Lissajous optical fiber scanner with combined cylindrical body
By adjusting the shape and size parameters of the support plate, a Lissajous fiber optic scanner with a combined cylindrical body was designed, which solved the problem of vibration coupling effect in Lissajous scanners and achieved high yield and high efficiency in processing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2026-04-07
AI Technical Summary
When the natural frequencies used by a Lissajous scanner in two directions are close, vibration coupling effects are likely to occur, leading to distortion of the scanning trajectory and making it difficult to guarantee processing accuracy and yield.
Design a Lissajous fiber optic scanner with a combined cylindrical body. By adjusting the shape and size parameters of the support plate, the natural frequencies of the combined part in the horizontal and vertical directions meet specific difference requirements, avoiding vibration coupling and reducing the processing difficulty and accuracy requirements.
It achieves a uniform and dense scanning grid in two directions, reducing the processing difficulty and accuracy requirements, and improving the yield and processing efficiency.
Smart Images
Figure CN224096078U_ABST
Abstract
Description
[0001] This application is a divisional application of the Chinese patent application No. 2024232650163, filed on December 30, 2024, with the State Intellectual Property Office of the People's Republic of China, and entitled "Lissajous Fiber Scanner with Combined Cylinder Body", the entire contents of which are incorporated herein by reference. TECHNICAL FIELD
[0002] The present application relates to the technical field of fiber scanner structure, in particular to a Lissajous fiber scanner with a combined cylinder body. BACKGROUND
[0003] A fiber scanner is a display technology that uses a scanning driver to control the swing of a fiber while the fiber emits light. It is mainly used in the technical fields of fiber scanning display technology, fiber scanning endoscope technology, fiber scanning radar, etc. When the fiber scanner is applied to image display, the color of the pattern illuminated by this technology is sharp and saturated, the contrast is high, the brightness is high, and the structure is very small.
[0004] A fiber scanner uses the principle of mechanical resonance to make the fiber cantilever achieve a large scanning range. The scanning method of the scanning driver can be divided into spiral scanning, grid scanning, and Lissajous scanning. The micro piezoelectric scanning device of Lissajous scanning generally has two driving parts that drive the scanning device to vibrate in two directions simultaneously. The closer the driving frequencies of the two directions in Lissajous scanning, the closer the uniformity (density) of the scanning grid in the two directions, and theoretically the closer the driving frequencies of the two directions, the better. However, the closer the inherent frequencies used in the two directions of the scanner, the more obvious the vibration coupling effect, which can worsen the scanning trajectory and cause uncontrolled components in the scanning trajectory, resulting in distortion of the scanning image, which is difficult to completely eliminate through post-processing. Therefore, the inherent frequencies used in the two directions of the Lissajous scanner should have a precise difference range, neither too small to cause coupling effect, nor too large to cause non-uniformity.
[0005] However, processing a Lissajous scanner with a precise difference in inherent frequencies used in the two directions requires extremely high processing precision, and both the cost of processing equipment and the yield cannot be guaranteed. Practical new type content
[0006] The present application provides a Lissajous fiber scanner with a combined cylinder body to reduce the processing difficulty and improve the processing yield.
[0007] To achieve the aforementioned objectives, this application provides a Lissajous fiber optic scanner with a combined cylindrical body, comprising a cylindrical body and an optical fiber. With the axis of the cylindrical body extending in the front-rear direction, the rear end of the cylindrical body is fixedly connected to a base for support. The cylindrical body consists of an open-topped base and a support plate that partially or completely covers the open-topped portion of the base. The front end of the support plate extends beyond the front end of the base, and the portion of the support plate connected to the base forms a cylindrical overlapping section with the base. The optical fiber is cantilevered and fixed to the front end of the support plate.
[0008] At least one of the inner and outer surfaces of the cylindrical overlapping portion is provided with a first inner electrode and a first outer electrode respectively. The portion of the cylindrical overlapping portion between the first inner electrode and the corresponding first outer electrode is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode and the corresponding first outer electrode is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction.
[0009] At least one of the inner and outer surfaces of the upper and lower sides of the cylindrical overlapping portion is provided with correspondingly fitted second inner and second outer electrodes. The portion of the cylindrical overlapping portion located between the second inner and second outer electrodes is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the second inner and second outer electrodes is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate in the vertical direction.
