Imaging device

Abstract

The utility model discloses an imaging device which comprises a light source, a light processing module, a sample module and a first imaging module, the light source is used for emitting laser beams to the light processing module, the light processing module comprises a cylindrical lens and a first spectroscope, and the first imaging module comprises an objective lens and a first imaging camera which are arranged on the two sides of the first spectroscope respectively. The cylindrical lens, the objective lens and the first imaging camera are located on different sides of the first spectroscope respectively, the objective lens is arranged between the first spectroscope and the sample module, the laser beam is reflected by the first spectroscope for the first time and then enters the objective lens, and an imaging tube lens is further arranged between the first imaging camera and the first spectroscope. According to the imaging equipment disclosed by the utility model, the laser beam forms a bright line on the surface of the sample module, the height position and the inclination amount of the surface of the sample module corresponding to the bright line can be determined through single measurement, and the focusing accuracy is remarkably improved; in addition, according to the scheme, normal imaging can be achieved even if the distance between the objective lens and the sample module is only a few millimeters.

Description

Technical Field

[0001] This utility model relates to the field of microscopic imaging, and in particular to an imaging device. Background Technology

[0002] In existing imaging equipment, the commonly used focusing method involves continuously capturing images of the object by scanning the Z-axis of the objective lens. Software algorithms then calculate the sharpness of the image at various Z-axis positions to determine the focal plane position. The image is then retaken at the focal plane position. The biggest drawback of this method is that the algorithm needs to calculate the sharpness value for each image, which is time-consuming and results in slow focusing speed, failing to meet the requirements of continuous image capture on a moving platform. Another common focusing method involves adding a point laser displacement sensor. This uses laser triangulation to measure the object's height, determining its position before moving the microscope objective to the focal plane position for image capture. However, this method requires an external laser displacement sensor, which interferes with the spatial layout of the equipment, especially with high-magnification objectives. At short working distances (the objective is very close to the object, only a few millimeters), it is impossible to arrange the external laser displacement sensor. Another drawback is that a single point laser measurement can only determine the height of a single point, while a microscope objective images an entire surface; using a point to represent the entire surface results in a lack of precision. Utility Model Content

[0003] To address the problems existing in the prior art, this utility model discloses an imaging device.

[0004] An imaging device includes a light source, a light processing module, a sample module, and a first imaging module. The light source emits a laser beam toward the light processing module. The light processing module includes a cylindrical lens and a first beam splitter arranged sequentially in a direction away from the light source. The first imaging module includes an objective lens and a first imaging camera disposed on both sides of the first beam splitter, with the cylindrical lens, objective lens, and first imaging camera located on different sides of the first beam splitter. The objective lens is disposed between the first beam splitter and the sample module. The laser beam enters the objective lens after being reflected for the first time by the first beam splitter. An imaging tube lens is also disposed between the first imaging camera and the first beam splitter.

[0005] In practical use, the light source emits a laser beam, which is then transformed into a line laser after passing through a cylindrical lens (one side of the cylindrical lens is a plane, and the other side is a cylindrical surface; unlike a spherical lens, which acts symmetrically on the incident light in both directions, a cylindrical lens acts on the incident light in only one direction, thus shaping parallel light into a line). The line laser then passes through a first beam splitter, which performs a first reflection to obtain a reflected ray. This reflected ray enters the objective lens, and is at a certain distance from the objective lens's optical axis. Simultaneously, the reflected ray is parallel to the objective lens's optical axis. After refraction by the objective lens, the reflected ray will be refracted at a certain angle. The light incident on the sample surface (the sample module includes the sample and a stage for placing the sample) is simultaneously focused into a bright line. After reflection from the surface, the bright line passes through the objective lens again at the same angle and reaches the first beam splitter. Part of the energy of the bright line is transmitted through the first beam splitter to the imaging tube lens, and then to the first imaging camera to obtain an image of the bright line, thus achieving line imaging of the sample surface. When the height of the sample surface changes, the resulting image of the bright line will also move accordingly. Based on this movement, the change in height and tilt of the sample surface can be deduced. The objective lens is then moved according to this change in height to achieve precise focusing. In this structure, both focusing and imaging require the use of the first imaging camera; therefore, focusing must be performed before imaging.

[0006] Preferably, it also includes a second imaging module. The laser beam is reflected a second time by the first beam splitter and then enters the second imaging module. The second imaging module is provided with a focusing tube lens and a second imaging camera in sequence in the direction away from the first beam splitter. The light processing module also includes a second beam splitter, which is located between the light source and the cylindrical lens. The laser beam is reflected a first time by the second beam splitter and then enters the cylindrical lens. The focal length of the focusing tube lens is 50-150mm.

