Temperature measuring device system for aluminum heating plate

Abstract

The utility model provides a temperature measuring device system for an aluminum heating plate. The temperature measuring device system comprises a base for placing the aluminum heating plate and a temperature measuring unit arranged on the upper surface of the aluminum heating plate, the temperature measuring unit comprises a central temperature measuring belt arranged in the center of the aluminum heating plate, and a plurality of high-temperature temperature measuring belts and a plurality of low-temperature temperature measuring belts which are annularly arranged on the central temperature measuring belt; the high-temperature temperature measuring belt is arranged right above the electric heating wire in the aluminum heating disc; and the low-temperature temperature measuring belt is arranged between two adjacent electric heating wires. The temperature measuring device system used for the aluminum heating plate is simple in structure, low in manufacturing cost and small in occupied space, accurate measurement of the temperature of the aluminum heating plate is achieved by designing the distribution condition of the temperature measuring elements on the upper surface of the aluminum heating plate, and therefore changes of temperature uniformity of the heating plate are judged, and guidance for product improvement is achieved.

Description

Technical Field

[0001] This utility model belongs to the field of temperature detection technology for industrial heating equipment, and specifically relates to a temperature measuring device system for aluminum heating plates. Background Technology

[0002] Although China started relatively late in the semiconductor design and manufacturing chain, and has faced challenges due to the recent global economic downturn, the rapid growth of downstream industries such as communications and automotive electronics, coupled with its long-standing position as a global electronics manufacturing center, has ensured that the consumer electronics market remains China's second-largest semiconductor chip market. Therefore, the semiconductor industry continues its cyclical upward trend. The market and demand for aluminum heating plates as wafer heating plates are also increasing. However, aluminum heating plates are expensive, have long been reliant on imports with long delivery times, severely impacting the development of related semiconductor industries. Customers are highly concerned about the uniformity of the heating temperature during use; therefore, monitoring the uniformity of the heating temperature is crucial during the manufacturing process.

[0003] Currently, the temperature uniformity of the heating plate can only be tested after the customer installs it. This operation not only increases the pass rate of the shipment department, but also increases the processing cost, which is not conducive to cost reduction and cost saving. Therefore, adding a temperature measuring device to measure the temperature uniformity after the heating plate is welded can effectively reduce the cost of subsequent processing and the rate of non-conforming shipments.

[0004] In existing technologies, heating plate temperature measurement platforms are commonly used in semiconductor processing equipment to detect the temperature of the heating plate during semiconductor manufacturing processes, ensuring the normal progress of the reaction and precise temperature control. Common temperature measurement functions include infrared (IR) temperature measurement and thermocouple (TC) temperature measurement. Infrared temperature measurement directly measures the surface temperature of the heating plate using an infrared camera positioned on top of an infrared shield. Thermocouple temperature measurement achieves temperature detection by placing a wafer with thermocouple points on the surface of the heating plate. Utility Model Content

[0005] To address the shortcomings of existing technologies, the purpose of this invention is to provide a temperature measuring device system for aluminum heating plates. This system has a simple structure, low manufacturing cost, and small footprint. By rationally distributing the temperature measuring units on the surface of the aluminum heating plate, it achieves accurate temperature measurement, thereby determining changes in the temperature uniformity of the heating plate and providing guidance for product improvement.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] This utility model provides a temperature measuring device system for an aluminum heating plate. The temperature measuring device system includes: a base for placing the aluminum heating plate, and a temperature measuring unit disposed on the upper surface of the aluminum heating plate.

[0008] The temperature measuring unit includes a central temperature measuring band located at the center of the aluminum heating plate, and several high-temperature temperature measuring bands and several low-temperature temperature measuring bands arranged around the central temperature measuring band.

[0009] The high-temperature measuring band is positioned directly above the heating wire inside the aluminum heating plate; the low-temperature measuring band is positioned between two adjacent heating wires.

