Four-chamber vacuum coating machine arranged in shape like Chinese character'hui '

Abstract

The utility model discloses a rectangular-ambulatory-plane-shaped four-chamber vacuum coating machine which comprises a pre-treatment chamber, a first optical coating process chamber, a second optical coating process chamber and a post-treatment chamber which are sequentially connected together, an inlet and an outlet of the first optical coating process cavity and an inlet and an outlet of the second optical coating process cavity are formed in two adjacent surfaces of the cavities, and the pre-treatment cavity and the post-treatment cavity are positioned on the same side, so that the inlet and the outlet of the four-cavity vacuum coating machine are positioned on the same side; an inlet and an outlet of the four-cavity vacuum coating machine are directly connected through a linear connecting platform, and a linear conveying mechanism capable of conveying the rotating frame in one direction is arranged in the front treatment cavity and the rear treatment cavity. And rotating stand conveying and reversing mechanisms capable of conveying the rotating stands and reversing the conveying direction are arranged in the first optical coating process cavity and the second optical coating process cavity. The conveying device is small in occupied space and higher in conveying efficiency.

Description

TECHNICAL FIELD

[0001] The utility model relates to multi -chamber vacuum coating technical field, concretely relates to a four chamber vacuum coating machine of back -shaped arrangement. BACKGROUND

[0002] Multi -chamber vacuum coating machine refers to the coating machine of two or more vacuum chambers in series, and the plug -in valve is arranged between the vacuum chambers, and the vacuum chambers are sealed off or opened through the plug -in valve, the workpiece is installed on the rotating frame, and the rotating frame needs to automatically flow between different chambers, when flowing into the chamber of coating process, the rotating head arranged on the lifting assembly is topped under the rotating frame, the rotating frame is lifted, the top of the rotating frame is connected with the rotating assembly of the chamber top, then the rotating frame is driven to rotate through the rotating assembly, to realize uniform coating.

[0003] But the multiple vacuum chambers of the existing multi -chamber vacuum coating machine will be arranged on a straight line, and the inlet and outlet of the multi -chamber vacuum coating machine will be located at both ends, so that a longer connecting platform is needed to connect the inlet and outlet of the multi -chamber vacuum coating machine, and the area occupied by the coating machine as a whole will be larger.

[0004] Such as the Chinese patent with application No. 202122000052.7 discloses a kind of multi-chamber vacuum magnetron sputtering coating device, it includes continuously arranged multiple vacuum chambers, multiple vacuum chambers are located on a straight line, and conveying mechanism is sequentially connected at both ends and front of coating device, conveying mechanism is the connecting platform described above, the inlet and outlet of coating device are connected by conveying mechanism, the conveying distance of conveying mechanism is far, and the area occupied by coating device as a whole is large. UTILITARIAN CONTENT

[0005] The utility model aims at providing a kind of four chamber vacuum coating machine of back -shaped arrangement, it is small in space occupation, and conveying efficiency is higher.

[0006] The utility model is realized by the following technical scheme:

[0007] The utility model provides a four chamber vacuum coating machine of square arrangement, it is characterized by: including front treatment chamber, first optical coating process chamber, second optical coating process chamber and post treatment chamber that connect together gradually, the entrance and export of first optical coating process chamber and the entrance and export of second optical coating process chamber all are equipped on the adjacent two faces of chamber, and the front treatment chamber and post treatment chamber are located at the same side, make the entrance and export of four chamber vacuum coating machine be located at the same side, the entrance and export of four chamber vacuum coating machine are connected through a straight line type's connecting platform directly, and the front treatment chamber and post treatment chamber are equipped with the linear conveying mechanism that can convey in one direction to the rotating frame, and the first optical coating process chamber and second optical coating process chamber are equipped with the rotating frame transmission and reversing mechanism that can convey to the rotating frame and can reverse to the conveying direction.

[0008] The utility model further provides a technical scheme: the first optical coating process chamber and second optical coating process chamber are all set arc cavity wall at the opposite position of the intersection of the face where the entrance and export are located, and the coating assembly of the first optical coating process chamber and second optical coating process chamber is installed on the arc cavity wall.

[0009] The utility model further provides a technical scheme: the intermediate conveying mechanism for supporting the rotating frame and conveying forward is arranged near the export and / or entrance of the chamber.

[0010] The utility model further provides a technical scheme: the supporting mechanism for supporting the rotating frame is arranged near the export and / or entrance of the chamber.

