Nitrogen heating device

Abstract

The utility model relates to a nitrogen gas heating device, including: intermediate pipe body, internal pipe body, heating pipe and gas inlet interface, intermediate pipe body is sleeved outside internal pipe body and is fixed relative to internal pipe body position, intermediate pipe body and internal pipe body form a second cavity, gas inlet interface and second cavity are communicated, heating pipe is located in second cavity, and gas inlet interface is located in the second cavity. The second cavity communicates with the interior of the inner pipe body through the third channel. The heating pipe is used for heating the nitrogen, the heated nitrogen heats the process waste gas and the inner wall of the pipeline through which the process waste gas flows, the number of the process waste gas deposited on the inner wall of the pipeline is small at the high temperature, and therefore blockage of the inner wall of the pipeline is relieved, and the maintenance period of the pipeline is prolonged. The waste heat of the outer wall of the middle pipe body is used for heating a small part of nitrogen in the first cavity, and the residual heat is utilized, so that the consumption of the heating pipe is reduced; nitrogen flowing in the first cavity takes away most waste heat, the temperature of the external pipe body is reduced, and workers are prevented from being scalded.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor pipe heating, and in particular to a nitrogen heating device. Background Technology

[0002] Semiconductor manufacturing processes generate waste gases, which are then pumped out through pipelines by dry pumps until the waste gases enter the exhaust gas treatment unit. These waste gases can accumulate on the inner walls of the pipelines, causing blockages, which in turn shortens the intervals between preventative maintenance and may even cause the dry pumps to shut down. Utility Model Content

[0003] The present invention aims to solve the above problems by providing a nitrogen heating device, which solves the problem that process waste gas is easily deposited on the inner wall of the pipe.

[0004] A nitrogen heating device includes: an intermediate tube, an inner tube, a heating tube, and an air inlet. The intermediate tube is fitted outside the inner tube and is fixed in position relative to the inner tube. A second cavity is formed between the intermediate tube and the inner tube. The air inlet is connected to the second cavity. The heating tube is located inside the second cavity. The second cavity is connected to the inside of the inner tube through a third channel.

[0005] Preferably, it further includes an outer tube, which is fitted outside the middle tube and fixed in position relative to the middle tube. A first cavity is formed between the outer tube and the middle tube. The air intake port is fixedly connected to the outer tube and communicates with the first cavity. The two ends of the first cavity and the second cavity are connected by a first channel and a second channel, respectively. The cross-sectional area of ​​the second channel is larger than that of the first channel. The air intake port is located at the end closer to the second channel. The first channel is closer to the third channel than the second channel.

[0006] Preferably, it further includes a second end plate and a third end plate, which are located at both ends of the intermediate tube and are fixedly connected to the outer tube. The third end plate is used to seal the ends of the outer tube and the intermediate tube.

[0007] Preferably, the first channel is an annular gap between the intermediate tube and the second end plate; the second channel is a through hole formed in the intermediate tube or a through hole formed by the intermediate tube and the third end plate.

[0008] Preferably, it also includes an air intake pipe, which is inserted into the end of the outer tube body away from the third end plate. The position of the air intake pipe relative to the outer tube body is fixed, and the third channel is an annular gap between the inner tube body and the air intake pipe.

[0009] Preferably, the inner tube has an inner conical surface, the air intake pipe has an outer conical surface, the outer conical surface is located inside the inner conical surface, the third channel is located between the inner and outer conical surfaces, and the gas flow in the third channel is directed away from the air intake pipe.

[0010] Preferably, it further includes a first end plate, the inner and outer sides of which are fixedly connected to the air intake pipe and the outer pipe body respectively. The first end plate is used to block the end of the outer pipe body. The inner and outer sides of the second end plate are fitted with the inner pipe body and the outer pipe body. The second end plate forms a first through hole. The outer pipe body, the first end plate, the second end plate and the air intake pipe form a third cavity. The first through hole connects the second cavity and the third cavity. The third channel connects the interior of the inner pipe body and the third cavity.

[0011] Preferably, it also includes a sensor interface, which is fixedly connected to the external tube body, and the external tube body is connected to the third cavity. A temperature sensor is installed in the sensor interface or is connected to the temperature sensor.