[0010] In this invention, by rationally distributing the temperature measuring units on the surface of the aluminum heating plate, accurate measurement of the temperature of the aluminum heating plate is achieved, thereby determining the change in the temperature uniformity of the heating plate and providing guidance for product improvement; moreover, the temperature measuring device system provided by this invention has a simple structure, and the aluminum heating plate can be supported by the base.

[0011] More specifically, in this invention, the highest temperature on the surface of the heating plate can be monitored by the high-temperature measuring band, and the lowest temperature on the surface of the heating plate can be monitored by the low-temperature measuring band. Therefore, the temperature measuring device provided by this invention can measure the maximum and minimum temperatures on the surface of the heating plate to the greatest extent, thereby maximizing the detection of temperature uniformity.

[0012] As a preferred embodiment of this utility model, the base includes a support frame and a support platform fixedly disposed above the support frame.

[0013] Preferably, the surface of the support platform is provided with through holes.

[0014] Preferably, a lifting column is provided inside the through hole.

[0015] As a preferred technical solution of this utility model, the through hole includes a first through hole and a second through hole;

[0016] The first through hole is located at the center of the support platform; the second through hole is uniformly arranged around the periphery of the first through hole.

[0017] Preferably, the number of the second through holes is 4 to 8, for example, 4, 5, 6, 7 or 8.

[0018] As a preferred technical solution of this utility model, the diameter of the first through hole is 50-70mm, for example, it can be 50mm, 54mm, 58mm, 62mm, 66mm or 70mm, etc., but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0019] Preferably, the diameter of the second through hole is 20 to 40 mm, for example, it can be 20 mm, 24 mm, 28 mm, 32 mm, 36 mm or 40 mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0020] Preferably, the center distance between the first through hole and the second through hole is 100-110 mm, for example, it can be 100 mm, 102 mm, 104 mm, 106 mm, 108 mm or 110 mm, etc., but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0021] As a preferred embodiment of this invention, the lifting column is used to support the aluminum heating plate.

[0022] Preferably, a non-metallic pad is provided at one end of the lifting column near the aluminum heating plate.

[0023] Preferably, the telescopic length of the lifting column is 30 to 100 mm, for example, it can be 30 mm, 40 mm, 50 mm, 60 mm, 70 mm, 80 mm, 90 mm or 100 mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0024] In this invention, the purpose of using a lifting column to support the aluminum heating plate is to isolate the heating plate from the temperature interference of the temperature measuring equipment during the heating process, which would cause the heating speed to slow down or the temperature measurement to be abnormal.

[0025] As a preferred embodiment of this utility model, the central temperature measuring band, the high temperature measuring band, and the low temperature measuring band each independently include a number of uniformly distributed thermocouple patches.

[0026] The thermocouple patches in the high-temperature temperature measuring zone and the thermocouple patches in the low-temperature temperature measuring zone are arranged alternately.

[0027] In this invention, each thermocouple patch is connected to a computer to detect the real-time temperature of each temperature sensing element, and to draw a map based on the real-time data, thereby observing the temperature difference changes of the heating plate at different locations, determining the changes in the uniformity of the heating temperature of the heating plate and heating wire, and providing guidance for product improvement.

[0028] As a preferred embodiment of this invention, the central temperature measuring band includes a thermocouple patch disposed at the center of the aluminum heating plate.

[0029] As a preferred technical solution of this utility model, when the distance between adjacent heating wires is 30-40mm, a low-temperature measuring band is set in the middle of the adjacent heating wires. Specifically, the distance between adjacent heating wires is 30-40mm, for example, it can be 30mm, 32mm, 34mm, 36mm, 38mm or 40mm, etc., but is not limited to the listed values. Other values ​​not listed within the value range are also applicable.

[0030] When the spacing between adjacent heating wires is 50-90mm, at least three low-temperature measuring bands are evenly spaced and parallel between adjacent heating wires, and a low-temperature measuring band is set in the middle of adjacent heating wires. Specifically, the spacing between adjacent heating wires is 50-90mm, for example, it can be 50mm, 60mm, 70mm, 80mm or 90mm, but is not limited to the listed values. Other values ​​not listed within the range are also applicable.

