Silane combustion tower based on heat exchange

Abstract

The utility model discloses a silane combustion tower based on heat exchange, which comprises a combustion chamber, a heat exchanger and a heat exchanger, the first waste gas inlet pipe is connected with a first port in one side of the combustion chamber through the first heat accumulator; the first waste gas inlet pipe is provided with a first valve; the second waste gas inlet pipe is connected with a first port in the other side of the combustion chamber through a second heat accumulator; the second waste gas inlet pipe is provided with a second valve; one end of the gas return pipeline is connected with a second port in one side of the combustion chamber through the first heat accumulator, and the other end of the gas return pipeline is connected with a second port in the other side of the combustion chamber through the second heat accumulator; the exhaust pipeline is arranged at the top of the combustion chamber; the compressed air and nitrogen inlet is formed in the top of the combustion chamber; the first valve and the second valve are not opened at the same time.

Description

Technical Field

[0001] This utility model relates to the field of environmental governance technology, specifically to a silane combustion tower based on heat exchange. Background Technology

[0002] Silanes are widely used as raw materials in semiconductor manufacturing, especially in processes such as etching and deposition, where they participate in reactions as either raw materials or auxiliary gases. During these processes, silanes may be converted into desired substances through combustion or catalytic oxidation, generating waste gases in the process. These waste gases may contain incompletely burned silanes, carbon monoxide, and other toxic and harmful substances. Furthermore, in the manufacturing of solar cells, silanes may also combust at specific stages, such as during silicon wafer surface treatment, where the waste gases produced by silane combustion contain various pollutants.

[0003] Silane combustion towers are commonly used equipment in the photovoltaic solar energy industry. Their working principle is that silane comes into contact with the input compressed air and nitrogen and spontaneously combusts or undergoes an oxidation reaction. After the reaction, a large amount of silica dust is generated. The dust is carried by the airflow to the spray system and dissolves into the water.

[0004] Existing silane combustion towers have the following drawbacks: ① Due to the corrosive and flammable nature of silane, the equipment requires strict material and sealing specifications, increasing maintenance difficulty and cost. ② The operation of silane combustion towers requires precise control of parameters such as combustion temperature and oxygen concentration to ensure complete combustion of silane and reduce the emission of harmful substances. Any errors or improper operation during the process may lead to equipment failure or excessive flue gas emissions, causing environmental pollution. ③ Silane combustion releases a large amount of heat energy. Although some heat can be recovered and utilized, the overall energy consumption remains high. ④ Silane exhaust gas contains various toxic and harmful substances, such as incompletely burned silane and carbon monoxide. These substances may be converted into other harmful substances during combustion, increasing the pressure on exhaust gas treatment. Utility Model Content

[0005] In view of this, the present invention provides a silane combustion tower based on heat exchange to solve the problems of high energy consumption and poor waste gas treatment effect of existing silane combustion towers.

[0006] This utility model embodiment provides a silane combustion tower based on heat exchange, comprising:

[0007] The combustion chamber has its inner walls coated with a silicon nitride coating.

[0008] The first exhaust gas inlet pipe is connected to the first port on one side of the combustion chamber via the first accumulator; the first exhaust gas inlet pipe is equipped with a first valve;

[0009] A second exhaust gas inlet pipe is connected with the first port on the other side of the combustion chamber through the second regenerator; the second exhaust gas inlet pipe is provided with a second valve;

[0010] A return gas pipe is connected with the second port on one side of the combustion chamber through the first regenerator, and connected with the second port on the other side of the combustion chamber through the second regenerator;

[0011] An exhaust pipe is arranged on the top of the combustion chamber;

[0012] A compressed air and nitrogen gas inlet is arranged on the top of the combustion chamber;

[0013] The first valve and the second valve are not opened at the same time.

[0014] Optionally, the system further comprises a spraying system, wherein a spraying liquid inlet is arranged on one side of the bottom of the combustion chamber, a spraying device is arranged at the middle position of the combustion chamber, and a blowdown port is arranged on the other side of the bottom of the combustion chamber.

