Target material side surface roughness measuring jig

Abstract

The utility model belongs to the technical field of detection devices, and discloses a target material side surface roughness measuring jig, which comprises a base, a vertical rod, a lifting positioning assembly and a rotary positioning assembly, the vertical rod is vertically arranged on the base; one end of the lifting positioning assembly is adjustably connected with the vertical rod in the Z-axis direction, and the other end of the lifting positioning assembly extends in the direction away from the vertical rod in the X-axis direction; the rotary positioning assembly comprises a connecting shaft, a rotating shaft and a first locking piece, the connecting shaft is arranged in the X-axis direction, one end of the connecting shaft is detachably connected with the end, away from the vertical rod, of the lifting positioning assembly, and the first locking piece can rotate around the axis of the connecting shaft; the rotating shaft is arranged in the Y-axis direction and can rotate around the axis of the rotating shaft, one end of the rotating shaft is rotationally connected with the first locking piece, the first locking piece can lock the positions of the connecting shaft and the rotating shaft, and the other end of the rotating shaft is detachably connected with the detector. According to the utility model, the problem of high reject ratio of the side surface roughness of the target material can be solved, the side surface detection precision of the target material is improved, and the side surface roughness detection time of the target material is shortened.

Description

Technical Field

[0001] This utility model relates to the field of detection device technology, and in particular to a target material side roughness measuring fixture. Background Technology

[0002] Currently, roughness measurement of split-type LCD sputtering targets mainly employs stylus-type roughness testers and other measuring equipment. These instruments are typically used to measure the horizontal surface (i.e., the upper or lower surface) of the target, acquiring roughness data by sliding a stylus along the surface. However, when measuring the roughness of the target's side surface (vertical direction), existing fixtures struggle to maintain stable contact with the measuring instrument due to the limitation of the measurement direction. Uneven force or angular deviations during measurement can easily lead to measurement errors. To obtain relatively accurate data, multiple repeated measurements are required, which not only affects measurement accuracy but also necessitates frequent adjustments to the fixture's clamping angle, further reducing measurement efficiency. If the target's side surface roughness is unqualified, abnormal discharge may occur during sputtering, leading to alarms, disrupting normal production, and even rendering the target unusable.

[0003] Therefore, there is an urgent need for a target material side roughness measurement fixture to solve the above problems. Utility Model Content

[0004] The purpose of this utility model is to provide a target material side roughness measuring fixture to solve the problem of high target material side roughness non-conformity rate in the prior art, improve the target material side roughness detection accuracy, and reduce the target material side roughness detection time.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] The target material side roughness measuring fixture includes:

[0007] Base;

[0008] A support pole is erected on the base.

[0009] The lifting and positioning assembly has one end adjustablely connected to the upright along the Z-axis, and the other end extends away from the upright along the X-axis.

[0010] A rotary positioning assembly includes a connecting shaft, a rotating shaft, and a first locking member. The connecting shaft is arranged along the X-axis, and one end of it is detachably connected to the end of the lifting positioning assembly away from the upright. The first locking member can rotate around the axis of the connecting shaft. The rotating shaft is arranged along the Y-axis and can rotate around its axis. One end of the rotating shaft is rotatably connected to the first locking member, which can lock the positions of the connecting shaft and the rotating shaft. The other end of the rotating shaft is detachably connected to a detector.

[0011] Wherein, the X-axis direction, the Y-axis direction, and the Z-axis direction are mutually perpendicular.

[0012] Optionally, the first locking member includes a clamp structure, the clamp structure including an annular clamp body and a locking part, the annular clamp body being rotatably sleeved on the outside of the connecting shaft; the rotating shaft being rotatably inserted through the opening and closing end of the annular clamp body, one end of the rotating shaft being threadedly connected to the locking part, and the other end abutting against the opening and closing end of the annular clamp body, so as to shrink the annular clamp body by tightening the locking part.

[0013] Optionally, the locking part includes a knob, one end of which is provided with an internal thread and threadedly connected to the rotating shaft, and the other end of which is provided with a protrusion.

[0014] Optionally, the rotary positioning assembly further includes a connector, which is fixedly disposed along the Y-axis at the end of the rotation axis away from the locking part, and is detachably and fixedly connected to the detector.