[0031] More specifically, when the distance between adjacent heating wires is 50-90mm (i.e., the distance between adjacent heating wires is relatively large), in addition to setting a low-temperature measuring band in the middle of the adjacent heating wires, at least two low-temperature measuring bands should be evenly set to ensure the accuracy and uniformity of temperature measurement.

[0032] As a preferred technical solution of this utility model, each of the low temperature measuring bands includes 3 to 10 thermocouple patches evenly arranged, for example, 3, 4, 6, 8 or 10, but not limited to the listed values, and other unlisted values ​​within the range are also applicable.

[0033] The distance between the temperature measuring unit closest to the edge of the aluminum heating plate and the edge of the heating plate is 3 to 8 mm, for example, it can be 3 mm, 4 mm, 5 mm, 6 mm, 7 mm or 8 mm, but is not limited to the listed values. Other values ​​not listed within the range are also applicable.

[0034] As a preferred technical solution of this utility model, each of the high-temperature measuring strips includes 3 to 8 thermocouple patches evenly arranged, for example, 3, 4, 5, 6, 7 or 8.

[0035] It is worth noting that this utility model achieves accurate measurement of the temperature of the aluminum heating plate by rationally distributing thermocouple patches on the surface of the aluminum heating plate, thereby determining the changes in the temperature uniformity of the heating plate and providing guidance for product improvement.

[0036] As a preferred technical solution of this utility model, the temperature measuring device system for aluminum heating plate provided by this utility model includes: a base for placing aluminum heating plate, and a temperature measuring unit disposed on the upper surface of aluminum heating plate;

[0037] The temperature measuring unit includes a central temperature measuring band located at the center of the aluminum heating plate, and several high-temperature temperature measuring bands and several low-temperature temperature measuring bands arranged around the central temperature measuring band.

[0038] The high-temperature measuring band is positioned directly above the heating wire inside the aluminum heating plate; the low-temperature measuring band is positioned between two adjacent heating wires.

[0039] The base includes a support frame and a support platform fixedly mounted on top of the support frame; the surface of the support platform is provided with a through hole; a lifting column is provided in the through hole;

[0040] The through holes include a first through hole and a second through hole; the first through hole is located at the center of the support platform; the second through holes are evenly arranged around the periphery of the first through hole; the number of the second through holes is 4 to 8.

[0041] The diameter of the first through hole is 50-70 mm; the diameter of the second through hole is 20-40 mm; the center distance between the first through hole and the second through hole is 100-110 mm.

[0042] The lifting column is used to support the aluminum heating plate; a non-metallic pad is provided at one end of the lifting column near the aluminum heating plate; the telescopic length of the lifting column is 30-100mm.

[0043] The central temperature measuring zone, the high temperature measuring zone, and the low temperature measuring zone each independently include several uniformly distributed thermocouple patches; the thermocouple patches in the high temperature measuring zone and the thermocouple patches in the low temperature measuring zone are arranged alternately.

[0044] The central temperature measuring band includes a thermocouple patch disposed at the center of the aluminum heating plate;

[0045] When the spacing between adjacent heating wires is 30-40mm, a low-temperature measuring band is set in the middle of the adjacent heating wires; when the spacing between adjacent heating wires is 50-90mm, at least three low-temperature measuring bands are evenly spaced and parallel between the adjacent heating wires, and a low-temperature measuring band is set in the middle of the adjacent heating wires; each of the low-temperature measuring bands includes 3-10 thermocouple patches evenly arranged; the distance between the low-temperature measuring band closest to the edge of the aluminum heating plate and the edge of the heating plate is 3-8mm;

[0046] Each of the aforementioned high-temperature measuring bands includes 3 to 8 thermocouple patches evenly arranged.

[0047] The numerical range described in this utility model includes not only the point values ​​listed above, but also any point values ​​within the numerical range not listed above. Due to space limitations and for the sake of brevity, this utility model will not exhaustively list the specific point values ​​included in the range.

[0048] The system refers to an equipment system, device system, or production device.

