Chemical agent concentration detection pipeline device

Abstract

A chemical agent concentration detection pipeline device comprises a branch pipeline, a first detection pipeline, a second detection pipeline, a communicating pipeline and a collecting pipeline, the branch pipeline is provided with two branch ends and is communicated with the first detection pipeline and the second detection pipeline respectively, and a first concentration detector is arranged on the first detection pipeline; a first concentration device is arranged on the first detection pipeline, a second concentration device is arranged on the second detection pipeline and is connected between the first detection pipeline and the second detection pipeline through a communicating pipeline, and the first detection pipeline and the second detection pipeline are converged through two converging ends of a converging pipeline; through combination of series connection and parallel connection double structure integration, the concentration detection control logic design of a chemical system can be realized, and the stability, the control flexibility and the like of the concentration detection control logic design are improved.

Description

Technical Field

[0001] This application relates to a chemical device, and more particularly to a concentration detection pipeline device for a chemical agent. Background Technology

[0002] In industries such as semiconductors, the concentration requirements for chemical reagents are extremely stringent. Therefore, chemical reagent supply systems typically include two sets of concentration detectors for data comparison and to prevent the concentration of the supplied reagents from changing due to the failure of either detector. Existing common concentration detectors usually employ configurations and designs such as series or parallel connections.

[0003] Many factors can easily affect the deviation or error of concentration detector data, mainly including bubbles, flow rate, flow volume, and temperature. However, since concentration detectors are usually placed in a temperature-controlled indoor air-conditioned space, the influence of temperature is not significant; the remaining challenge is to create an environment that does not generate bubbles and has a stable flow rate and flow volume.

[0004] In view of this, in order to improve and solve the above-mentioned deficiencies, the applicant has devoted himself to research and applied theoretical knowledge, and finally proposed a technical solution that is reasonably designed and effectively improves the above-mentioned deficiencies. Utility Model Content

[0005] The main objective of this application is to provide a concentration detection pipeline device for chemical agents, which is designed for concentration detection and control logic of chemical systems. By combining series and parallel dual-structure integration, it improves system stability and control flexibility.

[0006] To achieve the above objectives, this application provides a concentration detection pipeline device for a chemical agent, comprising a branch pipeline, a first detection pipeline, a second detection pipeline, a connecting pipeline, and a connecting pipeline: the branch pipeline has an inlet end, and a first branch end and a second branch end connected to the inlet end; the first detection pipeline has a first input end, a first output end, and a first concentration detector disposed between the first input end and the first output end, and the first input end is connected to the first branch end, and a first inlet control valve is disposed between the first input end and the first branch end; the second detection pipeline has a second input end, a second output end, and a second concentration detector disposed between the second input end and the second output end. The detector has a second input terminal connected to a second branch terminal, and a second inlet control valve is provided between the second input terminal and the second branch terminal; the connecting pipeline has a first connecting terminal, a second connecting terminal, and a connecting control valve provided between the first connecting terminal and the second connecting terminal, and the first connecting terminal is connected to a first output terminal, while the second connecting terminal is connected to a second input terminal; the collecting pipeline has an outlet terminal, and a first confluence terminal and a second confluence terminal connected to the outlet terminal, and the first confluence terminal is connected to the first output terminal, and a first outlet control valve is provided between the first confluence terminal and the first output terminal, while the second confluence terminal is connected to the second output terminal, and a second outlet control valve is provided between the second confluence terminal and the second output terminal.

[0007] Preferably, the first inlet control valve, the connecting control valve, and the second outlet control valve are in an open state, while the second inlet control valve and the first outlet control valve are in a closed state, thereby forming a detection loop.

[0008] Preferably, the first inlet control valve, the first outlet control valve, the second inlet control valve, the second outlet control valve, and the connecting control valve are all on / off valves.

[0009] Preferably, the first input end of the first detection pipeline is branched to a first discharge end, and the first discharge end is provided with a first discharge control valve.

[0010] Preferably, the first discharge control valve is an on / off valve.