[0007] In practical use, the light source emits a laser beam. After being reflected by the second beam splitter, the laser beam is redirected and becomes a line laser after passing through a cylindrical lens. It then passes through the first beam splitter, which reflects the line laser for the first time to obtain a reflected ray. This reflected ray enters the objective lens, maintaining a certain distance from the objective lens's optical axis and being parallel to it. After refraction by the objective lens, the reflected ray strikes the sample surface at a certain angle and is focused into a bright line. This bright line is reflected again by the sample surface and passes through the objective lens at the same angle to the first beam splitter. The first beam splitter then reflects a portion of the light a second time, while the remaining portion is transmitted. The second reflected ray enters the focusing tube lens and finally reaches the second imaging camera. The light transmitted through the first beam splitter enters the imaging tube lens and finally reaches the first imaging camera. In this structure, focusing is achieved using the second imaging camera, while imaging is achieved using the first imaging camera; that is, focusing and imaging are completed simultaneously.

[0008] Preferably, the light rays entering the objective lens are parallel to and separate from the optical axis of the objective lens, and the distance between the light rays entering the objective lens and the optical axis of the objective lens is 50%-80% of the objective lens radius.

[0009] Preferably, the transmittance of the first beam splitter is 10%-90%.

[0010] Preferably, the diameter of the laser beam emitted by the light source is 0.1mm-5mm.

[0011] Preferably, the wavelength of the laser beam emitted by the light source is 800nm-1500nm.

[0012] Preferably, the cylindrical lens has a cylindrical focal length of 10-20 mm.

[0013] Preferably, the focal length of the imaging tube lens is compatible with the objective lens. However, the focal length of the imaging tube lens may vary depending on the brand of the objective lens selected.

[0014] Compared with the prior art, the advantages of this utility model are:

[0015] The imaging device provided by this invention enables a laser beam to form a bright line on the sample surface. After obtaining the image of the bright line, focusing is performed based on the displacement of the bright line. Compared with traditional point laser single measurement, which can only determine the elevation position of a single point, the single measurement of this invention can not only determine the elevation position of the sample surface corresponding to the line, but also the tilt of the sample surface corresponding to the line, significantly improving the focusing accuracy. In addition, in the prior art, when the distance between the objective lens and the sample is small, the laser cannot be properly incident, thus failing to form a normal image. Furthermore, the solutions of the prior art cannot be applied in small-volume applications. However, the solution provided by this invention can form a normal image even when the objective lens and the sample are only a few millimeters apart. Attached Figure Description

[0016] Figure 1 A schematic diagram of the imaging device provided by this utility model;

[0017] Figure 2 A schematic diagram of another embodiment of the imaging device provided by this utility model. Detailed Implementation

[0018] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0019] like Figure 1As shown, an imaging device includes a light source 10, a light processing module, a sample module 20, and a first imaging module. The light source 10 is used to emit a laser beam toward the light processing module. The light processing module includes a cylindrical lens 31 and a first beam splitter 32 arranged sequentially in a direction away from the light source 10. The first imaging module includes an objective lens 40 and a first imaging camera 52 respectively disposed on both sides of the first beam splitter 32. The cylindrical lens 31, the objective lens 40, and the first imaging camera 52 are respectively located on different sides of the first beam splitter 32. The objective lens 40 is disposed between the first beam splitter 32 and the sample module 20. The laser beam enters the objective lens 40 after being reflected for the first time by the first beam splitter 32. An imaging tube lens 51 is also provided between the first imaging camera 52 and the first beam splitter 32.

[0020] In practical use, the light source 10 emits a laser beam, which becomes a line laser after passing through the cylindrical lens 31. The line laser then passes through the first beam splitter 32, which performs a first reflection to obtain a reflected ray. This reflected ray enters the objective lens 40, and is at a certain distance from and parallel to the optical axis of the objective lens 40. After refraction by the objective lens 40, the reflected ray is incident at a certain angle onto the surface of the sample (sample module 20 includes the sample and a stage for placing the sample) and focused into a bright line. After being reflected by the surface being measured, the line passes through the objective lens 40 again at the same angle to reach the first beam splitter 32. Part of the energy of the bright line is transmitted through the first beam splitter 32 to the imaging tube lens 51, and then to the first imaging camera 52 to obtain an image of the bright line, thus realizing line imaging of the sample surface. When the height of the sample surface changes, the resulting image of the bright line will also move accordingly. Based on this movement, the change in height and tilt of the sample surface can be deduced. The objective lens 40 is then moved according to this change in height to achieve precise focusing. In this structure, both focusing and imaging require the use of the first imaging camera 52; therefore, focusing must be performed before imaging.

