Semiconductor single crystal silicon rod equal-diameter length measuring device

Abstract

The utility model relates to the technical field of semiconductor single crystal silicon rod inspection, in particular to an equal-diameter length measuring device for a semiconductor single crystal silicon rod, which comprises a silicon rod body, a support frame, a correlation type laser sensor, a fixed frame, a fixed ring, a placing groove, a baffle plate, a fixed part and a movable part, the placing groove is fixedly connected with the supporting frame and located above the supporting frame, the fixing ring is arranged above the placing groove, the baffle is fixedly connected with the placing groove, the fixing component is arranged above the supporting frame, the moving component is arranged above the supporting frame, and the fixing component and the moving component are fixed through the supporting frame and the fixing frame. The silicon rod body is placed on the placing groove, the fixing part is controlled to drive the fixing ring to move so as to clamp and fix the silicon rod body, and then the moving part is controlled to drive the correlation type laser sensor to measure the silicon rod body, so that errors during measurement can be reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor single crystal silicon rod inspection technology, and in particular to a semiconductor single crystal silicon rod constant diameter length measuring device. Background Technology

[0002] Currently, measuring the equal diameter length of semiconductor silicon rods is a crucial step in ensuring the quality and performance of electronic components. Accurate equal diameter length ensures that the silicon rod meets product design specifications and affects the performance of the final semiconductor device. The equal diameter length of semiconductor silicon rods is often measured manually using a ruler, which is not very accurate and has large measurement errors. However, the semiconductor industry has high requirements for dimensional accuracy, and the manual ruler measurement method urgently needs to be improved.

[0003] To address the aforementioned issues, existing patent (CN215177544U) discloses a semiconductor single-crystal silicon rod constant diameter length measuring device. The X-axis moving module controls the through-beam laser sensor module to measure the length of the silicon rod, and the Y-axis moving module controls the through-beam laser sensor module to sense the highest point of the silicon rod in the vertical direction. This device can achieve high precision and accuracy, and is easy to develop and maintain.

[0004] However, in the aforementioned prior art, the equal diameter length measuring device for semiconductor single crystal silicon rods cannot fix the silicon rod, resulting in a large error during measurement. Utility Model Content

[0005] The purpose of this invention is to provide a semiconductor single crystal silicon rod constant diameter length measuring device, which aims to solve the technical problem that the existing semiconductor single crystal silicon rod constant diameter length measuring device cannot fix the silicon rod, resulting in large errors during measurement.

[0006] To achieve the above objectives, this utility model employs a semiconductor single-crystal silicon rod constant diameter length measuring device, comprising a silicon rod body, a support frame, a through-beam laser sensor, and a measuring component. The silicon rod body is disposed above the support frame, and the through-beam laser sensor is disposed above the support frame.

[0007] The measuring assembly includes a fixed frame, a fixed ring, a placement slot, a baffle, a fixing component, and a moving component. The fixed frame is fixedly connected to the support frame and located above the support frame. The placement slot is fixedly connected to the support frame and located above the support frame. The fixed ring is located above the placement slot. The baffle is fixedly connected to the placement slot and located on one side of the placement slot. The silicon rod is located above the placement slot. The fixing component is located above the support frame. The moving component is located above the support frame.

[0008] The fixing component includes a first positioning plate, a fixing threaded rod, a second positioning plate, a guide rod, and a drive unit. The first positioning plate is fixedly connected to the support frame and is located above the support frame. The fixing threaded rod is rotatably connected to the first positioning plate and passes through the placement groove, with the threads at both ends of the fixing threaded rod having opposite directions. The second positioning plate is fixedly connected to the support frame and is located above the support frame. The guide rod is fixedly connected to the second positioning plate and passes through the placement groove. The drive unit is located on both sides of the placement groove.

[0009] The drive unit includes a movable plate and a connecting rod. The movable plate is threadedly connected to the fixed threaded rod and wraps around the fixed threaded rod and the guide rod. The connecting rod is fixedly connected to the movable plate and is located above the movable plate. The connecting rod is detachably connected to the fixed ring.

[0010] The movable component includes a movable threaded rod and a fixed rod. The movable threaded rod is rotatably connected to the fixed frame and is located inside the fixed frame. The fixed rod is detachably connected to the fixed frame and is located outside the fixed frame.

[0011] The movable component further includes a movable block, which is threadedly connected to the movable threaded rod and located above the fixed frame, and the movable block is slidably connected to the fixed frame.

[0012] This utility model discloses a semiconductor single crystal silicon rod constant diameter length measuring device. The device uses a support frame and a fixing frame to fix the fixing component and the moving component. The silicon rod body is placed on the placement groove. The fixing component can be controlled to drive the fixing ring to move, thereby clamping and fixing the silicon rod body. Then, the moving component is controlled to drive the through-beam laser sensor to measure the silicon rod body, thereby reducing the measurement error. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the structure of the semiconductor single crystal silicon rod constant diameter length measuring device of this utility model.

