Cooling structure of vacuum coating machine

Abstract

The utility model discloses a cooling structure of a vacuum coating machine, which comprises the vacuum coating machine, one end of the vacuum coating machine is provided with a quick cooling mechanism for performing circulating accelerated cooling on cooling liquid, the quick cooling mechanism comprises a cooling box, and the outer wall of one end, far away from the vacuum coating machine, of the cooling box is provided with a mounting groove; a semiconductor chilling plate is mounted in the mounting groove, heat dissipation fins are arranged at the other end of the semiconductor chilling plate, two copper pipes are mounted at one end of the semiconductor chilling plate, rotating rods are rotationally connected to the top and the bottom of the inner wall of the cooling box, a plurality of stirring rods are fixed to the outer walls of the two rotating rods, and a motor is mounted at the top of one side of the cooling box; and an output shaft of the motor is fixedly connected with one end of one rotating rod. According to the utility model, the effect of quickly cooling the cooling liquid is realized, the cooling efficiency of the vacuum coating machine is improved, the heat exchange efficiency is improved, the cooling time is shortened, and the practicability is high.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating machine technology, and in particular to a cooling structure for a vacuum coating machine. Background Technology

[0002] Vacuum coating machines mainly refer to coating processes that require high vacuum levels. They encompass many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE (molecular beam epitaxy), PLD (laser-dependent deposition), and ion beam sputtering. The main approaches are categorized into evaporation and sputtering.

[0003] Traditional vacuum coating machines typically require cooling after a period of operation. A common practice is to wrap the cooling pipes around the outside of the machine. However, this method has several drawbacks: firstly, installation and disassembly are inefficient, increasing maintenance complexity; secondly, after prolonged use, dust easily accumulates on the outside of the pipes, significantly reducing thermal conductivity. Furthermore, during the cooling process, the coolant often retains a certain temperature when it returns to the cooling tank, thus limiting the cooling rate and ultimately resulting in unsatisfactory cooling efficiency for the vacuum coating machine. Therefore, a new cooling structure for vacuum coating machines is urgently needed to address these issues. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a cooling structure for a vacuum coating machine.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A cooling structure for a vacuum coating machine includes a vacuum coating machine, a base plate fixed to the bottom of the vacuum coating machine, a cooling mechanism for cooling the outside of the vacuum coating machine, and a rapid cooling mechanism for circulating and accelerating the cooling of the coolant at one end of the vacuum coating machine.

[0007] The rapid cooling mechanism includes a cooling box. An installation groove is formed on the outer wall of the cooling box at the end furthest from the vacuum coating machine, and a semiconductor cooling chip is installed inside the installation groove. A heat dissipation fin is provided at the other end of the semiconductor cooling chip. Two copper tubes are installed at one end of the semiconductor cooling chip. Rotary rods are rotatably connected to the top and bottom of the inner wall of the cooling box. Multiple stirring rods are fixed to the outer walls of the two rotating rods. A motor is installed on the top of one side of the cooling box, and the output shaft of the motor is fixedly connected to one end of one of the rotating rods. The stirring rods can stir the coolant, accelerating its cooling efficiency.

[0008] Preferably, a synchronous pulley is fixed to the other side of each of the two rotating rods, and the outer wall of the two synchronous pulleys is provided with a matching synchronous belt.

[0009] Preferably, the top of the cooling tank is provided with an inlet pipe communicating with its interior, and the bottom of one end of the cooling tank is provided with a drain pipe.

[0010] Preferably, the cooling mechanism includes two insulation plates, which are arc-shaped to form a cylinder, and the inner walls of the two insulation plates are equipped with serpentine coils.

[0011] Preferably, a water pump is installed at the bottom of one end of the cooling tank. The inlet of the water pump is connected to and communicates with the interior of the cooling tank through a conduit. The outlet of the water pump is connected to a connecting pipe through a conduit. One end of each of the two serpentine coils is connected to a connecting outlet pipe. The other end of each of the two serpentine coils is connected to a connecting liquid delivery pipe. The other end of each of the two outlet pipes is connected to and communicates with one end of the connecting pipe. The other end of each of the two liquid delivery pipes is connected to the top of the cooling tank and communicates with its interior.

