Wafer carrier plate film pasting device

Abstract

A wafer carrier plate film pasting device comprises a carrier plate movement conveying mechanism, a carrier plate position deviation calibration mechanism, a film pasting charging barrel mechanism, a carrier plate discharging, storing and containing mechanism, limiting mechanisms, a PLC, an air compressor, a rack plate and an air blowing pipe mechanism, the rack plate is installed at the lower end of the carrier plate movement conveying mechanism, and the two limiting mechanisms are transversely installed on the upper front portion and the middle of the rack plate; the carrier plate position deviation calibration mechanism is longitudinally arranged on the rack plate between the two sets of limiting mechanisms; the air blowing pipe mechanism is transversely installed on the portion, located at the front side end of the second limiting mechanism, of the rack plate, the film pasting material barrel mechanism is installed on the portions, on the two sides of the front middle portion of the carrier plate movement conveying mechanism, of the frame, and the carrier plate discharging, storing and containing mechanism is installed at the upper rear end of the rack plate. The limiting mechanism can ensure that the wafer products enter the film pasting station and the finished product station one by one, the carrier plate position deviation calibration mechanism can correct the left and right directions of the wafer plates, and the carrier plate discharging, storing and containing mechanism can automatically contain the wafer products pasted with the films in a multi-layer mode.

Description

Technical Field

[0001] This utility model relates to the field of wafer auxiliary production equipment technology, and in particular to a wafer carrier film application device. Background Technology

[0002] A wafer is a silicon wafer used to fabricate silicon semiconductor circuits. Its raw material is silicon. In the production process, high-purity polycrystalline silicon is dissolved and doped with silicon seed crystals, then slowly pulled out to form a single silicon ingot. After grinding, polishing, and slicing, the silicon ingot forms a silicon wafer (which can be square or round). After wafer production, a film needs to be applied to its top surface. In current technology, workers typically place the wafer at the film application station and then apply the film. This method is inconvenient for workers and hinders work efficiency. Therefore, providing a mechanism that can automatically complete wafer film application is particularly necessary. Utility Model Content

[0003] In order to overcome the shortcomings of existing wafer bonding methods due to structural limitations, as described in the background, this utility model provides a wafer carrier bonding device that, with the joint action of relevant mechanisms, allows the equipment to automatically complete the alignment, bonding, and unloading processes after the operator places the wafer product at the relevant work station, thereby bringing convenience to the operator and improving work efficiency.

[0004] The technical solution adopted by this utility model to solve its technical problem is:

[0005] A wafer carrier film lamination device includes a carrier motion conveying mechanism, a carrier position deviation calibration mechanism, a film lamination cylinder mechanism, a carrier unloading and storage mechanism, a limiting mechanism, a PLC, an air compressor, a frame plate, and an air blowing pipe mechanism. The carrier motion conveying mechanism is an electric roller conveyor. The frame plate is installed at the lower end of the carrier motion conveying mechanism. There are at least two sets of limiting mechanisms, which are laterally installed on the upper front and middle parts of the frame plate. The carrier position deviation calibration mechanism is longitudinally installed on the frame plate located between the two sets of limiting mechanisms. The air blowing pipe mechanism is laterally installed on the frame plate located at the front end of the second set of limiting mechanisms. The film lamination cylinder mechanism is installed on the frames on both sides of the front middle part of the carrier motion conveying mechanism. The carrier unloading and storage mechanism is installed on the upper rear end of the frame plate. The air compressor's air tank solenoid valve and the air inlet pipe of the air blowing pipe mechanism are connected by pipelines.

[0006] Furthermore, the carrier plate position deviation calibration mechanism includes a calibration mechanism mounting base plate, a linear slide rail, a slider plate, and carrier plate positioning wheels. The linear slide rail has two sliding blocks, and two sliding plates are respectively mounted on the two sliding blocks. Multiple carrier plate positioning wheels are rotatably mounted on the outer side of the upper end of each sliding plate.

[0007] Furthermore, the limiting mechanism includes an electric push rod and a stop rod. A connecting rod is horizontally mounted on the piston rod of the electric push rod, and the lower ends of multiple stop rods are respectively mounted on the connecting rod.