[0015] Optionally, the spraying system comprises:

[0016] A first spraying pipe, one end of which is the spraying liquid inlet, is fixed on the inner wall of the side of the combustion chamber connected with the first regenerator;

[0017] A second spraying pipe, one end of which is connected with the other end of the first spraying pipe, is provided with a plurality of spraying devices on the upper and lower sides of the second spraying pipe, and the other end of the second spraying pipe abuts against the inner wall of the side of the combustion chamber connected with the second regenerator.

[0018] Optionally, the first exhaust gas inlet pipe and the second exhaust gas inlet pipe are connected with a total exhaust gas inlet pipe through a three-way pipe; the total exhaust gas inlet pipe is connected with a silane exhaust port.

[0019] Optionally, the total exhaust gas inlet pipe is provided with an inlet pipe valve.

[0020] Optionally, the first exhaust gas inlet pipe and the second exhaust gas inlet pipe are arranged in the lower half region of the combustion chamber; and the total exhaust gas inlet pipe is arranged below the combustion chamber.

[0021] Optionally, the return gas pipe is arranged in the upper half region of the combustion chamber.

[0022] Optionally, the system further comprises:

[0023] A third valve is arranged at one end of the return gas pipe close to the first regenerator;

[0024] A fourth valve is arranged at one end of the return gas pipe close to the second regenerator.

[0025] The beneficial effects of the present application are as follows:

[0026] The silane combustion tower based on heat exchange provided by the embodiment of the utility model can efficiently recycle the heat energy generated in the combustion process through the addition of the heat accumulator.

[0027] The traditional silane combustion tower needs to be provided with a complex heat insulation layer to prevent heat energy loss.

[0028] The embodiment preheats the gas, so that the silane reaches a more suitable temperature before combustion, thereby improving the combustion efficiency of the silane.

[0029] The addition of the coating on the inner wall of the combustion chamber can effectively prevent the deposition of combustion products on the inner wall of the combustion barrel.

[0030] The silane combustion tower based on heat exchange provided by the embodiment is more simple in structure, reduces the complex heat insulation layer and other auxiliary equipment in the traditional silane combustion tower, and reduces the equipment cost. BRIEF DESCRIPTION OF DRAWINGS

[0031] The features and advantages of the utility model will be more clearly understood by referring to the accompanying drawings, which are schematic and should not be understood as any limitation to the utility model, and in the drawings:

[0032] Figure 1 A structure diagram of the silane combustion tower based on heat exchange in the embodiment of the utility model is shown;

[0033] Figure 2 A flowchart of the first half of the exhaust gas treatment cycle of the silane combustion tower based on heat exchange in the embodiment of the utility model is shown;

[0034] Figure 3 A flowchart of the second half of the exhaust gas treatment cycle of the silane combustion tower based on heat exchange in the embodiment of the utility model is shown. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be described clearly and completely in combination with the drawings in the embodiments of the utility model below. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor belong to the protection scope of the utility model.

[0036] As Figure 1 The utility model discloses an embodiment provides a kind of based on heat exchange's silane combustion tower, including total waste gas inlet pipeline 1, two-way waste gas import pipeline, first regenerator 301, second regenerator 302, combustion chamber 4 and back gas pipeline, wherein, the inner wall of combustion chamber 4 is coated with silicon nitride coating 401, silane combustion tower is coated on the inner wall of silicon nitride, can keep stable under high temperature, not easy to react with silicon dioxide, to prevent the formation of sediment.

[0037] First waste gas import pipe is connected with the first port of one side of combustion chamber 4 through first regenerator 301.

[0038] Second waste gas import pipe is connected with the first port of other side of combustion chamber 4 through second regenerator 302.

[0039] Back gas pipeline, one end is connected with the second port of one side of combustion chamber 4 through first regenerator 301, the other end of back gas pipeline is connected with the second port of other side of combustion chamber through second regenerator 302;

[0040] Exhaust pipe 7 is arranged at the top of combustion chamber 4.

[0041] Compressed air and nitrogen gas inlet 5 are arranged at the top of combustion chamber 4.

[0042] In the process of silane waste gas treatment, first valve 201 and second valve 202 are not opened simultaneously.

[0043] As optional implementation, exhaust pipe 7 is connected to spray system, and waste gas after sufficient combustion is discharged after spray treatment.

