify the solder on the back plate. The solder coating mechanism is mounted on the worktable and is used to evenly coat the molten solder on the back plate. The robot arm is used to grasp the target material and back plate for loading and unloading operations, and also for transferring the target material and back plate from one of the material-carrying platforms to the other.

[0007] As a further improvement of this utility model, the solder coating mechanism includes a coating driving device and an ultrasonic vibrating rod. The ultrasonic vibrating rod is mounted on the coating driving device, and the coating driving device is used to drive the ultrasonic vibrating rod to perform three-dimensional motion.

[0008] As a further improvement of this utility model, the directions of the two mutually perpendicular sides on the worktable are respectively taken as the X-axis and Y-axis, and the direction perpendicular to the X-axis and Y-axis is taken as the Z-axis. The coating drive device includes an X-axis linear module mounted on the worktable along the X-axis, a Y-axis linear module mounted on the X-axis linear module along the Y-axis, and a Z-axis linear module mounted on the Y-axis linear module along the Z-axis. The ultrasonic vibrating rod is mounted on the Z-axis linear module.

[0009] As a further improvement of this utility model, a pressure sensor is installed at the bottom of the ultrasonic vibrating rod.

[0010] As a further improvement of this utility model, a first slide rail is fixed on the table surface of the workbench, and both material loading platforms are slidably mounted on the first slide rail; two drive modules are respectively connected to the two material loading platforms at the bottom of the table surface of the workbench, and the two material loading platforms can be driven by their respective drive modules to move back and forth along the first slide rail.

[0011] As a further improvement of this utility model, the positioning mechanism includes two parallel first clamping rods, two parallel second clamping rods, a first driving device for driving the two first clamping rods to move closer to each other or away from each other, and a second driving device for driving the two second clamping rods to move closer to each other or away from each other, wherein the two first clamping rods are distributed perpendicular to the two second clamping rods.

[0012] As a further improvement of this utility model, the first driving device and the second driving device have the same structure, both including a motor, a bidirectional lead screw connected to the motor, and two lead screw nuts respectively fitted at both ends of the bidirectional lead screw, and the two first clamping rods and the two second clamping rods are respectively fixedly connected to the corresponding lead screw nuts.

[0013] As a further improvement of this utility model, the two first clamping rods and the two second clamping rods are all located at the top of the loading platform, and the first driving device and the second driving device are all installed at the bottom of the loading platform; a plurality of second slide rails are also installed at the bottom of the loading platform, and sliders are installed on the plurality of second slide rails; the two ends of each of the two first clamping rods and the two second clamping rods are respectively fixedly connected to the corresponding sliders through adapter blocks.

[0014] As a further improvement of this utility model, the heating area is heated by an electric heating rod.

[0015] As a further improvement of this utility model, the high-efficiency automatic target welding device also includes a CCD camera disposed above the worktable, which is used to take pictures of the back plate and the target material welded on the back plate.

[0016] The beneficial effects of this utility model are:

[0017] 1. This utility model provides a high-efficiency automatic target welding device. By setting up two material loading platforms, one for step-by-step heating and the other for step-by-step cooling of the back plate, this design fully considers the special requirements of temperature change during the welding of the target and the back plate. It effectively avoids thermal stress and residual stress caused by rapid heating and cooling, reduces the possibility of defects such as cracks and deformation in the welding area, significantly improves welding quality, and enhances the reliability and service life of the target assembly. In addition, the two material loading platforms can perform different stages of operation simultaneously. While one material loading platform is heating and solder coating, the other material loading platform can be cooling, realizing parallel processing of the welding process and further improving overall production efficiency.

