Electrostatic chuck machining assembly

Abstract

The utility model relates to the technical field of electrostatic chuck equipment, and provides an electrostatic chuck machining assembly which comprises a base and a partition plate, the partition plate is installed on the base and divides the base into two clamping areas, the two ends of each clamping area are further provided with side baffles used for clamping an electrostatic chuck, and lead screws penetrate through the side baffles in a threaded mode and are connected with the partition plate in a threaded mode. The side end face of the side baffle is further connected with an elastic column making contact with the electrostatic chuck. Lead screw transmission replaces rope transmission power, when the motor drives the lead screw to rotate, the side stop linearly moves along the axis of the lead screw, and the problems of fatigue fracture and pretightening force attenuation caused by repeated stretching and bending of the rope in the background technology are thoroughly solved by means of the self-locking characteristic and the zero-elastic-deformation characteristic of a thread pair. The rigid transmission of the lead screw enables the clamping force to be transmitted only through thread thrust, and the risk of dynamic relaxation does not exist.

Description

TECHNICAL FIELD

[0001] The utility model relates to electrostatic chuck equipment technical field, concretely relates to a kind of electrostatic chuck processing assembly. BACKGROUND

[0002] According to the public number for: CN218285072U, a kind of ESC electrostatic chuck insulating coating grinding fixture, motor drives shaft simultaneously drives rope rotation, to move the side of the chuck block towards shaft, spring is compressed slowly, so that ESC electrostatic chuck is clamped into the clamping groove between two chuck blocks, realize for ESC electrostatic chuck clamping, and in long-term use process, rope is repeatedly stretched, bent under the drive of motor, material internal gradually accumulates fatigue damage due to periodic stress, it is insufficient to appear relaxation even rupture that initial pre-tightening force of rope, reliability reduces, for this, we propose a kind of electrostatic chuck processing assembly. UTILITY MODEL CONTENTS

[0003] (One) the technical problem solved

[0004] In view of the deficiencies of the prior art, the utility model provides an electrostatic chuck processing assembly, which overcomes the deficiencies of the prior art, is reasonable in design, compact in structure and solves the problems raised in the background art.

[0005] (Two) technical scheme

[0006] To achieve the above object, the utility model is realized by the following technical scheme:

[0007] An electrostatic chuck processing assembly, comprising a base, a partition plate, the partition plate is installed on the base to divide it into two clamping areas, the two ends of the clamping area are also provided with side stops for clamping the electrostatic chuck, the side stop is threaded through the lead screw and is threadedly connected with the partition plate, and an elastic column in contact with the electrostatic chuck is connected to the side end face of the side stop.

[0008] Preferably, one of the side stops is fixedly connected to the base, and the other side stop is threaded through the lead screw and arranged on the end of the partition plate to drive the side stop to clamp the electrostatic chuck.

[0009] Preferably, a guide column is inserted into the partition plate, a pressure stop is sleeved on the guide column for pressing the electrostatic chuck, and a spring is sleeved on the guide column for resetting the pressure stop.

[0010] Preferably, a limiting piece is installed in the clamping area, the limiting piece comprises a pair of limiting sleeves and connecting rods connecting the limiting sleeves, and a gap exists between the connecting rods.

[0011] Preferably, a convex block is also installed in the clamping area, and the flange of the convex block is clamped in the gap of the connecting rod to make the limiting piece slide on the convex block.

[0012] Preferably, the same side of the side stop is also provided with a first cutting surface and a second cutting surface, and the axis extension lines of the elastic columns on the first cutting surface and the second cutting surface are connected to each other.

[0013] (III) Beneficial Effects

[0014] The utility model embodiment provides a static chuck processing subassembly. It has the following beneficial effects:

[0015] The power is transmitted by replacing the rope with a lead screw, when the motor drives the lead screw to rotate, the side stop moves linearly along the lead screw axis, the self-locking characteristics and zero elastic deformation characteristics of the screw pair are utilized to completely solve the fatigue fracture and pre-tightening force attenuation problems caused by repeated stretching and bending of the rope in the background art, and the rigid transmission of the lead screw enables the clamping force to be transmitted only by the screw thrust, without dynamic relaxation risk. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a structural schematic view of the utility model;

[0017] Figure 2 It is a side view schematic view of the utility model; Figure 1

[0018] Figure 3 It is a schematic view of the side stop of the utility model;

[0019] Figure 4 It is a schematic view of the limiting piece of the utility model.