[0021] like Figure 2 As shown, it also includes a second imaging module. The laser beam is reflected a second time by the first beam splitter 32 and then enters the second imaging module. The second imaging module is provided with a focusing tube lens 61 and a second imaging camera 62 in sequence in the direction away from the first beam splitter 32. The light processing module also includes a second beam splitter 33, which is located between the light source 10 and the cylindrical lens 31. The laser beam is reflected a first time by the second beam splitter 33 and then enters the cylindrical lens 31. The focal length of the focusing tube lens 61 is 50-150mm.

[0022] In practical use, the light source 10 emits a laser beam. After the laser beam is reflected by the second beam splitter 33, the optical path is reversed. After passing through the cylindrical lens 31, it becomes a line laser. Then, it passes through the first beam splitter 32, which reflects the line laser for the first time to obtain a reflected light. The reflected light enters the objective lens 40, and the reflected light is at a certain distance from the optical axis of the objective lens 40. At the same time, the reflected light is parallel to the optical axis of the objective lens 40. After being refracted by the objective lens 40, the reflected light enters the sample surface at a certain angle and is focused into a bright line. After being reflected by the sample surface, the bright line passes through the objective lens 40 again at the same angle and reaches the first beam splitter 32. At this time, the first beam splitter 32 reflects part of the light a second time to obtain a second reflected light, while the other part is transmitted. The second reflected light enters the focusing tube lens 61 and finally reaches the second imaging camera 62. The light transmitted through the first beam splitter 32 enters the imaging tube lens 51 and finally reaches the first imaging camera 52. In this structure, focusing is achieved using the second imaging camera 62, and imaging is achieved using the first imaging camera 52, meaning that focusing can be completed simultaneously with imaging.

[0023] The light rays incident on objective lens 40 are parallel to and separate from the optical axis of objective lens 40. The distance between the light rays incident on objective lens 40 and the optical axis of objective lens 40 is 50%-80% of the radius of objective lens 40.

[0024] The transmittance of the first beam splitter 32 is 10%-90%.

[0025] The diameter of the laser beam emitted by light source 10 is 0.1mm-5mm;

[0026] The wavelength of the laser beam emitted by light source 10 is 800nm-1500nm;

[0027] The cylindrical lens 31 has a cylindrical focal length of 10-20mm; the focal length of the imaging tube lens 51 is compatible with that of the objective lens 40, but the focal length of the imaging tube lens 51 will vary depending on the brand of the objective lens 40 selected.

Claims

1. An imaging apparatus comprising a light source, a light ray processing module, a sample module and a first imaging module, characterized in that, The light source is used for emitting a laser beam to the light processing module, the light processing module comprises a cylindrical lens and a first light splitter arranged in sequence in a direction away from the light source, the first imaging module comprises an objective lens and a first imaging camera arranged on two sides of the first light splitter respectively, and the cylindrical lens, the objective lens and the first imaging camera are located on different sides of the first light splitter respectively, the objective lens is arranged between the first light splitter and the sample module, the laser beam is incident into the objective lens after being reflected by the first light splitter for the first time, and an imaging tube lens is further arranged between the first imaging camera and the first light splitter.

2. The imaging device of claim 1, wherein, The second imaging module is further included, the laser beam is incident into the second imaging module after being reflected by the first light splitter for the second time, and the second imaging module is sequentially provided with a focusing tube lens and a second imaging camera in a direction away from the first light splitter.

3. The imaging device of claim 2, wherein, The light processing module further comprises a second light splitter, the second light splitter is arranged between the light source and the cylindrical lens, and the laser beam is incident into the cylindrical lens after being reflected by the second light splitter for the first time.

4. The imaging device of claim 2, wherein, The focal length of the focusing tube lens is 50-150 mm.

5. The imaging device of claim 1, wherein, The light incident into the objective lens is parallel to and separated from the optical axis of the objective lens.

6. The imaging device of claim 5, wherein, The distance between the light incident into the objective lens and the optical axis of the objective lens is 50%-80% of the radius of the objective lens.

7. The imaging device of claim 1, wherein, The light transmittance of the first light splitter is 10%-90%.

8. The imaging device of claim 1, wherein, The diameter of the laser beam emitted by the light source is 0.1 mm-5 mm.

9. The imaging device of claim 1, wherein, The wavelength of the laser beam emitted by the light source is 800 nm-1500 nm.

10. The imaging device of claim 1, wherein, The cylindrical focal length of the cylindrical lens is 10-20 mm.

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