[0012] Preferably, it also includes an exhaust pipe, which is fixedly connected to the end of the internal pipe away from the intake pipe, and the exhaust pipe is connected to the internal pipe. The intake pipe and the exhaust pipe are respectively provided with flanges for connection.

[0013] Preferably, it also includes a heating tube interface, which is fixedly connected to the outer tube body. The heating tube passes through the second channel and the heating tube interface, and the heating tube is fixedly connected to the heating tube interface. The portion of the heating tube located in the middle tube body is a spiral tube that winds around the inner tube body.

[0014] This utility model has the following advantages:

[0015] 1. Using heating tubes to heat nitrogen gas, the heated nitrogen gas heats the process waste gas and the inner wall of the pipeline during the flow process. At higher temperatures, less process waste gas is deposited on the inner wall of the pipeline, thereby reducing the blockage of the inner wall of the pipeline, extending the maintenance cycle of the pipeline, and reducing labor and material costs.

[0016] 2. The residual heat from the outer wall of the intermediate tube is used to heat a small portion of the nitrogen in the first chamber, thus reducing the consumption of the heating tube by utilizing the residual heat; at the same time, the nitrogen flowing in the first chamber carries away most of the residual heat, lowering the temperature of the outer tube and thus preventing burns to the staff. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0018] Figure 1 Top view of this utility model;

[0019] Figure 2 :exist Figure 1 Sectional view at point AA;

[0020] Figure 3 :exist Figure 2 Sectional view at point BB;

[0021] Figure 4 :exist Figure 2 A magnified view of a section at point C;

[0022] Figure 5 : A perspective view of this utility model;

[0023] Figure 6 : A three-dimensional view of the present invention after the outer tube body has been removed. Detailed Implementation

[0024] The present invention will be further described below with reference to the accompanying drawings and examples:

[0025] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0026] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0027] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0028] like Figures 1 to 6 As shown, a nitrogen heating device includes: an intermediate tube 2, an inner tube 3, a heating tube 4, and an air inlet 11. The intermediate tube 2 is fitted outside the inner tube 3 and is fixed in position relative to the inner tube 3. A second cavity 20 is formed between the intermediate tube 2 and the inner tube 3. The air inlet 11 is connected to the second cavity 20. The heating tube 4 is located inside the second cavity 20. The second cavity 20 is connected to the inside of the inner tube 3 through a third channel 30.

[0029] During operation, both ends of the intermediate pipe 2 are connected to pipes for discharging process waste gas, and the inlet 11 is connected to a nitrogen source. Nitrogen gas enters the second chamber 20 through the inlet 11 and comes into contact with the heating pipe 4, which heats the nitrogen. Then, the nitrogen flows through the third channel 30 into the inner pipe 3, flowing in the same direction as the process waste gas inside. During this flow, the heated nitrogen heats the process waste gas and the inner wall of the pipe it passes through. At higher temperatures, less process waste gas deposits on the inner wall of the pipe, thus reducing pipe blockage, extending the pipeline maintenance cycle, and reducing labor and material costs.

[0030] Preferably, it further includes an outer tube 1, which is fitted outside the middle tube 2 and fixed in position relative to the middle tube 2. A first cavity 10 is formed between the outer tube 1 and the middle tube 2. The air inlet 11 is fixedly connected to the outer tube 1 and communicates with the first cavity 10. The two ends of the first cavity 10 and the second cavity 20 are respectively connected through a first channel 21 and a second channel 22. The cross-sectional area of ​​the second channel 22 is larger than the cross-sectional area of ​​the first channel 21. The air inlet 11 is located at the end closer to the second channel 22. The first channel 21 is closer to the third channel 30 than the second channel 22.

[0031] Nitrogen gas from the nitrogen source enters the first chamber 10 through the inlet 11, then splits into two paths. Most of the nitrogen enters the first chamber 10 through the second channel 22, while a smaller portion enters through the first channel 21. This is because the second channel 22 has a larger cross-sectional area for gas passage compared to the first channel 21, and the shortest gas flow distance from the inlet 11 to the second channel 22 is shorter than that of the first channel 21. The smaller portion of nitrogen passing through the first channel 21 travels a longer distance through the first chamber 10 compared to the other path, thus being heated more by the outer wall of the intermediate tube 2. This fully utilizes the residual heat radiated outwards from the intermediate tube 2, saving energy consumed by the heating tube 4; simultaneously, it lowers the temperature of the outer tube 1, preventing burns from accidental contact. The majority of nitrogen passing through the second channel 22 travels a longer distance through the second chamber 20 compared to the other path, increasing the heating capacity of the heating tube 4 and ensuring that most of the nitrogen reaches a temperature close to that of the smaller portion.

