Slow-pulling inclined driving device and cleaning machine

Abstract

The utility model provides a slow-pulling inclined driving device and a cleaning machine, which belong to the field of silicon wafer production and processing, and comprise a slow-pulling lifting frame, an inclined supporting seat, a lifting driving mechanism, a basket positioning and guiding unit and an inclined limiting assembly, the two longitudinal ends of the inclined supporting seat are pivotally mounted above the two ends of the flat frame of the slow-pulling lifting frame through an inclined rotating shaft assembly; the lifting driving mechanism adopts a non-belt transmission mode, and the driving end is connected to vertical frames at the two ends of the slow-pull lifting frame. And a plurality of flower basket positioning and guiding units are arranged on the inclined supporting seat. According to the movement mechanism integrating lifting and lateral deviation inclination, residual moisture on the surface of a cleaned silicon wafer is reduced, the drying effect is improved, the slow-pull inclined driving device is integrally driven by a motor lead screw, the problems of easy aging and slipping caused by belt driving are solved, an independent positioning and guiding unit is arranged corresponding to each material basket or basket, positioning and guiding are facilitated, and the drying efficiency is improved. And therefore, the integral silicon wafer perfectness ratio is improved, and the silicon wafer cleaning device is convenient to popularize and apply in the fields of silicon wafer cleaning and the like.

Description

Technical Field

[0001] This utility model belongs to the field of silicon wafer production and processing, specifically relating to a slow-pull inclined drive device and a cleaning machine. Background Technology

[0002] During silicon wafer fabrication, a large amount of water residue remains on the surface of the cleaned wafers. If they are directly subjected to the drying process, the temperature difference between the wafer and the process temperature is too large, resulting in a significant amount of residual water and low drying efficiency. Therefore, it is necessary to remove as much water as possible from the surface of the wafers before final drying. Thus, it is desirable to design a drive mechanism for a basket or material basket that can move up and down and tilt within the cleaning tank, thereby minimizing the amount of residual water on the wafers or allowing as many impurities as possible to be cleaned and removed.

[0003] Furthermore, in some existing basket or flower basket drive structures, belt drives are commonly used. However, silicon wafer cleaning is a high-temperature environment. In this environment, firstly, belts are prone to aging; secondly, belt drives are susceptible to slippage, leading to transmission lag. Considering the considerable weight of the flower basket, material basket, and silicon wafers, any slippage or sudden start-up could cause the flower basket or material basket to move abruptly, potentially damaging the internal silicon wafers. Therefore, a stable drive system needs to be designed.

[0004] Furthermore, in existing cleaning pull devices, multiple baskets are placed on the same basket support frame, but each basket or flower basket is not positioned. If the aforementioned transmission slippage or sudden start occurs, the baskets or flower baskets will collide, which will also lead to fragmentation. Utility Model Content

[0005] In order to overcome the shortcomings of the prior art, the purpose of this utility model is to provide a slow-pull inclined drive device and a cleaning machine, which can solve the above problems.

[0006] Design principles: The slow-pull device is designed with an integrated lifting and tilting motion mechanism to improve the cleaning effect; secondly, the entire slow-pull device is driven by a motor screw, avoiding the problems of easy aging and slippage of belt drive; finally, each basket or flower basket is equipped with an independent positioning guide unit on the slow-pull material basket support frame to facilitate positioning and guidance and avoid collisions between them.

[0007] A slow-pull inclined drive device includes a generally concave slow-pull lifting frame, an inclined support base, a lifting drive mechanism, a flower basket positioning guide unit, and an inclined limiting component; the longitudinal ends of the inclined support base are pivotally mounted to the upper ends of the flat frame of the slow-pull lifting frame via an inclined rotating shaft assembly; the lifting drive mechanism adopts a non-belt drive method and the drive end is connected to the vertical frames at both ends of the slow-pull lifting frame; multiple flower basket positioning guide units are provided on the inclined support base.

[0008] Optionally, the slow-pull lifting frame includes a lifting flat frame and a lifting vertical frame, with two lifting vertical frames vertically installed at both ends of the lifting flat frame.

