Crucible

Abstract

The utility model relates to a crucible which is used for carrying out evaporation on a base plate of a circular structure, and comprises a bottle body used for containing raw materials; the bottle opening is provided with an opening, a molecular beam is generated after the raw material is heated and outwards diffused to the surface of the substrate through the opening of the bottle opening, the surface of the substrate is parallel to the horizontal plane during evaporation, and an acute angle is formed between the axis direction of the bottle body and the direction perpendicular to the surface of the substrate; wherein the cross section of the bottle opening is of an oval structure in the direction perpendicular to the axis of the bottle body, so that the cross section of a molecular beam diffused outwards through the opening of the bottle opening is of a circular structure. According to the crucible, the shape of a molecular beam can be matched with that of a substrate of a circular structure, so that the waste phenomenon of the molecular beam is greatly reduced, the consumption of expensive raw materials is greatly reduced, the energy consumption required by evaporation raw materials is greatly reduced, and the utilization rate of heat energy is improved; in addition, for raw materials with the same volume, more products can be evaporated, and the yield of the products is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, and in particular to a crucible. Background Technology

[0002] A crucible is a cup-shaped vessel used in semiconductor equipment, especially molecular beam epitaxy equipment, as a key component for heating materials at high temperatures. Because crucibles can ensure the purity of the material being melted, they are often used in applications where high material purity is required.

[0003] Currently, in the field of molecular beam epitaxy, the mainstream crucibles are usually designed with a conical structure, but this design results in a waste of raw materials. Utility Model Content

[0004] In view of this, the present application provides a crucible to solve at least one problem existing in the prior art.

[0005] In a first aspect, embodiments of this application provide a crucible for vapor deposition on a circular substrate, the crucible comprising:

[0006] The bottle body is used to hold raw materials;

[0007] The bottle mouth is connected to the bottle body and has an opening. After the raw material is heated, a molecular beam is generated and diffuses outward to the substrate surface through the opening of the bottle mouth. During vapor deposition, the substrate surface is parallel to the horizontal plane, and the axial direction of the bottle body forms an acute angle with the direction perpendicular to the substrate surface.

[0008] Wherein, perpendicular to the axis of the bottle body, the cross-section of the bottle opening is elliptical, so that the cross-section of the molecular beam diffusing outward through the opening of the bottle opening is circular.

[0009] In conjunction with the first aspect of this application, in an optional embodiment, the bottle opening includes a bottle opening body and a connecting portion, the connecting portion being connected to one end of the bottle opening body near the bottle body and perpendicular to the axial direction of the bottle body, and the connecting portion having an elliptical structure.

[0010] In conjunction with the first aspect of this application, in an optional embodiment, the bottle opening includes a bottle opening body and a connecting portion, the connecting portion being connected to one end of the bottle opening body near the bottle body and perpendicular to the axial direction of the bottle body, and the connecting portion having a circular structure.

[0011] In conjunction with the first aspect of this application, in an optional embodiment, the bottle mouth is further provided with an extension portion, the extension portion being formed by the opening of the bottle mouth extending toward its periphery.

[0012] In conjunction with the first aspect of this application, in an optional embodiment, the projection of the extended portion in the axial direction of the bottle body is a circular structure.

[0013] In conjunction with the first aspect of this application, in an optional embodiment, the extension direction of the edge portion is perpendicular to the axial direction of the bottle body.

[0014] In conjunction with the first aspect of this application, in an alternative embodiment, the extended portion is provided with a positioning member for defining the position of the bottle body in its circumferential direction.

[0015] In conjunction with the first aspect of this application, in an optional embodiment, the positioning element is a notch provided on the edge portion.

[0016] In conjunction with the first aspect of this application, in an optional embodiment, the bottle body includes a bottle body body and an outlet portion, the outlet portion being connected to one end of the bottle body body near the bottle opening, and in the axial direction of the bottle body, the outlet portion converging relative to the bottle body body toward the bottle opening, and the shape of the outlet portion matching the shape of the end of the bottle opening near the bottle body.

[0017] In conjunction with the first aspect of this application, in an optional embodiment, the bottle body is a cylindrical structure and the outlet is a conical structure.

[0018] The crucible provided in this embodiment is perpendicular to the axis of the bottle body, and the cross-section of the bottle mouth is elliptical. This allows the cross-section of the molecular beam diffusing outward through the bottle mouth to be circular, thus matching the shape of the molecular beam to the circular substrate. This significantly reduces molecular beam waste, greatly reducing the amount of expensive raw materials used and the energy consumption required for vapor deposition, thereby improving thermal energy utilization. In addition, more products can be vapor-deposited from the same volume of raw materials, increasing product yield. Furthermore, since the molecular beam is entirely deposited on the substrate, excess molecular beam deposition on the cavity walls of the equipment is greatly reduced, improving the convenience of subsequent equipment maintenance and cleaning.

