Wandering star wheel with coating and coating tool for wandering star wheel

Abstract

The utility model belongs to the technical field of wandering star wheel production, particularly relates to a wandering star wheel with a coating and a coating tool for the wandering star wheel, and provides the following scheme that the wandering star wheel comprises a bottom plate, and a cover plate of a circular ring structure is detachably mounted on one side of the bottom plate; a first protruding block and a second protruding block which are used for limiting the wandering star wheel in a matched mode are arranged at the positions, located on the inner ring of the cover plate, of the bottom plate. The corrosion resistance and the wear resistance of the wandering star wheel are improved, and the service life of the wandering star wheel is prolonged; through tool protection, coating clamping of the wandering star wheel is achieved; the problem of deformation after coating is reduced through a tool (the bottom plate is thickened, the pressing needle is fixed, and thermal deformation is reduced); through shielding of the tool and the protruding plate, the thickness uniformity after coating is guaranteed, and the planeness of the wandering star wheel is improved.

Description

Technical Field

[0001] This utility model relates to the field of planetary wheel manufacturing technology, and in particular to a planetary wheel with a coating and a coating tooling for the planetary wheel. Background Technology

[0002] A planetary wheel is a precision machining tool, also known as a polishing jig or polishing pad. It is primarily used in the following fields: Semiconductor industry: for grinding and polishing single-crystal silicon wafers, sapphire substrates, silicon carbide, etc. Optical industry: for grinding and polishing optical glass, windows, crystal, and other materials. Automotive industry: for grinding and polishing automotive parts. Other applications: including grinding and polishing silicon carbide, sapphire, piezoelectric crystals, quartz chips, displays, and other materials.

[0003] Our company produces planetary wheels such as Figure 4 As shown, stainless steel planetary gears require a PVD coating to improve their corrosion resistance and wear resistance; however:

[0004] 1. The planetary wheel is large in size and very thin in thickness. It is prone to deformation due to high temperature during coating. Significant deformation can render the planetary wheel unusable.

[0005] 2. The flatness of the entire surface of the planetary wheel is required to be high, and uneven coating thickness will also cause the planetary wheel to be scrapped. Utility Model Content

[0006] The purpose of this invention is to address the deficiencies of the prior art by providing a coated planetary wheel and a coating fixture for the planetary wheel, thereby solving the problems mentioned in the background art.

[0007] A coated planetary wheel includes a planetary wheel and a coating applied to it, said coating being a diamond-like carbon coating.

[0008] The diamond-like carbon coating structure includes a base layer, an adhesive layer, and a functional layer, which are applied one by one to the planetary gear. The coating thickness is 1.2-1.8 μm.

[0009] The coating thickness is preferably 1.5 μm.

[0010] A coating fixture for a planetary wheel includes a base plate, on one side of which a cover plate with a circular structure is detachably installed. On the base plate, at the inner circle of the cover plate, there are two protrusions for fitting and defining the planetary wheel. The edge of the protrusion is provided with multiple positioning holes at equal angles, and the surface of the protrusion is also provided with multiple pressure pins for defining the planetary wheel by means of positioning pins.

[0011] By adopting the above technical solution, the deformation problem of the planetary wheel after coating is reduced, the uniformity of the coating thickness is ensured, and the flatness of the planetary wheel is improved.

[0012] The end faces of the cover plate, the first protrusion, and the second protrusion are all designed to accommodate the thickness of the planetary wheel, and are flush with each other.

[0013] By adopting the above technical solution, the uniformity of the coating thickness is ensured, and the flatness of the planetary wheel is improved.

[0014] The first type of protrusion consists of three groups arranged in a circular array about the center point of the base plate. The second type of protrusion also consists of three groups, which are staggered between two adjacent first types of protrusion. The third type of protrusion consists of three protrusions.

[0015] By adopting the above technical solution, the planetary wheel can be adapted to completely limit its movement.

[0016] The bottom of the pressure pin, away from the positioning pin, is protruding, and its protruding position is located at the positioning port, which can be flush with the bottom edge of the protrusion.

[0017] The planetary wheel is fixed by adopting the above technical solution.

[0018] The end of the pressure pin at the connection position with the positioning pin is provided with an oblong hole, and the gap between the bottom of the positioning pin end and the protrusion is greater than the thickness of the pressure pin at the corresponding position, so that the pressure pin can move normally at the positioning pin.

[0019] By adopting the above technical solution, it is convenient to adjust the pressure pin to fix the planetary wheel.

