Jacking mechanism suitable for being used in vacuum cavity

Abstract

The utility model discloses a jacking mechanism suitable for being used in a vacuum cavity, which comprises a box body, a carrier arranged in the box body, a base and a lifting part. The base is arranged below the box body, and the base is connected with the box body through a plurality of supporting parts so as to support the box body; and the lifting part is mounted on the lower end surface of the base, is in driving connection with the carrier and can drive the carrier to do lifting action in the inner cavity of the box body. The jacking mechanism solves the problems that an existing lifting mechanism in a vacuum cavity occupies a large space in the cavity, the cavity is too large, and the jacking stroke is small. According to the jacking mechanism, the size of the inner cavity of the box body is greatly reduced, the vacuum response speed is increased, the working efficiency of the whole equipment is improved, and the cost of the equipment is reduced.

Description

Technical Field

[0001] This utility model relates to the bonding field of the 3C industry, specifically to a lifting mechanism suitable for use in a vacuum cavity. Background Technology

[0002] In existing technologies, bonding equipment in the 3C industry includes a bonding process, which incorporates a lifting mechanism. Traditionally, the power unit, transmission mechanism, and carrier of this lifting mechanism are all housed within a casing. This results in an excessively large casing, affecting the speed of vacuum response and the vacuum level within the casing. Furthermore, due to space constraints, the lifting stroke of traditional lifting mechanisms is limited. Additionally, traditional lifting mechanisms lack pressure feedback functionality.

[0003] In view of this, it is necessary to improve the traditional lifting mechanism. Utility Model Content

[0004] To address the shortcomings of existing technologies, the present invention aims to provide a lifting mechanism suitable for use in vacuum chambers. The purpose of this lifting mechanism is to reduce the volume of the chamber and increase the lifting stroke.

[0005] To solve the above-mentioned technical problems, this utility model provides the following solution: A lifting mechanism suitable for use in a vacuum cavity, comprising a housing and a carrier disposed within the housing, the lifting mechanism further comprising:

[0006] A base is provided below the box body, and the base is connected to the box body by a plurality of support parts to support the box body;

[0007] A lifting unit is installed on the lower end face of the base, which is driven to connect to the carrier and can drive the carrier to move up and down within the cavity of the box.

[0008] Furthermore, the support portion is provided in four sets, which are distributed at the four corners of the upper plate of the base, and the support portion has a buffer structure.

[0009] Furthermore, a limiting structure is provided between the housing and the base.

[0010] Furthermore, the limiting structure includes multiple limiting holes provided on the bottom plate of the box body and multiple limiting bolts fixed on the base, with the multiple limiting bolts corresponding one-to-one with the multiple limiting holes.

[0011] Furthermore, the lifting unit includes a power unit and a transmission mechanism driven and connected to the power unit;

[0012] The lifting unit also includes a box body, the bottom of which is a base plate. The front and rear ends of the base plate are vertically connected to sealing plates. One of the sealing plates has an opening, and a removable maintenance plate is installed at the opening. The left and right sides of the base plate are vertically connected to a first mounting plate. The opposite sides of the first mounting plate are provided with double rows of Z-axis guide rails, and sliders are slidably connected to the guide rails.

[0013] Furthermore, the power unit includes a servo motor and a reducer, with the servo motor driving the reducer and the reducer driving the transmission mechanism.

[0014] Furthermore, the transmission mechanism is a lead screw transmission mechanism.

[0015] Furthermore, the screw drive mechanism includes a ball screw, a mounted bearing, a deep groove ball bearing, a bearing housing, a screw nut, a shock absorber ring, and a movable seat. Each slider is fixed to the side of the movable seat and is fixed to the screw nut. The screw nut is screwed onto the ball screw. The lower end of the ball screw is connected to the coupling. The lower end of the ball screw is also fitted with a mounted bearing, and the upper end is fitted with a deep groove ball bearing. The mounted bearing is fixed to the base plate, and the deep groove ball bearing is fixed to the lower plate surface of the base through the bearing housing.

