Silicon wafer carrying basket

Abstract

The utility model discloses a silicon wafer carrying basket, and relates to the field of fire fighting equipment, the silicon wafer carrying basket comprises two side plates, a first wafer carrying plate and a second wafer carrying plate, a plurality of fixing rods are fixedly connected between the two side plates, and two ends of the first wafer carrying plate are fixedly connected with the side walls of one sides of the two side plates respectively; through cooperative arrangement of the through groove, the sliding block, the threaded rod and other structures, when the device is used, the two threaded pipes are rotated at the same time through the linkage assembly, the threaded rod is made to move in the threaded pipes, the sliding block is pushed to move in the through groove, the sliding block drives the second slide glass plate to move, and the second slide glass plate is driven to move. The distance between the second slide glass plate and the first slide glass plate is adjusted, so that silicon wafers of different specifications can be conveniently borne, and the problem that when the silicon wafers of different specifications are borne, screws need to be detached, the slide glass plate bracket is mounted through different mounting holes in the supporting plate, and the position of the slide glass plate bracket needs to be adjusted, so that the working efficiency is reduced is solved as much as possible.

Description

Technical Field

[0001] This application relates to the field of silicon wafer carriers, and more particularly to a silicon wafer carrier basket. Background Technology

[0002] A silicon wafer is a thin sheet made of monocrystalline or polycrystalline silicon, possessing a basically complete lattice structure, and is an excellent semiconductor material. Silicon wafers are mainly used in the manufacture of semiconductor devices, integrated circuits, solar cells, etc. Silicon wafer carrier baskets are tools used to transport and support silicon wafers during the manufacturing process of solar cells.

[0003] Utility model patent CN203707096U discloses a special wafer carrier basket for handling silicon wafers, which includes two side support plates, a support plate bracket fixed on the two side support plates, a wafer carrier bracket, and two wafer carrier plates, each composed of one, two, or more wafer carrier plates; the inner surface of each wafer carrier plate has silicon wafer clamping grooves evenly distributed; bolt holes are opened on the frame of the wafer carrier plate, and countersunk holes are opened on the wafer carrier plates between the frame. The wafer carrier plates are fixed to the wafer carrier bracket by bolts, washers, and nuts; the bolts are located in the bolt holes on the frame and the countersunk holes on the wafer carrier plates; multiple pairs of preset wafer carrier bracket mounting holes are opened on the two side support plates, and the wafer carrier bracket can be fixed on the two side support plates according to the size requirements of the silicon wafers.

[0004] The aforementioned silicon wafer handling basket uses screws to fix the wafer carrier bracket to a support plate. When handling silicon wafers of different specifications, the screws need to be removed, and the wafer carrier bracket needs to be installed through different mounting holes on the support plate. Adjusting the position of the wafer carrier bracket reduces work efficiency. Utility Model Content

[0005] To address the aforementioned issues, this application provides a silicon wafer carrier basket.

[0006] The silicon wafer carrier basket provided in this application adopts the following technical solution:

[0007] A silicon wafer carrier basket includes two side plates, a first wafer carrier plate, and a second wafer carrier plate. Multiple fixing rods are fixedly connected between the two side plates. Both ends of the first wafer carrier plate are fixedly connected to one side wall of each of the two side plates. The two side plates are provided with a movable assembly for adjusting the position of the second wafer carrier plate. Each movable assembly includes two through slots respectively formed on one side wall of the side plate. A slider is slidably disposed within each through slot. Both ends of the second wafer carrier plate are fixedly connected to the sliders. One end of each side plate is rotatably connected to a threaded tube. A threaded rod is threadedly connected within the threaded tube. One end of each threaded rod passes through the side plate and is fixedly connected to the slider. The threaded tube is provided with a linkage assembly for simultaneously rotating both threaded tubes.