[0011] The utility model further provides a technical scheme: the rotating frame transmission and reversing mechanism includes fixed seat, rotating plate, rotating motor, first conveying motor and first transmission wheel group, the fixed seat is fixedly arranged at the bottom of the chamber, the rotating plate is rotatably arranged on the upper surface of the fixed seat, the first reserved hole for installing the lifting assembly is arranged between the fixed seat and the rotating plate, the rotating motor is arranged below the rotating plate, the rotating plate is driven to rotate by the rotating motor, the first conveying motor and the first transmission wheel group are both arranged on the upper surface of the rotating plate, and the first transmission wheel group is driven by the first conveying motor.

[0012] The utility model further provides a technical scheme: the linear conveying mechanism includes second fixed plate, second conveying motor and second transmission wheel group, the second fixed plate is fixedly arranged at the bottom of the chamber, the second reserved hole for installing the lifting assembly is arranged in the middle of the second fixed plate, the second conveying motor and the second transmission wheel group are both arranged on the upper surface of the second fixed plate, and the second transmission wheel group is driven by the second conveying motor.

[0013] The utility model further provides a technical scheme: the intermediate conveying mechanism includes third fixed plate, two transmission wheels respectively arranged at the two ends of the third fixed plate and third conveying motor, and the transmission wheel is driven by the third conveying motor.

[0014] The further technical scheme of the utility model discloses: support mechanism includes first fixed plate and two transmission wheels that are arranged respectively at both ends of first fixed plate.

[0015] Compared with the prior art, the utility model has the following beneficial effects:

[0016] The utility model discloses the inlet and outlet of optical coating process cavity are located on two adjacent faces, and the pre-treatment cavity and post-treatment cavity are located on the same side, so that the inlet and outlet of four-chamber vacuum coating machine are located on the same side, which can connect the inlet and outlet of four-chamber vacuum coating machine through a straight line type connecting platform, the length of the connecting platform can be designed smaller, the conveying distance from the outlet to the inlet is short, and the conveying efficiency is greatly improved. Moreover, the utility model occupies small area as a whole, compared with the coating device of the background technology: the coating device in the embodiment of the patent with the application number 202122000052.7 needs to occupy ten unit positions, and the four-chamber vacuum coating machine of the utility model only needs to occupy six unit positions. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is the top view schematic diagram of four-chamber vacuum coating machine of the utility model embodiment;

[0018] Figure 2 It is the top view schematic diagram of connecting platform of the utility model embodiment;

[0019] Figure 3 It is the front view schematic diagram of four-chamber vacuum coating machine of the utility model embodiment;

[0020] Figure 4 It is the internal arrangement structure schematic diagram of chamber of four-chamber vacuum coating machine of the utility model embodiment;

[0021] Figure 5 It is the top view schematic diagram of rotating stand transmission and reversing mechanism of the utility model embodiment;

[0022] Figure 6 It is the side view schematic diagram of rotating stand transmission and reversing mechanism of the utility model embodiment;

[0023] Figure 7 It is the bottom view schematic diagram of rotating stand transmission and reversing mechanism of the utility model embodiment;

[0024] Figure 8 It is the structure schematic diagram of transmission wheel and rotating stand cooperation of the utility model embodiment;

[0025] Figure 9 It is the top view schematic diagram of straight line conveying mechanism of the utility model embodiment;

[0026] Figure 10 is a side view schematic diagram of the linear conveying mechanism of the embodiment of the utility model;

[0027] Figure 11 is a side view schematic diagram of the intermediate conveying mechanism of the embodiment of the utility model;

[0028] Figure 12 is a top view schematic diagram of the intermediate conveying mechanism of the embodiment of the utility model;

[0029] Figure 13 is a side view schematic diagram of the support mechanism of the embodiment of the utility model;

[0030] Figure 14 is a top view schematic diagram of the support mechanism of the embodiment of the utility model;

[0031] Figure 15 is a structure schematic diagram of the rotary frame in the process of entering the front processing cavity in the embodiment of the utility model;

[0032] Figure 16 is a structure schematic diagram of the rotary frame when entering the front processing cavity completely in the embodiment of the utility model;

[0033] Figure 17 is a structure schematic diagram of the rotary frame in the process of entering the first optical coating process cavity in the embodiment of the utility model;

[0034] Figure 18 is a structure schematic diagram of the rotary frame when entering the first optical coating process cavity completely in the embodiment of the utility model;

[0035] Figure 19 is a structure schematic diagram of the rotary frame in the process of entering the second optical coating process cavity in the embodiment of the utility model;

[0036] Figure 20 is a structure schematic diagram of the rotary frame when entering the second optical coating process cavity completely in the embodiment of the utility model;

[0037] Figure 21 is a structure schematic diagram of the rotary frame in the process of entering the rear processing cavity in the embodiment of the utility model;

[0038] Figure 22 is a structure schematic diagram of the rotary frame when entering the rear processing cavity completely in the embodiment of the utility model.