[0016] An anti-collision ring is also fitted onto the body of the ball screw, and the anti-collision ring is fixed to the lower end of the screw nut.

[0017] Furthermore, the screw drive mechanism also includes a lifting rod and a bellows. The lower end of the bellows is fixed to the movable seat, and the upper end of the bellows is connected to the housing. The bellows can contract through the corrugations on the pipe body. The lifting rod is located inside the bellows, and its lower end is fixed to the movable seat.

[0018] Sealing rings are provided at both ends of the bellows connection.

[0019] Furthermore, a pressure sensor is provided at the connection between the transmission mechanism and the vehicle.

[0020] Compared with the prior art, the beneficial effects of this utility model are:

[0021] 1. The lifting mechanism of this utility model solves the problems of existing lifting mechanisms in vacuum chambers occupying a large amount of internal space, resulting in excessively large chambers and small lifting strokes.

[0022] 2. The lifting mechanism of this utility model significantly reduces the internal cavity size of the housing, which is beneficial to improving the speed of vacuum response, increasing the working efficiency of the entire equipment, and reducing the cost of the equipment. Attached Figure Description

[0023] Figure 1This is a three-dimensional structural diagram of the visible top of the lifting mechanism of this utility model.

[0024] Figure 2 This is a three-dimensional structural diagram of the visible bottom of the lifting mechanism of this utility model.

[0025] Figure 3 This is an exploded view of the lifting mechanism of this utility model.

[0026] The following components are labeled in the attached diagram: 1. Base; 2. First mounting plate; 3. Base plate; 4. Sealing plate; 5. Maintenance plate; 6. Housing; 7. Support; 8. Limit bolt; 9. Servo motor; 10. Reducer; 11. Second mounting plate; 12. Coupling; 13. Ball screw; 14. Bearing with seat; 15. Deep groove ball bearing; 16. Bearing seat; 17. Screw nut; 18. Anti-collision ring; 19. Slider; 20. Guide rail; 21. Moving seat; 22. Lifting rod; 23. Pressure sensor mounting block; 24. Pressure sensor; 25. Carrier; 26. Anti-collision block; 27. Bellows; 28. Sealing ring. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments, so that the advantages and features of the present utility model can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present utility model. Obviously, the embodiments described in this utility model are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0028] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0029] Example 1: The specific structure of this utility model is as follows:

[0030] Please refer to the appendix. Figure 1-3 The present invention provides a lifting mechanism suitable for use in a vacuum cavity, comprising a housing 6 and a carrier 25 disposed within the housing 6. The housing 6 is a square box with a square opening at its top. A step is provided around the square opening, and a viewing window is attached to the step.

[0031] The lifting mechanism also includes a base 1 and a lifting part. The base 1 is located below the housing 6 and is connected to the housing 6 by multiple support parts 7 to support the housing 6. There are four sets of support parts 7, which are distributed at the four corners of the upper plate of the base 1, and each support part 7 has a buffer structure.

[0032] like Figure 2As shown, the support 7 includes a flange post fixed to the corner of the base 1, a spring sleeved on the flange post, and a connecting block sleeved on the flange post and abutting the upper end of the spring. The flange post has threads on its column portion, and the flange post is screwed with double nuts to limit the connecting block. The connecting block is also fixed to the lower edge of the side of the housing 6. The connecting block is movable and forms the buffer structure with the spring.

[0033] A limiting structure is also provided between the housing 6 and the base 1. The limiting structure includes multiple limiting holes on the bottom plate of the housing and multiple limiting bolts 8 fixed on the base 1. The multiple limiting bolts 8 correspond one-to-one with the multiple limiting holes. The limiting bolts 8 can limit the housing 6 and prevent the housing 6 from shifting.

[0034] The lifting unit is installed on the lower end face of the base 1, and is driven by the carrier 25, enabling the carrier 25 to move up and down within the cavity of the housing 6. The lifting unit includes a power unit 300 and a transmission mechanism 200 connected to the power unit. Specifically, the lifting unit also includes a housing, the bottom of which is a base plate 3. Both the front and rear ends of the base plate 3 are vertically connected to sealing plates 4. One of the sealing plates 4 has an opening, at which a removable maintenance plate 5 is installed. The left and right sides of the base plate are vertically connected to first mounting plates 2. The opposite sides of the first mounting plates 2 are provided with double rows of Z-axis guide rails 20, with sliders 19 slidably connected to the guide rails 20.

