Microelectronic dustproof constant-temperature and constant-humidity purification workshop

Abstract

The utility model relates to the technical field of workshops, and discloses a microelectronic dustproof constant-temperature constant-humidity purification workshop which comprises a workshop body, a purification assembly is arranged on the top of the workshop body, and the purification assembly comprises a circulating air pipe, a fan, a filtering assembly, a cleaning assembly, a temperature control assembly and a humidification assembly. The two ends of the circulating air pipe communicate with the two areas of the top of the main body correspondingly, the draught fan, the filtering assembly, the cleaning assembly, the temperature control assembly and the humidifying assembly are all installed in the circulating air pipe, air penetrating through the circulating air pipe is filtered through the filtering assembly, and the air penetrating through the circulating air pipe is heated and cooled through the temperature control assembly; air penetrating through the circulating air pipe is humidified through the humidifying assembly, the cleaning assembly is connected between the draught fan and the filtering assembly, and the draught fan rotates to drive the cleaning assembly to clean the filtering assembly. In the use process, the filter element does not need to be cleaned or replaced frequently, so that the production efficiency of a workshop is ensured.

Description

Technical Field

[0001] This utility model relates to the field of workshop technology, and more specifically to a microelectronic dustproof, constant temperature and humidity cleanroom. Background Technology

[0002] In the microelectronics manufacturing industry, dustproof, temperature- and humidity-controlled cleanrooms are commonly used to protect products and ensure manufacturing precision.

[0003] Currently, conventional dustproof, temperature- and humidity-controlled cleanrooms primarily achieve their dustproof function through the combination of negative pressure fans and filters. With this structure, users need to clean the filters regularly. During the cleaning process, the entire workshop basically needs to stop production to ensure production quality, which undoubtedly greatly affects production efficiency. Utility Model Content

[0004] In order to overcome the above-mentioned defects of the prior art, this utility model provides a microelectronic dustproof constant temperature and humidity cleanroom to solve the problem that existing workshops need to regularly replace and clean the filters, which affects production.

[0005] This utility model provides the following technical solution: a microelectronic dustproof, constant temperature and humidity cleanroom, comprising a main body of the workshop, with a purification component installed on the top of the main body. The purification component includes a circulating air duct, a fan, a filter component, a cleaning component, a temperature control component, and a humidification component. The two ends of the circulating air duct are respectively connected to the two sides of the top of the main body. The fan, filter component, cleaning component, temperature control component, and humidification component are all installed inside the circulating air duct. The filter component filters the air passing through the circulating air duct, the temperature control component heats and cools the air passing through the circulating air duct, and the humidification component humidifies the air passing through the circulating air duct. The cleaning component connects the fan and the filter component, and the rotation of the fan can drive the cleaning component to clean the filter component.

[0006] Furthermore, the filter assembly includes a bracket, a turntable, and a filter element. The bracket is fixedly installed inside the circulating air duct, and the turntable is rotatably installed in the middle of the bracket. The combination of the turntable and the bracket seals the middle of the circulating air duct. A speed reducer is installed in the middle of the circulating air duct. At the same time, the rotating shaft of the turntable and the rotating shaft of the fan are driven by the speed reducer. Several ventilation windows are opened on the surface of the turntable, and the ventilation windows are evenly distributed on the surface of the turntable in a circle. The filter element is installed in the ventilation windows.

[0007] Furthermore, the temperature control component includes a heat exchange coil, which is fixedly installed inside the circulating air duct and is connected to the air conditioning refrigerant.

[0008] Furthermore, the humidification component includes a nozzle, which is fixedly installed inside the circulating air duct.

[0009] Furthermore, the cleaning components include an air pump, an air tank, and a blowpipe. The air pump is fixedly installed inside the circulating air duct, and the air pump shaft and the fan shaft are driven by a pulley and a belt. The air tank is fixedly installed inside the circulating air duct and is connected to the air outlet of the air pump. The blowpipe is fixedly installed inside the circulating air duct, and when the turntable rotates, the blowpipe can be aligned with a filter element, while the blowpipe is connected to the air outlet of the air tank.

[0010] Furthermore, the blowpipe is close to the air outlet surface of the filter element, and the air outlet end of the blowpipe faces the filter element.