[0008] Furthermore, the air blowing mechanism includes an air inlet pipe and an air jet pipe. There are multiple air jet pipes, each of which is installed on the air inlet pipe. The lower end of the air inlet pipe is connected to the other end of the solenoid valve.

[0009] Furthermore, the carrier plate unloading and storage mechanism includes a motor, a drive pulley, a driven pulley, a lead screw, a top plate, a mounting frame, support rods, linear bearings, a lower fixed plate, a guide plate, and a lead screw. The bearing rods of multiple sets of linear bearings are respectively installed around the lower fixed plate, the outer sides of the bearing sleeves of multiple sets of linear bearings are respectively installed around the guide plate, the upper ends of the bearing rods of multiple sets of linear bearings are respectively installed around the lower end of the top plate, the lead screw is installed in the opening in the middle of the guide plate, the motor is installed in the middle of the lower fixed plate, the drive pulley is installed at the lower end of the motor shaft, the upper and lower ends of the lead screw are respectively installed in the bearing inner rings in the middle of the lower end of the top plate and the middle of the upper end of the lower fixed plate, the middle part of the lead screw and the lead screw are connected together by threads, the lower ends of the two mounting frames are respectively installed on the upper end of the top plate, multiple support rods are respectively installed inside the two mounting frames, the driven pulley is installed at the lower end of the lead screw, and a transmission belt is rotatably installed between the drive pulley and the driven pulley.

[0010] Furthermore, the film-applying cylinder mechanism is equipped with a cross-cutting device, a film-applying roller device, and a film length adjustment device. The film-applying cylinder mechanism includes a side plate, a new film cylinder, a new film cylinder slider plate, a new film cylinder sliding guide rail, a cylinder guide wheel, a gravity tensioning wheel, a gravity tensioning wheel slider plate, a gravity tensioning wheel lifting guide rail, a cross-cutting blade bottom roller, a cross-cutting blade, film-applying rollers, a release film separating blade, a release film separating blade rotary cylinder, a film-winding guide wheel, a film-clamping roller lifting cylinder, a film-clamping knurling shaft, an electrically driven film-clamping roller, a film-clamping roller cylinder connecting seat, and an electrically driven release film recycling system. The frame of the material cylinder, cross-cutting equipment, film-applying roller equipment, and film length adjustment equipment, as well as the side plates, new film material cylinder, new film material cylinder slider plate, new film material cylinder sliding guide rail, material cylinder guide wheel, gravity tensioning wheel, gravity tensioning wheel slider plate, gravity tensioning wheel lifting guide rail, cross-cutting knife bottom roller, cross-cutting knife, film-applying roller, release film separating knife, release film separating knife rotary cylinder, film-wrapping guide wheel, film clamping roller lifting cylinder, film clamping knurling shaft, electrically driven film clamping roller, film clamping roller cylinder connecting seat, and electrically driven release film recycling material cylinder are respectively installed between the inner ends of the two side plates.

[0011] Furthermore, the two new film cylinder sliding guide rails are respectively horizontally mounted on the upper inner front sides of the two side plates. The two ends of the new film cylinders are respectively horizontally rotatably mounted between the sliding blocks of the two new film cylinder sliding guide rails. The two ends of the two cylinder guide wheels are respectively horizontally rotatably mounted at the lower front and rear ends of the two sides of the new film cylinders. The two ends of the electrically driven release film recycling cylinder are respectively rotatably mounted horizontally on the lower inner front sides of the two side plates. The outer sides of the two gravity tension wheel lifting guide rails are respectively mounted at the lower rear sides of the new film cylinders. The two gravity tension wheel slider plates are respectively slidably located on the two gravity tension wheel guide rails. Inside the tension wheel lifting guide rail, there is a counterweight rod on the outside of the gravity tension wheel slider plate. The gravity tension wheels are respectively installed horizontally between the inner sides of the two counterweight rods. The outer sides of the two film clamping roller lifting cylinders are respectively installed on both sides of the rear end of the electric drive release film recycling cylinder. The lower ends of the connecting seats of the two film clamping roller cylinders are respectively installed on the upper ends of the piston rods of the two film clamping roller lifting cylinders. The film clamping knurling shaft is installed on the inner side of the two side plates. The film clamping rollers are installed between the connecting parts of the two film clamping roller cylinders. The two sides of the film-wrapping guide wheels are respectively installed horizontally at the rear end of the two film clamping roller lifting cylinders. The outer sides of the two release film separating knife rotating cylinders are respectively installed horizontally between the middle of the lower end of the two side plates. The two ends of the front side of the release film separating knife and the inner sides of the shafts of the two release film separating knife rotating cylinders are respectively installed together.

