Gasification transmission device for film coating

Abstract

The utility model provides a gasification transmission device for coating, which comprises a transmission device, an inner container is formed in the transmission device, a heating component is arranged on the transmission device, an input channel and an output channel are formed at the transmission device, the heating component is used for heating the inner container, the input channel and the output channel, and the input channel is communicated with the output channel. The output end of the input channel and the input end of the output channel are communicated with the inner container, and gasified solid materials in the inner container are output through the input channel and the output channel. The input channel, the output channel and the inner container are kept in a constant-temperature environment required by a process by heating through the heating piece on the inner container, so that the solid material placed in the inner container can be gasified, the gasified material cannot be condensed in the transmission channel, the channel blockage is effectively prevented, and the material accumulation is avoided.

Description

Technical Field

[0001] This utility model relates to the field of heating device technology, specifically to a gasification transmission device for coating. Background Technology

[0002] Solid materials are heated to vaporize. However, during the vaporization process, uneven ambient temperature leads to poor vaporization. Furthermore, after vaporization, the solid material is prone to re-condensation upon cooling in the output channel, causing blockage. Utility Model Content

[0003] This utility model addresses one of the problems existing in the prior art to a certain extent. Therefore, one objective of this utility model is to provide a gasification transmission device for coating, which effectively prevents channel blockage and avoids material accumulation.

[0004] The above objective is achieved through the following technical solution:

[0005] A vaporization transfer device for coating includes a transfer device, an inner liner formed within the transfer device, a heating component provided on the transfer device, and an input channel and an output channel formed at the transfer device. The heating component is used to heat the inner liner, the input channel, and the output channel. The output end of the input channel and the input end of the output channel are respectively connected to the inner liner. The vaporized solid material in the inner liner is output through the input channel and the output channel.

[0006] As a further improvement of this utility model, the inner liner has an upward opening, and the transmission device includes a cover that covers the inner liner to close the opening of the inner liner.

[0007] As a further improvement of this utility model, a heat insulation plate is provided on the shell cover to block the heat from being transmitted out of the inner liner.

[0008] As a further improvement of this utility model, a cooling water flow channel is provided on the shell cover to reduce the temperature on the shell cover through the cooling water flow channel.

[0009] As a further improvement of this utility model, a heat insulation cavity is provided in the transmission device, and the heat insulation cavity is filled with heat insulation cotton.

[0010] As a further improvement of this utility model, a first heating element is provided at the bottom of the transmission device, a second heating element is provided at the top of the transmission device, and a third heating element is provided on the outer wall of the inner liner.

[0011] As a further improvement of this utility model, the first heating element is a heating wire, the second heating element is a heating wire, and the third heating element is a heating strip.

[0012] As a further improvement of this utility model, the inner liner is used to place the feeding tank, and a placement groove is formed by a downward indentation at the bottom of the inner liner. The placement groove is used to limit the placement position of the feeding tank in the inner liner.

[0013] Compared with the prior art, the present invention has at least the following beneficial effects:

[0014] 1. This utility model proposes a vaporization transmission device for coating. By heating the input and output channels through the heating component, the blockage of the input and output channels can be prevented, and the vaporized solid material can be prevented from solidifying upon cooling, thus avoiding channel blockage. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of a vaporization transport device for coating in one embodiment;

[0016] Figure 2 This is a cross-sectional view of a vaporization transport device for coating in one embodiment. Detailed Implementation

[0017] The following embodiments illustrate the present invention, but the present invention is not limited to these embodiments. Modifications to the specific implementation of the present invention or equivalent substitutions for some technical features, without departing from the spirit of the present invention, should all be covered within the scope of the technical solution claimed by the present invention.

[0018] like Figure 1-2 A heating device includes a transmission device 1, an inner liner 2 formed within the transmission device 1, a heating component provided on the transmission device 1, and an input channel 4 and an output channel 5 formed at the transmission device 1. The heating component is used to heat the inner liner 2, the input channel 4, and the output channel 5. The output end of the input channel 4 and the input end of the output channel 5 are respectively connected to the inner liner 2, and the vaporized solid material in the inner liner 2 is output through the input channel 4 and the output channel 5.

[0019] This invention proposes a heating device that heats the inner liner 2, the input channel 4, and the output channel 5 using a heating component to maintain the input channel 4, the output channel 5, and the inner liner 2 in a constant temperature environment required by the process. A feeding tank is placed in the inner liner, and solid materials that need to be heated and vaporized are placed into the feeding tank. The solid materials are vaporized by heating with the heating component. Inert gas is introduced into the inner liner through the input channel 4. The inert gas and the vaporized solid materials can be output through the output channel, achieving the effect of vaporizing particulate materials. Furthermore, the heating effect of the heating component on the input and output channels can prevent blockage of the input and output channels and avoid the vaporized solid materials from solidifying upon cooling, thus preventing channel blockage.

[0020] The inner cavity 3 has an upward opening, and the transmission device includes a cover 11, which covers the housing and closes the opening of the inner cavity 3.