[0011] Furthermore, the cleaning components also include infrared sensors, solenoid valves, and sensing blocks. The number of sensing blocks is the same as that of the filter elements, and they are all installed on the turntable. At the same time, the sensing blocks correspond one-to-one with the filter elements. The solenoid valve is fixedly installed at the air outlet of the air tank, and the infrared sensor is fixedly installed inside the circulating air duct. When the infrared sensor is triggered, it can trigger the solenoid valve to open. When the turntable rotates, it can drive the sensing blocks to align with the infrared sensors. At the same time, when the sensing blocks are aligned with the infrared sensors, the blowpipe is aligned with the filter elements.

[0012] Furthermore, the cleaning components also include a collection hood and a dust collection box. The collection hood is fixedly installed inside the circulating air duct and is close to the air inlet surface of the filter element. The collection hood is also aligned with the blow pipe. The dust collection box is fixedly installed above the circulating air duct and is permeable to air. The dust collection box is connected to the collection hood. A baffle is rotatably installed at the connection between the collection hood and the dust collection box, and under the action of the baffle, only the air inside the collection hood is allowed to enter the dust collection box.

[0013] The technical effects and advantages of this utility model are as follows:

[0014] 1. In this utility model, during use, the cleaning component will automatically clean the filter component as the fan runs, thus eliminating the need for frequent cleaning or replacement of the filter element, thereby ensuring the production efficiency of the workshop. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0016] Figure 2 This is a schematic diagram of the internal structure of the circulating air duct of this utility model;

[0017] Figure 3 This utility model Figure 2 Enlarged structural diagram at point A in the middle.

[0018] The attached diagram is labeled as follows: 1. Main body; 2. Circulating air duct; 3. Fan; 4. Support; 5. Turntable; 6. Filter element; 7. Reducer; 8. Heat exchange coil; 9. Nozzle; 10. Air pump; 11. Air tank; 12. Blowpipe; 13. Infrared sensor; 14. Sensing block; 15. Collection hood; 16. Dust collection box; 17. Baffle. Detailed Implementation

[0019] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. In addition, the forms of the various structures described in the following embodiments are merely illustrative. The microelectronic dustproof constant temperature and humidity cleanroom involved in this utility model is not limited to the structures described in the following embodiments. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0020] Reference Figure 1-3 This utility model provides a microelectronic dustproof, constant temperature and humidity cleanroom, including a main body 1 of the workshop. The top of the main body 1 is equipped with a purification component, which includes a circulating air duct 2, a fan 3, a filter component, a cleaning component, a temperature control component, and a humidification component. The two ends of the circulating air duct 2 are respectively connected to the two sides of the top of the main body 1. The fan 3, filter component, cleaning component, temperature control component, and humidification component are all installed in the circulating air duct 2. The filter component filters the air passing through the circulating air duct 2, the temperature control component heats and cools the air passing through the circulating air duct 2, and the humidification component humidifies the air passing through the circulating air duct 2. The cleaning component connects the fan 3 and the filter component, and the rotation of the fan 3 can drive the cleaning component to clean the filter component.

[0021] The filter assembly includes a bracket 4, a turntable 5, and a filter element 6. The bracket 4 is fixedly installed inside the circulating air duct 2. The turntable 5 is rotatably installed in the middle of the bracket 4, and the combination of the turntable 5 and the bracket 4 seals the middle of the circulating air duct 2. A reducer 7 is installed in the middle of the circulating air duct 2. At the same time, the rotating shaft of the turntable 5 and the rotating shaft of the fan 3 are driven by the reducer 7. Several ventilation windows are opened on the surface of the turntable 5, and the ventilation windows are evenly distributed in a circle on the surface of the turntable 5. The filter element 6 is installed in the ventilation windows. When in use, simply start the fan 3, and the fan 3 will draw the air inside the workshop into the circulating air duct 2 and then send it out from the other end. During this process, the dust in the air will be intercepted by the filter element 6 to achieve the dust prevention function.

[0022] The temperature control component includes a heat exchange coil 8, which is fixedly installed inside the circulating air duct 2 and is connected to the air conditioning refrigerant. Thus, when the air temperature is high, the air conditioning can be activated to cool the heat exchange coil 8, thereby cooling the delivered air and achieving the function of workshop temperature control.

[0023] The humidification component includes a spray nozzle 9, which is fixedly installed inside the circulating air duct 2. In this way, when the air is relatively dry, water mist can be sprayed through the spray nozzle 9 to humidify the air and ensure the humidity inside the workshop.