[0039] The meaning of the reference signs in the drawing is as follows:

[0040] 1-rotating plate; 1.1-reserved hole; 2-transport wheel; 2.1-guide groove; 3-chain; 4-driven rotating shaft; 5-wheel seat; 6-position sensor; 7-driven gear; 8-sealing box; 9-rotating transmission and reversing mechanism; 10-driving rotating shaft; 11-sprocket; 12-conveying motor; 13-fixed seat; 14-rotating motor; 15-motor mounting frame; 16-shaft connector; 17-magnetic fluid sealing device; 18-bottom of chamber; 19-driving gear; 20-bearing outer hub; 21-rotating frame; 22-guide rail; 23-pre-treatment chamber; 24-first optical coating process chamber; 25-second optical coating process chamber; 26-post-treatment chamber; 27-lifting assembly; 28-connection platform; 29-linear conveying mechanism; 30-hatch; 31-plug valve; 32-vacuumizing device; 33-coating assembly; 34-mounting space of coating assembly; 35-supporting mechanism; 36-intermediate conveying mechanism; 37-cryogenic device and molecular pump; 38-heating device; 39-second fixed plate; 40-second reserved hole; 41-second conveying motor; 42-rising seat; 43-third fixed plate; 44-third conveying motor; 45-second motor mounting frame; 46-driving helical gear; 47-driven helical gear; 48-first fixed plate; 49-arc-shaped chamber wall; 50-matching device mounting wall; 51-inlet of optical coating process chamber; 52-outlet of optical coating process chamber; 53-inlet of four-chamber vacuum coating machine; 54-outlet of four-chamber vacuum coating machine. DETAILED DESCRIPTION

[0041] The utility model is further described below in combination with the embodiments.

[0042] In the description of the utility model, it needs to be understood that the orientation description, such as the orientation or position relation indicated by up, down, front, back, left, right and the like, is based on the orientation or position relation shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as the limitation of the utility model.

[0043] In the description of the utility model, the meaning of several is one or more, and the meaning of multiple is two or more, and greater than, less than, more than and the like are not included in the number, and above, below and the like are included in the number.If it is described to the first and the second, it is only for the purpose of distinguishing technical features, and therefore cannot be understood as indicating or implying the relative importance or implicitly indicating the number of indicated technical features or the sequence of indicated technical features.

[0044] In the description of the utility model, unless otherwise explicitly limited, the words such as setting, installation, connection should be understood broadly, and the skilled in the art can determine the specific meaning of the above words in the utility model according to the specific content of the technical scheme.

[0045] Embodiment:

[0046] As Figures 1 to 4 The four chambers of the utility model include front treatment chamber 23, first optical coating process chamber 24, second optical coating process chamber 25 and post treatment chamber 26 connected in sequence.

[0047] The inlet 51 of the optical coating process chamber and the outlet 52 of the optical coating process chamber are arranged on the adjacent two faces of the chamber, the face where the inlet 51 of the optical coating process chamber and the outlet 52 of the optical coating process chamber of the utility model are perpendicular, the outlet 23 of the front treatment chamber is connected with the inlet of the first optical coating process chamber 24, the outlet of the first optical coating process chamber 24 is connected with the inlet of the second optical coating process chamber 25, the outlet of the second optical coating process chamber 25 is connected with the inlet of the post treatment chamber 26, and the inlet of the front treatment chamber 23 and the outlet of the post treatment chamber 26 are the inlet and outlet of the four-chamber vacuum coating machine. The front treatment chamber 23 and the post treatment chamber 26 are located on the same side, so that the inlet and outlet of the four-chamber vacuum coating machine are located on the same side. The preferred scheme is that the inlet 53 of the four-chamber vacuum coating machine is located on the left side, and the outlet 54 of the four-chamber vacuum coating machine is located on the right side.

[0048] The specific process possessed by the front treatment chamber 23, the first optical coating process chamber 24, the second optical coating process chamber 25 and the post treatment chamber 26 is not necessarily definite, and different processing processes can be realized by installing corresponding devices in the front treatment chamber 23, the first optical coating process chamber 24, the second optical coating process chamber 25 and the post treatment chamber 26 according to needs. For example, heating device 38, deep cooling device and molecular pump 37 can be installed on the chamber wall of the front treatment chamber 23 to pre-treat the workpiece on the rotating frame 21 in the front treatment chamber 23; different coating assemblies 33, deep cooling devices and molecular pumps 37 can be installed in the first optical coating process chamber 24 and the second optical coating process chamber 25 to perform coating of different film layers; deep cooling devices and molecular pumps 37 can be installed in the post treatment chamber 26 to perform subsequent process treatment.