[0035] The power unit 300 includes a servo motor 9 and a reducer 10. The servo motor 9 drives the reducer 10, and the reducer 10 drives the transmission mechanism 200.

[0036] Specifically, the housing of the reducer 10 is connected to the second mounting plate 11, and a coupling 12 is provided inside the second mounting plate 11. The reducer 10 drives the coupling 12, and the coupling 12 is a component of the transmission mechanism 200. The upper end of the second mounting plate 11 is fixed to the lower end face of the base plate 3, and the base plate 3 has a through hole surrounded by the second mounting plate 11.

[0037] The transmission mechanism 200 is a screw drive mechanism, which includes a ball screw 13, a mounted bearing 14, a deep groove ball bearing 15, a bearing seat 16, a screw nut 17, a shock absorber ring 18, and a movable seat 21. Each slider 19 is fixed to the side of the movable seat 21 and is fixed to the screw nut 17. The screw nut 17 is screwed onto the ball screw 13. The lower end of the ball screw 13 is connected to the coupling 12. The lower end of the ball screw 13 is also fitted with a mounted bearing 14, and its upper end is fitted with a deep groove ball bearing 15. The mounted bearing 14 is fixed to the base plate 3, and the deep groove ball bearing 15 is fixed to the lower surface of the base 1 via the bearing seat 16.

[0038] An anti-collision ring 18 is also fitted onto the body of the ball screw 13, and the anti-collision ring 18 is fixed to the lower end of the screw nut 17.

[0039] The screw drive mechanism also includes a lifting rod 22 and a bellows 27. The lower end of the bellows 27 is fixed to the movable seat 21, and the upper end of the bellows 27 is connected to the housing 6. The bellows 27 can contract due to the corrugations on its body. The lifting rod 22 is located inside the bellows 27, and its lower end is fixed to the movable seat 21. Sealing rings 28 are provided at both ends of the bellows 27 to achieve a seal between the bellows 27 and the movable seat 21, and also to achieve a seal between the bellows 27 and the housing 6.

[0040] A pressure sensor 24 is provided at the connection between the transmission mechanism and the carrier 25. Specifically, the upper end of the lifting rod 22 is connected to the pressure sensor mounting block 23, and the upper end of the pressure sensor mounting block 23 is connected to the pressure sensor 24. The upper end of the pressure sensor 24 is connected to the carrier 25.

[0041] Example 2:

[0042] The working principle of the lifting mechanism of this utility model is as follows: After the servo motor 9 of this utility model is started, it drives the reducer 10 to work. The reducer 10 drives the coupling 12 to rotate. The coupling 12 drives the connecting ball screw 13 to rotate. Through the forward and reverse rotation of the ball screw 13, the screw nut 17 is driven to rise and fall. The screw nut 17 drives the moving seat 21 to rise and fall. In turn, the moving seat 21 drives the lifting rod 22 to rise and fall. The lifting rod 22 drives the carrier 25 to perform lifting and falling movements.

[0043] During the movement of the lifting rod 22, the pressure sensor 24 detects the pressure value in real time. By observing the changes in the pressure value, the magnitude of the force on the product on the carrier 25 can be determined.

[0044] In summary, the lifting mechanism of this invention solves the problems of existing lifting mechanisms occupying a large amount of internal space in the vacuum chamber, resulting in an excessively large chamber and a small lifting stroke. This lifting mechanism significantly reduces the internal dimensions of the chamber, which is beneficial for improving the speed of vacuum response, increasing the overall efficiency of the equipment, and reducing equipment costs.

[0045] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. Any equivalent structural or procedural transformations made based on the contents of the present utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of the present utility model.