[0015] Figure 2 This is a front view of the semiconductor single crystal silicon rod constant diameter length measuring device of this utility model.

[0016] Figure 3 This is a side view of the semiconductor single crystal silicon rod constant diameter length measuring device of this utility model.

[0017] Figure 4 This is the utility model Figure 3 A cross-sectional view of the AA line structure.

[0018] 101-Silicon rod body, 102-Support frame, 103-Through-beam laser sensor, 104-Fixed frame, 105-Fixed ring, 106-Placement slot, 107-Baffle, 108-First positioning plate, 109-Fixed threaded rod, 110-Second positioning plate, 111-Guide rod, 112-Moving plate, 113-Connecting rod, 114-Moving threaded rod, 115-Fixed rod, 116-Moving block, 117-Fixed motor, 118-Moving motor, 119-Cylinder. Detailed Implementation

[0019] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0020] Please see Figures 1-4 ,in Figure 1 This is a schematic diagram of the structure of the semiconductor single crystal silicon rod constant diameter length measuring device of this utility model. Figure 2 This is a front view of the semiconductor single-crystal silicon rod constant diameter length measuring device of this utility model. Figure 3 This is a side view of the semiconductor single-crystal silicon rod constant diameter length measuring device of this utility model. Figure 4 This is the utility model Figure 3 A cross-sectional view of the AA line structure.

[0021] This utility model provides a semiconductor single crystal silicon rod constant diameter length measuring device, including a silicon rod body 101, a support frame 102, a through-beam laser sensor 103 and a measuring component. The silicon rod body 101 is disposed above the support frame 102, and the through-beam laser sensor 103 is disposed above the support frame 102.

[0022] The measuring assembly includes a fixed frame 104, a fixing ring 105, a placement groove 106, a baffle 107, a fixing component, and a moving component. The fixed frame 104 is fixedly connected to the support frame 102 and is located above the support frame 102. The placement groove 106 is fixedly connected to the support frame 102 and is located above the support frame 102. The fixing ring 105 is located above the placement groove 106. The baffle 107 is fixedly connected to the placement groove 106 and is located on one side of the placement groove 106. The silicon rod is located above the placement groove 106. The fixing component is located above the support frame 102, and the moving component is located above the support frame 102.

[0023] In this embodiment, the fixed component and the moving component are fixed by the support frame 102 and the fixed frame 104, and the silicon rod body 101 is placed on the placement groove 106. The fixed component can drive the fixed ring 105 to move, thereby clamping and fixing the silicon rod body 101. Then, the moving component is controlled to drive the through-beam laser sensor 103 to measure the silicon rod body 101, thereby reducing measurement errors. The operator sets the measurement parameters, such as axial movement speed and sampling interval, according to the actual measurement requirements through the control panel. After setting, the moving motor 118 starts according to the set parameters, driving the moving threaded rod 114 to rotate. The rotation of the moving threaded rod 114 drives the moving block 116, which is threadedly connected to it, to move along the silicon rod axis with an accuracy of 0.1 mm / step on the linear slide rail of the fixed frame 104. This allows the through-beam laser sensor 103 mounted on the moving block 116 to scan and measure along the silicon rod axis. During the scanning process, the cylinder 119 automatically adjusts the height of the sensor according to the pre-input silicon rod diameter parameters or the silicon rod surface contour data monitored in real time by the sensor, ensuring that the laser beam is always perpendicularly incident on the silicon rod surface to obtain the most accurate measurement data. The data acquisition module built into the through-beam laser sensor 103 records the diameter value of each point in real time according to the set sampling interval, and transmits this data quickly to the PLC or industrial control computer through the RS485 interface. After receiving the data, the PLC or industrial control computer processes the data using the built-in professional algorithm, automatically generates the constant diameter length curve, and intuitively displays the diameter change at different positions of the silicon rod. At the same time, it calculates the maximum, minimum and average values ​​of the constant diameter length of the silicon rod, providing accurate data for evaluating the quality of the silicon rod.

[0024] Further, the fixing component includes a first positioning plate 108, a fixing threaded rod 109, a second positioning plate 110, a guide rod 111, and a driving unit. The first positioning plate 108 is fixedly connected to the support frame 102 and is located above the support frame 102. The fixing threaded rod 109 is rotatably connected to the first positioning plate 108 and passes through the placement groove 106. The threads at both ends of the fixing threaded rod 109 are in opposite directions. The second positioning plate 110 is fixedly connected to the support frame 102 and is located above the support frame 102. The guide rod 111 is fixedly connected to the second positioning plate 110 and passes through the placement groove 106. The driving unit is disposed on both sides of the placement groove 106.

[0025] In this embodiment, the first positioning plate 108 and the second positioning plate 110 fix the positions of the fixed threaded rod 109 and the guide rod 111. By controlling the fixed motor 117, the fixed threaded rod 109 can be driven to rotate. With the assistance of the guide rod 111, the rotation of the fixed threaded rod 109 can drive the drive unit to move.