[0019] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0020] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0021] Figure 1A front view of the crucible in the related art provided in the embodiments of this application;

[0022] Figure 2 A top view of the crucible in the related art provided in the embodiments of this application;

[0023] Figure 3 This is a schematic diagram of the crucible structure provided in the embodiments of this application;

[0024] Figure 4 A front view of the crucible provided in an embodiment of this application;

[0025] Figure 5a This is a schematic diagram of the structure of the bottle mouth in the crucible provided in an embodiment of this application;

[0026] Figure 5b for Figure 5a Sectional view at point BB;

[0027] Figure 5c for Figure 5a Sectional view at CC;

[0028] Figure 5d for Figure 5a Sectional view at point DD;

[0029] Figure 6 A schematic diagram showing the positional relationship between the crucible, molecular stream, and substrate provided in an embodiment of this application;

[0030] Figure 7a This is a schematic diagram of the crucible and molecular stream provided in the embodiments of this application;

[0031] Figure 7b for Figure 7a A schematic diagram of the cross-section of the molecular stream in the image;

[0032] Figure 8 A top view of the bottle opening in the crucible provided in an embodiment of this application.

[0033] Figure label:

[0034] 10. Bottle body; 110. Bottle body; 120. Exit part;

[0035] 20. Bottle neck; 200. Bottle neck body; 210. Connecting part; 220. Edge part; 221. Notch; 230. Opening;

[0036] 30. Molecular stream;

[0037] 40. Substrate. Detailed Implementation

[0038] To make the technical solution and beneficial effects of this utility model more apparent and understandable, a detailed description is provided below by listing specific embodiments. The accompanying drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly show the details of the local features; unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application pertains.

[0039] In the description of this utility model, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "height", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", and "counterclockwise" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the purpose of simplifying the description of this utility model and do not indicate that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. In other words, they should not be construed as limitations on this utility model.

[0040] In this utility model, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating the relative importance of the indicated features or the number of indicated technical features. Therefore, a feature specified as "first" or "second" can explicitly indicate that at least one of those features is included. In the description of this utility model, "multiple" means at least two, such as two, three, etc.; "several" means at least one, such as one, two, three, etc., unless otherwise explicitly specified.

[0041] In this utility model, unless otherwise explicitly defined, the terms "installation," "connection," "linking," "fixing," and "setting," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0042] In this utility model, unless otherwise explicitly defined, the terms "above," "on top of," "above," "over," "below," "below," "below," or "below" for "first feature above second feature" can refer to direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Furthermore, "above," "above," and "over" for "first feature above second feature" can mean the first feature is directly above or diagonally above the second feature, or simply indicates that the horizontal height of the first feature is higher than the horizontal height of the second feature. Similarly, "below," "below," and "below" for "first feature below second feature" can mean the first feature is directly below or diagonally below the second feature, or simply indicates that the horizontal height of the first feature is lower than the horizontal height of the second feature.

[0043] For related technologies, please refer to Figures 1 to 4 , Figure 1 The diagram illustrates the state of the bottle body 10, the bottle mouth 20, and the molecular beam generated by the evaporation of raw materials inside the bottle body 10. When vapor deposition is performed on the circular substrate 40 using a crucible, the surface of the substrate 40 is parallel to the horizontal plane, and the direction perpendicular to the substrate 40 is the vertical direction. Figure 1 The vertical line L1 shown in the figure; the axial direction of the bottle body 10, that is... Figure 1 The vertical line L1 of the bottle body 10 shown forms a first angle with the axis L2 of the bottle body 10. The first angle is an acute angle and can be 60°, 55°, 50°, 45°, 40°, 46°, etc. Preferably, the first angle is 45° to enable the substrate 40 to achieve higher vapor deposition efficiency. For example, the substrate 40 is a substrate or a molybdenum drag.

[0044] Please refer to Figure 2 , Figure 2 The image shows a top view illustrating the positional relationship between the conical bottle neck 20, the molecular beam formed by evaporation from the bottle neck 20, and the circular substrate 40. The substrate 40 is arranged around... Figure 1 The vertical line L1 shown rotates in the horizontal plane to allow for uniform deposition on the surface of substrate 40. Figure 2 It can be seen that the molecular beam that diffuses through the bottle opening 20 diffuses to the substrate 40 has an elliptical structure and the cross-section of the molecular beam is also an elliptical structure, while the substrate 40 has a circular structure, which results in a large amount of waste of the molecular beam.