[0015] Optionally, the connector includes a connecting rod and a fastening part. One end of the connecting rod can pass through the end of the rotating shaft away from the locking part and is interference-fitted with the rotating shaft. The fastening part is located at the other end of the connecting rod and is detachably and fixedly connected to the detector.

[0016] Optionally, the lifting and positioning assembly includes a connecting rod, a second locking member, and a third locking member. The end of the connecting rod near the upright has a positioning groove along the Z-axis direction, and the upright can be slidably inserted into the positioning groove. The second locking member can securely connect the upright to the connecting rod. The third locking member can securely connect the end of the connecting rod away from the upright to the connecting shaft.

[0017] Optionally, multiple second locking members are provided and arranged at intervals along the Z-axis direction.

[0018] Optionally, the second locking member includes a first bolt, one end of which is threadedly connected to the connecting rod and can pass through the connecting rod along the X-axis direction to abut against the upright.

[0019] Optionally, the third locking element includes an annular retaining ring and a second bolt, both of which can be inserted into the retaining ring, and one end of the second bolt can pass through the retaining ring to fasten the connecting rod and the connecting shaft.

[0020] Optionally, the upright is provided with scale lines.

[0021] The beneficial effects of this utility model are:

[0022] This invention provides a fixture for measuring the side roughness of a target material, including a base, a vertical rod, a lifting and positioning assembly, and a rotating positioning assembly. The rotating positioning assembly includes a connecting shaft, a rotating shaft, and a first locking member. The operator places the fixture on the target material and uses the fixture to clamp and position the probe. By adjusting the position of the lifting and positioning assembly along the Z-axis, the probe moves up and down along the Z-axis to precisely control its height. The first locking member on the connecting shaft rotates around its axis, adjusting the probe's angle. Furthermore, the rotating shaft is rotatably connected to a first fastener and can rotate around the Y-axis. The other end of the rotating shaft is detachably fixed to the probe, allowing for further fine-tuning of the probe's tilt angle to better fit the target material's side. After adjusting the probe's height and angle, tightening the first locking member ensures the stable positions of the connecting shaft, rotating shaft, and first locking member. This locking operation prevents misalignment of the equipment during measurement, ensuring the accuracy of each measurement. By following the above adjustment and locking steps, it can be ensured that the detector is always stably aligned with the side of the target material at the correct angle and height, thereby reducing measurement errors caused by improper or unstable positioning and improving the measurement accuracy of the target material's side roughness. The flexible adjustment method allows the equipment to quickly adapt to the needs of different targets, thus shortening the preparation time for each measurement, improving overall inspection efficiency, and reducing the rate of unqualified target material side roughness. Attached Figure Description

[0023] Figure 1 This is a structural schematic diagram of the target material side roughness measuring fixture at one angle in this utility model;

[0024] Figure 2 This is a schematic diagram of the target material side roughness measuring fixture from another angle in this utility model.

[0025] In the picture:

[0026] 1. Base; 2. Upright pole; 3. Lifting and positioning assembly; 31. Connecting rod; 32. Second locking component; 33. Third locking component; 331. Fixing ring; 332. Second bolt; 4. Rotation positioning assembly; 41. Connecting shaft; 42. Rotating shaft; 43. Clamp structure; 431. Annular clamp body; 432. Locking part; 44. Connecting component; 5. Detector. Detailed Implementation

[0027] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0028] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0030] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0031] Please refer to Figures 1 to 2 As shown, this utility model provides a target material side roughness measuring fixture for clamping and positioning the detector 5.

[0032] Specifically, the target material side roughness measuring fixture includes a base 1, a vertical rod 2, a lifting and positioning assembly 3, and a rotating positioning assembly 4; wherein the vertical rod 2 is erected on the base 1; one end of the lifting and positioning assembly 3 is adjustablely connected to the vertical rod 2 along the Z-axis, and the other end extends away from the vertical rod 2 along the X-axis; the rotating positioning assembly 4 includes a connecting shaft 41, a rotating shaft 42, and a first locking member; the connecting shaft 41 is arranged along the X-axis, and one end of it is detachably connected to the end of the lifting and positioning assembly 3 away from the vertical rod 2; the first locking member can rotate around the axis of the connecting shaft 41; the rotating shaft 42 is arranged along the Y-axis and can rotate around its axis; one end of the rotating shaft 42 is rotatably connected to the first locking member, and the first locking member can lock the positions of the connecting shaft 41 and the rotating shaft 42; the other end of the rotating shaft 42 is detachably connected to the detector 5.