[0010] The support plate ensures that the natural frequency of the combination of the cylindrical body and the optical fiber in the horizontal direction is greater than the natural frequency of the same order in the vertical direction, and that there is a difference between the natural frequency of the combination in the vertical direction that is closest to its V-order natural frequency in the horizontal direction and the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.
[0011] The assembly has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) is closest to the V-order natural frequency of the assembly in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more sampling points, the better, theoretically. However, the closer the natural frequencies used by the assembly in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the adjustment of the support plate shape structure and / or size parameters to make the natural frequencies of the assembly used in the two directions simultaneously satisfy the following: they are close enough to ensure good scanning effect and have a uniform and dense scanning grid; at the same time, they have a sufficient difference so that the vibration of the assembly in the two directions will not produce coupling.
[0012] Therefore, this application utilizes the adjustment of the support plate's shape and / or dimensional parameters to ensure that the vibration frequency of the assembly in both directions meets the requirements of Lissajous scanning, thereby reducing the processing size and precision requirements of the cylindrical body, making the processing of the cylindrical body easier, the processing error easier to control, and the yield rate higher.
[0013] In this embodiment, V is of order one and U is of order two. Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structures, V can also be an integer greater than 1, and U can be an integer greater than V.
[0014] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.
[0015] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values based on the above description is a conventional technique in the field.
[0016] Optionally, the inner and outer surfaces of either the left or right sides of the cylindrical overlapping portion are respectively provided with correspondingly fitted first inner and first outer electrodes. The portion of the cylindrical overlapping portion located between the first inner electrode and the corresponding first outer electrode is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode and the corresponding first outer electrode is driven to extend and retract in the front-back direction, driving the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first inner electrodes or first outer electrodes can be one, two, or more.
[0017] Alternatively, the inner and outer surfaces of both sides of the cylindrical overlapping portion are respectively provided with corresponding first inner electrodes and first outer electrodes. The portion of the cylindrical overlapping portion between the first inner electrode and the corresponding first outer electrode is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion between the first inner electrode and the corresponding first outer electrode is driven to extend and retract in the front-back direction, while the piezoelectric material portions on the upper and lower sides extend and retract synchronously in opposite directions and by the same length, driving the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first inner electrodes or first outer electrodes located on the same side can be one, two, or more.
[0018] Optionally, a second inner electrode and a second outer electrode are respectively provided on the inner and outer surfaces of either the upper or lower sides of the overlapping cylindrical portion. The portion of the piezoelectric material cylindrical body located between the second inner electrode and the second outer electrode is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part located between the two is driven by the second inner electrode and the second outer electrode to extend and retract in the front-back direction, driving the front end of the overlapping cylindrical portion to vibrate up and down in the vertical direction. The number of second inner electrodes or second outer electrodes can be one, two, or more.
[0019] Alternatively, the inner and outer surfaces of the upper and lower overlapping cylindrical sections are respectively provided with correspondingly fitted second inner and outer electrodes. The portion of the piezoelectric cylindrical body located between the second inner and second outer electrodes is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the second inner and second outer electrodes is driven to extend and retract in the front-back direction by the second inner and second outer electrodes, while the piezoelectric material portions on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the overlapping cylindrical section to vibrate up and down in the vertical direction. The number of second inner or second outer electrodes located on the same side can be one, two, or more.
[0020] More preferably, when the inner and outer surfaces of the left and right sides of the cylindrical overlapping portion are respectively provided with a first inner electrode and a corresponding first outer electrode, the first inner electrodes on the left and right sides of the cylindrical overlapping portion are symmetrically arranged to drive the cylindrical overlapping portion to vibrate accurately in the horizontal direction without generating a displacement component in the vertical direction; when the inner and outer surfaces of the upper and lower sides of the cylindrical overlapping portion are respectively provided with a second inner electrode and a corresponding second outer electrode, the second inner electrodes on the upper and lower sides of the cylindrical overlapping portion are symmetrically arranged to drive the cylindrical overlapping portion to vibrate accurately in the vertical direction without generating a displacement component in the horizontal direction.