[0012] Furthermore, the cross-cutting equipment includes a cross-cutting mechanism mounting base, a cross-cutting blade moving guide rail, a cross-cutting blade moving base block, a precision displacement fine-tuning slide, a cross-cutting blade fixing block, a cross-cutting blade, an electrically driven synchronous belt pulley drive wheel, a synchronous belt, a synchronous belt pulley driven wheel, a micrometer head, and a synchronous belt connecting block. The two ends of the cross-cutting mechanism mounting base are laterally distributed and mounted at the lower rear positions of the two new film cylinder sliding guide rails. The rear side of the cross-cutting blade moving guide rail is laterally distributed and mounted at the lower front end of the cross-cutting mechanism mounting base. The rear side of the cross-cutting blade moving base block is mounted on the slider of the cross-cutting blade moving guide rail. The lower end mounting seat of the precision displacement fine-tuning slide is mounted on the cross-cutting blade moving base block. The lower end of the cross-cutting blade fixing block is installed on the upper part of the moving end of the precision displacement fine-tuning slide. The upper end of the cross-cutting blade is installed on the lower part of the cross-cutting blade fixing block. The electric drive synchronous belt pulley driving wheel and the synchronous belt pulley driven wheel are respectively rotatably installed on both sides of the upper end of the cross-cutting blade mechanism mounting base. The synchronous belt is annularly rotated and sleeved on the outside of the connecting driving wheel and the driven wheel. The lower end of the micrometer head is installed on the moving base of the cross-cutting blade, and the lower end of its measuring head is placed on top of the moving end of the precision displacement fine-tuning slide. The synchronous belt connecting block installs the lower right side of the synchronous belt on the top of the moving base of the cross-cutting blade.

[0013] Furthermore, the film-applying roller device includes a film-applying roller mechanism mounting base plate, film-applying roller mechanism side plates, film-applying roller lifting drive cylinders, film-applying roller fixed side plates, film-applying rollers, film-applying roller drive motors, drive motor end synchronous pulleys, and film-applying roller end synchronous pulleys. The two ends of the film-applying roller mechanism mounting base plate are respectively mounted between the inner rear ends of the two side plates. The two film-applying roller mechanism side plates are respectively mounted on the outer sides of the film-applying roller mechanism mounting base plate. The cylinders of the two film-applying roller lifting drive cylinders are respectively mounted on the outer sides of the two film-applying roller mechanism side plates. The inner sides of the two film-applying roller fixed side plates are respectively mounted on the outer ends of the two sets of film-applying roller lifting drive cylinders. The two ends of the film-applying rollers are rotatably mounted on the lower ends of the two film-applying roller fixed side plates. The film-applying roller drive motor is mounted on the inner front side of the film-applying roller fixed side plate. The drive motor end synchronous pulley and the film-applying roller end synchronous pulley are respectively mounted on the outer sides of the rotating shafts of the film-applying roller and the drive motor end synchronous pulley, and located between the right outer ends of the film-applying roller fixed side plates. The synchronous pulleys at the drive motor end and the film-applying roller end are fitted with synchronous belts on their outer rotating sides.