[0033] Among them, the X-axis, Y-axis and Z-axis are mutually perpendicular.

[0034] The operator places the target side roughness measuring fixture on the target and uses the fixture to clamp and position the probe 5. By adjusting the position of the lifting and positioning component 3 along the Z-axis, the probe 5 moves up and down along the Z-axis to precisely control its height. The operator then rotates the first locking member on the connecting shaft 41, causing it to rotate around the axis of the connecting shaft 41, thereby adjusting the angle of the probe 5. Furthermore, the rotating shaft 42 is rotatably connected to the first fastener and can rotate around the Y-axis. The other end of the rotating shaft 42 is detachably fixed to the probe 5, allowing the operator to further fine-tune the tilt angle of the probe 5 to better fit the target side. After adjusting the height and angle of the probe 5, the operator tightens the first locking member to ensure the stable positions of the connecting shaft 41, rotating shaft 42, and the first locking member. This locking operation prevents misalignment of the equipment during measurement, thus ensuring the accuracy of each measurement.

[0035] Through the above adjustment and locking steps, operators can ensure that the detector 5 is always stably aligned with the side of the target material at the correct angle and height, thereby reducing measurement errors caused by improper or unstable positioning and improving the measurement accuracy of the target material's side roughness. The flexible adjustment method allows the equipment to quickly adapt to the needs of different targets, thus shortening the preparation time for each measurement, improving overall inspection efficiency, and reducing the rate of unqualified target material side roughness.

[0036] In addition, the other end of the lifting and positioning component 3 extends away from the pole 2 along the X-axis direction, so that the detector 5 and the pole 2 maintain an appropriate distance, avoid the pole 2 interfering with the operation of the detector 5 during the measurement process, and improve the measurement accuracy.

[0037] Optionally, the pole 2 is equipped with scale lines, which provide an intuitive height reference. Operators can quickly adjust the position of the lifting and positioning component 3 according to the scale lines without repeated measurement or trial adjustment, thus improving the adjustment speed.

[0038] Optionally, the pole 2 can be erected on the base 1 along the Z-axis, allowing the lifting and positioning assembly 3 to slide smoothly along the Z-axis, enabling the operator to easily adjust the height of the detector 5.

[0039] like Figure 1As shown, specifically, the first locking component includes a clamp structure 43, which includes an annular clamp body 431 and a locking part 432. The annular clamp body 431 is rotatably sleeved on the outside of the connecting shaft 41. A rotating shaft 42 is rotatably inserted through the opening and closing end of the annular clamp body 431. One end of the rotating shaft 42 is threadedly connected to the locking part 432, and the other end abuts against the opening and closing end of the annular clamp body 431, so that the annular clamp body 431 can be contracted by tightening the locking part 432. The annular clamp body 431 facilitates the adjustment of the angle of the detector 5, ensuring that the detector 5 fits well with the side of the target material. The rotating shaft 42 can rotate freely at the opening and closing end of the annular clamp body 431, allowing the detector 5 to finely adjust the angle in the Y-axis direction, thereby adapting to the shape of different target materials, ensuring accurate measurement point position, and improving the roughness measurement accuracy. After the detector 5 is rotated to the appropriate angle, one end of the rotating shaft 42 is threadedly connected to the locking part 432, and the other end abuts against the opening and closing end of the annular hoop 431. Tightening the locking part 432 causes the rotating shaft 42 to generate a radial contraction force on the annular hoop 431, ensuring that the annular hoop 431 tightly wraps around the connecting shaft 41, effectively locking it in place and preventing loosening, thus ensuring that the detector 5 will not shift position during measurement. Operators can easily adjust the locking state by simply rotating the locking part 432, reducing tedious locking operations and improving work efficiency. If it is necessary to change the angle or position of the detector 5, simply loosen the locking part 432 slightly to adjust the rotation angle of the connecting shaft 41 and the direction of the rotating shaft 42. After adjustment, tighten the locking part again, making the process convenient and quick.

[0040] More specifically, the locking part 432 includes a knob, one end of which has an internal thread for threaded connection with the rotating shaft 42, and the other end of which has a protrusion. The knob typically has a large diameter, increasing the lever arm and thus requiring less torque to tighten or loosen, making operation easier. It is easy to understand that a non-slip texture can be designed on the knob surface, allowing operators to tighten or loosen it directly without the need for additional tools.