[0012] Preferably, a connecting plate is fixed to the side of each of the two insulation boards that are close to each other. Both sides of the connecting plate have communicating holes, and a threaded rod is inserted through the hole. The other end of the threaded rod is provided with a matching nut. The insulation board can be removed by means of the threaded rod and nut, which facilitates the disassembly of the serpentine coil.

[0013] Preferably, the bottom plate has two communicating limiting holes at both ends of its top, and the bottom of each of the two insulation boards has two limiting rods fixed thereon, and the limiting rods are adapted to the limiting holes.

[0014] The beneficial effects of this utility model are as follows:

[0015] 1. Due to the adoption of a rapid cooling mechanism, the coolant is initially cooled by a semiconductor refrigeration chip and copper tubes. Then, the rotation of the stirring rod by the rotating rod ensures that the coolant is fully and evenly in contact with the copper tubes and semiconductor refrigeration chip, thereby achieving rapid cooling of the coolant. This improves the cooling efficiency of the vacuum coating machine, enhances heat exchange efficiency, reduces cooling time, and is highly practical.

[0016] 2. Due to the use of insulation boards and connecting plates, the two insulation boards can be quickly installed and removed through the cooperation of threaded rods and nuts, and the cold air generated by the serpentine coil is insulated. This achieves the effect of quick disassembly and installation of the serpentine coil, which is simple to operate and convenient to use. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of a cooling structure for a vacuum coating machine proposed in this utility model;

[0018] Figure 2This is a partial structural diagram of the rapid cooling mechanism of a vacuum coating machine cooling structure proposed in this utility model;

[0019] Figure 3 This is a partial structural diagram of the other side of the cooling box of a vacuum coating machine cooling structure proposed in this utility model;

[0020] Figure 4 This is a partial structural diagram of the cooling mechanism of a vacuum coating machine cooling structure proposed in this utility model;

[0021] Figure 5 This is a partial structural diagram of the insulation board of a vacuum coating machine cooling structure proposed in this utility model.

[0022] In the diagram: 1. Vacuum coating machine; 101. Base plate; 102. Limiting hole; 2. Cooling box; 201. Drain pipe; 202. Inlet pipe; 203. Semiconductor cooling chip; 204. Copper pipe; 205. Rotating rod; 206. Stirring rod; 207. Motor; 208. Heat dissipation fins; 209. Synchronous pulley; 210. Synchronous belt; 3. Insulation plate; 301. Connecting plate; 302. Threaded rod; 303. Nut; 304. Limiting rod; 305. Snake coil; 4. Water pump; 401. Diverter pipe; 402. Water outlet pipe; 403. Liquid delivery pipe. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0024] Reference Figure 1-5 A cooling structure for a vacuum coating machine includes a vacuum coating machine 1, a base plate 101 fixed to the bottom of the vacuum coating machine 1, a cooling mechanism for cooling the vacuum coating machine 1 on the outside, and a rapid cooling mechanism for circulating and accelerating the cooling of the coolant at one end of the vacuum coating machine 1.

[0025] The rapid cooling mechanism includes a cooling box 2. An installation groove is provided on the outer wall of the end of the cooling box 2 furthest from the vacuum coating machine 1, and a semiconductor cooling chip 203 is installed inside the installation groove. A heat dissipation fin 208 is provided on the other end of the semiconductor cooling chip 203. The semiconductor cooling chip 203 is located inside the cooling box 2. Two copper pipes 204 are installed on one end of the semiconductor cooling chip 203, which can quickly transfer the cooled temperature of the semiconductor cooling chip 203 into the coolant. Rotary rods 205 are rotatably connected to the top and bottom of the inner wall of the cooling box 2. Multiple stirring rods 206 are fixed to the outer walls of the two rotating rods 205, which can stir the coolant and accelerate its cooling efficiency. A motor 207 is installed on the top of one side of the cooling box 2, and the output shaft of the motor 207 is fixedly connected to one end of one of the rotating rods 205.

