Leakage monitoring system for RTP annealing furnace

Abstract

The utility model provides a leakage monitoring system for an RTP annealing furnace, and relates to the technical field of leakage monitoring of annealing furnaces, pressure values and gas concentrations in the annealing furnace are acquired through a sensor module installed in the annealing furnace and converted into electric signals, the electric signals are sent to a data reading module, and the data reading module is used for monitoring the leakage of the annealing furnace in a polling mode. The data judgment module receives the electric signals sent by the sensor module in turn and sends the electric signals to the data processing module for filtering processing, and the data judgment module judges whether the annealing furnace leaks or not by comparing the received filtered electric signals with a safety electric signal threshold value and sends an early warning instruction to the early warning module; the sensitivity adjusting module adjusts the early warning sensitivity by adjusting the safety electric signal threshold value, and the early warning module gives an alarm for whether leakage occurs in the annealing furnace or not according to an early warning instruction sent by the data judgment module.

Description

TECHNICAL FIELD

[0001] The utility model relates to annealing furnace leakage monitoring technical field, specifically is a kind of RTP annealing furnace is used leakage monitoring system. BACKGROUND

[0002] Annealing furnace is widely used in metal processing and heat treatment field, especially in the atmosphere control in the annealing process of metal is crucial.In the production and use of annealing furnace, gas leakage problem often brings serious influence to equipment safety, production efficiency and energy consumption, annealing furnace inside often needs to keep certain gas concentration and pressure, to ensure that the heating process of metal reaches predetermined physical and chemical properties.However, in the long-term use of annealing furnace, furnace body or hearth part may be not tightly sealed, leading to annealing protective gas leakage.This leakage not only can affect metal treatment effect, but also can cause energy waste, even bring risk to the safe operation of equipment.

[0003] At present, traditional monitoring means mainly rely on manual inspection or simple equipment alarm system, these systems often cannot detect leakage in real time effectively, and due to the environment in annealing furnace greatly influences sensor, false alarm exists, and traditional detection mode often uses parallel acquisition mode, needs to be equipped with independent signal conditioning circuit for each sensor, hardware cost is high and circuit complexity increases significantly.

[0004] Based on the above problems, there is an urgent need in the art for a RTP annealing furnace leakage monitoring system that can realize the comprehensiveness and real-time of leakage detection, effectively avoid false alarms according to the industrial control situation of annealing furnace, and effectively reduce the cost of monitoring system. SUMMARY

[0005] The utility model aims at providing a kind of RTP annealing furnace leakage monitoring system to solve the problems raised in the above background.

[0006] To achieve the above object, the utility model provides the following technical scheme:

[0007] A kind of RTP annealing furnace leakage monitoring system, comprising:

[0008] Sensor module, the sensor module is installed in annealing furnace, with data reading module electric connection, for gathering the pressure value and gas concentration conversion into electric signal in annealing furnace, and send to data reading module;

[0009] Data reading module, the data reading module is electrically connected with data processing module, for receiving the electric signal sent by sensor module in turn, and send to data processing module;

[0010] A data processing module is electrically connected with the data judging module, used for receiving the electric signal sent by the data reading module for filtering processing and sending to the data judging module;

[0011] The data judging module is electrically connected with the early warning module, used for comparing the received electric signal with the safety electric signal threshold, judging whether the annealing furnace leaks or not, and sending the early warning instruction to the early warning module;

[0012] The sensitivity adjusting module is electrically connected with the data judging module, used for adjusting the early warning sensitivity by adjusting the size of the safety electric signal threshold;

[0013] The early warning module alarms whether the annealing furnace leaks or not according to the early warning instruction sent by the data judging module.

[0014] Further, the sensor module includes a pressure sensor and a concentration sensor, the pressure sensor is uniformly installed in the hearth of the annealing furnace, used for detecting the pressure value in the annealing furnace, and the concentration sensor is uniformly installed outside the furnace body of the annealing furnace, used for detecting the gas concentration of the annealing protection gas filled in the hearth;

[0015] Further, the concentration sensor includes a nitrogen detection sensor, a hydrogen detection sensor and an ammonia detection sensor.

