Positive pressure vacuum welding furnace

Abstract

The utility model relates to the technical field of welding furnaces, in particular to a positive-pressure vacuum welding furnace. The positive-pressure vacuum welding furnace comprises an upper cavity, a lower cavity, a high-bending-strength heating plate, a plurality of limiting blocks, a plurality of upper heating pipes and a plurality of lower heating pipes. The upper cavity is arranged above the lower cavity, the upper cavity and the lower cavity form a sealed vacuum cavity, the high-bending-strength heating plate is arranged in the vacuum cavity, the limiting block is arranged on the high-bending-strength heating plate, the lower heating pipe is arranged in the lower cavity, and the limiting block is arranged on the limiting block. And the upper heating pipe is arranged in the upper cavity. The heating plate is high in bending strength, and the substrate can be stably fixed on the heating plate.

Description

TECHNICAL FIELD

[0001] The utility model relates to welding furnace technical field especially relates to a kind of positive pressure vacuum welding furnace. BACKGROUND

[0002] The vacuum welding equipment in prior art is a kind of professional, the equipment used for workpiece welding, its structure mainly includes: controller, sealable cavity, vacuumizing device, heating device, heating plate and cooling device etc.. Heating plate is located in sealable cavity, and heating plate is used to place workpiece. Heating device and cooling device correspond to the below of heating plate respectively, and are connected with controller respectively, under the regulation of controller, complete the heating plate temperature rising or temperature dropping process. Vacuumizing device is arranged outside sealable cavity, and vacuumizing device carries out vacuumizing treatment in sealable cavity, to ensure that welding process is carried out in oxygen-free state, ensure welding quality, reduce the internal porosity of welding simultaneously, improve the reliability of welding.

[0003] The heating plate of the vacuum welding furnace in prior art has low bending strength, and the substrate cannot be stably fixed on the heating plate. SUMMARY

[0004] The utility model provides a kind of positive pressure vacuum welding furnace, to solve the problem of the heating plate of the vacuum welding furnace in prior art with low bending strength, substrate cannot be stably fixed on the heating plate.

[0005] A kind of positive pressure vacuum welding furnace, including upper cavity, lower cavity, high bending strength heating plate, multiple limit blocks, multiple upper heating pipes and multiple lower heating pipes;The upper cavity is set in the upper of the lower cavity, the upper cavity and the lower cavity form sealed vacuum cavity, the high bending strength heating plate is set in the vacuum cavity, the limit block is set on the high bending strength heating plate, the lower heating pipe is set in the lower cavity, the upper heating pipe is set in the inside of the upper cavity.

[0006] According to the positive pressure vacuum welding furnace of the utility model, still include multiple infrared temperature measurement seats and multiple infrared temperature measurement sensors, the upper of the upper cavity is set the infrared temperature measurement seat, the infrared temperature measurement sensor is set inside the infrared temperature measurement seat.

[0007] According to the positive pressure vacuum welding furnace of the utility model, still include substrate, the substrate is set in the inside of the limit block, the infrared temperature measurement sensor is set on the side of the substrate upper side.

[0008] According to the positive pressure vacuum welding furnace of the utility model, still include positive pressure locking mechanism, the side of the vacuum cavity is set the positive pressure locking mechanism.

[0009] According to the positive pressure vacuum welding furnace of the utility model, the high bending strength heating plate is aluminum nitride, silicon carbide or alumina heating plate.

[0010] According to the positive pressure vacuum welding furnace of the utility model, the lower cavity includes a lower cavity frame, a gas pipe and a plurality of cooling pipe support columns, the cooling pipe support columns are arranged at the bottom of the lower cavity frame, and the gas pipe is arranged at both sides inside the lower cavity frame.

[0011] According to the positive pressure vacuum welding furnace of the utility model, a water cooling pipe is arranged inside the bottom of the lower cavity frame.

[0012] According to the positive pressure vacuum welding furnace of the utility model, the upper cavity further includes an upper cavity frame and an observation window, the observation window is arranged at the middle of the upper cavity frame, and a water cooling pipe is arranged inside the top of the upper cavity frame.

[0013] According to the positive pressure vacuum welding furnace of the utility model, a vacuumizing interface is arranged below the lower cavity.

[0014] According to the positive pressure vacuum welding furnace of the utility model, the upper heating pipe and the lower heating pipe are arranged vertically.