[0032] Preferably, it also includes a second end plate 6 and a third end plate 14, which are located at both ends of the intermediate tube 2, respectively. The second end plate 6 and the third end plate 14 are fixedly connected to the outer tube 1, and the third end plate 14 is used to block the ends of the outer tube 1 and the intermediate tube 2, so that nitrogen cannot flow out from this end of the first cavity 10 and the second cavity 20.

[0033] Preferably, the first channel 21 is an annular gap between the intermediate tube 2 and the second end plate 6, thereby making the nitrogen gas outlet more uniform; the second channel 22 is a through hole formed in the intermediate tube 2 (not shown in the figure) or a through hole formed by the intermediate tube 2 and the third end plate 14 (e.g., Figure 3 (As shown).

[0034] Preferably, it also includes an air inlet pipe 7, which is inserted into the end of the outer tube 1 away from the third end plate 14. The position of the air inlet pipe 7 relative to the outer tube 1 is fixed. The third channel 30 is an annular gap between the inner tube 3 and the air inlet pipe 7, so that the nitrogen gas output is more uniform.

[0035] Preferably, the inner tube 3 has an inner conical surface 31, the air inlet pipe 7 has an outer conical surface 71, the outer conical surface 71 is located inside the inner conical surface 31, the third channel 30 is located between the inner conical surface 31 and the outer conical surface 71, the gas flow in the third channel 30 is directed away from the air inlet pipe 7, and the flow direction of hot nitrogen is the same as the flow direction of process waste.

[0036] Preferably, it further includes a first end plate 5, the inner and outer sides of which are fixedly connected to the air inlet pipe 7 and the outer pipe 1, respectively. The first end plate 5 is used to block the end of the outer pipe 1. The inner and outer sides of the second end plate 6 are fitted to the inner pipe 3 and the outer pipe 1. The second end plate 6 forms a first through hole 61. The outer pipe 1, the first end plate 5, the second end plate 6 and the air inlet pipe 7 form a third cavity 50. The first through hole 61 connects the second cavity 20 and the third cavity 50. The third channel 30 connects the inside of the inner pipe 3 and the third cavity 50. The third cavity 50 is used to mix nitrogen and make the nitrogen uniformly heated.

[0037] Preferably, it also includes a sensor interface 12, which is fixedly connected to the external tube 1. The external tube 1 is connected to the third cavity 50. A temperature sensor is installed in the sensor interface 12 or is connected to the temperature sensor. The operator can adjust the heating amount of the heating tube 4 according to the temperature uploaded by the temperature sensor.

[0038] Preferably, it also includes an exhaust pipe 8, which is fixedly connected to the end of the internal pipe 3 away from the intake pipe 7. The exhaust pipe 8 is connected to the internal pipe 3, and the ends of the intake pipe 7 and the exhaust pipe 8 are respectively formed with flanges for connection.

[0039] Preferably, it also includes a heating tube interface 13, which is fixedly connected to the outer tube body 1. The heating tube 4 passes through the second channel 22 and the heating tube interface 13. The heating tube 4 is fixedly connected to the heating tube interface 13. The part of the heating tube 4 located in the middle tube body 2 is a spiral tube that winds around the inner tube body 3, thereby increasing the total length of the heating tube 4 within the limited axial length of the second cavity 20, and thus increasing the heating amount.

[0040] More preferably, the heating element 4 is an electric heating element.

[0041] Preferably, such as Figure 5 As shown, it also includes a protective shell 9, which is fixedly connected to the first end plate 5. A gap is formed between the outer tube 1 and the protective shell 9, which isolates the outer tube 1 from the protective shell 9. The protective shell 9 prevents workers from contacting the outer tube 1, and since the protective shell 9 does not contact the outer tube 1, its temperature is lower, preventing burns to workers.