[0044] As optional implementation, spray system is arranged inside combustion chamber 4. Spray liquid inlet 601 is arranged at one side of the bottom of combustion chamber 4, spray device 602 is arranged at the middle position of combustion chamber 4, and blow-off port 402 is arranged at the other side of the bottom of combustion chamber 4.

[0045] As an optional implementation, the spraying system comprises a first spraying pipe and a second spraying pipe, one end of the first spraying pipe is a spraying liquid inlet, and the first spraying pipe is fixed on the inner wall of the side of the combustion chamber connected with the first regenerator. One end of the second spraying pipe is connected with the other end of the first spraying pipe, and a plurality of spraying devices are arranged on the upper and lower sides of the second spraying pipe, and the other end of the second spraying pipe abuts against the inner wall of the side of the combustion chamber connected with the second regenerator.

[0046] As an optional implementation, the third valve 203 is arranged at one end of the gas return pipeline close to the first regenerator 301.

[0047] The fourth valve 204 is arranged at one end of the gas return pipeline close to the second regenerator 302.

[0048] Suppose that the first regenerator 301 exchanges heat with the waste gas of combustion during the previous operation, at this time, the first regenerator 301 is in a high-temperature state, and the second regenerator 302 is in a low-temperature state, and the operation process of one processing cycle of the silane combustion tower based on heat exchange provided in the embodiment is described:

[0049] As shown in the figure, the first half cycle is as follows: Figure 2

[0050] ① The valve 201 is opened, and the valves 202, 203 and 204 are closed.

[0051] ② The silane waste gas enters from the total waste gas inlet pipeline 1, enters the first regenerator 301 from the left end, and enters the combustion chamber 4 after being heated by the first regenerator 301.

[0052] ③ The valve at the gas inlet 5 is opened, the compressed air and nitrogen gas are introduced into the combustion chamber 4 from the gas inlet 5, the silane waste gas is fully combusted, and the heat is absorbed by the second regenerator 302. After full combustion, the valve at the gas inlet 5 is closed.

[0053] ④ The valves 204 and 203 are opened, and the waste gas after being cooled enters the combustion chamber 4 through the gas return pipeline and the first regenerator 301. The heat in the first regenerator 301 has been exchanged into the silane waste gas, and the first regenerator 301 is in a low-temperature state, while the second regenerator 302 is in a high-temperature state.

[0054] ⑤ At this time, the combustion chamber is not in a combustion state, and the spraying system is started to spray the waste gas.

[0055] ⑥ After the spraying is completed, the exhaust pipeline is opened, and the treated gas is discharged outward.

[0056] ⑦ The blowdown port is opened, and the spraying waste liquid is discharged.

[0057] As shown in the figure, the second half cycle is as follows: Figure 3 ​​

[0058] ① Valve 202 is opened, and valves 201, 203, and 204 are closed.

[0059] ② Silane waste gas enters from the total waste gas inlet pipeline 1, enters the second regenerator 302 from the right end, and after being warmed up by the second regenerator 302, enters the combustion chamber 4.

[0060] ③ The valve at the air inlet 5 is opened, and compressed air and nitrogen are introduced into the combustion chamber 4 from the air inlet 5, and the silane waste gas is fully combusted and absorbs heat in the first regenerator 301. After full combustion, the valve at the air inlet 5 is closed.

[0061] ④ Valves 203 and 204 are opened, and the cooled waste gas enters the combustion chamber 4 through the return gas pipeline and the second regenerator 302. The heat in the second regenerator 302 has been exchanged to the silane waste gas, and the second regenerator 302 is in a low-temperature state, while the first regenerator 301 is in a high-temperature state.

[0062] ⑤ At this time, the combustion chamber is not in a combustion state, and the spraying system is started to spray the waste gas.

[0063] ⑥ After spraying is completed, the exhaust pipeline is opened, and the treated gas is discharged outward.

[0064] ⑦ The blowdown port is opened, and the spraying waste liquid is discharged.

[0065] In addition, citric acid is added to the equipment to prevent silicon dioxide from depositing on the pipeline and equipment, reducing clogging and maintenance problems.