[0011] Preferably, the second input end of the second detection pipeline is branched to a second discharge end, and the second discharge end is provided with a second discharge control valve.

[0012] Preferably, the second discharge control valve is a switch valve.

[0013] Preferably, the second input end of the second detection pipeline is branched to a second discharge end, and the second discharge end is provided with a second discharge control valve.

[0014] Preferably, the second discharge control valve is a switch valve.

[0015] The concentration detection pipeline device for chemical reagents provided in this application is a concentration detection and control logic design for chemical systems. By combining series and parallel dual-structure integration, it improves system stability and control flexibility. Attached Figure Description

[0016] The above and other objects, features, and advantages of this utility model will become clearer through the detailed description of the preferred embodiments shown in the accompanying drawings. The same reference numerals indicate the same parts throughout the drawings, and the drawings are not intentionally drawn to scale with actual dimensions; the focus is on illustrating the gist of this utility model.

[0017] Figure 1 This is a plan view of the detection state of this application.

[0018] Figure 2 This is a plan view of the first detection pipeline used in this application.

[0019] Figure 3 This is a plan view of the second detection pipeline used in this application.

[0020] Figure 4 A schematic diagram showing the discharge of the reagents supplied in this application.

[0021] Figure label:

[0022] 1: Concentration detection pipeline device

[0023] 10: Branch Pipeline

[0024] 100: Entry point

[0025] 101: First Divergence

[0026] 102: Second Divergence

[0027] 11: First detection pipeline

[0028] 110: First input terminal

[0029] 110a: First inlet control valve

[0030] 111a: First outlet control valve

[0031] 111: First output terminal

[0032] 112: First Concentration Detector

[0033] 113: First emission end

[0034] 113a: First emission control valve

[0035] 12: Second detection pipeline

[0036] 120: Second input terminal

[0037] 120a: Second inlet control valve

[0038] 121a: Second outlet control valve

[0039] 121: Second output terminal

[0040] 122: Second Concentration Detector

[0041] 123: Second emission end

[0042] 123a: Second emission control valve

[0043] 13: Connecting pipes

[0044] 130: First connected terminal

[0045] 131: Second connection terminal

[0046] 132: Connecting control valve

[0047] 14: Collection Pipeline

[0048] 140: Export end

[0049] 141: First junction terminal

[0050] 142: Second junction terminal

[0051] 2: Chemical Tank

[0052] 3: Chemical Tank Detailed Implementation

[0053] Numerous specific details are provided in this specification to provide a thorough understanding of the specific embodiments of the present invention; however, those skilled in the art will recognize that the purpose of the present invention can still be achieved without one or more of these specific details; in other cases, well-known details have not been shown or described to avoid obscuring the main technical features of the present invention. A detailed description and technical content of the present invention are illustrated below with reference to the accompanying drawings; however, the drawings are provided for reference and illustration only and are not intended to limit the scope of the present invention.

[0054] To further disclose the features and technical content of this application, please refer to the following detailed description and accompanying drawings. However, the accompanying drawings are provided for reference and illustration only and are not intended to limit this application.

[0055] Please see Figure 1This is a plan view of the detection state in this application. This application provides a concentration detection pipeline device 1 for a chemical agent, which can be connected between two agent tanks 2 and 3, so that the agent in one agent tank 2 can be detected numerically (e.g., concentration) through the concentration detection pipeline device 1, and then the detected agent can be transported to the other agent tank 3 for subsequent use. The concentration detection pipeline device 1 includes a branch pipeline 10, a first detection pipeline 11, a second detection pipeline 12, a connecting pipeline 13, and a collecting pipeline 14; wherein:

[0056] The branch pipe 10 has an inlet end 100, and a first branch end 101 and a second branch end 102 connected to the inlet end 100, and the first branch end 101 and the second branch end 102 are also connected. The inlet end 100 is used to connect to the aforementioned reagent tank 2, so that the reagent of the concentration to be detected can enter the inlet end 100 from the reagent tank 2 for detection.