[0008] By adopting the above technical solution, during use, according to the different specifications of silicon wafers, two threaded tubes are rotated simultaneously by a linkage component. During the rotation of the threaded tubes, the threaded rod and the slider are fixedly connected and cannot rotate, allowing the threaded rod to move in the threaded tube, pushing the slider to move in the through slot. This causes the slider to move the second wafer carrier, adjusting the distance between the second wafer carrier and the first wafer carrier. This facilitates the support of silicon wafers of different specifications and minimizes the need to remove screws and install the wafer carrier bracket through different mounting holes on the support plate when supporting silicon wafers of different specifications, thus avoiding the problem of reduced work efficiency caused by adjusting the position of the wafer carrier bracket when supporting silicon wafers of different specifications.

[0009] Preferably, the linkage assembly includes two first sprockets respectively sleeved on the threaded tube, the first sprockets being fixedly connected to the threaded tube, and chains being installed on the two first sprockets.

[0010] By adopting the above technical solution, by rotating one of the threaded tubes, the first sprocket drives the chain to rotate, which can simultaneously rotate the other threaded tube, causing the threaded rod to simultaneously push the slider to move.

[0011] Preferably, a plurality of springs are fixedly connected to the side wall of the slider away from the threaded rod, and the end of the spring away from the slider is fixedly connected to the side wall of the through groove.

[0012] By adopting the above technical solution, the stability of the slider sliding in the through groove can be improved by using a spring.

[0013] Preferably, each spring is provided with a positioning rod, the two ends of which are fixedly connected to the side wall of the through groove, and the sliders are respectively sleeved on the positioning rods.

[0014] By adopting the above technical solution, the stability of the spring can be improved by using the positioning rod, preventing the spring from bending when compressed, which would lead to spring damage.

[0015] Preferably, a perforation is provided on one side wall of the side plate above the through groove.

[0016] By adopting the above technical solution, the perforation facilitates the extraction of the slide blue by personnel.

[0017] Preferably, a fixing plate is fixedly connected to one end of each of the two side plates. The fixing plate is located above the chain. A bolt is provided at the top of the fixing plate. The bolt threaded end passes through the fixing plate and is rotatably connected to a U-shaped frame. The bolt is threadedly connected to the fixing plate. A second sprocket for pressing the chain is rotatably connected inside the U-shaped frame.

[0018] By adopting the above technical solution, rotating the bolt causes the U-shaped frame to move downward, which allows the second sprocket to engage with the chain, adjusts the chain tension, and prevents the chain from detaching from the first sprocket.

[0019] Preferably, guide rods are fixedly connected to the upper surface of the U-shaped frame on both sides of the bolt, and the end of the guide rod away from the U-shaped frame passes through the fixing plate and forms a sliding arrangement.

[0020] By adopting the above technical solution, the guide rod can prevent the bolt from rotating and causing the U-shaped frame to rotate, which would make it difficult for the second sprocket to mesh with the chain.

[0021] In summary, this application includes at least one of the following beneficial technical effects:

[0022] 1. This application utilizes the cooperative arrangement of structures such as through slots, sliders, and threaded rods. During use, depending on the different specifications of the silicon wafers, two threaded tubes are rotated simultaneously via a linkage assembly. During the rotation of the threaded tubes, the threaded rod is fixedly connected to the slider and cannot rotate, allowing the threaded rod to move within the threaded tubes. This pushes the slider to move within the through slot, causing the slider to move the second wafer carrier. This adjusts the distance between the second and first wafer carriers, facilitating the support of silicon wafers of different specifications. This approach minimizes the need to remove screws and install the wafer carrier support through different mounting holes on the support plate when supporting silicon wafers of different specifications, thus reducing work efficiency.

[0023] 2. By rotating the bolt, the bolt pushes the U-shaped frame downward. The guide rod prevents the U-shaped frame from rotating when the bolt rotates, so that the second sprocket engages with the chain, adjusts the chain tension, and prevents the chain from disengaging from the first sprocket. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure of a silicon wafer carrier basket according to an embodiment of this application;

[0025] Figure 2 This is a schematic diagram illustrating the internal structure of the spring, as shown in the embodiments of this application.

[0026] Figure 3 The embodiments of this application mainly embody Figure 1 A schematic diagram of the enlarged structure of region A in the middle;

[0027] Figure 4 The embodiments of this application mainly embody Figure 1 A schematic diagram of the enlarged structure of region B in the middle.