[0021] One or more technical solutions in this application have at least the following technical effects or advantages:
[0022] This application eliminates the need for a specific difference in the natural frequencies of the piezoelectric actuator in the two driving directions of the Lissajous scanner, thus avoiding vibration coupling in both directions and reducing the requirements for manufacturing difficulty and precision. By adjusting the shape and / or dimensional parameters of the support plate, this application ensures that the vibration frequencies of the assembly in both directions meet the requirements of Lissajous scanning, reducing the dimensional and precision requirements of the cylindrical body. This results in lower manufacturing difficulty, easier control of manufacturing errors, and higher yield, significantly improving both manufacturing efficiency and yield. Attached Figure Description
[0023] Figure 1 This is a schematic diagram of the structure of this utility model. Detailed Implementation
[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application. Example
[0025] Combination Figure 1 As shown, a Lissajous fiber optic scanner with a combined cylindrical body includes a cylindrical body and an optical fiber 104.
[0026] With the axial extension direction of the cylindrical body as the front-to-back direction, the rear end of the cylindrical body is fixedly connected to the base 200 and supported by the base 200.
[0027] The cylindrical body consists of a base 100 with an upper opening and a support plate 103 that covers part or all of the upper opening of the base 100. The front end of the support plate 103 extends beyond the front end of the base 100. The part of the support plate 103 that connects to the base 100 forms a cylindrical overlapping part with the base 100. The optical fiber 104 is fixedly mounted on the front end of the support plate 103 in a cantilever support manner.
[0028] At least one of the inner and outer surfaces of the cylindrical overlapping portion has a first inner electrode 1011 and a first outer electrode 1012 respectively, which are correspondingly fitted. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction.
[0029] At least one of the inner and outer surfaces of the upper and lower sides of the cylindrical overlapping portion is provided with a correspondingly mating second inner electrode 1021 and a second outer electrode 1022. The portion of the cylindrical overlapping portion located between the second inner electrode 1021 and the second outer electrode 1022 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the second inner electrode 1021 and the second outer electrode 1022 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate in the vertical direction.
[0030] The support plate 103 makes the natural frequency of the combination of the cylindrical body and the optical fiber 104 in the horizontal direction greater than the natural frequency of the same order in the vertical direction, and makes the natural frequency of the combination in the vertical direction that is closest to its V-order natural frequency in the horizontal direction have a difference with the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.
[0031] The assembly has first-order, second-order, third-order, ... N-order natural frequencies in the vertical direction. Among them, a certain natural frequency (e.g., U-order, where U is an integer greater than or equal to two) is closest to the V-order natural frequency of the assembly in the horizontal direction (V is less than U). In Lissajous scanning, the closer the driving frequencies in the two directions are, the closer the uniformity (density) of the scanning grid in the two directions will be. The more sampling points, the better, theoretically. However, the closer the natural frequencies used by the assembly in the two directions are, the more obvious the coupling effect will be. Therefore, this application uses the adjustment of the shape structure and / or size parameters of the support plate 103 to ensure that the natural frequencies of the assembly used in the two directions are both close enough to ensure good scanning effect and a uniform and dense scanning grid, and have sufficient difference so that the vibration of the assembly in the two directions will not couple.
[0032] Therefore, by adjusting the shape and / or dimensional parameters of the support plate 103, this application enables the vibration frequency of the assembly in both directions to meet the requirements of Lissajous scanning, thereby reducing the processing size and precision requirements of the cylindrical body, making the processing of the cylindrical body easier, the processing error easier to control, and the yield rate higher.
[0033] In this embodiment, V is of order one and U is of order two. Of course, this is only the parameter selection for this embodiment. In other embodiments with similar structures, V can also be an integer greater than 1, and U can be an integer greater than V.
[0034] The difference ensures that when the assembly performs a Lissajous scan under the drive signal, the vibrations of the assembly in the horizontal direction and the vibrations in the vertical direction will not couple.
[0035] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values based on the above description is a conventional technique in the field.
[0036] Optionally, a first inner electrode 1011 and a first outer electrode 1012 are respectively provided on the inner and outer surfaces of either side of the cylindrical overlapping portion. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, driving the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two, or more.