[0045] It should be noted that the shape of the molecular beam formed by the evaporation of the heated raw material and its outward diffusion through the bottle opening 20 is constrained by the shape of the bottle opening 20. The shape of the bottle opening 20 can not only constrain the shape of the molecular beam, that is, the evaporation direction of the molecular beam, but also constrain the evaporation range.

[0046] Based on this, this application provides a crucible with an elliptical cross-section at the bottle opening 20, so that the cross-section of the molecular beam diffusing outward through the opening of the bottle opening 20 is circular. This allows the shape of the molecular beam to match the circular substrate 40, thereby greatly reducing molecular beam waste. This not only significantly reduces the amount of expensive raw materials used, but also significantly reduces the energy consumption required for vapor deposition, improving the utilization rate of thermal energy. In addition, for the same volume of raw materials, more products can be vapor deposited, increasing product yield. Furthermore, since the molecular beam 30 is entirely deposited on the substrate 40, excess molecular beam 30 deposited on the cavity wall of the equipment is greatly reduced, improving the convenience of subsequent equipment maintenance and cleaning.

[0047] For details, please refer to Figure 3 and Figure 4 The crucible includes a bottle body 10 and a bottle mouth 20. The bottle body 10 is used to contain raw materials, and the bottle mouth 20 is connected to the bottle body 10 and has an opening 230. After the raw materials in the bottle body 10 are heated, they evaporate to generate a molecular beam, which diffuses outward to the surface of the substrate 40 through the opening 230 of the bottle mouth 20. During vapor deposition, the bottle body 10 is in the form of... Figure 4 The state shown is such that the axis of the bottle 10 forms a first angle with the vertical direction, the first angle being an acute angle, and the plane on which the surface of the substrate 40 is located is parallel to the horizontal plane.

[0048] Please refer to Figure 5a , Figure 5c , Figure 5d and Figure 6 In the direction perpendicular to the axis of the bottle body 10, the cross-section of the bottle mouth 20 is elliptical, so that the cross-section of the molecular beam formed by the outward diffusion through the opening 230 of the bottle mouth 20 is circular.

[0049] Figure 5c It shows Figure 5a Sectional view at point CC. Figure 5d It shows Figure 5a A sectional view at point DD. Figure 5c and Figure 5d It can be seen that the cross-section of the bottle mouth 20 is elliptical in the direction perpendicular to the axis of the bottle body 10.

[0050] Figure 6 The diagram shows a three-dimensional schematic representation of the bottle body 10, bottle mouth 20, molecular beam, and substrate 40. Figure 6 Thus, the molecular beam formed by diffusion through the elliptical bottle opening 20 has a circular cross-section on the horizontal plane, which can match the substrate 40 on the horizontal plane, thereby reducing the waste of molecular beam and saving costs.

[0051] Figure 7aThe image shows a top view of the bottle body 10, the bottle mouth 20, and the molecular beam. Figure 7b The diagram shows a schematic cross-section of the molecular beam perpendicular to the axis of the bottle 10. Figure 7a and Figure 7b Therefore, in this embodiment of the application, the molecular beam formed by diffusion from the bottle opening 20 has a circular cross-section in the horizontal direction, which can be adapted to the circular substrate 40, thereby greatly reducing the waste generated during the vapor deposition process.

[0052] It should be noted that the size of the bottle opening 20 along the axial direction of the bottle body 10, and the size relationship between the major axis and minor axis of the elliptical cross-section of the bottle opening 20 perpendicular to the axial direction of the bottle body 10, can be specifically set according to the parameters of the substrate 40. This embodiment does not make specific settings.

[0053] In one alternative embodiment, please refer to Figure 5a and Figure 5b The bottle mouth 20 includes a bottle mouth body 200 and a connecting part 210. The connecting part 210 is connected to the end of the bottle mouth body 200 near the bottle body 10, perpendicular to the axis of the bottle body 10, and the connecting part 210 has an elliptical structure.

[0054] Figure 5b It shows Figure 5a The cross-sectional view of the bottle neck 20 at BB is shown in the figure. Figure 5b Therefore, although the connecting part 210 is an elliptical structure, the elliptical connecting part 210 is close to a circular structure, so that the connecting part 210 near the bottle mouth 20 can match the bottle body 10.

[0055] In an optional embodiment, the connecting part 210 has a circular structure in the direction perpendicular to the axis of the bottle body 10, so as to ensure the matching degree between the bottle mouth 20 and the bottle body 10.