[0015] The aluminum nitride heating plate has high bending strength, high thermal conductivity and small thermal deformation coefficient, can better bear the fixing pressure of the limiting block on the substrate and the mechanical pressure possibly generated in the use process, and is not prone to rupture or damage. The aluminum nitride heating plate has good thermal conductivity, can quickly and uniformly heat the substrate, and ensures that the temperatures of all parts of the substrate are consistent. The limiting block can stably fix the substrate on the aluminum nitride heating plate, so that the substrate maintains position accuracy in the heating process, and the heating effect and process accuracy are avoided from being affected by shaking or displacement. In a vacuum environment, the infrared temperature sensor can measure the temperature without contacting the substrate, avoiding the damage to the vacuum environment and the pollution or damage to the surface of the substrate possibly caused by the contact type temperature measurement. The temperature data of the blank part of the substrate can be detected in real time, so that the operator can know the temperature state of the substrate in time, so as to quickly adjust the heating parameters according to the measurement result, and accurately control the temperature in real time. The vacuum welding furnace has a positive pressure function, and the positive pressure locking mechanism is used to maintain the positive pressure of the vacuum welding furnace. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creating laboriously.

[0017] Figure 1 It is a schematic view of the three-dimensional structure of the vacuum welding furnace.

[0018] Figure 2It is a sectional view structure schematic diagram of a vacuum welding furnace;

[0019] Figure 3 It is a sectional view structure schematic diagram of a lower cavity;

[0020] Figure 4 It is an enlarged view structure schematic diagram of a local A;

[0021] Figure 5 It is a sectional view structure schematic diagram of an upper cavity Figure 1 ;

[0022] Figure 6 It is a sectional view structure schematic diagram of an upper cavity Figure 2 ;

[0023] Fig. 1, an upper cavity; 2, a lower cavity; 11, an upper cavity frame; 12, an upper heating pipe; 13, an observation window; 14, a handle assembly; 15, a positive pressure locking mechanism; 16, an infrared temperature measurement seat; 17, a fixed plate; 21, a lower cavity frame; 22, a gas pipe; 23, an aluminum nitride heating plate; 24, a limiting block; 25, a lower heating pipe; 26, a cooling pipe support column; 27, a temperature measurement sensor support; 28, a base plate; 29, a workpiece; 30, a temperature measurement area. DETAILED DESCRIPTION

[0024] The embodiments of the present application will be further described below in conjunction with the drawings and examples. The following examples are used to illustrate the present application, but cannot be used to limit the scope of the present application.

[0025] In the description of the embodiments of the present application, it should be explained that the orientation or position relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the embodiments of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0026] In the description of the embodiments of the present application, it should be explained that unless otherwise explicitly specified and limited, the terms "connected", "connected" should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0027] In the embodiments of the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature can be "above", "over" and "on" the second feature, which can be that the first feature is directly above or obliquely above the second feature, or only means that the horizontal height of the first feature is higher than that of the second feature. The first feature can be "under", "below" and "underneath" the second feature, which can be that the first feature is directly below or obliquely below the second feature, or only means that the horizontal height of the first feature is less than that of the second feature.

[0028] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, the skilled in the art can combine and combine the different embodiments or examples described in the present application and the features of the different embodiments or examples without contradiction.

[0029] The present application will be described below Figures 1-6 The present application discloses a positive pressure vacuum welding furnace, which comprises an upper cavity 1, a lower cavity 2, a high-bending-strength heating plate 23, a plurality of limiting blocks 24, a plurality of upper heating pipes 12 and a plurality of lower heating pipes 25. The upper cavity 1 is arranged above the lower cavity 2, and the upper cavity 1 and the lower cavity 2 form a sealed vacuum cavity. The high-bending-strength heating plate 23 is arranged in the vacuum cavity, the limiting blocks 24 are arranged on the high-bending-strength heating plate 23, the lower heating pipes 25 are arranged in the lower cavity 2, and the upper heating pipes 12 are arranged inside the upper cavity 1.

[0030] In some embodiments, the infrared temperature measurement seat 16 and the infrared temperature measurement sensor are further included. The infrared temperature measurement seat 16 is arranged above the upper cavity 1, and the infrared temperature measurement sensor is arranged inside the infrared temperature measurement seat 16.