[0014] Furthermore, the film length adjustment device includes an outer plate of the film length adjustment mechanism, an inner plate of the film length adjustment mechanism, a slider, a slide rail, a film clamping roller telescopic cylinder, a film clamping knurling shaft cylinder connector, a film clamping knurling shaft, film clamping rollers, a film clamping roller rotation drive motor, a rack, a motor, and gears. Two slide rails are respectively installed at the rear end of the cross-cutting device. Each slide rail has a slider. The outer sides of the outer plate and the inner plate of the film length adjustment mechanism are respectively installed on the inner ends of the sliding blocks of the two slide rails. Two film clamping roller telescopic cylinders are respectively installed on the outer ends of the outer plate and the inner plate of the film length adjustment mechanism. The rear sides of the two film clamping knurling shaft cylinder connectors are respectively installed on the rear ends of the piston rods of the two film clamping roller telescopic cylinders. The two ends of the film knurling shaft are led outward through the opening in the middle of the outer plate and inner plate of the film length adjustment mechanism, and are rotatably installed together with the inner rear ends of the two ink-adding knurling shaft cylinder connectors. The left end of the film clamping roller is rotatably installed at the rear of the outer plate of the film length adjustment mechanism and located at the rear end of the film knurling shaft. The right end of the film clamping roller is installed together with the shaft of the film clamping roller rotation drive motor. The film clamping roller rotation drive motor is installed at the lower rear outer end of the inner plate of the film length adjustment mechanism. The right end of the motor is installed at the upper rear inner end of the right side plate. The gear is installed at the front end of the motor shaft. The rack is installed at the upper right end of the inner plate of the film length adjustment mechanism, and the lower part of the gear meshes with the upper end of the rack.

[0015] The beneficial effects of this invention are as follows: With the combined action of related mechanisms, after the operator places the wafer product on the carrier plate conveying mechanism, the limiting mechanism ensures that the wafer products enter the lamination station and the finished product station one by one. The carrier plate position deviation calibration mechanism automatically corrects the left and right orientation of the wafer plate, ensuring the accuracy of the wafer position during lamination by the lamination cylinder mechanism. The carrier plate unloading, storage, and collection mechanism automatically collects the laminated wafer products in multiple layers. This invention brings convenience to the operator and correspondingly improves work efficiency. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0018] Figure 2 This is a partial structural schematic diagram of the present invention.

[0019] Figure 3 This is a schematic diagram of the carrier plate position deviation calibration mechanism of this utility model.

[0020] Figure 4 This is a schematic diagram of the film-applying cylinder mechanism of this utility model.

[0021] Figure 5 This is a schematic diagram of the film-applying cylinder mechanism of this utility model.

[0022] Figure 6 This is a schematic diagram of the cross-cutting device of this utility model.

[0023] Figure 7 This is a schematic diagram of the structure of the film-applying roller device of this utility model.

[0024] Figure 8 This is a schematic diagram of the structure of the carrier plate unloading, storage and collection device of this utility model.

[0025] Figure 9 This is a schematic diagram of the structure of the membrane length adjustment device of this utility model. Detailed Implementation

[0026] Figure 1 , 2As shown in figures 3, 4, 5, 6, 7, 8, and 9, a wafer carrier film laminating device includes: a carrier motion conveying mechanism 1, a carrier position deviation calibration mechanism 2, a film laminating cylinder mechanism 3, a carrier unloading and storage mechanism 4, a limiting mechanism 5, a PLC (not shown in the figures), an air compressor (not shown in the figures), a frame plate (not shown in the figures), and an air blowing pipe mechanism 6. The carrier motion conveying mechanism 1 is an electric roller conveyor. The frame plate is fixedly installed at the lower end of the carrier motion conveying mechanism 1. There are at least two sets of limiting mechanisms 5. The two sets of limiting mechanisms 5 are horizontally fixedly installed at the upper front part of the frame plate. The carrier position deviation calibration mechanism 2 is vertically fixedly installed on the frame plate located between the two sets of limiting mechanisms 5. The air blowing pipe mechanism 6 is horizontally fixedly installed on the frame plate located at the front end of the second set of limiting mechanisms 5. The film laminating cylinder mechanism 3 is fixedly installed... The carrier plate unloading and storage mechanism 4 is fixedly installed on the upper rear end of the frame plate on the frame on both sides of the middle part of the carrier plate motion transmission mechanism 1; the air compressor's air tank solenoid valve and the air inlet pipe of the air blowing pipe mechanism 6 are fixedly connected by pipes; the power input terminal of the PLC and the two poles of the AC 220V power supply are respectively connected by wires; the PLC's multi-channel power output terminal and the motor of the carrier plate motion transmission mechanism, the linear slide rail of the carrier plate position deviation calibration mechanism, the electric drive release film recycling cylinder, electric drive clamping roller, clamping roller lifting cylinder, release film separation tip rotation cylinder, electric drive synchronous belt pulley drive wheel, film-applying roller lifting drive cylinder, film-applying roller drive motor, clamping roller rotation drive motor, motor, motor of the carrier plate unloading and storage mechanism, the electric push rod of the limit mechanism, the power input terminal of the solenoid valve, etc. are respectively connected by wires.