[0049] The first optical coating process cavity 24 and the second optical coating process cavity 25 of the embodiment are provided with arc-shaped cavity walls 49 at positions opposite to the intersection of the faces where the respective inlets and outlets are located, and the coating assemblies 33 of the first optical coating process cavity 24 and the second optical coating process cavity 25 are installed on the arc-shaped cavity walls 49, and the circumferential center of the arc-shaped cavity walls 49 coincides with the rotation center of the rotating frame 21 in the optical coating process cavity. Figure 4 The coating assemblies 33 are not shown in the embodiment, and only the installation positions 34 of the coating assemblies are shown.

[0050] Moreover, the arc-shaped cavity walls 49 will be inclined to one side of the optical coating process cavity (in the embodiment, the arc-shaped cavity wall 49 of the first optical coating process cavity 24 is inclined to the side where the inlet is located, and the arc-shaped cavity wall 49 of the second optical coating process cavity 25 is inclined to the side where the outlet is located), and the other side will have more space, which is used as a device installation wall 50, so that other devices, such as a cryogenic device and a molecular pump, can be installed.

[0051] Of course, a plug valve 31 will be arranged between the connected cavities, and when the cavity needs to be vacuumized for operation, the cavity will be sealed and separated from other cavities through the plug valve 31. The inlet of the pre-processing cavity 23 and the outlet of the post-processing cavity 26 are provided with corresponding conventional sealable doors 30, so as to realize the closing and opening of the inlets and outlets. The bottoms of the pre-processing cavity 23, the first optical coating process cavity 24, the second optical coating process cavity 25 and the post-processing cavity 26 are respectively provided with conventional lifting assemblies 27, and the tops are respectively provided with conventional rotating assemblies, so as to lift and rotate the rotating frame 21. The four-cavity vacuum coating machine is also provided with a conventional vacuumizing device 32, so as to vacuumize the cavities.

[0052] The inlet and the outlet of the four-cavity vacuum coating machine are directly connected through a straight connecting platform 28, and the connecting length of the connecting platform 28 of the embodiment is small, the conveying distance is short, and the occupied area is small.

[0053] The embodiment is provided with a rotating frame transmission and reversing mechanism 9 which can convey the rotating frame and reverse the conveying direction in the first optical coating process cavity 24 and the second optical coating process cavity 25, and is provided with a straight line conveying mechanism 29 which can convey the rotating frame in one direction in the pre-processing cavity 23 and the post-processing cavity 29, and is respectively provided with intermediate conveying mechanisms 36 for supporting and conveying the rotating frame 21 forward at the outlet of the pre-processing cavity 23, the inlet of the first optical coating process cavity 24, the outlet of the first optical coating process cavity 24, the inlet of the second optical coating process cavity 25, the outlet of the second optical coating process cavity 25 and the inlet of the post-processing cavity 26, and is respectively provided with supporting mechanisms 35 at the inlet of the pre-processing cavity 23, the inlet of the second optical coating process cavity 25 and the outlet of the post-processing cavity 26.

[0054] like Figures 5 to 7 As shown, the specific structure of the rotating frame transmission and reversing mechanism 9 in this embodiment is as follows: it includes a fixed base 13, a rotating plate 1, a rotating motor 14, a first conveying motor 12, and a first transmission wheel set.

[0055] The fixed seat 13 is used to fix the bottom 18 of the chamber. The rotating plate 1 is in the shape of a disc and is rotatably mounted on the fixed seat 13 via a conventional bearing. The specific structure is as follows: the outer hub 20 of the bearing is fixedly connected to the bottom of the rotating plate 1, and the inner hub of the bearing is fixedly connected to the top of the fixed seat 13.

[0056] The fixed base 13 and the rotating plate 1 are provided with a first reserved hole 1.1 for installing the lifting component 27, so that the rotating frame transmission and reversing mechanism can be installed in the optical coating process cavity without affecting the lifting movement of the lifting component 27 in the cavity itself.