[0028] Reference numerals: 1. Side plate; 2. First carrier plate; 3. Second carrier plate; 4. Through groove; 5. Slider; 6. Threaded tube; 7. Threaded rod; 8. Fixing rod; 9. First sprocket; 10. Chain; 11. Spring; 12. Positioning rod; 13. Perforation; 14. Fixing plate; 15. Bolt; 16. U-shaped frame; 17. Second sprocket; 18. Guide rod. Detailed Implementation

[0029] The following is in conjunction with the appendix Figures 1-4 This application will be described in further detail.

[0030] This application discloses a silicon wafer carrier basket.

[0031] Reference Figure 1 , Figure 2 and Figure 3 A silicon wafer carrier basket includes two side plates 1, a first wafer carrier 2 and a second wafer carrier 3. The first wafer carrier 2 and the second wafer carrier 3 are arranged in parallel. A plurality of fixing rods 8 are fixedly connected between the two side plates 1. The two ends of the first wafer carrier 2 are respectively fixedly connected to one side wall of the two side plates 1. The two side plates 1 are provided with a moving assembly for adjusting the position of the second wafer carrier 3. The moving assembly includes a through groove 4, a slider 5, a threaded tube 6 and a threaded rod 7.

[0032] Two through slots 4 are provided and are respectively opened on one side wall of the side plate 1. Two sliders 5 are provided and are respectively slidably disposed in the through slots 4. The two ends of the second carrier plate 3 are respectively fixedly connected to the sliders 5. Two threaded tubes 6 are provided and are respectively rotatably connected to one end of the side plate 1. Two threaded rods 7 are provided and are respectively threadedly connected to the threaded tubes 6. One end of the threaded rods 7 passes through the side plate 1 and is respectively fixedly connected to the sliders 5. The threaded tubes 6 are provided with a linkage component for making the two threaded tubes 6 rotate simultaneously.

[0033] Reference Figure 1 and Figure 3 The linkage component includes two first sprockets 9 respectively sleeved on the threaded tube 6. The first sprockets 9 are fixedly connected to the threaded tube 6. A chain 10 is installed on the two first sprockets 9. By rotating one of the threaded tubes 6, the first sprocket 9 drives the chain 10 to rotate, which can make the other threaded tube 6 rotate at the same time, so that the threaded rod 7 pushes the slider 5 to move at the same time.

[0034] Reference Figure 1 Multiple springs 11 are fixedly connected to the side wall of the slider 5 away from the threaded rod 7. The end of the spring 11 away from the slider 5 is fixedly connected to the side wall of the through groove 4. The springs 11 can improve the stability of the slider 5 sliding in the through groove 4.

[0035] Reference Figure 2Each spring 11 is equipped with a positioning rod 12. The two ends of the positioning rod 12 are fixedly connected to the side wall of the through groove 4. The sliders 5 are respectively sleeved on the positioning rod 12. The positioning rod 12 can improve the stability of the spring 11 and prevent the spring 11 from bending when squeezed, which would cause the spring 11 to be damaged.

[0036] Reference Figure 1 and Figure 2 A perforation 13 is provided on one side wall of the side plate 1 above the through groove 4, which facilitates the removal of the slide basket by personnel.

[0037] Reference Figure 1 and Figure 4 Two side plates 1 are fixedly connected to one end of a fixing plate 14. The fixing plate 14 is located above the chain 10. The top of the fixing plate 14 is provided with a bolt 15. The screw end of the bolt 15 passes through the fixing plate 14 and is rotatably connected to a U-shaped frame 16. The bolt 15 is threadedly connected to the fixing plate 14. A second sprocket 17 for pressing the chain 10 is rotatably connected inside the U-shaped frame 16. By rotating the bolt 15, the bolt 15 pushes the U-shaped frame 16 down, which can make the second sprocket 17 mesh with the chain 10, adjust the tension of the chain 10, and prevent the chain 10 from disengaging from the first sprocket 9.

[0038] Reference Figure 4 Guide rods 18 are fixedly connected to the upper surface of the U-shaped frame 16 on both sides of the bolt 15. The end of the guide rod 18 away from the U-shaped frame 16 passes through the fixed plate 14 and forms a sliding setting. The guide rod 18 can prevent the bolt 15 from rotating and causing the U-shaped frame 16 to rotate, which would make it difficult for the second sprocket 17 to mesh with the chain 10.