[0018] 2. This utility model, by installing positioning mechanisms on both material-carrying platforms, can accurately position the back plate placed on the material-carrying platform within the heating area, ensuring the accuracy of the back plate's position. During the coating process, the back plate can be held in place by two first clamping rods and two second clamping rods, ensuring that the solder coating mechanism can evenly coat the molten solder on the back plate, avoiding shaking and displacement during the solder coating process, reducing uneven coating and poor welding caused by back plate position deviation, improving welding accuracy, and thus increasing the product yield. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a perspective view of the high-efficiency automatic target welding device of this utility model;

[0021] Figure 2 This is a perspective view of the material loading platform in the high-efficiency automatic target welding device of this utility model;

[0022] Figure 3 This is a perspective view of the material loading platform in the high-efficiency automatic target welding device of this utility model.

[0023] Referring to the accompanying drawings, the following explanations are provided:

[0024] 1. Workbench; 2. Material loading platform; 201. Heating area; 3. Ultrasonic vibrator; 4. X-axis linear module; 5. Y-axis linear module; 6. Z-axis linear module; 7. Pressure sensor; 8. First slide rail; 9. First clamping rod; 10. Second clamping rod; 11. Motor; 12. Bidirectional lead screw; 13. Lead screw nut; 14. Second slide rail; 15. Adapter block. Detailed Implementation

[0025] The present application will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0026] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0027] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0028] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The illustrations only show the components related to this application and are not drawn according to the number, shape and size of the components in actual implementation. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0029] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0030] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.

[0031] See Figures 1 to 3 This utility model provides an efficient automatic target welding device for welding target materials onto a back plate, which includes: a worktable 1, two material loading platforms 2, a solder coating mechanism, and a robotic arm.

[0032] Both loading platforms 2 are mounted on the workbench 1. A heating zone 201 is provided in the center of each loading platform 2, and a positioning mechanism is installed on each platform 2 to position the backplate placed on the loading platform 2 within the heating zone 201. The heating zone 201 on one loading platform 2 is used for stepped heating of the backplate, for example, increasing the temperature by 50°C at regular intervals until a set maximum temperature is reached. At this temperature, the solder pre-coated on the backplate melts. The heating zone 201 on the other loading platform 2 is used for stepped cooling of the backplate, for example, decreasing the temperature by 50°C at regular intervals until a set minimum temperature is reached. At this temperature, the solder on the backplate solidifies, thus achieving welding and fixing of the target material and the backplate.

[0033] Among them, heating zone 201 is heated by an electric heating rod.

[0034] This invention employs two material-carrying platforms 2, one for stepped heating and the other for stepped cooling of the backplate. This design fully considers the special temperature requirements during the welding of the target material and the backplate, effectively avoiding thermal stress and residual stress caused by rapid heating and cooling. This reduces the possibility of defects such as cracks and deformation in the welding area, significantly improving welding quality and enhancing the reliability and service life of the target material assembly. Furthermore, the two material-carrying platforms 2 can perform different stages of operation simultaneously. While one platform 2 is heating and applying solder, the other platform 2 can be cooling, enabling parallel processing of the welding process and further improving overall production efficiency.

[0035] Furthermore, a solder coating mechanism is mounted on the worktable 1. The solder coating mechanism is used to evenly coat the molten solder on the backplate, ensuring consistent bonding strength in the welding area and improving welding quality. The solder coating mechanism includes a coating drive device and an ultrasonic vibrator 3. The ultrasonic vibrator 3 is mounted on the coating drive device, which drives the ultrasonic vibrator 3 to perform three-dimensional motion.

[0036] like Figure 1 As shown, the directions of the two mutually perpendicular sides on the worktable 1 are respectively taken as the X-axis and Y-axis, and the direction perpendicular to the X-axis and Y-axis is taken as the Z-axis. The coating drive device includes an X-axis linear module 4 mounted on the worktable 1 along the X-axis, a Y-axis linear module 5 mounted on the X-axis linear module 4 along the Y-axis, and a Z-axis linear module 6 mounted on the Y-axis linear module 5 along the Z-axis. An ultrasonic vibrator 3 is mounted on the Z-axis linear module 6. Under the joint drive of the X-axis linear module 4, the Y-axis linear module 5, and the Z-axis linear module 6, the ultrasonic vibrator 3 performs three-dimensional movement above the worktable 1 to evenly coat the molten solder on the back plate.