[0057] The rotary motor 14 is mounted outside the bottom 18 of the chamber via a first motor mounting bracket 15, located below the rotating plate. This means the rotary motor 14 will be located outside the optical coating process chamber and will not be in the vacuum environment of the optical coating process chamber during use. The upper end of the first motor mounting bracket 15 is fixedly connected to the bottom 18 of the chamber with bolts, and the rotary motor 14 is in a vertically mounted state. The bottom 18 of the chamber is connected to a conventional magnetic fluid sealing device 17. The output shaft of the rotary motor 14 is connected to the lower end of the intermediate shaft of the magnetic fluid sealing device 17 via a shaft connector 16. A drive gear 19 is connected to the upper end of the intermediate shaft of the magnetic fluid sealing device 17, thereby connecting the drive gear 19 to the output shaft of the rotary motor 14. The rotary motor 14 drives the drive gear 19 to rotate, achieving sealing simultaneously.

[0058] A driven gear 7 is fixedly connected to the outer hub 20 of the bearing. The driven gear 7 is a quarter-turn gear. The center of the driven gear 7 coincides with the center of the rotating plate 1. The driving gear 7 meshes with the driven gear 7, so that the rotating plate 1 can be driven to rotate by the rotary motor 14.

[0059] Two sets of first transmission wheel assemblies are respectively arranged on both sides of the rotating plate. Each set of first transmission wheel assemblies includes three transmission wheels 2 located on the same conveying path. The conveying paths of the two sets of first transmission wheel assemblies are parallel, and the transmission wheels 2 of each first transmission wheel assembly are connected by a first sprocket assembly. Specifically, each transmission wheel 2 in the first transmission wheel assembly is provided with a wheel seat 5, which is fixedly installed on the rotating plate 1. The transmission wheel 2 is rotatably mounted on the wheel seat 5 via a driven shaft 4. The first sprocket assembly includes a chain 3 and sprockets 11 provided on the driven shaft 4. Sprockets 11 are provided at both ends of the driven shaft 4 located in the middle, and the chain 3 connects the sprockets 11 on the adjacent driven shafts 4.

[0060] The embodiment is provided with a sealed box 8 on the rotating plate 1, and the first conveying motor 12 is arranged in the sealed box 8, so as to isolate the first conveying motor 12 from the vacuum environment in the chamber, and solve the problem that the motor is easy to cause fire when operating in the vacuum environment.

[0061] One end of the driven rotating shaft 4 of the two sets of first transmission wheel groups is connected through the driving rotating shaft 10, and the first conveying motor 12 and the driving rotating shaft 10 are located at the same end of the rotating plate 1. The first conveying motor 12 is connected with the driven rotating shaft 4 at one end of the driving rotating shaft 10, so as to drive the transmission wheel 2 to rotate through the first conveying motor 12. The rotating sealing connection between the shaft and the sealed box 8 can be realized through a conventional magnetic fluid sealing device or other conventional sealing structure.

[0062] The periphery of the transmission wheel 2 of the embodiment is provided with a guide groove 2.1, which is used for cooperating with the guide rail 22 at the bottom of the rotating frame 21. As shown in Figure 8 , when the conveying rotating frame 21 is conveyed, the bottom of the guide rail 22 will be embedded in the guide groove 2.1.

[0063] As shown in Figure 9 and Figure 10 , the linear conveying mechanism 29 of the embodiment includes a second fixed plate 39, a second conveying motor 41 and a second transmission wheel group. The second fixed plate 29 is in the shape of a rectangle, and the second fixed plate 29 is fixed on the bottom of the chamber through a cushion seat 42, which is used for lifting the height of the second fixed plate 29. The bottom of the cushion seat 42 is fixedly connected with the bottom of the chamber, and the top is fixedly connected with the second fixed plate 39. The middle of the second fixed plate 39 is provided with a second reserved hole 40 for installing a lifting assembly. The second conveying motor 41 and the second transmission wheel group are both arranged on the upper surface of the second fixed plate 39, and the second transmission wheel group is driven by the second conveying motor 41.

[0064] The second transmission wheel group has two sets, which are arranged on the two sides of the upper surface of the second fixed plate 39 respectively. The structure of the second transmission wheel group is the same as that of the first transmission wheel group, and both include the transmission wheel 2 which is rotatably installed on the wheel seat 5 through the driven rotating shaft 4. The transmission wheels 2 of the second transmission wheel groups are connected by a second sprocket assembly, and the structure of the second sprocket assembly is the same as that of the first sprocket assembly, and both include the chain 3 and the sprocket 11 arranged on the driven rotating shaft 4.

[0065] The second fixed plate is also provided with a sealed box 8, and the second conveying motor 41 is arranged in the sealed box 8 on the second fixed plate 39.