[0020] The beneficial effects of this utility model of a coated planetary wheel and the coating fixture for the planetary wheel are:

[0021] 1. Improved the corrosion resistance and wear resistance of the planetary wheel, increasing its service life;

[0022] 2. The coating of the planetary wheel was clamped by tooling protection;

[0023] 3. By using tooling (thickening of the base plate, fixing of the pressure pins, and reduction of thermal deformation), the problem of deformation after coating is reduced;

[0024] 4. The tooling and shielding of the convex plate ensure the uniformity of the coating thickness and improve the flatness of the planetary wheel. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of the planetary wheel coating fixture proposed in this utility model;

[0026] Figure 2This is another perspective view of the planetary wheel coating fixture proposed in this utility model;

[0027] Figure 3 The planetary wheel coating fixture proposed in this utility model Figure 2 Enlarged view of point A in the middle;

[0028] Figure 4 This is a schematic diagram of the planetary wheel structure proposed in this utility model;

[0029] Figure 5 This is a partial cross-sectional view of the planetary wheel after coating according to this utility model.

[0030] In the diagram: 1. Base plate; 2. Cover plate; 3. Protrusion 1; 301. Positioning port; 4. Protrusion 2; 5. Pressing pin; 6. Positioning pin; 7. Planetary wheel; 8. Coating; 801. Undercoat; 802. Adhesive layer; 803. Functional layer. Detailed Implementation

[0031] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby providing a clearer and more definite definition of the scope of protection of the present invention.

[0032] Reference Figure 1-5 A coated planetary wheel includes a planetary wheel 7 and a coating 8 coated on the planetary wheel 7. The coating 8 is a diamond-like carbon (DLC) coating. The DLC coating structure includes a base layer 801, an adhesive layer 802, and a functional layer 803. The base layer 801, adhesive layer 802, and functional layer 803 are coated one by one on the planetary wheel 7. The thickness of the coating 8 is 1.2-1.8 μm.

[0033] Preferably, the thickness of coating 8 is 1.5 μm;

[0034] Planetary wheels are made from a variety of materials, including blued steel, stainless steel, FR-4 board, and epoxy resin board, to meet the processing needs of different industries and materials. With the development of the semiconductor industry, CMP (Chemical Mechanical Polishing) of wafers has become increasingly important. CMP is an advanced semiconductor manufacturing technology used to achieve global planarization of the wafer surface. Through the synergistic effect of chemical etching and mechanical polishing, CMP achieves efficient removal and global nanoscale planarization of the wafer surface. This technology utilizes chemical and physical processes. First, a chemical process causes a chemical reaction between the wafer surface and abrasive grains, generating easily removable substances. Then, a physical process removes these substances through friction between the abrasive grains and the wafer surface. Due to the corrosiveness of polishing fluids and the need for wear resistance, stainless steel planetary wheels are increasingly used. However, stainless steel still cannot meet the wear resistance and corrosion resistance lifespan requirements of CMP processing, necessitating surface treatment to improve the performance of the planetary wheel, such as using a DLC coating.

[0035] Coating protection and coating thickness of planetary wheel 7: Due to the thinness of the wafer and the high requirements for dimensional precision, the thickness of planetary wheel 7 is classified in detail, and the thickness control of coating 8 is also high, generally 1-2.5μm. In order to ensure that the coating 8 thickness is uniform across the entire surface of planetary wheel 7, multiple convex plates are used to shield the blank areas to prevent coating 8 from accumulating at the edges and causing the coating 8 to be too thick, thus making the flatness exceed the standard.

[0036] A coating fixture for a planetary wheel 7 includes a base plate 1. A cover plate 2 with a circular structure is detachably installed on one side of the base plate 1. On the base plate 1, at the inner circle of the cover plate 2, there are protrusions 3 and 4 for fitting and defining the planetary wheel 7. Multiple positioning holes 301 are opened at equal angles on the edge of the protrusion 3. Multiple pressure pins 5 for defining the planetary wheel 7 are also installed on the surface of the protrusion 3 through positioning pins 6 and are movably connected to the protrusion 3.

[0037] Place the adapted planetary wheel 7 on the base plate 1. The first protrusion 3 and the second protrusion 4 installed on the base plate 1 protrude from the blank area of ​​the planetary wheel 7. The corresponding position of the planetary wheel 7 is set to fit the edge of the first protrusion 3 and the second protrusion 4. The end of the pressure pin 5 at the connection position with the positioning pin 6 is set with an oblong hole. The gap between the bottom of the end of the positioning pin 6 and the first protrusion 3 is greater than the thickness of the corresponding position of the pressure pin 5, so that the pressure pin 5 can move normally at the positioning pin 6. Then the pressure pin 5 can be moved to the positioning port 301. At this time, the planetary wheel 7 is positioned by the multiple pressure pins 5 on the first protrusion 3, thereby restricting the planetary wheel 7 on the base plate 1.