[0009] Optionally, the tilting shaft assembly includes a tilting shaft, a shaft lifting flat frame end fixing component, a shaft tilting flat frame end fixing component, a shaft lifting flat support component, and a shaft tilting flat frame support component; the shaft lifting flat frame end fixing component and the shaft tilting flat frame end fixing component are correspondingly provided at both ends of the lifting flat frame and the tilting support base, the two ends of the tilting shaft pass through the shaft lifting flat frame end fixing component and the shaft tilting flat frame end fixing component, and the middle part of the tilting shaft is supported by a plurality of shaft lifting flat support components and shaft tilting flat frame support components.

[0010] Optionally, the lifting drive mechanism includes a motor reducer assembly, a first commutator, a horizontal drive shaft, a second commutator, a vertical drive shaft, a lifting screw assembly, an upper and lower transition fixing plate assembly, and a slow-pull sliding plate transition assembly. The output end of the motor reducer assembly is connected to the horizontal input end of the horizontal drive shaft and the lower end of a vertical drive shaft via the first commutator. The horizontal output end of the horizontal drive shaft is connected to the lower end of another vertical drive shaft via the second commutator. The upper and lower parts of each lifting screw assembly are supported and connected to the outer frame or the outer end of the cleaning tank via the upper and lower transition fixing plate assembly. A slow-pull sliding plate transition assembly driven by the lifting screw assembly is provided between the two upper and lower transition fixing plate assemblies. The slow-pull sliding plate transition assembly is connected to the lifting frame of the slow-pull lifting frame.

[0011] Optionally, the lifting drive mechanism further includes a slow-pull lifting guide assembly. Two sets of the slow-pull lifting guide assemblies are symmetrically arranged on both sides of the lifting screw assembly. The slow-pull lifting guide assembly adopts a guide bushing assembly to enhance the stability of the device's lifting.

[0012] Optionally, the flower basket positioning guide unit includes a slow-lift positioning fixing plate and a flower basket positioning plate with a positioning notch. The flower basket positioning plate is horizontally installed onto the frame of the inclined support seat through the slow-lift positioning fixing plate.

[0013] Optionally, the tilting limiting component includes a tilting frame flipping stop component and a vertical frame limiting adjustment stop component. The tilting frame flipping stop component includes an L-shaped upper stop plate component disposed at both ends of the frame on the same side of the tilting support base and a lower stop component extending outward from the longitudinal side bar on the other side. The vertical frame limiting adjustment stop component is disposed on the outside of the lifting vertical frame using a stop rod or stop plate structure, and includes an upper stop limiting adjustment seat and an angle adjusting screw component.

[0014] Optionally, a tilting drive mechanism is also provided between the slow-pull lifting frame and the tilting support seat to drive the tilting support seat to rotate and tilt relative to the slow-pull lifting frame.

[0015] Optionally, the slow-pull inclined drive device also includes multiple lifting sensing units. Each lifting sensing unit includes a sensing mounting rod, a sensor mounting base, and a position sensor. The upper and lower ends of the sensing mounting rod are respectively mounted on two upper and lower transition fixing plates. The position sensor is mounted on the sensing mounting rod through the sensor mounting base.

[0016] This utility model also provides a cleaning machine, including a cleaning tank, a slow-pull device and a drying tank, wherein the slow-pull device adopts the aforementioned slow-pull inclined drive device.

[0017] Compared with the prior art, the beneficial effects of this utility model are as follows: The integrated lifting and tilting motion mechanism of this application improves the cleaning effect. The slow pull inclined drive device is driven by a motor screw, which avoids the problems of easy aging and slippage of belt drive. Each material basket or flower basket is equipped with an independent positioning and guiding unit, which facilitates positioning and guidance, avoids collisions between them, improves the overall silicon wafer integrity rate, and facilitates its promotion and application in the field of silicon wafer cleaning. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the slow-pull inclined drive device of this utility model;

[0019] Figure 2 This is a schematic diagram of the lifting drive mechanism;

[0020] Figure 3 A partial structural schematic diagram of the slow-pull angled drive device;

[0021] Figure 4 A schematic diagram of the frame limit adjustment stop assembly;

[0022] Figure 5 This is a schematic diagram of the lifting sensing unit.

[0023] Figure 6 This is a schematic diagram of a cleaning machine.