[0049] Compared with the prior art, the present invention has the following beneficial effects:

[0050] (1) The temperature measuring device system provided by this utility model realizes accurate measurement of the temperature of the aluminum heating plate by measuring the distribution of the temperature measuring element on the surface of the aluminum heating plate, thereby determining the change in the temperature uniformity of the heating plate and providing guidance for product improvement.

[0051] (2) The temperature measuring device system provided by this utility model has a simple structure, low manufacturing cost, small footprint, and is suitable for industrial production and application.

[0052] (3) The temperature measuring device system provided by this utility model realizes the lifting and lowering of the aluminum heating plate through the lifting column set in the base, avoiding the temperature interference of the heating plate body on the temperature measuring equipment during the temperature measurement process, which would cause the heating speed to slow down or the temperature measurement to be abnormal. Attached Figure Description

[0053] Figure 1 This is a top view of the base provided in Embodiment 1 of the present utility model;

[0054] Figure 2 A schematic diagram of the structure of the base of Embodiment 1 provided by this utility model;

[0055] Figure 3 This invention provides a schematic diagram of the thermocouple patch distribution in the temperature measuring unit of Embodiment 1.

[0056] Wherein: 1 is the support platform, 2 is the support frame, 3 is the lifting column, 4 is the first through hole, 5 is the second through hole, 6 is the central temperature measuring zone, 7-1 is the first temperature measuring zone, 7-2 is the second temperature measuring zone, 7-3 is the third temperature measuring zone, 7-4 is the fourth temperature measuring zone, and 7-5 is the fifth temperature measuring zone. Detailed Implementation

[0057] It should be understood that in the description of this utility model, the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0058] It should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0059] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0060] Example 1

[0061] This embodiment provides a temperature measuring device system for an aluminum heating plate, the temperature measuring device system including: a base for placing the aluminum heating plate (e.g., a base for placing the aluminum heating plate). Figure 1 and Figure 2 As shown), and a temperature measuring unit (such as) disposed on the upper surface of the aluminum heating plate. Figure 3 (as shown);

[0062] The temperature measuring unit includes a central temperature measuring band located at the center of the aluminum heating plate, and several high-temperature temperature measuring bands and several low-temperature temperature measuring bands arranged around the central temperature measuring band.

[0063] The high-temperature measuring band is positioned directly above the heating wire inside the aluminum heating plate; the low-temperature measuring band is positioned between two adjacent heating wires.

[0064] The base includes a support frame 2 and a support platform 1 fixedly installed above the support frame 2; the surface of the support platform 1 is provided with a through hole; a lifting column 3 is provided in the through hole;

[0065] The through holes include a first through hole 4 and a second through hole 5; the first through hole 1 is located at the center of the support platform 1; the second through holes 5 are evenly arranged around the periphery of the first through hole 4; the number of the second through holes 5 is 6.

[0066] The diameter of the first through hole 4 is 60 mm; the diameter of the second through hole 5 is 30 mm; the center distance between the first through hole 4 and the second through hole 5 is 106 mm;

[0067] The lifting column 3 is used to support the aluminum heating plate; a non-metallic pad is provided at one end of the lifting column 3 near the aluminum heating plate; the telescopic length of the lifting column 3 is 50mm.

[0068] The central temperature measuring zone 6, the high temperature measuring zone, and the low temperature measuring zone each independently include several uniformly distributed thermocouple patches; the thermocouple patches in the high temperature measuring zone and the thermocouple patches in the low temperature measuring zone are arranged alternately.

[0069] The central temperature measuring band includes a thermocouple patch disposed at the center of the aluminum heating plate;

[0070] From the edge of the aluminum heating plate toward the center temperature measuring zone 6, a first temperature measuring zone 7-1, a second temperature measuring zone 7-2, a third temperature measuring zone 7-3, a fourth temperature measuring zone 7-4, and a fifth temperature measuring zone 7-5 are arranged sequentially. The first temperature measuring zone 7-1 has 6 thermocouple patches evenly arranged, the second temperature measuring zone 7-2 has 6 thermocouple patches evenly arranged, the third temperature measuring zone 7-3 has 3 thermocouple patches evenly arranged, and the fourth temperature measuring zone 7-4 has 3 thermocouple patches evenly arranged.