[0038] The first protrusion 3 is arranged in a ring array of three groups about the center point of the base plate 1. The second protrusion 4 is also arranged in three groups, staggered between two adjacent first protrusions 3. The end face of the cover plate 2, the end face of the first protrusion 3, and the end face of the second protrusion 4 are all set to adapt to the thickness of the planetary wheel 7, and the end face of the cover plate 2, the end face of the first protrusion 3, and the end face of the second protrusion 4 are set to be flush. The blank area of ​​the planetary wheel 7 is shielded by multiple protrusions, which can avoid the accumulation of coating 8 at the edge, resulting in a thick coating 8 and causing the flatness to exceed the standard. The thickening of the base plate 1 and the fixing of the pressure pin 5 can reduce the deformation problem after coating 8.

[0039] The bottom of the pressure pin 5, which is away from the positioning pin 6, is protruding. Its protruding position is located at the positioning port 301 and can be flush with the bottom edge of the protrusion 3. The positioning pin 6 is movable. After the planetary wheel 7 is placed on the base plate 1, the pressure pin 5 can be moved to the positioning port 301 to position the planetary wheel 7. Since there is a lot of blank area on the planetary wheel 7, multiple pressure pins 5 are set on the edge of the protrusion 3 to stably restrict the planetary wheel 7.

[0040] By combining the planetary wheel 7 and the base plate 1, the thickened base plate 1 increases the overall rigidity of the planetary wheel 7, making it more resistant to deformation when heated. The thickened base plate 1 and the planetary wheel 7 become a single unit, allowing for more uniform heat conduction and distribution within the material. This avoids thermal stress deformation caused by localized large temperature differences, which is common in thin-walled workpieces due to faster heat conduction. At the same time, thicker workpieces have a larger overall volume and a relatively larger absolute value of thermal expansion when heated, resulting in a smaller relative deformation rate. Therefore, the overall deformation of the planetary wheel 7 is also reduced. Thus, tooling protection and fixation are required, and the thickness of the base plate 1 can reduce deformation during heating.

[0041] The embodiments described above are merely examples of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. A coating fixture for a planetary gear, characterized in that: Includes a base plate (1), on one side of which a cover plate (2) in the form of a ring is detachably installed. On the base plate (1), at the inner circle of the cover plate (2), there are protrusions 1 (3) and 2 (4) for fitting and limiting the planetary wheel. Multiple positioning holes (301) are opened at equal angles at the edge of the protrusion 1 (3), and multiple pressure pins (5) for limiting the planetary wheel are also installed on the surface of the protrusion 1 (3) and are movably connected to the protrusion 1 (3) by positioning pins (6).

2. The coating fixture for a planetary wheel according to claim 1, characterized in that: The end face of the cover plate (2), the end face of the first protrusion (3) and the end face of the second protrusion (4) are all set to adapt to the thickness of the planetary wheel, and the end face of the cover plate (2), the end face of the first protrusion (3) and the end face of the second protrusion (4) are set to be flush.

3. The coating fixture for a planetary wheel according to claim 2, characterized in that: The first protrusion (3) is a three-group circular array distributed about the center point of the base plate (1). The second protrusion (4) is also a three-group array, which is staggered between two adjacent first protrusions (3). The second protrusion (4) is set in three.

4. The coating fixture for a planetary wheel according to claim 3, characterized in that: The bottom of the pressure pin (5) is protruding at the end away from the positioning pin (6), and its protruding position is at the positioning port (301), which can be flush with the bottom edge of the protrusion (3).

5. The coating fixture for a planetary gear according to claim 4, characterized in that: The end of the pressure pin (5) connected to the positioning pin (6) is provided with a waist-shaped hole, and the gap between the bottom of the end of the positioning pin (6) and the protrusion (3) is greater than the thickness of the pressure pin (5) at the corresponding position, so that the pressure pin (5) can move normally at the positioning pin (6).

6. A coated planetary wheel processed by the coating tooling described in claim 5, characterized in that: It includes a planetary wheel (7) and a coating (8) applied to the planetary wheel (7), wherein the coating is a diamond-like coating.

7. The coated planetary wheel according to claim 6, characterized in that: The aforementioned diamond-like The stone coating structure includes a base layer (801), an adhesive layer (802), and a functional layer (803). The base layer (801), adhesive layer (802), and functional layer (803) are applied one by one to the planetary wheel (7), and the coating thickness is 1.2-1.8 μm.

8. The coated planetary wheel according to claim 7, characterized in that: The coating thickness is preferably 1.5 μm.

Images