[0039] The implementation principle of a silicon wafer carrier basket according to this application is as follows: In use, depending on the different specifications of the silicon wafers, rotating one of the threaded tubes 6 causes the first sprocket 9 to drive the chain 10 to rotate, simultaneously rotating the other threaded tube 6. During rotation, the threaded rod 7 is fixedly connected to the slider 5 and cannot rotate, allowing the threaded rod 7 to move within the threaded tube 6, pushing the slider 5 to move within the through slot 4. This causes the slider 5 to move the second wafer carrier plate 3, adjusting the distance between the second wafer carrier plate 3 and the first wafer carrier plate 2 to facilitate the carrying of silicon wafers of different specifications. Simultaneously, by rotating bolt 15, the U-shaped frame 16 is pushed down. This, along with the guide rod 18, prevents the U-shaped frame 16 from rotating when bolt 15 rotates. This causes the second sprocket 17 to engage with the chain 10, pressing down on the chain 10 and adjusting its tension. This prevents the chain 10 from detaching from the first sprocket 9, thus minimizing the need to remove screws and install the wafer carrier bracket through different mounting holes on the support plate when supporting silicon wafers of different specifications, thereby reducing work efficiency.

[0040] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A silicon wafer slide basket, comprising two side plates (1), a first slide plate (2) and a second slide plate (3), a plurality of fixing rods (8) are fixedly connected between the two side plates (1), the first slide plate (2) is fixedly connected with one side wall of the two side plates (1) at both ends respectively, and a moving assembly for adjusting the position of the second slide plate (3) is arranged on the two side plates (1). The moving assembly comprises two through grooves (4) respectively formed in one side wall of the side plate (1), a sliding block (5) is slidingly arranged in the through groove (4), two ends of the second slide plate (3) are fixedly connected with the sliding block (5) respectively, a threaded pipe (6) is rotationally connected at one end of the side plate (1), a threaded rod (7) is threadedly connected in the threaded pipe (6), one end of the threaded rod (7) penetrates through the side plate (1) and is fixedly connected with the sliding block (5) respectively, and a linkage assembly for simultaneously rotating the two threaded pipes (6) is arranged on the threaded pipe (6).

2. A wafer boat according to claim 1, wherein: The linkage assembly comprises two first sprockets (9) which are sleeved on the threaded pipe (6) respectively, the first sprocket (9) is fixedly connected with the threaded pipe (6), and a chain (10) is arranged on the two first sprockets (9).

3. A wafer boat according to claim 2, wherein: A plurality of springs (11) are fixedly connected with the side wall of the sliding block (5) away from the threaded rod (7), and one end of the spring (11) away from the sliding block (5) is fixedly connected with the side wall of the through groove (4).

4. A wafer boat according to claim 3, wherein: A positioning rod (12) is arranged in the spring (11), the two ends of the positioning rod (12) are fixedly connected with the side wall of the through groove (4), and the sliding block (5) is sleeved on the positioning rod (12).

5. A wafer boat according to claim 4, wherein: A through hole (13) is formed in the side wall of the side plate (1) above the through groove (4).

6. A wafer boat according to claim 5, wherein: One end of the two side plates (1) is fixedly connected with a fixed plate (14), the fixed plate (14) is located above the chain (10), and a bolt (15) is arranged at the top end of the fixed plate (14).

7. A wafer boat according to claim 6, wherein: The screw end of the bolt (15) penetrates through the fixed plate (14) and is rotationally connected with a U-shaped frame (16), the bolt (15) is threadedly connected with the fixed plate (14), and a second sprocket (17) for pressing the chain (10) is rotationally connected in the U-shaped frame (16).

8. A wafer boat according to claim 7, wherein: Guide rods (18) are fixedly connected on the upper surface of the U-shaped frame (16) on both sides of the bolt (15), one end of the guide rod (18) away from the U-shaped frame (16) penetrates through the fixed plate (14) and is slidingly arranged.

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