Sample stage of high-throughput scanning electron microscope (STEM)

Abstract

The utility model provides a high-flux scanning electron microscope (STEM) sample stage. The STEM sample stage comprises a circular base station, a circular ring pressing sheet and a fastener, a plurality of high-precision stepped holes which are annularly distributed are engraved on the circular base table, the size of the stepped holes is matched with that of the carbon support film of the transmission electron microscope, and the stepped holes are used for loading a plurality of carbon support films for the transmission electron microscope in batches, so that high-flux transmission electron microscope sample screening and testing are realized; secondly, the device is also provided with a high-precision integrated circular ring pressing sheet matched with a stepped hole in the circular base platform, and a transmission electron microscope carbon supporting film can be fixed by matching with a screw, so that the installation operation is simplified, the time is saved, and the safety is improved; and finally, scribed lines and letters matched with the distribution of the slotted holes are further engraved on the circular base station, so that the mounting direction of the transmission electron microscope positioning carbon support film on the base station can be unified in batches, matching with a transmission electron microscope coordinate system is facilitated, and rapid screening and positioning of transmission electron microscope samples are realized.

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