Claims

1. A jacking mechanism suitable for use in a vacuum chamber, comprising a housing (6), a carrier (25) disposed within the housing (6), characterised in that, The jacking mechanism further comprises: A base (1) is arranged below the box body (6), and the base (1) is connected to the box body (6) through a plurality of support portions (7) to support the box body (6); A lifting portion is installed on the lower end surface of the base (1), is drivingly connected to the carrier (25), and can drive the carrier (25) to perform lifting action in the inner cavity of the box body (6).

2. A jacking mechanism suitable for use in a vacuum chamber as claimed in claim 1, wherein, The support portions (7) are provided in four groups, and the four groups of support portions (7) are distributed on the four corners of the upper plate surface of the base (1). The support portions (7) have a buffering structure.

3. A jacking mechanism suitable for use in a vacuum chamber as claimed in claim 2, wherein, A limiting structure is further arranged between the box body (6) and the base (1).

4. A lifting mechanism suitable for use in a vacuum chamber as claimed in claim 3, wherein The limiting structure comprises a plurality of limiting holes arranged on the bottom plate of the box body (6) and a plurality of limiting bolts (8) fixed on the base (1). The plurality of limiting bolts (8) correspond one-to-one to the plurality of limiting holes.

5. A jacking mechanism suitable for use in a vacuum chamber as claimed in claim 1, wherein, The lifting portion comprises a power portion (300) and a transmission mechanism (200) drivingly connected to the power portion; The lifting portion further comprises a box body, the bottom end of the box body is a bottom plate (3), the front end and the rear end of the bottom plate (3) are both vertically connected to sealing plates (4), one of the sealing plates (4) is provided with an opening, a detachable maintenance plate (5) is installed at the opening, the left side and the right side of the bottom plate are both vertically connected to first mounting plates (2), the opposite side surfaces of the first mounting plates (2) are both provided with double rows of Z-axis direction guide rails (20), and the guide rails (20) are slidingly connected to sliding blocks (19).

6. A lifting mechanism suitable for use in a vacuum chamber as claimed in claim 5, wherein, The power portion (300) comprises a servo motor (9) and a speed reducer (10), the servo motor (9) is drivingly connected to the speed reducer (10), and the speed reducer (10) is drivingly connected to the transmission mechanism (200).

7. A lifting mechanism suitable for use in a vacuum chamber as claimed in claim 6, wherein The transmission mechanism (200) adopts a lead screw transmission mechanism.

8. A jacking mechanism suitable for use in a vacuum chamber as claimed in claim 7, wherein, The lead screw transmission mechanism comprises a ball screw (13), a bearing with seat (14), a deep groove ball bearing (15), a bearing seat (16), a lead screw nut (17), a collision prevention ring (18), and a moving seat (21). The side portions of the moving seat (21) are fixed with the sliding blocks (19), which are fixed with the lead screw nut (17). The lead screw nut (17) is screwed with the ball screw (13), the lower end of the ball screw (13) is connected to the shaft coupling (12), the lower end rod body of the ball screw (13) is further sleeved with the bearing with seat (14), and the upper end thereof is sleeved with the deep groove ball bearing (15). The bearing with seat (14) is fixed to the bottom plate (3), and the deep groove ball bearing (15) is fixed to the lower plate surface of the base (1) through the bearing seat (16). The rod body of the ball screw (13) is further sleeved with the collision prevention ring (18), and the collision prevention ring (18) is fixed to the lower end of the lead screw nut (17).

9. A lifting mechanism suitable for use in a vacuum chamber as claimed in claim 8, wherein, The lead screw transmission mechanism further comprises a jacking rod (22) and a bellows (27). The lower end of the bellows (27) is fixed to the moving seat (21), the upper end of the bellows (27) is connected to the box body (6), the bellows (27) can be contracted through the bellows on the pipe body, and the jacking rod (22) is arranged in the bellows (27) and is fixed to the moving seat (21). Both ends of the bellows (27) are provided with sealing rings (28).

10. A jacking mechanism suitable for use in a vacuum chamber as claimed in claim 1, wherein, The connection between the transmission mechanism and the carrier (25) is provided with a pressure sensor (24).

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