[0024] In the picture,

[0025] 100. Slow-release lifting frame; 110. Lifting flat frame; 120. Lifting upright frame;

[0026] 200. Inclined support seat;

[0027] 300. Lifting drive mechanism; 310. Motor reducer assembly; 320. First commutator; 330. Horizontal drive shaft; 340. Second commutator; 350. Vertical drive shaft; 360. Lifting screw assembly; 361. Screw body; 362. Screw support end seat; 363. Screw nut; 364. Screw nut adapter plate; 370. Upper and lower adapter fixing plate assembly; 380. Slow-pull sliding plate adapter assembly; 390. Slow-pull lifting guide assembly; 391. Slow-pull guide shaft; 392. Optical shaft mounting end seat; 393. Guide bushing;

[0028] 400. Flower basket positioning guide unit; 410. Slow-lift positioning fixing plate; 420. Flower basket positioning plate; 421. Positioning notch;

[0029] 500. Tilt limit assembly; 510. Tilt frame flip stop assembly; 511. Upper stop plate; 512. Lower stop; 520. Vertical frame limit adjustment stop assembly; 521. Upper stop limit adjustment seat; 522. Angle adjustment screw;

[0030] 600. Tilting pivot assembly; 610. Tilting pivot; 620. Pivot lifting flat frame end fixing component; 630. Pivot tilting flat frame end fixing component; 640. Pivot lifting flat support component; 650. Pivot tilting flat frame support component;

[0031] 700. Lifting sensor unit; 710. Sensor mounting rod; 720. Sensor mounting base; 730. Position sensor;

[0032] 1000, Cleaning tank;

[0033] 2000, Slow-pull device;

[0034] 3000, Drying tank. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0036] Slow-pull angled drive device

[0037] A slow-pull slant drive device, see Figures 1-5It includes a concave-shaped slow-pull lifting frame 100, an inclined support seat 200, a lifting drive mechanism 300, a flower basket positioning guide unit 400, an inclined limit component 500, and an inclined rotating shaft component 600.

[0038] Arrangement: The longitudinal ends of the inclined support base 200 are pivotally mounted to the upper ends of the flat frame of the slow-pull lifting frame 100 via an inclined pivot assembly 600; the lifting drive mechanism 300 adopts a non-belt drive method and its drive end is connected to the vertical frames at both ends of the slow-pull lifting frame 100, thereby driving the slow-pull lifting frame 100 and the inclined support base 200 to lift as a whole; multiple basket positioning guide units 400 are provided on the inclined support base 200 for guiding and positioning the silicon wafer baskets of each support.

[0039] The slow-pull lifting frame 100 includes a lifting flat frame 110 and a lifting vertical frame 120, with the two lifting vertical frames 120 vertically installed at both ends of the lifting flat frame 110.

[0040] In a specific example, both the lifting flat frame 110 and the lifting vertical frame 120 can be constructed by splicing profiles. The profiles must be of a high-temperature and corrosion-resistant structure, such as stainless steel square tubing. Reinforcing ribs are added at the connection points to improve strength and stability. Specifically, the inclined support 200 adopts a flat frame structure.

[0041] The tilting shaft assembly 600 includes a tilting shaft 610, a shaft lifting flat frame end fixing member 620, a shaft tilting flat frame end fixing member 630, a shaft lifting flat support member 640, and a shaft tilting flat frame support member 650.

[0042] For details, see Figure 2 At the longitudinal ends of the lifting flat frame 110 and the inclined support seat 200, a rotating shaft lifting flat frame end fixing member 620 and a rotating shaft inclined flat frame end fixing member 630 are respectively provided. The two ends of the inclined rotating shaft 610 pass through the rotating shaft lifting flat frame end fixing member 620 and the rotating shaft inclined flat frame end fixing member 630. The middle part of the inclined rotating shaft 610 is supported by a plurality of rotating shaft lifting flat support members 640 and rotating shaft inclined flat frame support members 650.

[0043] In the illustrated example, a rotating shaft lifting flat frame end fixing member 620 is provided at the upper middle of each of the longitudinal ends of the lifting flat frame 110 of the slow-pull lifting frame 100, and a rotating shaft tilting flat frame end fixing member 630 is provided at the middle of each of the longitudinal ends of the flat frame structure of the tilting support base 200. Bearing seats are provided on the rotating shaft lifting flat frame end fixing members 620 to support the tilting rotating shaft 610. Bearing seats may or may not be provided on the rotating shaft tilting flat frame end fixing members 630. The rotating shaft lifting flat frame end fixing members 620 and tilting flat frame end fixing members 630 at the same end are arranged alternately and adjacently.