[0016] Further, the data reading module comprises a resistor R1, a resistor R2, a capacitor C1, a timer, a decoder and a multiplexer, the timer is a model 555 timer, the decoder is a model CD4017, and the multiplexer is a model DG406, the timer comprises an OUT end, an RST end, a DISC end, a THR end, a THIG end, a VCC end and a GND end, the decoder comprises a VCC end, a CLK end, a GND end, a P1 end, a P2 end and a P3 end, and the multiplexer comprises an A0 end, an A1 end, an A2 end, a VCC end, an EN end, a GND end, Y0-Y8 ends and a D end, one end of the resistor R1 is electrically connected with the VCC end and the RST end of the timer, the VCC end of the decoder, the VCC end and the EN end of the multiplexer and a power supply VCC end, the other end of the resistor R1 is electrically connected with the DISC end of the timer and one end of the resistor R2, the other end of the resistor R2 is electrically connected with the THR end and the THIG end of the timer and one end of the capacitor C1, the other end of the capacitor C1 is electrically connected with a power supply GND end, the GND end of the timer, the GND end of the decoder and the GND end of the multiplexer, the OUT end of the timer is electrically connected with the CLK end of the decoder, the P1 end, the P2 end and the P3 end of the timer are connected with the A0 end, the A1 end and the A2 end of the multiplexer respectively, the Y0-Y8 ends of the multiplexer are electrically connected with output ends of the sensor module respectively, the D end is electrically connected with the data processing module, and the capacitor C1 and the resistors R1 and R2 are used for adjusting a pulse frequency.

[0017] Further, the data judging module is a comparator of a model LM393, the comparator comprises a VCC end, an IN+ end, an IN- end, a GND end and an OUT end, the sensitivity adjusting module comprises a resistor R4 and an adjustable potentiometer R5, the size of a safety electric signal threshold value is adjusted by adjusting the resistance value of the adjustable potentiometer R5, the sensitivity of early warning is adjusted, one end of the adjustable potentiometer R5 is electrically connected with a power supply VCC end, the other end of the adjustable potentiometer R5 is electrically connected with one end of the resistor R4, the other end of the resistor R4 is electrically connected with the IN- end of the comparator, the IN+ end of the comparator is electrically connected with the data processing module, and the OUT end of the comparator is electrically connected with the early warning module.

[0018] The utility model discloses the beneficial effect is:

[0019] The utility model discloses a sensor module is installed in the annealing furnace, and the pressure value and gas concentration in the annealing furnace are gathered and converted into electric signal, and are sent to data reading module, through the polling mode of data reading module, the electric signal of sensor module is received in turn, and is sent to data processing module and carries out filter processing, and data judging module compares the electric signal after filtering with safety electric signal threshold value, judges whether annealing furnace leaks, and sends early warning instruction to early warning module, and sensitivity adjustment module adjusts the size of safety electric signal threshold value, and carries out early warning sensitivity adjustment, and early warning module according to the early warning instruction of data judging module, whether annealing furnace leaks is alarmed.

[0020] The scheme can real-time and accurately monitor the pressure value and gas concentration inside and outside the annealing furnace through the cooperative work of multiple modules such as the sensor module, the data processing module and the data judging module, significantly improves the comprehensiveness and real-time performance of the leakage detection, effectively reduces the hardware cost of the system in combination with the polling type hardware data acquisition, avoids complex wiring, the sensitivity adjustment module is further equipped, the early warning sensitivity can be adjusted according to the specific working environment and requirements, so that the system can maintain efficient and stable monitoring function under different conditions, effectively avoids false alarms according to the industrial control condition of the annealing furnace, and greatly improves the production safety and the reliability of equipment operation. BRIEF DESCRIPTION OF DRAWINGS

[0021] Fig. 1 It is system structure schematic diagram of the utility model;

[0022] Fig. 2 It is data reading module circuit structure schematic diagram of the utility model;

[0023] Fig. 3 It is data judging module and sensitivity adjustment module circuit structure schematic diagram of the utility model.

[0024] In the drawing: 10 sensor module, 11 pressure sensor, 12 concentration sensor, 20 data reading module, 30 data processing module, 40 data judging module, 50 sensitivity adjustment module, 60 early warning module. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the utility model will be described clearly and completely below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0026] Embodiment:

[0027] Please refer toFigs. 1-3 The utility model provides a technical scheme:

[0028] A kind of leakage monitoring system for RTP annealing furnace, including sensor module 10, data reading module 20, data processing module 30, data judging module 40, sensitivity adjustment module 50 and early warning module 60, wherein:

[0029] The sensor module 10 is installed in the annealing furnace, and is electrically connected with the data reading module 20, for collecting the pressure value and gas concentration in the annealing furnace into electrical signals, and sending to the data reading module 20.