[0020] In the figure: 1, base; 11, partition; 12, side stop; 121, first cutting surface; 122, second cutting surface; 13, lead screw; 14, elastic column; 15, pressure stop; 16, guide column; 17, spring; 2, limiting piece; 21, limiting sleeve; 22, connecting rod; 3, convex block. DETAILED DESCRIPTION

[0021] To make the purpose, technical scheme and advantages of the utility model embodiments clearer, the technical scheme in the utility model embodiments will be described clearly and completely below in combination with the drawings in the utility model embodiments. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0022] Refer to the drawings Figures 1-4 ​The utility model relates to an electrostatic chuck processing assembly, including base 1, baffle 11, baffle 11 is installed on base 1 and is divided into two clamping areas, it is characterized by: the both ends of the clamping area are equipped with the side stop 12 for clamping electrostatic chuck, the output end of the motor of side stop 12 is connected with screw rod 13, and the motor drives screw rod 13 to thread through and is connected with baffle 11, at this time, screw rod 13 drives side stop 12 to approach the direction of baffle 11, and the elastic column 14 in contact with electrostatic chuck is further connected on the side end surface of side stop 12, to clamp electrostatic chuck.

[0023] One side stop 12 is fixedly connected on base 1, and the other side stop 12 is threadedly arranged on the end of baffle 11 to drive side stop 12 to clamp electrostatic chuck, and a limiting piece 2 is installed in the clamping area, in order to avoid scratching electrostatic chuck, the whole limiting piece 2 is made of elastic material, flexible clamping is realized by elastic column 14 and limiting piece 2, the cooperation of limiting sleeve 21 and connecting rod 22 limits, to ensure that the position of the chuck is fixed during clamping, avoid local stress concentration caused by deviation, the limiting piece 2 includes a pair of limiting sleeve 21 and connecting rod 22 connected with limiting sleeve 21, and a gap exists between connecting rod 22, a convex block 3 is also installed in the clamping area, the flange of convex block 3 is clamped in the gap of connecting rod 22 to make limiting piece 2 slide on convex block 3, at this time, one side of electrostatic chuck is supported by elastic piece 14, and the other side is supported by limiting sleeve 21 to form clamping.

[0024] A guide column 16 is also inserted on baffle 11, a pressure stop 15 is sleeved on guide column 16 to press electrostatic chuck, a spring 17 is also sleeved on guide column 16 to reset pressure stop 15, a corresponding groove exists in the middle of pressure stop 15, a cylinder pushes pressure stop 15 to slide down along guide column 16, and spring 17 is compressed, the both ends of pressure stop 15 are displaced downward and are supported on connecting rod 22 of limiting piece 2, so that it is fixed, the cylinder pushes pressure stop 15 to compress spring 17 and is supported on limiting piece 2, to further balance the clamping pressure and avoid unilateral overload.

[0025] A first cutting surface 121 and a second cutting surface 122 are also arranged on the same side of side stop 12, the axis extension lines of elastic column 14 located on the first cutting surface 121 and the second cutting surface 122 are connected with each other, the axis extension lines of the two rows of elastic column 14 form "cross constraint", bidirectional friction is generated during clamping, effectively resist the tangential force, such as the torque of rotary grinding head, that the chuck receives during grinding, to prevent the chuck from slipping or rotating deviation.

[0026] It is to be noted that, in the present text, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element preceded by "comprises a" does not, without more constraints, foreclose the existence of additional identical elements in the process, method, article, or apparatus that comprises the recited element.

[0027] The above embodiments are only used to illustrate the technical solutions of the present application, but not limit the present application; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. An electrostatic chuck processing assembly comprising a base (1), a partition (11) installed on the base (1) to divide it into two clamping areas, characterized in that: The two ends of the clamping area are also provided with side stops (12) for clamping the electrostatic chuck, the side stops (12) are threaded through by a lead screw (13) and are threadedly connected with the partition plate (11), and an elastic column (14) in contact with the electrostatic chuck is connected to the side end face of the side stop (12).

2. An electrostatic chuck assembly as set forth in claim 1, further comprising: One of the side stops (12) is fixedly connected to the base (1), and the other side stop (12) is threaded through the end of the partition plate (11) by the lead screw (13) to drive the side stop (12) to clamp the electrostatic chuck.

3. An electrostatic chuck assembly as set forth in claim 1, wherein: A guide column (16) is also inserted into the partition plate (11), a pressure stop (15) is sleeved on the guide column (16) for pressing the electrostatic chuck, and a spring (17) is also sleeved on the guide column (16) for resetting the pressure stop (15).

4. An electrostatic chuck assembly as set forth in claim 1, further comprising: A limiting piece (2) is installed in the clamping area, the limiting piece (2) includes a pair of limiting sleeves (21) and connecting rods (22) connecting the limiting sleeves (21), and there is a gap between the connecting rods (22).

5. An electrostatic chuck assembly as set forth in claim 4, wherein: A convex block (3) is also installed in the clamping area, the flange of the convex block (3) is clamped in the gap of the connecting rods (22) to make the limiting piece (2) slide on the convex block (3).

6. An electrostatic chuck assembly as claimed in any one of claims 1 to 5, wherein: The same side of the side stop (12) is also provided with a first cutting surface (121) and a second cutting surface (122), and the axis extension lines of the elastic columns (14) located on the first cutting surface (121) and the second cutting surface (122) are connected with each other.

Images