[0042] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A nitrogen heating device, characterized by, It comprises: The intermediate pipe body (2) is sleeved outside the inner pipe body (3) and is fixed in position relative to the inner pipe body (3), a second cavity (20) is formed between the intermediate pipe body (2) and the inner pipe body (3), the air inlet (11) is in communication with the second cavity (20), and the heating pipe (4) is located inside the second cavity (20).

2. The nitrogen heating apparatus of claim 1, wherein: It further comprises an outer pipe body (1), the outer pipe body (1) is sleeved outside the intermediate pipe body (2) and is fixed in position relative to the intermediate pipe body (2), a first cavity (10) is formed between the outer pipe body (1) and the intermediate pipe body (2), the air inlet (11) is fixedly connected with the outer pipe body (1) and is in communication with the first cavity (10), the first cavity (10) and the second cavity (20) are in communication through a first channel (21) and a second channel (22) at two ends respectively, the cross-sectional area of the second channel (22) is greater than that of the first channel (21), the air inlet (11) is located at one end close to the second channel (22), and the first channel (21) is closer to the third channel (30) than the second channel (22).

3. A nitrogen heating device according to claim 2, wherein: It further comprises a second end plate (6) and a third end plate (14), the second end plate (6) and the third end plate (14) are located at two ends of the intermediate pipe body (2) respectively, the second end plate (6) and the third end plate (14) are fixedly connected with the outer pipe body (1) respectively, and the third end plate (14) is used for plugging the end portions of the outer pipe body (1) and the intermediate pipe body (2).

4. The nitrogen heating apparatus of claim 3, wherein: The first channel (21) is an annular gap between the intermediate pipe body (2) and the second end plate (6), and the second channel (22) is a through hole formed in the intermediate pipe body (2) or a through hole formed by splicing the intermediate pipe body (2) and the third end plate (14).

5. The nitrogen heating apparatus of claim 3, wherein: It further comprises an air inlet pipe (7), the air inlet pipe (7) is inserted into one end of the outer pipe body (1) away from the third end plate (14), the air inlet pipe (7) is fixed in position relative to the outer pipe body (1), and the third channel (30) is an annular gap between the inner pipe body (3) and the air inlet pipe (7).

6. A nitrogen heating device according to claim 5, wherein: The inner pipe body (3) is formed with an inner tapered surface (31), the air inlet pipe (7) is formed with an outer tapered surface (71), the outer tapered surface (71) is located inside the inner tapered surface (31), the third channel (30) is located between the inner tapered surface (31) and the outer tapered surface (71), and the gas flow in the third channel (30) is directed away from the air inlet pipe (7).

7. The nitrogen heating apparatus of claim 5, wherein: Also include the first end plate (5), the first end plate (5) inside and outside are fixedly connected with the air inlet pipe (7) and the external pipe body (1) respectively, the first end plate (5) is used for plugging the end of the external pipe body (1), the second end plate (6) inside and outside are attached with the internal pipe body (3) and the external pipe body (1), the second end plate (6) is formed with the first through hole (61), the external pipe body (1), the first end plate (5), the second end plate (6) and the air inlet pipe (7) are formed with the third cavity (50), the first through hole (61) is connected with the second cavity (20) and the third cavity (50), the third channel (30) is connected with the internal pipe body (3) inside and the third cavity (50).

8. The nitrogen heating apparatus of claim 5, wherein: Also include the sensor interface (12), the sensor interface (12) is fixedly connected with the external pipe body (1), the external pipe body (1) is connected with the third cavity (50), the temperature sensor is installed in the sensor interface (12) or connected with the temperature sensor.

9. The nitrogen heating apparatus of claim 5, wherein: Also include the air outlet pipe (8), the air outlet pipe (8) is fixedly connected with the internal pipe body (3) away from the air inlet pipe (7) one end, the air outlet pipe (8) is connected with the internal pipe body (3), the air inlet pipe (7) and the air outlet pipe (8) end part are formed with the flange for connection.

10. The nitrogen heating apparatus of claim 5, wherein: Also include the heating pipe interface (13), the heating pipe interface (13) is fixedly connected with the external pipe body (1), the heating pipe (4) passes through the second channel (22) and the heating pipe interface (13), the heating pipe (4) is fixedly connected with the heating pipe interface (13), the part of the heating pipe (4) in the intermediate pipe body (2) is the spiral pipe around the internal pipe body (3).

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