[0024] The cleaning assembly includes an air pump 10, an air reservoir 11, and a blowpipe 12. The air pump 10 is fixedly installed inside the circulating air duct 2, and the shaft of the air pump 10 is driven by the shaft of the fan 3 through a pulley and a belt. The air reservoir 11 is fixedly installed inside the circulating air duct 2, and the air reservoir 11 is connected to the air outlet of the air pump 10. The blowpipe 12 is fixedly installed inside the circulating air duct 2, and when the turntable 5 rotates, the blowpipe 12 can be aligned with a filter element 6, and at the same time, the blowpipe 12 is connected to the air outlet of the air reservoir 11.

[0025] The blowpipe 12 is close to the air outlet surface of the filter element 6, and the air outlet end of the blowpipe 12 faces the filter element 6.

[0026] Thus, during the rotation of the blower 3, the air pump 10 will be driven to run through the pulley and belt. The air pump 10 will continuously fill the air tank 11 with air. At the same time, the rotation of the blower 3 will also drive the turntable 5 to rotate through the reducer 7. During the rotation of the turntable 5, the filter elements 6 will be continuously aligned with the blow pipe 12. At this time, the high-pressure air released in the air tank 11 can be used to back-blow and clean the filter elements 6.

[0027] The cleaning assembly also includes an infrared sensor 13, a solenoid valve, and a sensor block 14. The number of sensor blocks 14 is the same as that of the filter element 6, and they are all installed on the turntable 5. At the same time, the sensor blocks 14 correspond one-to-one with the filter element 6. The solenoid valve is fixedly installed at the air outlet of the air tank 11. The infrared sensor 13 is fixedly installed inside the circulating air duct 2. When the infrared sensor 13 is triggered, it can trigger the solenoid valve to open. When the turntable 5 rotates, it can drive the sensor block 14 to align with the infrared sensor 13. At the same time, when the sensor block 14 is aligned with the infrared sensor 13, the blowpipe 12 is aligned with the filter element 6.

[0028] Thus, when the blowpipe 12 is aligned with the filter element 6, the infrared sensor 13 will align with the sensing block 14 to sense the air, thereby causing the solenoid valve to open and release the high-pressure air in the air bag 11 from the blowpipe 12.

[0029] The cleaning assembly also includes a collection hood 15 and a dust collection box 16. The collection hood 15 is fixedly installed inside the circulating air duct 2 and is close to the air inlet surface of the filter element 6. The collection hood 15 is also aligned with the blow pipe 12. The dust collection box 16 is fixedly installed above the circulating air duct 2 and is permeable to air. The dust collection box 16 is connected to the collection hood 15. A baffle 17 is rotatably installed at the connection between the collection hood 15 and the dust collection box 16. Under the action of the baffle 17, only the air inside the collection hood 15 is allowed to enter the dust collection box 16.

[0030] In this way, the high-pressure air will backflush the filter element 6, blowing the dust into the collection hood 15 and finally into the dust collection box 16.

[0031] Therefore, the complete usage process is as follows: First, start the fan 3. The fan 3 will draw the air inside the workshop into the circulating air duct 2 and then send it out from the other end. During this process, the dust in the air will be intercepted by the filter element 6. When the air temperature is high, the air conditioner can be turned on to cool the heat exchange coil 8, thereby cooling the delivered air and realizing the function of workshop temperature control. When the air is relatively dry, water mist can be sprayed through the spray pipe 9 to humidify the air and ensure the humidity inside the workshop.

[0032] During the rotation of the blower 3, the air pump 10 is driven by pulleys and belts, continuously filling the air tank 11 with air. Simultaneously, the rotation of the blower 3 also drives the turntable 5 to rotate via the reducer 7. As the turntable 5 rotates, it causes the filter elements 6 to align with the blowpipe 12. When the blowpipe 12 aligns with the filter element 6, the infrared sensor 13 aligns with the sensing block 14 to sense the alignment, thereby opening the solenoid valve to release the high-pressure air from the air tank 11 through the blowpipe 12. At this time, the high-pressure air will back-blow the filter element 6, blowing the dust into the collection hood 15 and finally into the dust collection box 16. In this way, the filter element 6 can be automatically cleaned, eliminating the need for frequent cleaning or replacement, thus ensuring the production efficiency of the workshop.

[0033] Finally, it should be noted that the accompanying drawings of the embodiments disclosed in this utility model only involve the structures involved in the embodiments disclosed in this utility model. Other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of this utility model can be combined with each other.