[0044] Similarly, multiple rotating shaft lifting support members 640 are longitudinally arranged in the middle of the bottom surface of the lifting flat frame 110, and correspondingly, multiple rotating shaft inclined flat frame support members 650 are longitudinally arranged in the middle of the top surface of the flat frame structure of the inclined support base 200. The number and structure of the rotating shaft inclined flat frame support members 650 are the same as those of the rotating shaft lifting flat support members 640.

[0045] The top of the lifting flat support 640 and the tilting flat frame support 650 of the rotating shaft is a bearing seat, a circular slot, or a semi-circular groove, used to support the tilting rotating shaft 610. When the top is a circular slot or a semi-circular groove, a slip ring or a semi-circular sliding plate is provided at the groove surface that abuts against the tilting rotating shaft 610. The slip ring or sliding plate is a wear-resistant and corrosion-resistant structure, such as a bronze slip ring / sliding plate, a ceramic slip ring / sliding plate, etc.

[0046] The tops of the two corresponding rotating shaft lifting flat support members 640 and rotating shaft tilting flat frame support members 650 are staggered and adjacent.

[0047] The lifting drive mechanism 300 includes a motor reducer assembly 310, a first commutator 320, a horizontal transmission shaft 330, a second commutator 340, a vertical transmission shaft 350, a lifting screw assembly 360, an upper and lower transition fixing plate assembly 370, and a slow-pull slide plate transition assembly 380.

[0048] Specifically, the output end of the motor reducer assembly 310 is connected to the horizontal input end of the horizontal drive shaft 330 and the lower end of a vertical drive shaft 350 via the first commutator 320. The horizontal output end of the horizontal drive shaft 330 is connected to the lower end of another vertical drive shaft 350 via the second commutator 340. The upper and lower parts of each lifting screw assembly 360 are connected to the outer frame or the outer end of the cleaning tank by the upper and lower transition fixing plate group 370. A slow-pull slide plate transition assembly 380 driven by the lifting screw assembly 360 is set between the two upper and lower transition fixing plate groups 370. The slow-pull slide plate transition assembly 380 is connected to the lifting frame 120 of the slow-pull lifting frame 100.

[0049] The two sets of vertical drive shafts 350, lifting screw assembly 360, upper and lower adapter fixing plate assembly 370, slow pull slide plate adapter assembly 380, and slow pull lifting guide assembly 390 are set on the output end of the two vertical drive shafts 350.

[0050] The lifting screw assembly 360 includes a screw body 361, a screw support end seat 362, a screw nut 363, and a screw nut adapter plate 364. The lower end of the screw body 361 is connected to the upper end of the vertical drive shaft 350 via a universal joint. The upper and lower parts of the screw body 361 are respectively supported and installed on the upper and lower adapter fixing plate assembly 370 via corresponding screw support end seats 362. The screw nut 363 is sleeved on the outer periphery of the screw body 361. The screw nut 363 is connected to the screw nut adapter plate 364, and the screw nut adapter plate 364 is connected to the slow-pull slide plate adapter assembly 380.

[0051] Furthermore, the lifting drive mechanism 300 also includes a slow-pull lifting guide assembly 390. Two sets of the slow-pull lifting guide assemblies 390 are symmetrically arranged on both sides of the lifting screw assembly 360. The slow-pull lifting guide assembly 390 adopts a guide bushing assembly to enhance the stability of the device's lifting.

[0052] Specifically, the slow-pull lifting guide assembly 390 includes a slow-pull guide shaft 391, optical axis mounting end seats 392, and a guide shaft sleeve 393. The upper and lower ends of the two optical axis mounting end seats 392 are fixed to the corresponding upper and lower transition fixing plate assemblies 370. The guide shaft sleeve 393 is fixed to the slow-pull slide plate transition assembly 380. The two ends of the slow-pull guide shaft 391 are fixed by the two optical axis mounting end seats 392, and the optical rod of the slow-pull guide shaft 391 is sleeved in the guide shaft sleeve 393. In a specific example, the guide shaft sleeve 393 adopts a linear bearing sleeve structure, but other sliding sleeve structures can also be used.

[0053] Furthermore, a drive mounting base is provided at the bottom of the lifting drive mechanism 300, which includes the motor reducer assembly 310, the first commutator 320, and the second commutator 340. The drive mounting base can be a flat plate structure or any other form.