[0066] The second conveying motor 41 is connected with the driven rotating shaft 4 at one end of the second transmission wheel set, so that the transmission wheel 2 can be driven to rotate by the second conveying motor 41. The rotating sealing connection between the shaft and the sealing box 8 can be realized by a conventional magnetic fluid sealing device or other conventional sealing structure.

[0067] As shown in Figure 11 and Figure 12 , the intermediate conveying mechanism 36 of the embodiment comprises a third fixed plate 43, two transmission wheels 2 and a third conveying motor 44. The third fixed plate 43 is in a long strip shape, the two transmission wheels 2 are respectively rotatably installed on the wheel seats 5 at both ends of the third fixed plate 43 through the driven rotating shafts 4, the driven rotating shafts 4 at both ends are connected through the driving rotating shaft 10, and the outer end of the driven rotating shaft 4 at one end is connected with the driven bevel gear 47.

[0068] The third conveying motor 44 is installed outside the bottom 18 of the chamber through the second motor mounting frame 45, that is, the third conveying motor 44 is located outside the chamber and will not be in the vacuum environment of the chamber during use. The upper end of the second motor mounting frame 45 is fixedly connected with the bottom 18 of the chamber through bolts, the third conveying motor 44 is in a vertical installation state, the bottom 18 of the chamber is connected with a conventional magnetic fluid sealing device 17, the output shaft of the third conveying motor 44 is connected with the lower end of the intermediate shaft of the magnetic fluid sealing device 17 through the shaft connector 16, and the driving bevel gear 46 is connected with the output shaft of the third conveying motor 44 through the upper end of the intermediate shaft of the magnetic fluid sealing device 17, so that the driving bevel gear 46 is driven to rotate by the third conveying motor 44 while realizing sealing. The driving bevel gear 46 is engaged with the driven bevel gear 47, so that the transmission wheel 2 of the intermediate conveying mechanism 36 can be driven to rotate by the third conveying motor 44.

[0069] As shown in Figure 13 and Figure 14 , the support mechanism 35 of the embodiment comprises a first fixed plate 48 and two transmission wheels 2. The first fixed plate 48 is in a long strip shape, the two transmission wheels 2 are respectively rotatably installed on the wheel seats 5 at both ends of the first fixed plate 48 through the driven rotating shafts 4, and the driven rotating shafts 4 at both ends are connected through the driving rotating shaft 10. The transmission wheels 2 of the support mechanism 35 play a transitional supporting role for the rotating frame 21 and do not have power.

[0070] The embodiment also has corresponding position sensors 6 on the mechanism. The specific distribution of the position sensors 6 is as follows: a first position sensor 6.1 is arranged on the front side of the support mechanism 35 at the entrance of the pre-processing cavity 23, a second position sensor 6.2 is arranged on the rear side of the intermediate conveying mechanism 36 at the exit of the pre-processing cavity 23, a third position sensor 6.3 and a fourth position sensor 6.4 are respectively arranged at both ends of the conveying path of the rotary table transmission and reversing mechanism 9 of the first optical coating process cavity 24, a fifth position sensor 6.5 and a sixth position sensor 6.6 are respectively arranged at both ends of the conveying path of the rotary table transmission and reversing mechanism 9 of the second optical coating process cavity 25, a seventh position sensor 6.7 is arranged on the front side of the intermediate conveying mechanism 36 at the entrance of the post-processing cavity 26, and an eighth position sensor 6.8 is arranged on the rear side of the support mechanism 35 at the exit of the post-processing cavity 26. The above-mentioned position sensors 6 are all located on the movement path of the guide rail 22 at the bottom of the rotary table, and the position sensors 6 are triggered by the contact between the guide rail 22 and the position sensors 6.

[0071] The two ends of the connecting platform 28 of the embodiment are respectively close to the entrance 53 of the four-chamber vacuum coating machine and the exit 54 of the four-chamber vacuum coating machine, the rotary table transmission and reversing mechanism 9 is respectively arranged at the bottom of the two ends of the connecting platform 28, and the linear conveying mechanism 29 is arranged in the middle of the connecting platform 28, so as to realize the conveying of the rotary table.