[0071] The distance between the thermocouple patch in the fourth temperature measuring zone and the center of the central temperature measuring zone 6 is 45mm.

[0072] The distance between any two adjacent thermocouple patches in the first temperature measuring zone 7-1 is 120mm; the minimum distance between the thermocouple patch in the first temperature measuring zone 7-1 and the thermocouple patch in the fifth temperature measuring zone 7-5 is 70mm; the minimum distance between the thermocouple patch in the second temperature measuring zone 7-2 and the thermocouple patch in the fifth temperature measuring zone 7-5 is 52mm.

[0073] The fifth temperature measuring band 7-5 includes six thermocouple patches evenly arranged; the distance between the fifth temperature measuring band 7-5 and the outermost edge of the aluminum heating plate is 5mm.

[0074] In this embodiment, the high-temperature measuring band includes a fourth measuring band 7-4, a second measuring band 7-2, and a fifth measuring band 7-5; the low-temperature measuring band includes a first measuring band 7-1 and a third measuring band 7-3.

[0075] Example 2

[0076] This embodiment provides a temperature measuring device system for an aluminum heating plate. The device system includes: a base for placing the aluminum heating plate, and a temperature measuring unit disposed on the upper surface of the aluminum heating plate.

[0077] The temperature measuring unit includes a central temperature measuring band located at the center of the aluminum heating plate, and several high-temperature temperature measuring bands and several low-temperature temperature measuring bands arranged around the central temperature measuring band.

[0078] The high-temperature measuring band is positioned directly above the heating wire inside the aluminum heating plate; the low-temperature measuring band is positioned between two adjacent heating wires.

[0079] The base 1 includes a support frame 2 and a support platform 1 fixedly installed above the support frame 2; the surface of the support platform 1 is provided with a through hole; a lifting column 3 is provided in the through hole;

[0080] The through holes include a first through hole 4 and a second through hole 5; the first through hole 1 is located at the center of the support platform 1; the second through holes 5 are evenly arranged around the periphery of the first through hole 4; the number of the second through holes 5 is 6.

[0081] The diameter of the first through hole 4 is 70 mm; the diameter of the second through hole 5 is 40 mm; the center distance between the first through hole 4 and the second through hole 5 is 110 mm.

[0082] The lifting column 3 is used to support the aluminum heating plate; a non-metallic pad is provided at one end of the lifting column 3 near the aluminum heating plate; the telescopic length of the lifting column 3 is 100mm.

[0083] The central temperature measuring zone, the high temperature measuring zone, and the low temperature measuring zone each independently include several uniformly distributed thermocouple patches; the thermocouple patches in the high temperature measuring zone and the thermocouple patches in the low temperature measuring zone are arranged alternately.

[0084] The central temperature measuring band includes a thermocouple patch disposed at the center of the aluminum heating plate;

[0085] When the spacing between adjacent heating wires is 35mm, a low-temperature measuring band is set in the middle of the adjacent heating wires; when the spacing between adjacent heating wires is 60mm, three low-temperature measuring bands are evenly spaced and parallel between the adjacent heating wires, and a low-temperature measuring band is set in the middle of the adjacent heating wires; each of the low-temperature measuring bands includes 8 thermocouple patches evenly arranged; the distance between the measuring unit closest to the edge of the aluminum heating plate and the edge of the heating plate is 6mm;

[0086] Each of the aforementioned high-temperature measuring bands includes four thermocouple patches evenly arranged.

[0087] Example 3

[0088] This embodiment provides a temperature measuring device system for an aluminum heating plate, including: a base for placing the aluminum heating plate, and a temperature measuring unit disposed on the upper surface of the aluminum heating plate;

[0089] The temperature measuring unit includes a central temperature measuring band located at the center of the aluminum heating plate, and several high-temperature temperature measuring bands and several low-temperature temperature measuring bands arranged around the central temperature measuring band.