[0026] In this utility model, a synchronous wheel 209 is fixed on the other side of each of the two rotating rods 205, and a matching synchronous belt 210 is provided on the outer wall of the two synchronous wheels 209.

[0027] In this utility model, the top of the cooling box 2 is provided with an inlet pipe 202 that communicates with its interior. Coolant can be poured into the interior of the cooling box 2 through the inlet pipe 202. A drain pipe 201 is provided at the bottom of one end of the cooling box 2.

[0028] In this utility model, the cooling mechanism includes two insulation plates 3, and the two insulation plates 3 are arc-shaped to form a cylindrical shape. The inner walls of the two insulation plates 3 are each equipped with a serpentine coil 305.

[0029] In this utility model, a water pump 4 is installed at the bottom of one end of the cooling box 2. The water inlet of the water pump 4 is connected to and communicates with the interior of the cooling box 2 through a conduit. The water outlet of the water pump 4 is connected to a connecting pipe 401 through a conduit. One end of each of the two serpentine coils 305 is connected to a connecting water outlet pipe 402. The other end of each of the two serpentine coils 305 is connected to a connecting liquid delivery pipe 403. The other end of each of the two water outlet pipes 402 is connected to and communicates with one end of the connecting pipe 401. The other end of each of the two liquid delivery pipes 403 is connected to the top of the cooling box 2 and communicates with its interior.

[0030] In this utility model, a connecting plate 301 is fixed on the side of each of the two insulation boards 3 that are close to each other. The connecting plate 301 has a through hole on both sides, and a threaded rod 302 is inserted through the hole. The other end of the threaded rod 302 is provided with a matching nut 303. The insulation board 3 can be removed through the threaded rod 302 and the nut 303, which facilitates the disassembly of the serpentine coil 305.

[0031] In this utility model, two interconnected limiting holes 102 are provided at both ends of the top of the base plate 101, and two limiting rods 304 are fixed at the bottom of the two insulation plates 3, and the limiting rods 304 are adapted to the limiting holes 102.

[0032] Working principle: In use, firstly, insert the two limiting rods 304 at the bottom of the two insulation plates 3 into the limiting holes 102. At this time, the two insulation plates 3 will form a circle and surround the outside of the vacuum coating machine 1. Then, the threaded rod 302 passes through the hole between the two connecting plates 301, and the threaded rod 302 is engaged by the nut 303, thereby realizing the quick installation and disassembly of the two insulation plates 3. Then, one end of the two serpentine coils 305 is connected to one end of the water outlet pipe 402 through the connector, and the other end of the serpentine coils 305 is connected to one end of the liquid delivery pipe 403 through the connector. Then, the coolant is poured into the interior of the cooling tank 2 through the liquid inlet pipe 202. Then, the coolant inside the cooling tank 2 is cooled by the semiconductor cooling chip 203 and conducted through the copper pipe 204. Then, the motor 207 is started, which drives one of the rotating rods 205 to rotate. The rotating rod 205 drives one of the synchronous pulleys 209. When the synchronous pulley 209 rotates, it drives another synchronous pulley 209 to rotate via the synchronous belt 210. At this time, the two rotating rods 205 will rotate synchronously, which will drive the stirring rod 206 to rotate and stir the coolant inside the cooling tank 2, so that the coolant can fully contact the copper pipe 204 and the semiconductor cooling chip 203, thereby accelerating the cooling effect of the coolant. Then, the coolant is drawn out by the water pump 4 and delivered to the diversion pipe 401. Then, it is diverted from the diversion pipe 401 into the two outlet pipes 402. The outlet pipes 402 deliver the coolant to the serpentine coil 305, where it circulates and cools the vacuum coating machine 1. The insulation plate 3 can keep the temperature of the coolant and prevent the cold air from escaping quickly. Then, it is output through the other end of the serpentine coil 305 and flows into the interior of the cooling tank 2 through the liquid delivery pipe 403, thus repeating the cycle and achieving the effect of rapid cooling of the vacuum coating machine 1.