[0072] The operation process of the four-chamber vacuum coating machine of the embodiment is as follows:

[0073] P1, the workpiece to be coated is loaded on the rotary table 21 located at the end of the connecting platform 28 close to the entrance 53 of the four-chamber vacuum coating machine;

[0074] P2, after the loading is completed, the rotary table transmission and reversing mechanism 9 of the connecting platform 28 sends the rotary table 21 together with the workpiece thereon into the pre-processing cavity 23, as shown in Figure 15 , during the sending process, the guide rail 22 of the rotary table 21 first triggers the first position sensor 6.1, after the first position sensor 6.1 is triggered, the second conveying motor 41 of the linear conveying mechanism 29 of the pre-processing cavity 23 is started, and after the rotary table 21 continues to enter, the guide rail 22 is correspondingly clamped into the transmission wheel 2 of the linear conveying mechanism 29 of the pre-processing cavity 23, and the rotary table 21 is finally completely moved to the linear conveying mechanism 29 of the pre-processing cavity 23, at this time the guide rail 22 is separated from the first position sensor 6.1, the second conveying motor 41 of the linear conveying mechanism 29 is stopped, at this time, as shown in Figure 16 , the hatch 30 and the corresponding plug valve 31 are closed, vacuum is drawn, and the rotary table 21 stays in the pre-processing cavity 23 for pre-processing;

[0075] P3, after the pretreatment is completed, the corresponding slide valve 31 opens, and the linear conveying mechanism 29 of the pretreatment chamber 23 is activated, conveying the rotating frame 21 to the first optical coating process chamber 24, such as... Figure 17 As shown, during the conveying process, the guide rail 22 first triggers the second position sensor 6.2, starting the intermediate conveying mechanism 36 at the outlet of the pre-processing cavity 23. Then, after entering the first optical coating process cavity 24, it triggers the third position sensor 6.3, starting the intermediate conveying mechanism 36 at the entrance of the first optical coating process cavity 24 and the first conveying motor of the rotating frame transmission and reversing mechanism 9 of the first optical coating process cavity 24. Finally, the rotating frame 21 moves completely onto the rotating frame transmission and reversing mechanism 9 of the first optical coating process cavity 24. At this time, the fourth position sensor 6.4 is triggered, and the motor stops. Figure 18 As shown, the corresponding gate valve 31 is then closed, a vacuum is drawn, and the first coating process is carried out in the first optical coating process chamber 24.

[0076] P4, after the first coating process is completed, the corresponding gate valve 31 opens, and the rotary motor of the rotating frame transport and reversing mechanism 9 of the first optical coating process cavity 24 starts, causing the rotating frame 21 to rotate 90°. Then, the first conveying motor of the rotating frame transport and reversing mechanism 9 of the first optical coating process cavity 24 and the intermediate conveying mechanism 36 at the outlet of the first optical coating process cavity 24 start, conveying to the second optical coating process cavity 25, such as... Figure 19 As shown, during the conveying process, when the guide rail 22 triggers the fifth position sensor 6.5, the first conveying motor of the intermediate conveying mechanism 36 at the entrance of the second optical coating process cavity 25 and the rotating frame transmission and reversing mechanism 9 of the second optical coating process cavity 25 starts, ultimately causing the rotating frame 21 to move completely onto the rotating frame transmission and reversing mechanism 9 of the second optical coating process cavity 25. At this time, the sixth position sensor 6.6 is triggered, and the motor stops. Figure 20 As shown, the corresponding gate valve 31 is then closed, a vacuum is drawn, and the second coating process is carried out in the second optical coating process chamber 25.

[0077] P5, after the second coating process is completed, the corresponding gate valve 31 opens, and the rotary motor of the rotating frame transport and reversing mechanism 9 of the second optical coating process chamber 25 starts, causing the rotating frame 21 to rotate 90°. Then, the first conveying motor of the rotating frame transport and reversing mechanism 9 of the second optical coating process chamber 25 and the intermediate conveying mechanism 36 at the outlet of the second optical coating process chamber 25 start, conveying to the subsequent processing chamber 26, such as... Figure 21 As shown, during the conveying process, when the guide rail 22 triggers the seventh position sensor 6.7, the intermediate conveying mechanism 36 and the linear conveying mechanism 29 of the post-processing chamber 26 are activated, ultimately conveying the rotating frame 21 onto the linear conveying mechanism 29 of the post-processing chamber 26. At this time, the guide rail disengages from the seventh position sensor 6.7, the motor stops, and then...Figure 22 As shown, the corresponding slide gate valve 31 is closed, and post-processing is performed in the post-processing chamber 26;

[0078] After P6, following the post-processing, the hatch 30 and corresponding slide valve 31 are opened for unloading. The linear conveyor mechanism 29 of the post-processing chamber 26 is activated, and the rotating frame 21 is transported to the rotating frame transfer and reversing mechanism 9 near the outlet of the four-chamber vacuum coating machine on the connecting platform 29. When the sensor on the connecting platform 28 is triggered, the first conveyor motor of the rotating frame transfer and reversing mechanism 9 on the connecting platform starts. Finally, the rotating frame 21 completes its exit from the chamber and stops at the rotating frame transfer and reversing mechanism 9 on the connecting platform 28. The rotary motor of the rotating frame transfer and reversing mechanism 9 on the connecting platform 28 starts, rotates 90°, and then cooperates with the linear conveyor mechanism 29 on the connecting platform 28 for transport. Finally, it arrives at the rotating frame transfer and reversing mechanism 9 on the left side of the connecting platform 28, where it is unloaded and loaded. Then, the above steps are repeated to process the workpiece, and the cycle continues.

