Tail gas treatment device for chemical vapor infiltration process

Abstract

The utility model discloses a tail gas treatment device for a chemical vapor infiltration process, which comprises a filter assembly, the filter assembly comprises a fixed cylinder, the gas inlet end of the fixed cylinder is in threaded connection with an insertion cylinder, and one end of the fixed cylinder far away from the insertion cylinder is provided with a conical part with a gradually reduced aperture. A filter element is arranged between the insertion cylinder and the conical part in the fixed cylinder, and the insertion cylinder is matched with the conical part to fix the filter element in a mounting state. According to the utility model, the filter assembly and the insertion cylinder are arranged at one end of the fixed cylinder in a threaded connection manner, and when the insertion cylinder is screwed tightly, the insertion cylinder is matched with the conical part in the fixed cylinder, so that the filter element is firmly fixed, and the design not only ensures the stability of the filter element in the working period, but also ensures the stability of the filter element. And meanwhile, it is ensured that fixation can be quickly released when the filter element needs to be replaced or cleaned, and the filter element can be conveniently taken out, so that the filter element is quickly cleaned or replaced.

Description

Technical Field

[0001] This utility model belongs to the field of chemical vapor permeation process technology, and particularly relates to a tail gas treatment device for chemical vapor permeation process. Background Technology

[0002] Vapor deposition is a common chemical reaction in industrial manufacturing, and the vapor deposition furnace is the most important piece of equipment for this chemical reaction. The use of a vapor deposition furnace will generate a large amount of exhaust gas during the production process, which needs to be treated by an exhaust gas treatment device.

[0003] In existing technologies, exhaust gas treatment devices use filter structures to perform preliminary filtration of particulate matter in the exhaust gas. However, exhaust gas treatment devices often lack an easy-to-operate quick disassembly and assembly mechanism, which makes filter replacement inconvenient. Utility Model Content

[0004] This utility model addresses the problems in the prior art by proposing the following technical solution:

[0005] This utility model provides a tail gas treatment device for a chemical vapor permeation process, comprising:

[0006] A filter assembly includes a fixed cylinder, an insert cylinder is threadedly connected to the air inlet end of the fixed cylinder, and a tapered part with a gradually decreasing diameter is provided at the end of the fixed cylinder away from the insert cylinder. A filter element is located in the fixed cylinder between the insert cylinder and the tapered part. The insert cylinder cooperates with the tapered part to fix the filter element in the installed state.

[0007] As a preferred embodiment of the above technical solution, a limiting ring is also provided on the outer wall of the insert, and a sealing gasket is provided at one end of the limiting ring near the fixed cylinder.

[0008] As a preferred embodiment of the above technical solution, a fixing plate is further provided inside the fixing cylinder. The fixing plate is located at the starting end of the conical part, and a number of through holes are distributed at intervals on the fixing plate.

[0009] As a preferred embodiment of the above technical solution, a cooling component is also included. The cooling component includes a housing, inside which a curved cooling pipe is provided. One side of the housing is connected to the fixed cylinder of the filter component, and the other side is provided with an exhaust port.

[0010] As a preferred embodiment of the above technical solution, an inclined guide plate is provided inside the box at the position below the cooling pipe, and a discharge port is provided at the lowest end of the guide plate, with a collection box provided below the discharge port.

[0011] As a preferred embodiment of the above technical solution, the cooling assembly further includes a refrigeration box disposed outside the housing. Two sets of conveying pipes are connected to the refrigeration box. The ends of the two sets of conveying pipes away from the refrigeration box penetrate the side wall of the housing and extend into the interior of the housing. The ends of the two sets of conveying pipes extending into the housing are respectively fixedly connected to the two ends of the cooling pipe.