[0021] In this embodiment, the cover 11 has a handle, which can be used to pick up and put down the cover 11.

[0022] A heat insulation plate 111 is provided on the shell cover 11 to block the heat from escaping from the inner liner. The heat insulation plate 111 is located in the middle of the shell cover 11 and at the corresponding position of the upward opening of the inner liner 2. It can effectively prevent burns caused by excessive heat when touching the shell cover 11 of the outer shell 1.

[0023] A cooling water flow channel 112 is provided on the shell cover 11 to reduce the temperature of the shell cover. The cooling water flow channel 112 is arranged around the heat insulation plate 111. The cooling water flow channel 112 cools the shell cover 11, preventing the shell cover 11 from being at a high temperature.

[0024] In this embodiment, the cooling water flow channel 112 includes an inlet and an outlet, and cooling water can be introduced through an external water pipe.

[0025] A heat insulation cavity 6 is also formed within the transmission device, and this cavity is filled with insulating cotton. The heat insulation cavity 6, located between the inner liner and the outer shell of the heat insulation device, prevents the high temperature of the inner liner 2 from being directly conducted to the outer shell, and also insulates the temperature of the inner liner, preventing heat loss. This avoids burns from accidental contact with the outer shell of the transmission device. Furthermore, in this embodiment, the insulating cotton filling or placement within the heat insulation cavity 6 effectively maintains the inner liner 2 at a high temperature.

[0026] A first heating element is provided at the bottom of the transmission device, a second heating element is provided at the top of the transmission device, and a third heating element is provided on the outer wall of the inner liner.

[0027] In this embodiment, the first heating element is a heating wire, the second heating element is a heating wire, and the third heating element is a heating strip.

[0028] In this embodiment, the inner liner is used to place the feeding tank, and a placement groove is formed by a downward indentation at the bottom of the inner liner. The placement groove is used to engage and position with the feeding tank.

[0029] The inner liner can be heated by the first, second, and third heating elements. Heating elements are installed around the inner liner to ensure heating effect and maintain a constant temperature environment required by the process, avoiding situations where the temperature reaches the appropriate level in some areas while other areas do not.

[0030] The inner liner is used to place the feed tank. A placement groove is formed by a downward indentation at the bottom of the inner liner. The placement groove is used to restrict the placement position of the feed tank in the inner liner.

[0031] The feeding tank is placed in the inner liner 3, and the solid material to be vaporized is placed in the feeding tank. The heating component heats the inner liner 3 to maintain the temperature at 200-300℃. The temperature of the inner liner 2 is maintained at 200-300℃, which allows the solid material in the feeding tank to be effectively vaporized.

[0032] Inert gas, such as argon, is introduced into the inner liner 3 through the input channel. The argon gas then carries the vaporized solid material out through the output channel and into the vacuum chamber 9.

[0033] Both the input channel and the output channel 5 are covered with heating elements to prevent the vaporized solid material from re-condensing into a solid state due to a drop in ambient temperature, which could lead to pipe blockage.

[0034] In this embodiment, the solid material to be vaporized can be tantalum pentachloride.

[0035] In this embodiment, the feeding tank is made of graphite material, which allows the material inside the feeding tank to be heated evenly.

[0036] The above preferred embodiments should be regarded as illustrative examples of the embodiments of the present application. Any technical deductions, substitutions, improvements, etc. that are similar to or based on the present application should be considered within the scope of protection of this patent.

Claims

1. A gasification and transport device for coating, characterized by, The transmission device comprises a container formed therein, a heating assembly arranged on the transmission device, and an input channel and an output channel formed at the transmission device, the heating assembly being used for heating the container, the input channel and the output channel, the output end of the input channel and the input end of the output channel being respectively communicated with the container, and the container being used for outputting the solid material gasified therein through the input channel and the output channel.

2. The vaporization and delivery device for coating according to claim 1, wherein The container has an upward opening, and the transmission device comprises a cover which is arranged on the container to close the opening of the container.

3. The vaporization and delivery device for coating according to claim 2, wherein A heat insulation plate is arranged on the cover to block the heat in the container from being transmitted outwards.

4. The vaporization and delivery device for coating according to claim 2, wherein A cooling water flow channel is arranged on the cover to reduce the temperature on the cover through the cooling water flow channel.

5. The vaporization and delivery device for coating according to claim 1, wherein A heat insulation cavity is further arranged in the transmission device, and the heat insulation cavity is filled with heat preservation cotton.

6. The vaporization and delivery device for coating according to claim 1, wherein A first heating element is arranged at the bottom of the transmission device, a second heating element is arranged at the top of the transmission device, and a third heating element is arranged on the outer wall of the container.

7. The vaporization and delivery device for coating according to claim 6, wherein The first heating element is a heating wire, the second heating element is a heating wire, and the third heating element is a heating belt.

8. The vaporization and delivery device for coating according to claim 1, wherein The container is used for placing a feeding tank, a placing groove is formed at the bottom of the container by being recessed downwards, and the placing groove is used for limiting the placement position of the feeding tank in the container.

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