[0031] In some embodiments, the substrate 28 is further included, which is arranged on the inner side of the limiting block 24. The infrared temperature measurement sensor is arranged above the side of the substrate 28, that is, the substrate 28 is arranged in the temperature measurement area 30 for the infrared temperature measurement sensor to measure the temperature. The substrate 28 is provided with a groove for placing the workpiece 29.

[0032] In some embodiments, the positive pressure locking mechanism 15 is further included, and the positive pressure locking mechanism 15 is arranged on the side of the vacuum cavity. The fixed plate 17 is arranged on the side of the upper cavity 1, and the positive pressure locking mechanism 15 is locked on the fixed plate 17. The handle assembly 14 is arranged on the opposite side of the positive pressure locking mechanism 15.

[0033] In some embodiments, the high-bending-strength heating plate 23 is an aluminum nitride, silicon carbide or aluminum oxide heating plate 23. The temperature measuring sensor bracket 27 is arranged above the side of the aluminum nitride heating plate 23.

[0034] In some embodiments, the lower cavity 2 includes a lower cavity frame 21, a gas pipe 22 and a plurality of cooling pipe support columns 26. The cooling pipe support columns 26 are arranged on the bottom of the lower cavity frame 21, and the gas pipe 22 is arranged on both sides inside the lower cavity frame 21.

[0035] In some embodiments, the water cooling pipe is arranged inside the bottom of the lower cavity frame 21.

[0036] In some embodiments, the upper cavity 1 further includes an upper cavity frame 11 and an observation window 13. The observation window 13 is arranged in the middle of the upper cavity frame 11, and the water cooling pipe is arranged inside the top of the upper cavity frame 11. The infrared temperature measuring seat 16 is arranged around the observation window 13.

[0037] In some embodiments, the vacuum interface is arranged below the lower cavity 2.

[0038] In some embodiments, the upper heating pipe 12 and the lower heating pipe 25 are arranged vertically.

[0039] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements to some technical features. These modifications or replacements do not make the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A positive pressure vacuum brazing furnace characterized by, It includes upper cavity, lower cavity, high bending strength heating plate, multiple limiting blocks, multiple upper heating pipes and multiple lower heating pipes; the upper cavity is arranged above the lower cavity, the upper cavity and the lower cavity form a sealed vacuum cavity, the high bending strength heating plate is arranged in the vacuum cavity, the limiting blocks are arranged on the high bending strength heating plate, the lower heating pipes are arranged in the lower cavity, and the upper heating pipes are arranged inside the upper cavity.

2. The positive pressure vacuum brazing furnace of claim 1, wherein, It also includes multiple infrared temperature measurement seats and multiple infrared temperature measurement sensors, the infrared temperature measurement seats are arranged above the upper cavity, and the infrared temperature measurement sensors are arranged inside the infrared temperature measurement seats.

3. The positive pressure vacuum brazing furnace of claim 2, wherein, It also includes a substrate, the substrate is arranged on the inner side of the limiting blocks, and the infrared temperature measurement sensors are arranged above the side of the substrate.

4. The positive pressure vacuum brazing furnace of claim 1, wherein, It also includes a positive pressure locking mechanism, and the positive pressure locking mechanism is arranged on the side of the vacuum cavity.

5. The positive pressure vacuum brazing furnace of claim 1, wherein, The high bending strength heating plate is an aluminum nitride, silicon carbide or aluminum oxide heating plate.

6. The positive pressure vacuum brazing furnace of claim 1, wherein, The lower cavity includes a lower cavity frame, a gas pipe and multiple cooling pipe support columns; the cooling pipe support columns are arranged on the bottom of the lower cavity frame, and the gas pipe is arranged on both sides of the inside of the lower cavity frame.

7. The positive pressure vacuum brazing furnace of claim 6, wherein, The inside of the bottom of the lower cavity frame is provided with a water cooling pipe.

8. The positive pressure vacuum furnace according to claim 1, wherein, The upper cavity further includes an upper cavity frame and an observation window; the observation window is arranged in the middle of the upper cavity frame, and a water cooling pipe is arranged in the inside of the top of the upper cavity frame.

9. The positive pressure vacuum brazing furnace of claim 1, wherein, A vacuum extraction interface is arranged below the lower cavity.

10. The positive pressure vacuum brazing furnace of claim 1, wherein, The upper heating pipes and the lower heating pipes are arranged vertically.

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