[0012] The beneficial effects of this utility model are as follows:

[0013] This utility model features a filter assembly in which the insert is installed at one end of the fixed cylinder via a threaded connection. When the insert is tightened, it engages with the conical part inside the fixed cylinder, thus firmly securing the filter element. This design not only ensures the stability of the filter element during operation but also ensures that the fixing can be quickly released when the filter element needs to be replaced or cleaned, making it easy to remove the filter element for quick cleaning or replacement. Attached Figure Description

[0014] Figure 1 The diagram shown is a front view of the exhaust gas treatment device in the embodiment;

[0015] Figure 2 The diagram shown is a partial cross-sectional view of the exhaust gas treatment device in the embodiment;

[0016] Figure 3 The diagram shown is an exploded view of the filter assembly in the embodiment;

[0017] Reference numerals: 10. Filter assembly; 11. Fixed cylinder; 12. Insert cylinder; 13. Limiting ring; 14. Sealing gasket; 15. Filter element; 16. Conical part; 17. Fixed plate; 171. Through hole; 20. Cooling assembly; 21. Box body; 22. Cooling pipe; 23. Refrigeration box; 24. Conveying pipe; 25. Guide plate; 26. Discharge port; 27. Collection box. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments.

[0019] Example

[0020] like Figure 1 As shown, Figure 1 The diagram shown is a front view of the exhaust gas treatment device in the embodiment;

[0021] This device includes:

[0022] The filter assembly 10 and the cooling assembly 20 are connected in sequence.

[0023] like Figure 2 As shown, Figure 2 The diagram shown is a partial cross-sectional view of the exhaust gas treatment device in the embodiment;

[0024] The filter assembly 10 includes a fixed cylinder 11, one end of which is connected to the cooling assembly 20, and the other end of which is threadedly connected to an insert cylinder 12. The fixed cylinder 11 is provided with a tapered portion 16 with a gradually decreasing diameter at the end away from the insert cylinder 12. A filter element 15 is located in the fixed cylinder 11 between the insert cylinder 12 and the tapered portion 16. In the installed state, the insert cylinder 12 cooperates with the tapered portion 16 to fix the filter element 15.

[0025] The insert 12 is installed at one end of the fixed cylinder 11 via a threaded connection. The detachable design allows for quick disassembly, making it easy to remove the filter element 15 for cleaning or replacement. Furthermore, when installed, the insert 12 engages with the tapered part 16 to secure the filter element 15.

[0026] Filter element 15 is used to filter the exhaust gas entering the device to remove particulate matter or other impurities.

[0027] The tapered section 16 with a gradually decreasing diameter also helps guide the gas flow and increase the gas velocity as it flows through the filter element 15, thereby improving filtration efficiency.

[0028] A limiting ring 13 is also provided on the outer wall of the insert 12, and a sealing gasket 14 is provided at the end of the limiting ring 13 near the fixed cylinder 11.

[0029] The sealing gasket 14 ensures a tight seal between the insert 12 and the fixed cylinder 11, preventing untreated gas leakage.

[0030] Specifically, after one end of the insert 12 is screwed into the open end of the fixed cylinder 11, the limiting ring 13 and the open end of the fixed cylinder 11 are sealed by the compressed sealing gasket 14.

[0031] The fixed cylinder 11 is also provided with a fixed plate 17, which is located at the starting end of the tapered part 16. The fixed plate 17 has several through holes 171 distributed at intervals.

[0032] The fixing plate 17 can make the filter element 15 more stable during installation.

[0033] Through-hole 171 allows the gas, after initial filtration, to continue flowing forward, while also helping to distribute the gas flow rate evenly.

[0034] like Figure 3 As shown, Figure 3 The diagram shown is an exploded view of the filter assembly in the embodiment;

[0035] The cooling assembly 20 includes a housing 21, inside which a curved cooling pipe 22 is provided. One side of the housing 21 is connected to the filter assembly 10, and the other side is provided with an exhaust port.

[0036] Inside the housing 21, at the position below the cooling pipe 22, there is an inclined guide plate 25. At the lowest end of the guide plate 25, there is a discharge port 26, and below the discharge port 26, there is a collection box 27.

[0037] The gas filtered by the filter assembly 10 enters the cooling assembly 20 for cooling treatment, which can condense the tar components in the exhaust gas into liquid and remove them. The exhaust port is used to discharge the filtered and cooled gas.