[0054] The flower basket positioning guide unit 400 includes a slow-lift positioning fixing plate 410 and a flower basket positioning plate 420 with a positioning notch 421. The flower basket positioning plate 420 is horizontally installed on the frame of the inclined support seat 200 through the slow-lift positioning fixing plate 410.

[0055] Two sets of slow-lift positioning plates 410 and flower basket positioning plates 420 constitute a positioning guide mechanism for a flower basket, and the interval between the two slow-lift positioning plates 410 is adapted to the width of the flower basket.

[0056] Specifically, the flower basket positioning plate 420 is made of bent plate, and the flat plate part is fixedly connected to the flat frame of the inclined support base 200 together with the slow lifting positioning fixing plate 410 below by bolts.

[0057] The two flower basket positioning plates 420 of a positioning and guiding mechanism are arranged obliquely upward and outward to guide and position the flower baskets. The positioning notch 421 is opened on the bending plate.

[0058] In the illustrated example, three flower basket positioning guide units 400 are set side by side to support three silicon wafer flower baskets at the same time. However, depending on the actual design requirements, they can be set to two, four, five, etc.

[0059] The tilting limit assembly 500 includes a tilting frame flipping stop assembly 510 and a vertical frame limiting adjustment stop assembly 520. The tilting frame flipping stop assembly 510 includes an L-shaped upper stop plate 511 disposed at both ends of the frame on the same side of the tilting support 200 and a lower stop 512 extending outward from the longitudinal side bar on the other side. The vertical frame limiting adjustment stop assembly 520 is disposed on the outside of the frame of the lifting vertical frame 120 using a stop rod or stop plate structure, and includes an upper stop limiting adjustment seat 521 and an angle adjustment screw 522.

[0060] Not shown in the figure, a tilting drive mechanism is also provided between the slow-pull lifting frame 100 and the tilting support 200 to drive the tilting support 200 to rotate and tilt relative to the slow-pull lifting frame 100. The tilting drive mechanism can be a cylinder drive mechanism, a motor sprocket drive mechanism, or the like.

[0061] Furthermore, the slow-pull inclined drive device also includes multiple lifting sensing units 700, see [link / reference]. Figure 5 The lifting sensing unit 700 includes a sensing mounting rod 710, a sensor mounting base 720, and a position sensor 730. The upper and lower ends of the sensing mounting rod 710 are respectively mounted on two upper and lower transition fixing plate groups 370. The position sensor 730 is mounted on the sensing mounting rod 710 through the sensor mounting base 720.

[0062] Specifically, the sensing mounting rod 710 can be made of C-shaped groove profile, which facilitates the installation of the sensor mounting base 720. The sensor mounting base 720 can be made of angle iron or other plate components. The position sensor 730 can be a photoelectric switch, limit switch, touch sensor switch, etc., and its form is not limited.

[0063] The lifting and tilting principle of the device is to achieve the tilting posture through eccentric gravity.

[0064] cleaning machine

[0065] A cleaning machine, see Figure 6 It includes a cleaning tank 1000, a slow-pulling device 2000 and a drying tank 3000, wherein the slow-pulling device 2000 adopts the aforementioned slow-pulling oblique drive device.

[0066] This device can be used in cleaning machines during silicon wafer manufacturing. In silicon wafer cleaning, the silicon wafer basket needs to be lifted from the cleaning tank 1000 by the slow pull device 2000 and tilted to control water flow. Then, it enters the drying tank 3000 in the drying station for drying. The aforementioned slow pull tilt drive device tilts the silicon wafers as much as possible to remove surface water stains, which facilitates subsequent drying.

[0067] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A slow-pull inclined drive device, comprising a concave slow-pull lifting frame (100), an inclined support base (200), a lifting drive mechanism (300), a basket positioning guide unit (400), and an inclined limiting component (500); characterized in that: The longitudinal ends of the inclined support base (200) are pivotally mounted to the upper ends of the flat frame of the slow-pull lifting frame (100) via an inclined pivot assembly (600); the lifting drive mechanism (300) adopts a non-belt drive method and the drive end is connected to the vertical frame at both ends of the slow-pull lifting frame (100); multiple flower basket positioning guide units (400) are provided on the inclined support base (200).