[0041] To allow for free adjustment of the probe 5's angle and enhance measurement flexibility, in some embodiments, the rotary positioning assembly 4 further includes a connector 44. The connector 44 is fixedly disposed along the Y-axis at the end of the rotating shaft 42 away from the locking part 432 and is detachably and fixedly connected to the probe 5. Since the rotating shaft 42 can rotate around its own axis, the connection between the connector 44 and the probe 5 allows the probe 5 to adjust its angle appropriately in the Y-axis direction to adapt to the surface position of different target materials. Combining the first locking part (which can rotate around the connecting shaft 41) and the rotatability of the rotating shaft 42, multiple angle fine-tuning can be achieved, enabling the probe 5 to more precisely conform to the side of the target material and improve measurement accuracy.

[0042] Specifically, the connector 44 includes a connecting rod and a fastening part. One end of the connecting rod passes through the end of the rotating shaft 42 away from the locking part 432 and is interference-fitted with the rotating shaft 42. The fastening part is located at the other end of the connecting rod and is detachably and fixedly connected to the detector 5. The interference fit ensures a tight connection between the connecting rod and the rotating shaft 42, preventing loosening due to vibration or external force, improving stability during the measurement process, and eliminating the need for additional fastening screws, thus reducing the number of connecting parts. The detachable connection between the fastening part and the detector 5 allows the detector 5 to be replaced according to different measurement needs and facilitates the reading of measurement data.

[0043] It is understandable that the fastening part can be a magnetic structure to attract the detector 5 to the connecting rod; or the fastening part can be a bolt structure to fasten the detector 5 to the connecting rod. The specific connection method is not limited here.

[0044] like Figure 2 As shown, to improve the convenience of height adjustment, the lifting and positioning assembly 3 includes a connecting rod 31, a second locking member 32, and a third locking member 33. The connecting rod 31 has a positioning groove along the Z-axis at the end near the upright 2, into which the upright 2 can be slidably inserted. The second locking member 32 securely connects the upright 2 to the connecting rod 31. The third locking member 33 securely connects the end of the connecting rod 31 away from the upright 2 to the connecting shaft 41. Because the upright 2 can be slidably inserted into the positioning groove, the operator can easily adjust the height of the detector 5 along the Z-axis. Furthermore, the positioning groove ensures that the upright 2 can only slide along the Z-axis, avoiding adjustment errors caused by excessive freedom in multiple directions and improving the accuracy of height adjustment. By fixing the upright 2 with the second locking member 32, the height can be adjusted at any time without affecting the stability of the entire measuring device. The third locking member 33 ensures a secure connection between the connecting rod 31 and the connecting shaft 41, preventing errors or vibrations caused by loosening during measurement.

[0045] Optionally, multiple second locking elements 32 are provided and arranged at intervals along the Z-axis; this can evenly distribute the clamping force, effectively reduce the swaying and deformation of the upright 2, and enhance the stability of the overall structure. It is understood that the number of second locking elements 32 can be two or three, etc., and is not specifically limited here.

[0046] Specifically, the second locking element 32 includes a first bolt, one end of which is threaded to the connecting rod 31 and can pass through the connecting rod 31 along the X-axis direction to abut against the upright 2. The upright 2 is slidably inserted into the positioning groove of the connecting rod 31. When adjusted to a suitable height, the first bolt can pass through the connecting rod 31 along the X-axis direction and apply a locking force to the upright 2, ensuring that the upright 2 will not loosen or slide during measurement. The operator can easily loosen or lock the upright 2 by rotating the first bolt.

[0047] The third locking element 33 includes an annular retaining ring 331 and a second bolt 332. Both the connecting rod 31 and the connecting shaft 41 can be inserted into the retaining ring 331. One end of the second bolt 332 can pass through the retaining ring 331 to fasten the connecting rod 31 and the connecting shaft 41. The retaining ring 331 forms a circumferential support, ensuring a tighter connection between the connecting rod 31 and the connecting shaft 41, occupying less space, and ensuring the compactness and lightness of the measuring fixture. The second bolt 332, with one end passing through the retaining ring 331 to fasten the connecting rod 31 and the connecting shaft 41, provides a stable clamping force, ensuring that loosening does not occur during measurement and improving the overall stability of the device.