[0038] The surface of the cooling pipe 22 is kept at a low temperature. The exhaust gas entering from the inside of the housing 21 comes into contact with the surface of the cooling pipe 22, thereby condensing the tar components in the exhaust gas into a liquid state, thus achieving the removal of tar from the exhaust gas.

[0039] The guide plate 25 can guide the tar generated during the cooling process to flow into the feed inlet 26 and be collected by the collection box 27.

[0040] The cooling assembly 20 also includes a refrigeration box 23 disposed outside the housing 21. Two sets of delivery pipes 24 are connected to the refrigeration box 23. The ends of the two sets of delivery pipes 24 away from the refrigeration box 23 penetrate the side wall of the housing 21 and extend into the interior of the housing 21. The ends of the two sets of delivery pipes 24 extending into the housing 21 are respectively fixedly connected to the two ends of the cooling pipe 22.

[0041] The interior of the refrigeration chamber 23 is used to store coolant, and the refrigeration chamber 23 has a refrigeration effect to ensure that the temperature of the coolant is low enough. The refrigeration chamber 23 is also equipped with a water pump, which draws the coolant into one of the delivery pipes 24. The coolant is then introduced into the cooling pipe 22 from the inside of the delivery pipe 24, and the coolant in the cooling pipe 22 is then circulated back to the refrigeration chamber 23 through another set of delivery pipes 24.

[0042] Working principle: When this device is in use, the exhaust gas first undergoes preliminary purification through the filter assembly 10: the filter element 15 is used to filter the exhaust gas entering the device, removing particulate matter or other impurities. Then the gas enters the cooling assembly 20. The exhaust gas entering the interior of the housing 21 comes into contact with the surface of the cooling pipe 22, thereby condensing the tar components in the exhaust gas into a liquid state, thus achieving the removal of tar from the exhaust gas. The exhaust port is used to discharge the filtered and cooled gas.

[0043] The above embodiments are only used to illustrate the technical solution of this utility model, and are not intended to limit it.

Claims

1. A tail gas treatment device for a chemical vapor permeation process, characterized in that, include: A filter assembly (10) includes a fixed cylinder (11), the air inlet end of the fixed cylinder (11) is threadedly connected to a plug cylinder (12), the fixed cylinder (11) is provided with a tapered part (16) with a gradually decreasing diameter at the end away from the plug cylinder (12), and a filter element (15) is located between the plug cylinder (12) and the tapered part (16) in the fixed cylinder (11). The plug cylinder (12) cooperates with the tapered part (16) to fix the filter element (15) in the installed state.

2. The tail gas treatment device for a chemical vapor permeation process according to claim 1, characterized in that, A limiting ring (13) is also provided on the outer wall of the insert (12), and a sealing gasket (14) is provided at one end of the limiting ring (13) near the fixed cylinder (11).

3. The tail gas treatment device for a chemical vapor permeation process according to claim 1, characterized in that, The fixed cylinder (11) is also provided with a fixed plate (17), which is located at the starting end of the conical part (16). The fixed plate (17) has a number of through holes (171) spaced apart.

4. The tail gas treatment device for a chemical vapor permeation process according to claim 1, characterized in that, It also includes a cooling assembly (20), which includes a housing (21) with a curved cooling pipe (22) inside. One side of the housing (21) is connected to the fixed cylinder (11) of the filter assembly (10), and the other side is provided with an exhaust port.

5. The tail gas treatment device for a chemical vapor permeation process according to claim 4, characterized in that, Inside the housing (21), a guide plate (25) is provided at a position below the cooling pipe (22) and is inclined. A discharge port (26) is provided at the lowest end of the guide plate (25) and a collection box (27) is provided below the discharge port (26).

6. A tail gas treatment device for a chemical vapor permeation process according to claim 4 or 5, characterized in that, The cooling assembly (20) also includes a refrigeration box (23) disposed outside the housing (21). Two sets of conveying pipes (24) are connected to the refrigeration box (23). The ends of the two sets of conveying pipes (24) away from the refrigeration box (23) penetrate the side wall of the housing (21) and extend into the interior of the housing (21). The ends of the two sets of conveying pipes (24) extending into the housing (21) are respectively fixedly connected to the two ends of the cooling pipe (22).

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