[0037] Alternatively, the inner and outer surfaces of both sides of the cylindrical overlapping portion are respectively provided with correspondingly fitted first inner electrodes 1011 and first outer electrodes 1012. The portion of the cylindrical overlapping portion between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to extend and retract in the front-back direction, while the piezoelectric material portions on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 located on the same side can be one, two, or more.
[0038] Optionally, a second inner electrode 1021 and a second outer electrode 1022 are respectively provided on the inner and outer surfaces of either the upper or lower sides of the cylindrical overlapping portion. The portion of the piezoelectric material cylindrical body located between the second inner electrode 1021 and the second outer electrode 1022 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the two is driven by the second inner electrode 1021 and the second outer electrode 1022 to extend and retract in the front-rear direction, driving the front end of the cylindrical overlapping portion to vibrate up and down in the vertical direction. The number of the second inner electrode 1021 or the second outer electrode 1022 can be one, two, or more.
[0039] Alternatively, the inner and outer surfaces of the upper and lower overlapping cylindrical portions are respectively provided with correspondingly fitted second inner electrodes 1021 and second outer electrodes 1022. The portion of the piezoelectric cylindrical body located between the second inner electrodes 1021 and the second outer electrodes 1022 is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the second inner electrodes 1021 and the second outer electrodes 1022 is driven to extend and retract in the front-back direction, while the piezoelectric material portions on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the overlapping cylindrical portion to vibrate up and down in the vertical direction. The number of second inner electrodes 1021 or second outer electrodes 1022 located on the same side can be one, two, or more.
[0040] More preferably, when the inner and outer surfaces of the left and right sides of the cylindrical overlapping portion are respectively provided with a first inner electrode 1011 and a corresponding first outer electrode 1012, the first inner electrodes 1011 on the left and right sides of the cylindrical overlapping portion are symmetrically arranged to drive the cylindrical overlapping portion to vibrate accurately in the horizontal direction without generating a displacement component in the vertical direction; when the inner and outer surfaces of the upper and lower sides of the cylindrical overlapping portion are respectively provided with a second inner electrode 1021 and a corresponding second outer electrode 1022, the second inner electrodes 1021 on the upper and lower sides of the cylindrical overlapping portion are symmetrically arranged to drive the cylindrical overlapping portion to vibrate accurately in the vertical direction without generating a displacement component in the horizontal direction.
[0041] This application eliminates the need for a specific difference in the natural frequencies of the piezoelectric actuator in the two driving directions of the Lissajous scanner, thus avoiding coupling of vibrations in both directions and reducing the requirements for manufacturing difficulty and precision. By adjusting the shape and / or dimensional parameters of the support plate 103, this application ensures that the vibration frequencies of the assembly in both directions meet the requirements of Lissajous scanning, reducing the size and precision requirements of the cylindrical body. This results in lower manufacturing difficulty, easier control of manufacturing errors, and higher yield, significantly improving both manufacturing efficiency and yield.
[0042] It should be noted that the above embodiments are illustrative of this application and not limiting of it, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The words “comprising” or “including” do not exclude the presence of elements or steps not listed in the claims. The words “a” or “an” preceding an element do not exclude the presence of a plurality of such elements. The use of the words first, second, and third, etc., does not indicate any order and these words can be interpreted as names.
[0043] All features disclosed in this specification, except for mutually exclusive features, can be combined in any way.
[0044] Any feature disclosed in this specification (including any appended claims, abstract, and drawings) may be replaced by other equivalent or similar features for a similar purpose, unless specifically stated otherwise. That is, unless specifically stated otherwise, each feature is merely one example of a series of equivalent or similar features.
[0045] This application is not limited to the specific embodiments described above. This application extends to any new features or combinations disclosed in this specification, as well as any new steps or combinations of any new methods or processes disclosed.