[0066] By adding regenerators, the silane combustion tower based on heat exchange provided in this embodiment can efficiently recover the heat energy generated during combustion. The regenerators can store heat energy and release it when needed, thereby improving energy utilization efficiency and reducing energy waste.

[0067] Traditional silane combustion towers need to be provided with complex heat insulation layers to prevent heat energy loss. However, since the regenerators are used in this embodiment, heat energy loss through the tower body is effectively reduced, so there is no need to set up heat insulation layers, thereby reducing equipment cost and maintenance difficulty.

[0068] By preheating the gas, the silane reaches a more suitable temperature before combustion, thereby improving the combustion efficiency of the silane. Preheating the gas helps the silane to burn more completely, reduces harmful substances produced by incomplete combustion, and improves waste gas treatment effect.

[0069] By adding a coating on the inner wall of the combustion chamber, deposition of combustion products on the inner wall of the combustion barrel can be effectively prevented. This not only prolongs the service life of the combustion chamber, but also reduces the problem of decreased combustion efficiency and increased difficulty of waste gas treatment caused by deposits.

[0070] The silane combustion tower based on heat exchange provided by the embodiment is more simple in structure, reduces the complex heat insulation layer and other auxiliary equipment in the traditional silane combustion tower, and reduces the equipment cost.

[0071] Although the embodiments of the present application are described in conjunction with the drawings, various modifications and changes can be made by those skilled in the art without departing from the spirit and scope of the present application, and such modifications and changes fall within the scope defined by the appended claims.

Claims

1. A heat exchange based silane combustion tower characterized by, The application relates to a silane waste gas combustion device, which comprises the following parts: a combustion chamber, the inner wall of which is coated with a silicon nitride coating; a first waste gas inlet pipe connected with a first port on one side of the combustion chamber through a first regenerator, wherein the first waste gas inlet pipe is provided with a first valve; a second waste gas inlet pipe connected with a first port on the other side of the combustion chamber through a second regenerator, wherein the second waste gas inlet pipe is provided with a second valve; a back gas pipe, one end of which is connected with a second port on one side of the combustion chamber through the first regenerator, and the other end of which is connected with a second port on the other side of the combustion chamber through the second regenerator; an exhaust pipe arranged on the top of the combustion chamber; a compressed air and nitrogen gas inlet arranged on the top of the combustion chamber; wherein the first valve and the second valve are not opened at the same time.

2. The heat exchange based silane combustion tower of claim 1, wherein, The application further comprises: a spraying system, wherein a spraying liquid inlet is arranged on one side of the bottom of the combustion chamber, spraying devices are arranged at the middle position of the combustion chamber, and a blowdown port is arranged on the other side of the bottom of the combustion chamber.

3. The heat exchange based silane combustion tower of claim 2, wherein, The spraying system comprises: a first spraying pipe, one end of which is the spraying liquid inlet, and the first spraying pipe is fixed on the inner wall of the side of the combustion chamber connected with the first regenerator; a second spraying pipe, one end of which is connected with the other end of the first spraying pipe, and the upper and lower sides of the second spraying pipe are provided with a plurality of spraying devices, and the other end of the second spraying pipe abuts against the inner wall of the side of the combustion chamber connected with the second regenerator.

4. The heat exchange based silane combustion tower of claim 1, wherein, The first waste gas inlet pipe and the second waste gas inlet pipe are connected with a total waste gas inlet pipe through a tee pipe, and the total waste gas inlet pipe is connected with a silane waste gas exhaust port.

5. The heat exchange based silane combustion tower of claim 4, wherein, An inlet pipe valve is arranged on the total waste gas inlet pipe.

6. The heat exchange based silane combustion tower of claim 4, wherein, The first waste gas inlet pipe and the second waste gas inlet pipe are arranged in the lower half area of the combustion chamber, and the total waste gas inlet pipe is arranged below the combustion chamber.

7. The heat exchange based silane combustion tower of claim 1, wherein, The back gas pipe is arranged in the upper half area of the combustion chamber.

8. The heat exchange based silane combustion tower of claim 1, wherein, The application further comprises: a third valve arranged at one end of the back gas pipe close to the first regenerator; a fourth valve arranged at one end of the back gas pipe close to the second regenerator.

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