[0030] In the embodiment, the sensor module 10 includes a pressure sensor 11 and a concentration sensor 12, the pressure sensor 11 adopts a high-temperature-resistant piezoresistive sensor with a model number MPX5050DP, including a probe part and a wiring part, the probe part is installed in the hearth of the annealing furnace, and the wiring part is installed outside the annealing furnace, the pressure sensor 11 is installed in the hearth at the same horizontal position, and is uniformly spaced in the hearth of the annealing furnace, for detecting the pressure value in the annealing furnace, the concentration sensor 12 is uniformly installed at the upper, lower, left, right, front and rear positions outside the furnace body of the annealing furnace, for detecting the gas concentration of the annealing protective gas leakage in the hearth.

[0031] In the embodiment, the concentration sensor 12 includes a nitrogen detection sensor, a hydrogen detection sensor and an ammonia detection sensor, the nitrogen detection sensor has a model number AGS3870, the hydrogen detection sensor has a model number AGS2616, and the ammonia detection sensor has a model number NH3-100L.

[0032] The annealing furnace needs to maintain a certain pressure environment during operation, which can ensure the stable heat treatment process in the hearth. If the pressure in the hearth is abnormal, it may mean that leakage occurs in a certain part of the furnace body. The pressure sensor can monitor the pressure change in the hearth in real time and provide timely feedback. If a decrease in pressure is detected, it may indicate that gas leakage exists, which may affect the stability of the annealing process. Therefore, through real-time monitoring of the pressure, equipment failure or production problems caused by abnormal pressure of the annealing furnace can be effectively prevented.

[0033] In the annealing furnace, gases such as nitrogen, hydrogen and ammonia are commonly used as protective atmosphere. The leakage of these gases not only affects the working efficiency of the annealing furnace, but also may bring safety hazards. For example, hydrogen leakage may cause fire or explosion hazards, ammonia leakage will pollute the environment, and nitrogen leakage will affect the stability of the atmosphere. Concentration sensor can monitor the gas concentration in the furnace, and detect the leakage of gas in real time. When the concentration abnormally rises, the sensor will output an electrical signal, prompting the system to check whether the furnace body has gas leakage. Therefore, concentration monitoring is not only crucial to protect the normal operation of the annealing furnace, but also can ensure the safety of the operating personnel and environmental protection. At the same time, the detection of multiple gases and pressures can real-time and accurately monitor the pressure value and gas concentration inside and outside the annealing furnace, significantly improving the comprehensiveness and real-time of leakage detection.

[0034] The data reading module 20 is electrically connected with the data processing module 30, and is used to receive the electrical signals sent by the sensor module 10 in turn. The reading module 20 opens the channel switching logic of the internal multiplexer, sequentially connects each pressure sensor 11 and concentration sensor 12 with the data processing module 30, and sends to the data processing module 30.

[0035] In this embodiment, the data reading module 20 includes resistors R1, R2, capacitor C1, timer, decoder and multiplexer. The timer is a model 555 timer, the decoder is a model CD4017, and the multiplexer is a model DG406. The timer includes an OUT terminal, an RST terminal, a DISC terminal, a THR terminal, a THIG terminal, a VCC terminal and a GND terminal. The decoder includes a VCC terminal, a CLK terminal, a GND terminal, a P1 terminal, a P2 terminal and a P3 terminal. The multiplexer includes an A0 terminal, an A1 terminal, an A2 terminal, a VCC terminal, an EN terminal, a GND terminal, Y0-Y8 terminals and a D terminal. One end of the resistor R1 is electrically connected with the VCC terminal, the RST terminal of the timer, the VCC terminal of the decoder, the VCC terminal and the EN terminal of the multiplexer and the power supply VCC terminal. The other end of the resistor R1 is electrically connected with the DISC terminal of the timer and one end of the resistor R2. The other end of the resistor R2 is electrically connected with the THR terminal and the THIG terminal of the timer and one end of the capacitor C1. The other end of the capacitor C1 is electrically connected with the power supply GND terminal, the GND terminal of the timer, the GND terminal of the decoder, the GND terminal of the multiplexer. The OUT terminal of the timer is electrically connected with the CLK terminal of the decoder. The P1 terminal, the P2 terminal and the P3 terminal of the timer are respectively connected to the A0 terminal, the A1 terminal and the A2 terminal of the multiplexer. The Y0-Y8 terminals of the multiplexer are respectively electrically connected with the output terminals of the sensor module 10. The D terminal is electrically connected with the data processing module 30. The capacitor C1 and the resistors R1 and R2 are used to adjust the pulse frequency.