Claims
1. A Lissajous fiber optic scanner with a combined cylindrical body, characterized in that, Includes cylindrical body and optical fiber, With the axial extension direction of the cylindrical body as the front-to-back direction, the rear end of the cylindrical body is fixedly connected to the base for support. The cylindrical body consists of a base with an upper opening and a support plate that partially or completely covers the base. The front end of the support plate extends beyond the front end of the base, and the part of the support plate that connects to the base forms a cylindrical overlapping part with the base. The optical fiber is fixedly mounted on the front end of the support plate in a cantilever support manner. At least one of the inner and outer surfaces of the cylindrical overlapping portion is provided with a first inner electrode and a first outer electrode respectively. The portion of the cylindrical overlapping portion between the first inner electrode and the corresponding first outer electrode is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the first inner electrode and the corresponding first outer electrode is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate left and right in the horizontal direction. At least one of the inner and outer surfaces of the upper and lower sides of the cylindrical overlapping portion is provided with correspondingly fitted second inner and second outer electrodes. The portion of the cylindrical overlapping portion located between the second inner and second outer electrodes is a piezoelectric material portion polarized along the thickness direction. The piezoelectric material portion located between the second inner and second outer electrodes is driven to extend and retract in the front-back direction, driving the front end of the cylindrical body to vibrate in the vertical direction. The support plate ensures that the natural frequency of the combination of the cylindrical body and the optical fiber in the horizontal direction is greater than the natural frequency of the same order in the vertical direction, and that there is a difference between the natural frequency of the combination in the vertical direction that is closest to its V-order natural frequency in the horizontal direction and the natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.
2. A Lissajous fiber optic scanner with a combined cylindrical body as described in claim 1, characterized in that, The difference satisfies that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the scanner arm does not couple with the vibration of the scanner arm in the horizontal and vertical directions.
3. A Lissajous fiber optic scanner with a combined cylindrical body as described in claim 1 or 2, characterized in that, The difference range is 10Hz to 12KHz.
4. A Lissajous fiber optic scanner with a combined cylindrical body as described in claim 3, characterized in that, The difference range is 1kHz to 10kHz.
5. A Lissajous fiber optic scanner with a combined cylindrical body as described in claim 1 or 2, characterized in that, The inner and outer surfaces of either side of the cylindrical overlapping part are respectively provided with a first inner electrode and a first outer electrode that are correspondingly matched. The part of the cylindrical overlapping part between the first inner electrode and the corresponding first outer electrode is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part located between the two is driven by the first inner electrode and the corresponding first outer electrode to extend and retract in the front-back direction, and the front end of the cylindrical overlapping part is driven to vibrate left and right in the horizontal direction.
6. A Lissajous fiber optic scanner with a combined cylindrical body as described in claim 1 or 2, characterized in that, The inner and outer surfaces of the left and right sides of the cylindrical overlapping part are respectively provided with corresponding first inner electrodes and first outer electrodes. The part of the cylindrical overlapping part between the first inner electrode and the corresponding first outer electrode is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part between the two is driven by the first inner electrode and the corresponding first outer electrode to extend and retract in the front-back direction. The piezoelectric material parts on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping part to vibrate left and right in the horizontal direction.
7. A Lissajous fiber optic scanner with a combined cylindrical body as described in claim 1 or 2, characterized in that, The inner and outer surfaces of either the upper or lower sides of the cylindrical overlapping part are respectively provided with corresponding and matched second inner and second outer electrodes. The part of the piezoelectric material cylindrical body located between the second inner and second outer electrodes is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part located between the two is driven by the second inner and second outer electrodes to extend and retract in the front-back direction, driving the front end of the cylindrical overlapping part to vibrate up and down in the vertical direction.
8. A Lissajous fiber optic scanner with a combined cylindrical body as described in claim 1 or 2, characterized in that, The inner and outer surfaces of the upper and lower sides of the cylindrical overlapping part are respectively provided with corresponding and matched second inner electrodes and second outer electrodes. The part of the piezoelectric material cylindrical body located between the second inner electrode and the second outer electrode is a piezoelectric material part polarized along the thickness direction. The piezoelectric material part located between the two is driven by the second inner electrode and the second outer electrode to extend and retract in the front-back direction. The piezoelectric material parts on the upper and lower sides extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping part to vibrate up and down in the vertical direction.
9. A Lissajous fiber optic scanner with a combined cylindrical body as described in claim 6, characterized in that, The first inner electrodes on the left and right sides of the overlapping cylindrical part are symmetrically arranged.
10. A Lissajous fiber optic scanner with a combined cylindrical body as described in claim 8, characterized in that, The second inner electrodes on the upper and lower sides of the overlapping cylindrical part are symmetrically arranged.