[0057] The first detection line 11 has a first input terminal 110, a first output terminal 111, and a first concentration detector 112 disposed between the first input terminal 110 and the first output terminal 111. The first input terminal 110 is connected to the first branch terminal 101 of the aforementioned branch line 10, so that the reagent entering the inlet terminal 100 of the branch line 10 can pass through the first detection line 11 and be initially detected by the first concentration detector 112. A first inlet control valve 110a is provided between the first input terminal 110 and the first branch terminal 101. The first inlet control valve 110a can be a switch valve, used to control whether the connection between the first input terminal 110 and the first branch terminal 101 is maintained. Figure 1 In the embodiment shown, the first inlet control valve 110a is in an open state, allowing the agent to flow to the first concentration detector 112 for concentration detection.

[0058] The second detection pipeline 12 has a second input terminal 120, a second output terminal 121, and a second concentration detector 122 disposed between the second input terminal 120 and the second output terminal 121. The second input terminal 120 is connected to the second branch terminal 102 of the aforementioned branch pipeline 10, and a second inlet control valve 120a is provided between the second input terminal 120 and the second branch terminal 102. The second inlet control valve 120a can be a switching valve, which can be used to control whether the connection between the second input terminal 120 and the second branch terminal 102 is established. Figure 1 In the embodiment shown, the second inlet control valve 120a is closed to restrict the agent to flow only to the first concentration detector 112 for concentration detection.

[0059] This application primarily connects the connecting pipe 13 between the first detection pipe 11 and the second detection pipe 12. Specifically, the connecting pipe 13 has a first connecting end 130, a second connecting end 131, and a connecting control valve 132 disposed between the first connecting end 130 and the second connecting end 131. The first connecting end 130 is connected to the first output end 111 of the first detection pipe 11, and the second connecting end 131 is connected to the second input end 120 of the second detection pipe 12, so that the reagent for the first concentration detection can enter the second detection pipe 12 through the connecting control valve 132 of the connecting pipe 13, and be detected a second time by the second concentration detector 122. The connecting control valve 132 can be a switch valve, used to control whether the connection between the first detection pipe 11 and the second detection pipe 12 is established. Figure 1 In the embodiment shown, the connection control valve 132 is in an open state, allowing the agent to flow to the second concentration detector 122 for concentration detection.

[0060] Furthermore, the manifold 14 has an outlet end 140, and a first manifold 141 and a second manifold 142 connected to and gathered at the outlet end 140. The first manifold 141 is connected to the first output end 111 of the first detection conduit 11, and a first outlet control valve 111a is provided between the first manifold 141 and the first output end 111. The first outlet control valve 111a can be a switch valve, used to control whether the connection between the first manifold 141 and the first output end 111 is established. Figure 1 In the illustrated embodiment, the first outlet control valve 111a is closed to prevent the drug from being directly delivered to another drug tank 3 without passing through the second concentration detector 122. Furthermore, the second manifold 142 is connected to the second output terminal 121 of the aforementioned second detection pipeline 12, and a second outlet control valve 121a is provided between the second manifold 142 and the second output terminal 121. This second outlet control valve 121a can be a switching valve, used to control whether the connection between the second manifold 142 and the second output terminal 121 is maintained. Figure 1 In the embodiment shown, the second outlet control valve 121a is in the open state to allow the reagent that has passed the secondary concentration detection to be delivered to another reagent tank 3 for subsequent use.

[0061] And in Figure 1 In the state shown, the first inlet control valve 110a, the connecting control valve 132 and the second outlet control valve 121a are in the open state, while the second inlet control valve 120a and the first outlet control valve 111a are in the closed state, thus forming a detection loop.

[0062] In summary, the concentration detection pipeline device for the chemical reagents described above can be obtained.