[0034] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A microelectronic dustproof, constant temperature and humidity cleanroom, comprising the main body of the workshop (1), characterized in that: The top of the main body (1) is provided with a purification component, which includes a circulating air duct (2) and a fan (3) installed in the middle of the circulating air duct (2), a filter component, a cleaning component, a temperature control component and a humidification component. The two ends of the circulating air duct (2) are respectively connected to the two sides of the top of the main body (1), and the air passing through the circulating air duct (2) is filtered by the filter component. The temperature control component can raise and lower the temperature of the air passing through the circulating air duct (2). The humidification component can humidify the air passing through the circulating air duct (2). The cleaning component is connected between the fan (3) and the filter component, and the rotation of the fan (3) can drive the cleaning component to clean the filter component.

2. The microelectronic dustproof, constant temperature and humidity cleanroom according to claim 1, characterized in that: The filter assembly includes a bracket (4), a turntable (5), and a filter element (6). The bracket (4) is fixedly installed inside the circulating air duct (2). The turntable (5) is rotatably installed in the middle of the bracket (4), and the combination of the turntable (5) and the bracket (4) seals the middle of the circulating air duct (2). A speed reducer (7) is installed in the middle of the circulating air duct (2). At the same time, the rotating shaft of the turntable (5) and the rotating shaft of the fan (3) are driven by the speed reducer (7). Several ventilation windows are opened on the surface of the turntable (5), and the ventilation windows are evenly distributed on the surface of the turntable (5) in a circle. The filter element (6) is installed in the ventilation windows.

3. The microelectronic dustproof, constant temperature and humidity cleanroom according to claim 1, characterized in that: The temperature control component includes a heat exchange coil (8), which is fixedly installed in the circulating air duct (2) and is connected to the air conditioning refrigerant.

4. The microelectronic dustproof, constant temperature and humidity cleanroom according to claim 1, characterized in that: The humidification component includes a nozzle (9), which is fixedly installed inside the circulating air duct (2).

5. A microelectronic dustproof, constant temperature and humidity cleanroom according to claim 2, characterized in that: The cleaning assembly includes an air pump (10), an air bag (11), and a blowpipe (12). The air pump (10) is fixedly installed in the circulating air duct (2), and the shaft of the air pump (10) and the shaft of the fan (3) are driven by a pulley and a belt. The air bag (11) is fixedly installed in the circulating air duct (2), and the air bag (11) is connected to the air outlet of the air pump (10). The blowpipe (12) is fixedly installed in the circulating air duct (2), and when the turntable (5) rotates, the blowpipe (12) can be aligned with a filter element (6), and the blowpipe (12) is connected to the air outlet of the air bag (11).

6. A microelectronic dustproof, constant temperature and humidity cleanroom according to claim 5, characterized in that: The blowpipe (12) is close to the air outlet surface of the filter element (6), and the air outlet end of the blowpipe (12) faces the filter element (6).

7. A microelectronic dustproof, constant temperature and humidity cleanroom according to claim 5, characterized in that: The cleaning assembly also includes an infrared sensor (13), a solenoid valve, and a sensor block (14). The number of sensor blocks (14) is the same as that of the filter element (6), and they are all installed on the turntable (5). At the same time, the sensor blocks (14) correspond one-to-one with the filter element (6). The solenoid valve is fixedly installed at the air outlet of the air bag (11). The infrared sensor (13) is fixedly installed inside the circulating air duct (2). When the infrared sensor (13) is triggered, it can trigger the solenoid valve to open. When the turntable (5) rotates, it can drive the sensor block (14) to align with the infrared sensor (13). At the same time, when the sensor block (14) is aligned with the infrared sensor (13), the blowpipe (12) is aligned with the filter element (6).

8. A microelectronic dustproof, constant temperature and humidity cleanroom according to claim 7, characterized in that: The cleaning assembly also includes a collection cover (15) and a dust collection box (16). The collection cover (15) is fixedly installed inside the circulating air duct (2) and is close to the air inlet surface of the filter element (6). At the same time, the collection cover (15) is aligned with the blow pipe (12). The dust collection box (16) is fixedly installed above the circulating air duct (2) and is permeable to air. The dust collection box (16) is connected to the collection cover (15). A baffle (17) is rotatably installed at the connection between the collection cover (15) and the dust collection box (16). Under the action of the baffle (17), only the air inside the collection cover (15) is allowed to enter the dust collection box (16).

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