[0037] For example, the X-axis linear module 4, the Y-axis linear module 5, and the Z-axis linear module 6 can all be ball screw linear modules or linear motor modules, etc.

[0038] In addition, a pressure sensor 7 is installed at the bottom of the ultrasonic vibrating rod 3. During the solder coating process, the pressure sensor 7 is used to detect the pressure between the ultrasonic vibrating rod 3 and the back plate, thereby controlling the height at which the Z-axis linear module 6 drives the ultrasonic vibrating rod 3 to descend, ensuring uniform solder coating.

[0039] In this embodiment, the solder is specifically indium.

[0040] See Figure 1Two first slide rails 8 are fixed along the X-axis on the table surface of the workbench 1, and the two material loading platforms 2 are slidably mounted on the first slide rails 8. At the same time, two drive modules (not shown in the figure) are installed at the bottom of the table surface of the workbench 1 and are respectively connected to the two material loading platforms 2. The two material loading platforms 2 can be driven by their respective drive modules to move back and forth along the first slide rails 8.

[0041] In this embodiment, both drive modules are ball screw linear modules, and the bottoms of the two loading platforms 2 are respectively connected to the corresponding ball screw linear modules via connecting blocks. A clearance groove is provided on the worktable 1 between the two first slide rails 8 to provide movement space for the connecting blocks.

[0042] See Figure 2 and Figure 3 The positioning mechanism includes two parallel first clamping rods 9, two parallel second clamping rods 10, a first driving device, and a second driving device. In this embodiment, the loading platform 2 is rectangular. The two first clamping rods 9 are distributed along two opposite sides of the loading platform 2, and the two second clamping rods 10 are distributed along the other two opposite sides of the loading platform 2. The two first clamping rods 9 are perpendicular to the two second clamping rods 10, so that the two first clamping rods 9 and the two second clamping rods 10 are arranged in a "well" shape. The first driving device is used to drive the two first clamping rods 9 to move closer together or away from each other, and the second driving device is used to drive the two second clamping rods 10 to move closer together or away from each other.

[0043] The backplate can be square or circular; in this embodiment, it is square. A first driving device drives two first clamping rods 9 to move closer together, while a second driving device drives two second clamping rods 10 to move closer together, thereby pushing the backplate on the loading platform 2 into the heating area 201 for precise positioning. This invention, by installing positioning mechanisms on both loading platforms 2, can accurately position the backplate placed on the loading platform 2 within the heating area 201, ensuring the accuracy of the backplate's position. During the coating process, the two first clamping rods 9 and two second clamping rods 10 can hold the backplate, ensuring that the solder coating mechanism can evenly coat the molten solder on the backplate, avoiding shaking and offset during solder coating, reducing uneven coating and poor welding caused by backplate position deviation, improving welding accuracy, and thus increasing the product yield.

[0044] Furthermore, the two first clamping rods 9 and the two second clamping rods 10 are all located at the top of the loading platform 2, and the first driving device and the second driving device are both installed at the bottom of the loading platform 2. Second slide rails 14 are installed along the four sides of the bottom of the loading platform 2, and two sliders are slidably installed on each second slide rail 14. The two ends of each of the two first clamping rods 9 and the two second clamping rods 10 are respectively fixedly connected to the corresponding sliders via adapter blocks 15.