[0079] Of course, during the above process, the rotating frame transmission and reversing mechanism 9 will rotate and reset after completing the rotation reversal and sending the rotating frame 21 out.

[0080] The above embodiments of this utility model are not intended to limit the scope of protection of this utility model. The implementation of this utility model is not limited thereto. All other modifications, substitutions or alterations made to the above structure of this utility model based on the above content of this utility model and in accordance with the common technical knowledge and conventional means in the field, without departing from the basic technical idea of ​​this utility model, shall fall within the scope of protection of this utility model.

Claims

1. A four-chamber vacuum coating machine of a Hangeul character arrangement, characterized in that: The four-chamber vacuum coating machine comprises a pre-treatment chamber, a first optical coating process chamber, a second optical coating process chamber and a post-treatment chamber connected in sequence, the inlet and outlet of the first optical coating process chamber and the inlet and outlet of the second optical coating process chamber are arranged on two adjacent surfaces of the chamber, the pre-treatment chamber and the post-treatment chamber are arranged on the same side, so that the inlet and outlet of the four-chamber vacuum coating machine are arranged on the same side, the inlet and outlet of the four-chamber vacuum coating machine are directly connected by a linear connecting platform, the pre-treatment chamber and the post-treatment chamber are provided with a linear conveying mechanism capable of conveying a rotary frame in one direction, and the first optical coating process chamber and the second optical coating process chamber are provided with a rotary frame transmission and reversing mechanism capable of conveying a rotary frame and reversing the conveying direction.

2. The four-chamber vacuum coating machine of the return- shaped arrangement according to claim 1, characterized in that: The first optical coating process chamber and the second optical coating process chamber are provided with arc-shaped cavity walls at positions opposite to the intersection of the surfaces where the inlets and outlets are arranged, and the coating assemblies of the first optical coating process chamber and the second optical coating process chamber are mounted on the arc-shaped cavity walls.

3. The four-chamber vacuum coating machine of the return- shaped arrangement according to claim 1, characterized in that: An intermediate conveying mechanism for supporting and conveying the rotary frame forward is arranged near the outlet and / or inlet of the chamber.

4. The four-chamber vacuum coating machine of the return- shaped arrangement according to claim 1, characterized in that: A supporting mechanism for supporting the rotary frame is arranged near the outlet and / or inlet of the chamber.

5. The square-shaped four-chamber vacuum coating machine of claim 1, wherein: The rotary frame transmission and reversing mechanism comprises a fixed seat, a rotating plate, a rotating motor, a first conveying motor and a first transmission wheel set, the fixed seat is fixedly arranged on the bottom of the chamber, the rotating plate is rotatably arranged on the fixed seat, a first reserved hole for mounting a lifting assembly is arranged between the fixed seat and the rotating plate, the rotating motor is arranged below the rotating plate and drives the rotating plate to rotate, the first conveying motor and the first transmission wheel set are arranged on the rotating plate, and the first transmission wheel set is driven by the first conveying motor.

6. The square-shaped four-chamber vacuum coating machine of claim 1, wherein: The linear conveying mechanism comprises a second fixed plate, a second conveying motor and a second transmission wheel set, the second fixed plate is fixedly arranged on the bottom of the chamber, a second reserved hole for mounting a lifting assembly is arranged in the middle of the second fixed plate, the second conveying motor and the second transmission wheel set are arranged on the second fixed plate, and the second transmission wheel set is driven by the second conveying motor.

7. The four-chamber vacuum coating machine of the return- shaped arrangement according to claim 3, characterized in that: The intermediate conveying mechanism comprises a third fixed plate, two transmission wheels arranged at the two ends of the third fixed plate respectively and a third conveying motor, and the transmission wheels are driven by the third conveying motor.

8. The four-chamber vacuum coating machine of the return- shaped arrangement according to claim 4, characterized in that: The supporting mechanism comprises a first fixed plate and two transmission wheels arranged at the two ends of the first fixed plate respectively.

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