[0033] It should be noted that the device structure and accompanying drawings of this utility model mainly describe the principle of this utility model. In terms of the technical aspects of this design principle, the setting of the power mechanism, power supply system and control system of the device is not fully described. However, under the premise that those skilled in the art understand the principle of the above utility model, the specific details of its power mechanism, power supply system and control system can be clearly understood. The control method in the application document is automatic control through a controller. The control circuit of the controller can be implemented by those skilled in the art through simple programming.

[0034] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A cooling structure of a vacuum coating machine, comprising a vacuum coating machine (1), characterized in that, The bottom of the vacuum coating machine (1) is fixed with a bottom plate (101), the outside of the vacuum coating machine (1) is provided with a cooling mechanism for cooling, and one end of the vacuum coating machine (1) is provided with a rapid cooling mechanism for circulating and accelerating the cooling of the cooling liquid. The rapid cooling mechanism comprises a cooling box (2), the outer wall of one end of the cooling box (2) is provided with a mounting groove, and the inside of the mounting groove is provided with a semiconductor refrigerating fin (203), the other end of the semiconductor refrigerating fin (203) is provided with a heat dissipation fin (208), one end of the semiconductor refrigerating fin (203) is provided with two copper pipes (204), and the inner wall top and bottom of the cooling box (2) are rotatably connected with rotating rods (205), the outer wall of the two rotating rods (205) is fixedly connected with a plurality of stirring rods (206), and one side top of the cooling box (2) is provided with a motor (207).

2. The vacuum coating machine cooling structure according to claim 1, characterized in that, The other side of the two rotating rods (205) is fixedly connected with synchronous wheels (209), and the outer wall of the two synchronous wheels (209) is provided with a matched synchronous belt (210).

3. The vacuum coater cooling structure according to claim 1, wherein, The top of the cooling box (2) is provided with a liquid inlet pipe (202) communicating with the inside of the cooling box (2), and the bottom of one end of the cooling box (2) is provided with a liquid outlet pipe (201).

4. The vacuum coater cooling structure according to claim 1, wherein, The cooling mechanism comprises two heat preservation plates (3), and the two heat preservation plates (3) are arc-shaped to form a cylindrical shape, and the inner wall of the two heat preservation plates (3) is provided with a serpentine coil pipe (305).

5. The vacuum coating machine cooling structure according to claim 4, characterized in that, One end of the cooling box (2) is provided with a water pump (4), the water inlet end of the water pump (4) is connected with the inside of the cooling box (2) through a pipeline, the water outlet end of the water pump (4) is connected with a communicating shunt pipe (401) through a pipeline, one end of the two serpentine coil pipes (305) is connected with a communicating water outlet pipe (402), the other end of the two serpentine coil pipes (305) is connected with a communicating liquid feeding pipe (403), the other end of the two water outlet pipes (402) is connected with one end of the shunt pipe (401) and communicates with each other, and the other end of the two liquid feeding pipes (403) is connected with the top of the cooling box (2) and communicates with the inside of the cooling box (2).

6. The vacuum coater cooling structure according to claim 4, wherein, One side of the two heat preservation plates (3) close to each other is fixedly connected with a connecting plate (301), the two sides of the connecting plate (301) are provided with communicating holes, and a threaded rod (302) penetrates through the holes, and the other end of the threaded rod (302) is provided with a matched nut (303).

7. The vacuum coater cooling structure according to claim 6, wherein, The top of the bottom plate (101) is provided with two communicating limiting holes (102), and the bottom of the two heat preservation plates (3) is fixedly connected with two limiting rods (304), and the limiting rods (304) are matched with the limiting holes (102).

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