[0056] In one alternative embodiment, please refer to Figure 3 , Figure 5a and Figure 8 The bottle mouth 20 is also provided with an extension portion 220, which is formed by extending from the opening 230 of the bottle mouth 20 toward its surroundings.

[0057] The extension portion 220 is used for circumferential positioning of the entire crucible to ensure that the shape of the molecular stream 30 formed by diffusion through the bottle mouth 20 can be adapted to the circular substrate 40.

[0058] Furthermore, the positioning element is a notch 221 provided on the edge portion 220. The notch 221 is used to match with other components of the molecular beam epitaxy equipment to facilitate the positioning of the crucible with other components.

[0059] In one alternative embodiment, please refer to Figure 3 The bottle body 10 includes a bottle body 110 and an outlet 120. The outlet 120 is connected to the end of the bottle body 110 near the bottle mouth 20. In the axial direction of the bottle body 10, the outlet 120 converges towards the bottle mouth 20 relative to the bottle body 110. The shape of the outlet 120 matches the shape of the end of the bottle mouth 20 near the bottle body 10.

[0060] This can be understood as follows: perpendicular to the axis of the bottle body 10, from the bottom of the bottle body 10 toward the bottle mouth 20, the cross-sectional diameter of the outlet 120 becomes smaller, and the size of the outlet 120 becomes smaller. On the one hand, this is to match the size of the bottle mouth 20; on the other hand, it ensures that the part of the bottle body 10 that contains raw materials has a larger space to accommodate more volume of raw materials, thereby reducing the number of times raw materials need to be added and improving the evaporation efficiency.

[0061] Furthermore, the bottle body 110 has a cylindrical structure, and the outlet 120 has a conical structure. The conical outlet 120 can better match the bottle mouth 20, and the cylindrical bottle body 110 can accommodate a larger volume of raw materials.

[0062] It should be understood that the above embodiments are exemplary and are not intended to encompass all possible implementations included in the claims. Various modifications and changes can be made to the above embodiments without departing from the scope of this disclosure. Similarly, the various technical features of the above embodiments can be arbitrarily combined to form other embodiments of this application that may not be explicitly described. Therefore, the above embodiments only illustrate several implementations of this application and do not limit the scope of protection of this patent application.

Claims

1. A crucible, characterized in that, The crucible is used for vapor deposition on a circular substrate, and the crucible includes: The bottle body is used to hold raw materials; The bottle mouth is connected to the bottle body and has an opening. After the raw material is heated, a molecular beam is generated and diffuses outward to the substrate surface through the opening of the bottle mouth. During vapor deposition, the substrate surface is parallel to the horizontal plane, and the axial direction of the bottle body forms an acute angle with the direction perpendicular to the substrate surface. Wherein, perpendicular to the axis of the bottle body, the cross-section of the bottle opening is elliptical, so that the cross-section of the molecular beam diffusing outward through the opening of the bottle opening is circular.

2. The crucible according to claim 1, characterized in that, The bottle mouth includes a bottle mouth body and a connecting part. The connecting part is connected to one end of the bottle mouth body near the bottle body and is perpendicular to the axis of the bottle body. The connecting part has an elliptical structure.

3. The crucible according to claim 1, characterized in that, The bottle opening includes a bottle opening body and a connecting part. The connecting part is connected to one end of the bottle opening body near the bottle body and is perpendicular to the axial direction of the bottle body. The connecting part has a circular structure.

4. The crucible according to claim 1, characterized in that, The bottle mouth is also provided with an extension portion, which is formed by extending the opening of the bottle mouth toward its surroundings.

5. The crucible according to claim 4, characterized in that, The projection of the extended portion onto the axial direction of the bottle body is a circular structure.

6. The crucible according to claim 4, characterized in that, The extension direction of the edge portion is perpendicular to the axial direction of the bottle body.

7. The crucible according to claim 4, characterized in that, The extended portion is provided with a positioning element, which is used to define the position of the bottle body in its circumferential direction.

8. The crucible according to claim 7, characterized in that, The positioning element is a notch provided on the extended edge portion.

9. The crucible according to claim 1, characterized in that, The bottle body includes a bottle body and an outlet. The outlet is connected to the end of the bottle body near the bottle opening. In the axial direction of the bottle body, the outlet converges relative to the bottle body towards the bottle opening. The shape of the outlet matches the shape of the end of the bottle opening near the bottle body.

10. The crucible according to claim 9, characterized in that, The bottle body is cylindrical, and the outlet is conical.

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