[0063] Accordingly, Figure 2 and Figure 3 As shown, through the above design, this application can also be used independently as any one of the detection lines. Figure 2 As shown, by closing the second inlet control valve 120a, the second outlet control valve 121a, and the connecting control valve 132, which are connected to the second detection pipeline 12, and opening the first inlet control valve 110a and the first outlet control valve 111a, which are connected to the first detection pipeline 11, the agent can be supplied from the agent tank 2 to the other agent tank 3 using only the first detection pipeline 11; and if Figure 3 As shown, by closing the first inlet control valve 110a, the first outlet control valve 111a, and the connecting control valve 132 that are connected to the first detection pipeline 11, and opening the second inlet control valve 120a and the second outlet control valve 121a that are connected to the second detection pipeline 12, the agent can be supplied from the agent tank 2 to another agent tank 3 using only the second detection pipeline 12.

[0064] Also, such as Figure 4 As shown, this application may also branch off to a first discharge end 113 at the first input end 110 of the first detection pipeline 11, and the first discharge end 113 is provided with a first discharge control valve 113a. The first discharge control valve 113a may be a switch valve, which can control whether the agent in the first detection pipeline 11 is discharged. At the same time, the second input end 120 of the second detection pipeline 12 may branch off to a second discharge end 123, and the second discharge end 123 is provided with a second discharge control valve 123a. The second discharge control valve 123a may be a switch valve, which can also control whether the agent in the second detection pipeline 12 is discharged.

[0065] The above description is merely a preferred embodiment of this utility model and should not be construed as limiting the scope of implementation of this utility model. All equivalent variations and modifications made according to the claims of this utility model should still fall within the scope of protection intended by this utility model. The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments have been described. However, as long as the combination of these technical features does not contradict each other, it should be considered within the scope of this specification. This utility model may also have other embodiments. Without departing from the spirit and essence of this utility model, those skilled in the art can make various corresponding changes and modifications based on this utility model, but these corresponding changes and modifications should all fall within the protection scope of the claims of this utility model.

Claims

1. A concentration detection pipeline device for a chemical agent, characterized in that, The utility model relates to a concentration detection system, comprising: a manifold having an inlet end, and a first branch end and a second branch end in communication with the inlet end; a first detection line having a first input end, a first output end, and a first concentration detector disposed between the first input end and the first output end, wherein the first input end is in communication with the first branch end, and a first inlet control valve is disposed between the first input end and the first branch end; a second detection line having a second input end, a second output end, and a second concentration detector disposed between the second input end and the second output end, wherein the second input end is in communication with the second branch end, and a second inlet control valve is disposed between the second input end and the second branch end; a communication line having a first communication end, a second communication end, and a communication control valve disposed between the first communication end and the second communication end, wherein the first communication end is in communication with the first output end, and the second communication end is in communication with the second input end; and a collection line having an outlet end, and a first flow end and a second flow end in communication with the outlet end, wherein the first flow end is in communication with the first output end, and a first outlet control valve is disposed between the first flow end and the first output end, and the second flow end is in communication with the second output end, and a second outlet control valve is disposed between the second flow end and the second output end.

2. The chemical concentration detection line apparatus according to claim 1, wherein The first inlet control valve, the communication control valve, and the second outlet control valve are in an open state, and the second inlet control valve and the first outlet control valve are in a closed state, thereby forming a detection loop.

3. The chemical concentration detection conduit apparatus of claim 1 or 2, wherein, The first inlet control valve, the first outlet control valve, the second inlet control valve, the second outlet control valve, and the communication control valve are all on-off valves.

4. The chemical concentration detection pipe device according to claim 1 or 2, wherein The first input end of the first detection line is branched in communication with a first discharge end, and a first discharge control valve is disposed on the first discharge end.

5. The chemical concentration detection conduit apparatus of claim 4, wherein, The first discharge control valve is an on-off valve.

6. The chemical concentration detection conduit apparatus of claim 4, wherein, The second input end of the second detection line is branched in communication with a second discharge end, and a second discharge control valve is disposed on the second discharge end.

7. The chemical concentration detection conduit apparatus of claim 6, wherein, The second discharge control valve is an on-off valve.

8. The chemical concentration detection conduit apparatus of claim 1 or 2, wherein, The second input end of the second detection line is branched in communication with a second discharge end, and a second discharge control valve is disposed on the second discharge end.

9. The chemical concentration detection conduit apparatus of claim 8, wherein, The second discharge control valve is an on-off valve.

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