[0090] The high-temperature measuring band is positioned directly above the heating wire inside the aluminum heating plate; the low-temperature measuring band is positioned between two adjacent heating wires.

[0091] The base 1 includes a support frame 2 and a support platform 1 fixedly installed above the support frame 2; the surface of the support platform 1 is provided with a through hole; a lifting column 3 is provided in the through hole;

[0092] The through holes include a first through hole 4 and a second through hole 5; the first through hole 1 is located at the center of the support platform 1; the second through holes 5 are evenly arranged around the periphery of the first through hole 4; the number of the second through holes 5 is 6.

[0093] The diameter of the first through hole 4 is 50mm; the diameter of the second through hole 5 is 20mm; the center distance between the first through hole 4 and the second through hole 5 is 100mm.

[0094] The lifting column 3 is used to support the aluminum heating plate; a non-metallic pad is provided at one end of the lifting column 3 near the aluminum heating plate; the telescopic length of the lifting column 3 is 40mm.

[0095] The central temperature measuring zone, the high temperature measuring zone, and the low temperature measuring zone each independently include several uniformly distributed thermocouple patches; the thermocouple patches in the high temperature measuring zone and the thermocouple patches in the low temperature measuring zone are arranged alternately.

[0096] The central temperature measuring band includes a thermocouple patch disposed at the center of the aluminum heating plate;

[0097] When the spacing between adjacent heating wires is 40mm, a low-temperature measuring band is set in the middle of the adjacent heating wires; when the spacing between adjacent heating wires is 90mm, five low-temperature measuring bands are evenly spaced and parallel between the adjacent heating wires, and a low-temperature measuring band is set in the middle of the adjacent heating wires; each of the low-temperature measuring bands includes 10 thermocouple patches evenly arranged; the distance between the measuring unit closest to the edge of the aluminum heating plate and the edge of the heating plate is 3mm;

[0098] Each of the aforementioned high-temperature measuring bands includes three thermocouple patches evenly arranged.

[0099] A comprehensive analysis of Examples 1-3 shows that the temperature measuring device system provided by this utility model can realize real-time monitoring and accurate measurement of the surface temperature of the heating plate, thereby enabling the monitoring of the temperature uniformity changes of the heating plate. The temperature measuring device system has a simple structure, low manufacturing cost, and small footprint, making it suitable for industrial production and application.

[0100] Example 4

[0101] This embodiment provides a temperature measuring device system for an aluminum heating plate. The only difference between this temperature measuring device system and that of Embodiment 1 is:

[0102] This embodiment omits the through holes and lifting columns on the support platform.

[0103] This embodiment provides a temperature measuring device system for an aluminum heating plate. The only difference between this temperature measuring device system and that of Embodiment 1 is:

[0104] In this embodiment, the lifting column is adjusted to a support column with a fixed height of 50mm.

[0105] Compared with Example 1, Examples 4-5 adjust the setting of the lifting column, thereby affecting the limitation of the lifting height of the heating plate or the heat dissipation effect;

[0106] More specifically, when the lifting column is omitted, the heating plate needs to be placed directly on the surface of the support platform, which will result in poor heat dissipation at the bottom of the heating plate, thus affecting the accuracy of temperature detection.

[0107] If the lifting column is adjusted to a support column of fixed height, it will cause obstruction to the raising and lowering of the heating plate during the temperature measurement process.

[0108] Example 7

[0109] This embodiment provides a temperature measuring device system for an aluminum heating plate. The only difference between this temperature measuring device system and that of Embodiment 1 is:

[0110] In this embodiment, when the distance between adjacent heating wires of the aluminum heating plate is 70mm, the number of low-temperature measuring bands is adjusted to 1.

[0111] Comparative Example 1

[0112] This comparative example provides a temperature measuring device system for an aluminum heating plate, the only difference between the temperature measuring device system and that of Example 1 is:

[0113] This comparative example omits the setting of the high-temperature temperature measurement zone.