[0048] For example, if the connecting rod 31 and the connecting shaft 41 are stacked in the fixing ring 331 along the Z-axis direction, the second bolt 332 passes through the fixing ring 331 along the Z-axis direction to fix the two; or if the connecting rod 31 and the connecting shaft 41 are stacked in the fixing ring 331 along the Y-axis direction, the second bolt 332 passes through the fixing ring 331 along the Y-axis direction to fix the two.

[0049] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A fixture for measuring the surface roughness of a target material, characterized in that, include: Base (1); The upright (2) is erected on the base (1); The lifting and positioning assembly (3) has one end connected to the upright (2) in an adjustable position along the Z-axis direction, and the other end extends away from the upright (2) along the X-axis direction. The rotating positioning assembly (4) includes a connecting shaft (41), a rotating shaft (42), and a first locking member. The connecting shaft (41) is arranged along the X-axis, and one end of it is detachably connected to the end of the lifting positioning assembly (3) away from the upright (2). The first locking member can rotate around the axis of the connecting shaft (41). The rotating shaft (42) is arranged along the Y-axis and can rotate around its axis. One end of the rotating shaft (42) is rotatably connected to the first locking member. The first locking member can lock the positions of the connecting shaft (41) and the rotating shaft (42). The other end of the rotating shaft (42) is detachably connected to the detector (5). Wherein, the X-axis direction, the Y-axis direction, and the Z-axis direction are mutually perpendicular.

2. The target material side roughness measuring fixture according to claim 1, characterized in that, The first locking component includes a clamp structure (43), which includes an annular clamp body (431) and a locking part (432). The annular clamp body (431) is rotatably sleeved on the outside of the connecting shaft (41). The rotating shaft (42) is rotatably inserted through the opening and closing end of the annular clamp body (431). One end of the rotating shaft (42) is threadedly connected to the locking part (432), and the other end abuts against the opening and closing end of the annular clamp body (431) so that the annular clamp body (431) can be contracted by tightening the locking part (432).

3. The target material side roughness measuring fixture according to claim 2, characterized in that, The locking part (432) includes a knob, one end of which is provided with an internal thread and is threadedly connected to the rotating shaft (42), and the other end of which is provided with a protrusion.

4. The target material side roughness measuring fixture according to claim 2, characterized in that, The rotary positioning assembly (4) further includes a connector (44), which is fixedly disposed along the Y-axis at one end of the rotating shaft (42) away from the locking part (432) and is detachably and fixedly connected to the detector (5).

5. The target material side roughness measuring fixture according to claim 4, characterized in that, The connector (44) includes a connecting rod and a fastening part. One end of the connecting rod can pass through the end of the rotating shaft (42) away from the locking part (432) and is interference-fitted with the rotating shaft (42). The fastening part is located at the other end of the connecting rod and is detachably and fixedly connected to the detector (5).

6. The target material side roughness measuring fixture according to claim 1, characterized in that, The lifting and positioning assembly (3) includes a connecting rod (31), a second locking member (32), and a third locking member (33). The connecting rod (31) has a positioning groove along the Z-axis at one end near the upright (2). The upright (2) can be slidably inserted into the positioning groove. The second locking member (32) can fasten the upright (2) to the connecting rod (31). The third locking member (33) can fasten the end of the connecting rod (31) away from the upright (2) to the connecting shaft (41).

7. The target material side roughness measuring fixture according to claim 6, characterized in that, Multiple second locking members (32) are provided and are spaced apart along the Z-axis direction.

8. The target material side roughness measuring fixture according to claim 7, characterized in that, The second locking member (32) includes a first bolt, one end of which is threaded to the connecting rod (31) and can pass through the connecting rod (31) along the X-axis direction to abut against the upright (2).

9. The target material side roughness measuring fixture according to claim 6, characterized in that, The third locking member (33) includes an annular retaining ring (331) and a second bolt (332). The connecting rod (31) and the connecting shaft (41) can both be inserted into the retaining ring (331). One end of the second bolt (332) can pass through the retaining ring (331) to fasten the connecting rod (31) and the connecting shaft (41).

10. The target material side roughness measuring fixture according to any one of claims 1-9, characterized in that, The upright (2) is provided with scale lines.

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