[0036] The timer is set to be unstable, and the OUT terminal of the timer continuously generates a pulse signal and sends to the CLK terminal of the decoder, drives the decoder to carry out the decimal counter cycle work, and each clock rising edge triggers the P1 terminal, the P2 terminal and the P3 terminal of the decoder to output high level in turn, and the high level state of the P1 terminal, the P2 terminal and the P3 terminal is converted into 3-bit binary address in real time and input to the A0 terminal, the A1 terminal and the A2 terminal of the multiplexer, directly controls the channel switching logic of the multiplexer, and makes the Y0-Y8 terminal be turned on in turn with the common output terminal in sequence, so that the polling data acquisition of the multi-way gas sensor is realized. Combined with the polling type hardware data acquisition, the hardware cost of the system is effectively reduced, and complex wiring is avoided.

[0037] The data processing module 30 includes an amplifier and a filter, the model of the amplifier is LM358, the model of the filter is Murata GRM, and the amplifier and the filter are electrically connected with the data judgment module 40, used for receiving the electric signal sent by the data reading module 20 for filtering processing and sending to the data judgment module 40.

[0038] The data judgment module 40 is electrically connected with the early warning module, used for comparing the received electric signal with the safety electric signal threshold, judging whether the annealing furnace leaks or not, and sending the early warning instruction to the early warning module 60.

[0039] The sensitivity adjustment module 50 is electrically connected with the data judgment module 40, used for adjusting the size of the safety electric signal threshold to adjust the early warning sensitivity.

[0040] In the embodiment, the model of the data judgment module 40 is a comparator of LM393, the comparator includes a VCC terminal, an IN+ terminal, an IN- terminal, a GND terminal and an OUT terminal, the sensitivity adjustment module 50 includes a resistor R4 and an adjustable potentiometer R5, the size of the safety electric signal threshold is adjusted by adjusting the resistance value of the adjustable potentiometer R5 to realize the early warning sensitivity adjustment, one end of the adjustable potentiometer R5 is electrically connected with the power supply VCC terminal, the other end of the adjustable potentiometer R5 is electrically connected with one end of the resistor R4, the other end of the resistor R4 is electrically connected with the IN- terminal of the comparator, the IN+ terminal of the comparator is electrically connected with the data processing module 30, and the OUT terminal of the comparator is electrically connected with the early warning module 60.

[0041] The resistance R4 is used for setting the basic safety electric signal threshold, that is, allowing the sensor not to alarm in the safety range, the adjustable potentiometer R5 is used for sensitivity adjustment, the greater the resistance value of the adjustable potentiometer R5, the greater the safety range of the sensor, when the electric signal sent by the data processing module 30 exceeds the voltage of the IN end of the comparator, the comparator outputs the voltage signal to the early warning module 60 through the OUT end. Through the adjustment of the sensitivity adjustment module, the early warning sensitivity can be adjusted according to the specific working environment and demand, so that the system can maintain efficient and stable monitoring function in different situations, effectively avoid false alarm according to the work control condition of the annealing furnace, and greatly improve the production safety and the reliability of equipment operation.

[0042] The early warning module 60 is of a BC-8T type, and according to the early warning instruction sent by the data judgment module 40, whether the annealing furnace leaks is alarmed.

[0043] The use principle of the utility model is: in use, the sensor module installed in the annealing furnace collects the pressure value and gas concentration in the annealing furnace and converts into electric signals, and sends to the data reading module, through the data reading module, the electric signals sent by the sensor module are received in turn through polling, and are sent to the data processing module for filtering processing, the data judgment module compares the filtered electric signals with the safety electric signal threshold, judges whether the annealing furnace leaks, and sends the early warning instruction to the early warning module, the sensitivity adjustment module adjusts the early warning sensitivity by adjusting the size of the safety electric signal threshold, and the early warning module alarms whether the annealing furnace leaks according to the early warning instruction sent by the data judgment module.