[0114] Comparative Example 2

[0115] This comparative example provides a temperature measuring device system for an aluminum heating plate, the only difference between the temperature measuring device system and that of Example 1 is:

[0116] This comparative example omits the setting of the low-temperature measurement zone.

[0117] A comprehensive analysis of Examples 1 and 7 and Comparative Examples 1-2 shows that reducing the number of temperature measuring bands in the temperature measuring unit will affect the temperature measuring accuracy, which may lead to errors in judging the temperature uniformity of the heating plate and potentially damage the heating plate.

[0118] In summary, the temperature measuring device system for aluminum heating plates provided by this utility model has a simple structure, low manufacturing cost, and small footprint. By designing the distribution of temperature measuring elements on the upper surface of the aluminum heating plate, it can achieve accurate measurement of the temperature of the aluminum heating plate, thereby determining the change in the temperature uniformity of the heating plate and providing guidance for product improvement.

[0119] The applicant declares that the above description is only a specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model fall within the protection and disclosure scope of the present utility model.

Claims

1. A temperature measuring device system for an aluminum heating plate, characterized in that, The temperature measuring device system includes: a base for placing an aluminum heating plate, and a temperature measuring unit disposed on the upper surface of the aluminum heating plate; The temperature measuring unit includes a central temperature measuring band located at the center of the aluminum heating plate, and several high-temperature temperature measuring bands and several low-temperature temperature measuring bands arranged around the central temperature measuring band. The high-temperature measuring band is positioned directly above the heating wire inside the aluminum heating plate; the low-temperature measuring band is positioned between two adjacent heating wires.

2. The temperature measuring device system for an aluminum heating plate according to claim 1, characterized in that, The base includes a support frame and a support platform fixedly mounted on the support frame; The surface of the support platform is provided with through holes; A lifting column is installed inside the through hole.

3. The temperature measuring device system for an aluminum heating plate according to claim 2, characterized in that, The through hole includes a first through hole and a second through hole; The first through hole is located at the center of the support platform; The second through hole is uniformly arranged around the periphery of the first through hole; The number of the second through holes is 4 to 8.

4. The temperature measuring device system for an aluminum heating plate according to claim 3, characterized in that, The diameter of the first through hole is 50~70mm; The diameter of the second through hole is 20~40mm; The center distance between the first through hole and the second through hole is 100~110mm.

5. The temperature measuring device system for an aluminum heating plate according to claim 2, characterized in that, The lifting column is used to hold the aluminum heating plate; A non-metallic pad is provided at the end of the lifting column near the aluminum heating plate; The telescopic length of the lifting column is 30~100mm.

6. The temperature measuring device system for an aluminum heating plate according to claim 1, characterized in that, The central temperature measuring zone, high temperature measuring zone, and low temperature measuring zone each independently include several uniformly distributed thermocouple patches; The thermocouple patches in the high-temperature temperature measuring zone and the thermocouple patches in the low-temperature temperature measuring zone are arranged alternately.

7. The temperature measuring device system for an aluminum heating plate according to claim 6, characterized in that, The central temperature measuring band includes a thermocouple patch disposed at the center of the aluminum heating plate.

8. The temperature measuring device system for an aluminum heating plate according to claim 6, characterized in that, When the distance between adjacent heating wires is 30~40mm, a low-temperature measuring band is set in the middle of the adjacent heating wires; When the spacing between adjacent heating wires is 50~90mm, at least three low-temperature measuring bands are evenly spaced and parallel between adjacent heating wires, and a low-temperature measuring band is set in the middle of adjacent heating wires. Each of the aforementioned low-temperature measurement bands includes 3 to 10 thermocouple patches evenly arranged.

9. The temperature measuring device system for an aluminum heating plate according to claim 8, characterized in that, The distance between the temperature measuring unit closest to the edge of the aluminum heating plate and the edge of the heating plate is 3~8mm.

10. The temperature measuring device system for an aluminum heating plate according to claim 6, characterized in that, Each of the aforementioned high-temperature measuring bands includes 3 to 8 thermocouple patches evenly arranged.

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