[0045] In this invention, the first driving device and the second driving device have the same structure. Both the first and second driving devices include a motor 11, a bidirectional lead screw 12 rotatably mounted on the bottom of the loading platform 2 and driven by the motor 11, and two lead screw nuts 13 respectively fitted onto both ends of the bidirectional lead screw 12. Two first clamping rods 9 are fixedly connected to the two lead screw nuts 13 in the first driving device via their respective adapter blocks 15, and two second clamping rods 10 are fixedly connected to the two lead screw nuts 13 in the second driving device via their respective adapter blocks 15. Since the threads at both ends of the bidirectional lead screw 12 are in opposite directions, when the motor 11 drives the bidirectional lead screw 12 to rotate, the two first clamping rods 9 / two second clamping rods 10 can be moved closer together or further apart via the two lead screw nuts 13.

[0046] In this utility model, the robotic arm can be installed on the workbench 1, on the solder coating mechanism, or on the ground and arranged beside the workbench 1. The robotic arm is not shown in the figure. It adopts existing conventional technology and is used to grab the target material and back plate for loading and unloading operations. It is also used to transfer the target material and back plate from one of the loading platforms 2 to another loading platform 2.

[0047] In addition, the high-efficiency automatic target welding device of this utility model also includes a CCD camera set above the worktable 1. The CCD camera is used to take pictures of the back plate and the target welded on the back plate, and to identify the position of the back plate and check the welding accuracy of the target and the back plate.

[0048] It should be noted that the material loading platform 2 and its components in this utility model are made of high-temperature resistant materials. If necessary, heat insulation components can also be installed to prevent other components from being affected by the heated area 201.

[0049] The working principle of this high-efficiency automatic target welding device is as follows:

[0050] by Figure 1The indicated orientation is for reference. A loading platform 2 on the right, driven by its drive module, first moves to the loading station at the right end of the workbench 1. A robotic arm picks up the backplate and places it on the loading platform 2. Driven by the drive module, the loading platform 2 moves to the left to the welding station in the middle of the workbench 1. The positioning mechanism positions the backplate placed on the loading platform 2 within the heating zone 201. The heating zone 201 begins to heat the backplate in a stepped manner, melting the solder on the backplate. Next, the coating drive device drives the ultrasonic vibrating rod 3 to perform three-dimensional motion, evenly coating the molten solder on the backplate. Finally, the robotic arm picks up the target material and places it in the solder area on the backplate. Then, driven by its drive module, the left-hand loading platform 2 moves to the middle position of the worktable 1 (next to the right-hand loading platform 2). Simultaneously, the positioning mechanism on the right-hand loading platform 2 resets and leaves the backplate. The robot transfers the backplate and target material from the right-hand loading platform 2 to the left-hand loading platform 2. The positioning mechanism on the left-hand loading platform 2 positions the backplate and target material within its heating area 201 and moves them to the unloading station at the left end of the worktable 1. The heating area 201 on the left-hand loading platform 2 performs stepped cooling on the backplate and target material, causing the solder to solidify, thus achieving welding and fixing of the target material to the backplate. This process is repeated to achieve automated welding of the target material and backplate.

[0051] Therefore, the high-efficiency automatic target welding device of this utility model, by setting up two material-carrying platforms 2, is used for stepped heating and stepped cooling of the back plate respectively. This design fully considers the special requirements of temperature change during the welding of the target and the back plate, effectively avoiding thermal stress and residual stress caused by rapid heating and cooling, reducing the possibility of defects such as cracks and deformation in the welding area, significantly improving welding quality, and enhancing the reliability and service life of the target assembly. In addition, the two material-carrying platforms 2 can perform different stages of operation simultaneously. While one material-carrying platform 2 is heating and solder coating, the other material-carrying platform 2 can be cooling, realizing parallel processing of the welding process and further improving the overall production efficiency. Furthermore, by installing positioning mechanisms on both material loading platforms 2, this utility model can accurately position the back plate placed on the material loading platform 2 within the heating area 201, ensuring the positional accuracy of the back plate. During the coating process, the back plate can be held by the two first clamping rods 9 and the two second clamping rods 10, ensuring that the solder coating mechanism can evenly coat the molten solder on the back plate, avoiding shaking and displacement during the solder coating process, reducing uneven coating and poor welding caused by back plate position deviation, improving welding accuracy, and thus improving the product yield.