2. The slow-pull inclined drive device according to claim 1, characterized in that: The slow-pull lifting frame (100) includes a lifting flat frame (110) and a lifting vertical frame (120), with the two lifting vertical frames (120) vertically installed at both ends of the lifting flat frame (110).

3. The slow-pull inclined drive device according to claim 2, characterized in that: The tilting shaft assembly (600) includes a tilting shaft (610), a shaft lifting flat frame end fixing member (620), a shaft tilting flat frame end fixing member (630), a shaft lifting flat support member (640), and a shaft tilting flat frame support member (650). The shaft lifting flat frame end fixing member (620) and the shaft tilting flat frame end fixing member (630) are respectively provided at the longitudinal ends of the lifting flat frame (110) and the tilting support seat (200). The two ends of the tilting shaft (610) pass through the shaft lifting flat frame end fixing member (620) and the shaft tilting flat frame end fixing member (630). The middle part of the tilting shaft (610) is supported by a plurality of shaft lifting flat support members (640) and shaft tilting flat frame support members (650).

4. The slow-pull inclined drive device according to claim 2, characterized in that: The lifting drive mechanism (300) includes a motor reducer assembly (310), a first commutator (320), a horizontal drive shaft (330), a second commutator (340), a vertical drive shaft (350), a lifting screw assembly (360), an upper and lower transition fixing plate assembly (370), and a slow-pull slide plate transition assembly (380). The output end of the motor reducer assembly (310) is connected to the horizontal input end of the horizontal drive shaft (330) and the lower end of a vertical drive shaft (350) via the first commutator (320). The horizontal output end of the shaft (330) is connected to the lower end of another vertical transmission shaft (350) through the second commutator (340); the upper and lower parts of each lifting screw assembly (360) are connected to the outer frame or the outer end of the cleaning tank through the upper and lower transition fixing plate group (370), and a slow pull slide plate transition assembly (380) driven by the lifting screw assembly (360) is set in the middle of the two upper and lower transition fixing plate groups (370), and the slow pull slide plate transition assembly (380) is connected to the lifting frame (120) of the slow pull lifting frame (100).

5. The slow-pull inclined drive device according to claim 4, characterized in that: The lifting drive mechanism (300) also includes a slow-pull lifting guide assembly (390). Two sets of slow-pull lifting guide assemblies (390) are symmetrically arranged on both sides of the lifting screw assembly (360). The slow-pull lifting guide assembly (390) adopts a guide bushing assembly to enhance the stability of the device's lifting.

6. The slow-pull inclined drive device according to claim 1, characterized in that: The flower basket positioning guide unit (400) includes a slow-lift positioning fixing plate (410) and a flower basket positioning plate (420) with a positioning notch (421). The flower basket positioning plate (420) is horizontally installed on the frame of the inclined support seat (200) through the slow-lift positioning fixing plate (410).

7. The slow-pull inclined drive device according to claim 1, characterized in that: The tilting limit assembly (500) includes a tilting frame flipping stop assembly (510) and a vertical frame limit adjustment stop assembly (520). The tilting frame flipping stop assembly (510) includes an L-shaped upper stop plate (511) disposed at both ends of the frame on the same side of the tilting support base (200) and a lower stop plate (512) extending outward from the longitudinal side bar on the other side. The vertical frame limit adjustment stop assembly (520) is disposed on the outside of the frame of the lifting vertical frame (120) using a stop rod or stop plate structure, and includes an upper stop limit adjustment seat (521) and an angle adjustment screw (522).

8. The slow-pull inclined drive device according to claim 1, characterized in that: An inclined drive mechanism is also provided between the slow-pull lifting frame (100) and the inclined support (200) to drive the inclined support (200) to rotate and tilt relative to the slow-pull lifting frame (100).

9. The slow-pull inclined drive device according to claim 4, characterized in that: The slow-pull inclined drive device also includes multiple lifting sensing units (700). Each lifting sensing unit (700) includes a sensing mounting rod (710), a sensor mounting base (720), and a position sensor (730). The upper and lower ends of the sensing mounting rod (710) are respectively mounted on two upper and lower transition fixing plate groups (370). The position sensor (730) is mounted on the sensing mounting rod (710) through the sensor mounting base (720).

10. A cleaning machine, characterized in that: The cleaning machine includes a cleaning tank (1000), a slow-pull device (2000), and a drying tank (3000), wherein the slow-pull device (2000) is the slow-pull inclined drive device according to any one of claims 1-9.

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