[0026] Furthermore, the drive unit includes a movable plate 112 and a connecting rod 113. The movable plate 112 is threadedly connected to the fixed threaded rod 109 and wraps around the fixed threaded rod 109 and the guide rod 111. The connecting rod 113 is fixedly connected to the movable plate 112 and is located above the movable plate 112. The connecting rod 113 is detachably connected to the fixing ring 105.

[0027] In this embodiment, when the fixed threaded rod 109 rotates, it can drive the moving plate 112 to move. The movement of the moving plate 112 can drive the connecting rod 113 to move. The movement of the connecting rod 113 will drive the fixed ring 105 to move, thereby clamping and fixing the silicon rod body 101. At the same time, the guide rod 111 can increase the stability of the moving plate 112 when it moves.

[0028] Furthermore, the movable component includes a movable threaded rod 114 and a fixed rod 115. The movable threaded rod 114 is rotatably connected to the fixed frame 104 and is located inside the fixed frame 104. The fixed rod 115 is detachably connected to the fixed frame 104 and is located outside the fixed frame 104.

[0029] In this embodiment, the fixing rod 115 fixes the movable motor 118 to the outside of the fixing frame 104, and the movable motor 118 can drive the movable threaded rod 114 to rotate by controlling the movable motor 118.

[0030] Furthermore, the movable component also includes a movable block 116, which is threadedly connected to the movable threaded rod 114 and located above the fixed frame 104, and the movable block 116 is slidably connected to the fixed frame 104.

[0031] In this embodiment, the rotation of the movable threaded rod 114 can drive the movable block 116 to slide above the fixed frame 104, thereby driving the through-beam laser sensor 103 to move. The cylinder 119 fixed above the movable block 116 can drive the through-beam laser sensor 103 to move up and down, thereby adjusting the height of the through-beam laser sensor 103 and making the scanning of the through-beam laser sensor 103 more comprehensive.

[0032] The above-disclosed embodiments are merely preferred embodiments of the present utility model and should not be construed as limiting the scope of the present utility model. Those skilled in the art can understand that implementing all or part of the above-described embodiments and making equivalent changes in accordance with the claims of the present utility model are still within the scope of the utility model.

Claims

1. A device for measuring the equal diameter length of a semiconductor single-crystal silicon rod, comprising a silicon rod body (101), a support frame (102), and a through-beam laser sensor (103), wherein the silicon rod body (101) is disposed above the support frame (102), and the through-beam laser sensor (103) is disposed above the support frame (102), characterized in that, It also includes measurement components; The measuring assembly includes a fixed frame (104), a fixing ring (105), a placement slot (106), a baffle (107), a fixing component, and a moving component. The fixed frame (104) is fixedly connected to the support frame (102) and is located above the support frame (102). The placement slot (106) is fixedly connected to the support frame (102) and is located above the support frame (102). The fixing ring (105) is located above the placement slot (106). The baffle (107) is fixedly connected to the placement slot (106) and is located on one side of the placement slot (106). The silicon rod body (101) is located above the placement slot (106). The fixing component is located above the support frame (102). The moving component is located above the support frame (102).

2. The semiconductor single-crystal silicon rod constant diameter length measuring device as described in claim 1, characterized in that, The fixing components include a first positioning plate (108), a fixing threaded rod (109), a second positioning plate (110), a guide rod (111), and a driving unit. The first positioning plate (108) is fixedly connected to the support frame (102) and is located above the support frame (102). The fixing threaded rod (109) is rotatably connected to the first positioning plate (108) and passes through the placement groove (106). The threads at both ends of the fixing threaded rod (109) are opposite in direction. The second positioning plate (110) is fixedly connected to the support frame (102) and is located above the support frame (102). The guide rod (111) is fixedly connected to the second positioning plate (110) and passes through the placement groove (106). The driving unit is located on both sides of the placement groove (106).

3. The semiconductor single-crystal silicon rod constant diameter length measuring device as described in claim 2, characterized in that, The drive unit includes a movable plate (112) and a connecting rod (113). The movable plate (112) is threadedly connected to the fixed threaded rod (109) and wraps around the fixed threaded rod (109) and the guide rod (111). The connecting rod (113) is fixedly connected to the movable plate (112) and is located above the movable plate (112). The connecting rod (113) is detachably connected to the fixed ring (105).

4. The semiconductor single-crystal silicon rod constant diameter length measuring device as described in claim 1, characterized in that, The movable component includes a movable threaded rod (114) and a fixed rod (115). The movable threaded rod (114) is rotatably connected to the fixed frame (104) and is located inside the fixed frame (104). The fixed rod (115) is detachably connected to the fixed frame (104) and is located outside the fixed frame (104).

5. The semiconductor single-crystal silicon rod constant diameter length measuring device as described in claim 4, characterized in that, The moving component further includes a moving block (116), which is threadedly connected to the moving threaded rod (114) and located above the fixed frame (104), and the moving block (116) is slidably connected to the fixed frame (104).

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