[0052] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A high-efficiency target material automatic welding device for welding a target material on a back plate, characterized by, The utility model provides a kind of soldering device for target material and backboard, including: Workbench (1); Two load platforms (2) are installed on the workbench (1), the middle part of two load platforms (2) is provided with heating area (201), and positioning mechanism is installed on two load platforms (2) simultaneously, the positioning mechanism is used to position backboard placed on load platform (2) in heating area (201), one load platform (2) is used to carry out stepwise temperature heating to backboard, so that solder on backboard melts, another load platform (2) is used to carry out stepwise temperature cooling to backboard, so that solder on backboard solidifies; Soldering mechanism is erected on the workbench (1), and the soldering mechanism is used to uniformly apply solder melted on backboard; And manipulator, the manipulator is used to grab target material and backboard and carry out feeding and discharging operation, and is also used to transfer target material and backboard from one load platform (2) to another load platform (2).

2. The apparatus of claim 1, wherein: The soldering mechanism includes coating driving device and ultrasonic vibration rod (3), the ultrasonic vibration rod (3) is installed on the coating driving device, and the coating driving device is used to drive the ultrasonic vibration rod (3) to move in three dimensions.

3. The apparatus of claim 2, wherein: Two mutually perpendicular side directions on the tabletop of the workbench (1) are respectively used as X-axis direction and Y-axis direction, and the direction perpendicular to X-axis direction and Y-axis direction is used as Z-axis direction, the coating driving device includes X-axis linear module (4) installed on the workbench (1) along X-axis direction, Y-axis linear module (5) installed on the X-axis linear module (4) along Y-axis direction and Z-axis linear module (6) installed on the Y-axis linear module (5) along Z-axis direction, and the ultrasonic vibration rod (3) is installed on the Z-axis linear module (6).

4. The apparatus of claim 2, wherein: The bottom of the ultrasonic vibration rod (3) is provided with a pressure sensor (7).

5. The apparatus of claim 1, wherein: The tabletop of the workbench (1) is fixed with a first sliding rail (8), and two load platforms (2) are slidably arranged on the first sliding rail (8); the bottom of the tabletop of the workbench (1) is provided with two drive modules connected to two load platforms (2) respectively, and two load platforms (2) can be driven by respective drive modules to move back and forth along the first sliding rail (8).

6. The apparatus of claim 1, wherein: The positioning mechanism includes two parallel first clamping rods (9), two parallel second clamping rods (10), first driving device for driving two first clamping rods (9) to approach or deviate from each other and second driving device for driving two second clamping rods (10) to approach or deviate from each other, wherein two first clamping rods (9) are perpendicular to two second clamping rods (10).

7. The apparatus of claim 6, wherein: The first driving device and the second driving device have the same structure, and each include a motor (11), a bidirectional screw rod (12) in transmission connection with the motor (11), and two screw nuts (13) sleeved on both ends of the bidirectional screw rod (12) respectively, two first clamping rods (9) and two second clamping rods (10) are fixedly connected to corresponding screw nuts (13) respectively.

8. The apparatus of claim 6, wherein: Two first clamping rods (9) and two second clamping rods (10) are arranged on the top of the loading platform (2), and the first driving device and the second driving device are arranged on the bottom of the loading platform (2); the bottom of the loading platform (2) is further provided with a plurality of second sliding rails (14), and a sliding block is arranged on each of the second sliding rails (14); and the two ends of each of the two first clamping rods (9) and the two second clamping rods (10) are fixedly connected to the corresponding sliding blocks through an adapter block (15).

9. The apparatus of claim 1, wherein: The heating area (201) is heated by an electric heating rod.

10. The apparatus of claim 1, wherein: A CCD camera is further arranged above the workbench (1), and the CCD camera is used for photographing the back plate and the target material welded on the back plate.

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