[0044] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A leakage monitoring system for an RTP annealing furnace, characterized in that, include: The sensor module (10) is installed inside the annealing furnace and is electrically connected to the data reading module (20). It is used to collect the pressure value and gas concentration value inside the annealing furnace and convert them into electrical signals to be sent to the data reading module (20). The data reading module (20) is electrically connected to the data processing module (30) and is used to receive the electrical signals sent by the sensor module (10) in turn and send them to the data processing module (30). The data processing module (30) is electrically connected to the data judgment module (40) and is used to receive the electrical signal sent by the data reading module (20), perform filtering processing, and send it to the data judgment module (40). The data judgment module (40) is electrically connected to the early warning module and is used to compare the received electrical signal with the safety electrical signal threshold to determine whether the annealing furnace has leaked and to send an early warning command to the early warning module (60). Sensitivity adjustment module (50), which is electrically connected to data judgment module (40), is used to adjust the warning sensitivity by adjusting the size of the safety electrical signal threshold; The early warning module (60) alarms whether the annealing furnace is leaking based on the early warning command sent by the data judgment module (40).

2. The leakage monitoring system for an RTP annealing furnace according to claim 1, characterized in that; The sensor module (10) includes a pressure sensor (11) and a concentration sensor (12). The pressure sensor (11) is evenly installed inside the furnace of the annealing furnace to detect the pressure value inside the annealing furnace. The concentration sensor (12) is evenly installed outside the furnace body of the annealing furnace to detect the gas concentration of the annealing protective gas leaking from the furnace.

3. The leakage monitoring system for an RTP annealing furnace according to claim 2, characterized in that: The concentration sensor (12) includes a nitrogen detection sensor, a hydrogen detection sensor, and an ammonia detection sensor.

4. The leakage monitoring system for an RTP annealing furnace according to claim 1, characterized in that: The data reading module (20) includes resistors R1 and R2, capacitor C1, a timer, a decoder, and a multiplexer. The timer is a 555 timer, the decoder is a CD4017, and the multiplexer is a DG406. The timer includes OUT, RST, DISC, THR, THIG, VCC, and GND terminals. The decoder includes VCC, CLK, GND, P1, P2, and P3 terminals. The multiplexer includes A0, A1, A2, VCC, EN, GND, Y0-Y8, and D terminals. One end of resistor R1 is connected to the VCC and RST terminals of the timer, the VCC terminal of the decoder, and the VCC and EN terminals of the multiplexer. The resistor R1 is electrically connected to the VCC terminal of the power supply. The other end of the resistor R1 is electrically connected to the DISC terminal of the timer and one end of the resistor R2. The other end of the resistor R2 is electrically connected to the THR terminal and THIG terminal of the timer and one end of the capacitor C1. The other end of the capacitor C1 is electrically connected to the GND terminal of the power supply, the GND terminal of the timer, the GND terminal of the decoder, and the GND terminal of the multiplexer. The OUT terminal of the timer is electrically connected to the CLK terminal of the decoder. The P1, P2, and P3 terminals of the timer are respectively connected to the A0, A1, and A2 terminals of the multiplexer. The Y0-Y8 terminals of the multiplexer are respectively electrically connected to the output terminal of the sensor module (10). The D terminal is electrically connected to the data processing module (30). The capacitor C1, resistor R1, and resistor R2 are used to adjust the pulse frequency.

5. A leakage monitoring system for an RTP annealing furnace according to claim 1, characterized in that: The data judgment module (40) uses an LM393 comparator, which includes a VCC terminal, an IN+ terminal, an IN- terminal, a GND terminal, and an OUT terminal. The sensitivity adjustment module (50) includes a resistor R4 and an adjustable potentiometer R5. The threshold value of the safety electrical signal is adjusted by adjusting the resistance value of the adjustable potentiometer R5 to achieve the adjustment of the warning sensitivity. One end of the adjustable potentiometer R5 is electrically connected to the power supply VCC terminal, and the other end of the adjustable potentiometer R5 is electrically connected to one end of the resistor R4. The other end of the resistor R4 is electrically connected to the IN- terminal of the comparator. The IN+ terminal of the comparator is electrically connected to the data processing module (30), and the OUT terminal of the comparator is electrically connected to the warning module (60).

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