[0027] Figure 1 , 2As shown in 3, 4, 5, 6, 7, 8, and 9, the carrier plate position deviation calibration mechanism 2 includes a calibration mechanism mounting base plate 21 (the reference plate and support plate of the carrier plate position deviation calibration mechanism, which is horizontally mounted on the frame plate), a linear slide rail 22 (serving as a guide for the synchronous and reverse movement of the two side slider plates 23), slider plates 23 (support plates for the carrier plate positioning wheels 24), and carrier plate positioning wheels 24 (the positioning wheels on both sides can move synchronously and in reverse, converging towards the center to correct the carrier plate, and the positioning wheels 24 can rotate around their own axis to avoid wear when in contact with the carrier plate). The linear slide rail has two sliding blocks 221, and the two sliding blocks 221 and the external threads at both ends of the linear slide rail screw have opposite directions. Two sliding plates 23 are respectively mounted on the two sliding blocks 221, and each sliding plate 23 has a rotating outer side at its upper end. Multiple plate positioning wheels 24 are distributed on the two sliding plates 23 and are located between the two conveying rollers 101 of the plate movement transmission mechanism, with a distance between them. The calibration mechanism mounting base plate 21 is fixedly mounted on the frame plate. The limiting mechanism includes an electric push rod (or a cylinder) 51 (to limit and release the plate; pushing the stop rod up has a limiting effect, and lowering it has a releasing effect) and a stop rod 52 (for plate limiting). A connecting rod is horizontally fixedly mounted on the piston rod of the electric push rod 51. The lower ends of multiple stop rods 52 are distributed on the connecting rod and are located between the two conveying rollers 101 of the plate movement transmission mechanism, with a distance between them. The lower end of the cylinder of the electric push rod 51 is fixedly mounted on the frame plate. The air blowing mechanism includes an intake pipe 61 and a jet pipe 62. There are multiple jet pipes 62, with their lower ends distributed on the left and right sides of the intake pipe 61. The lower end of the intake pipe 61 and the other end of the solenoid valve are fixedly connected via a pipe (air output from the air compressor enters the jet pipe, and the air blowing direction of the jet pipe is as follows). Figure 5As shown, to prevent the film at the beginning of the film application from rolling downwards and thus failing to properly adhere to the carrier plate, the air intake pipes 62 are distributed on the left and right sides between the two conveying rollers 101 of the carrier plate movement transmission mechanism, with a distance between them. The lower end of the air intake pipe is fixedly mounted on the frame plate. The carrier plate unloading and storage mechanism includes a motor 41 (providing power for the rotation of the lead screw), a drive pulley 42, a driven pulley (not shown in the figure; the drive pulley 42 and the driven pulley are coaxially connected to the motor 41 and the lead screw 491 respectively, and there is a synchronous connection between the drive pulley 42 and the driven pulley to provide power transmission between the motor 41 and the lead screw), a lead screw seat 43 (when the lead screw 491 rotates, it can move up and down relative to the lead screw seat; the lead screw seat serves as a guide for the movement of the lead screw and is used in conjunction with it), a top plate 44, and a mounting bracket 45 (providing support for the support rod 46). The following components are included: a support rod 46 (used to support the carrier plate), linear bearings 47 (as shown in the figure, A and B are the linear bearing seats and guide shafts, respectively, used together to provide auxiliary guidance for the overall lifting of the mounting frame), a lower fixed plate 48, a guide plate 49 (installed on the frame, relatively stationary, serving as the mounting base for the carrier plate unloading and storage mechanism), and a lead screw 491 (for the transmission of the overall lifting motion). The bearing rods of the four sets of linear bearings 47 are respectively fixedly installed around the lower fixed plate 48, and the outer sides of the bearing sleeves of the four sets of linear bearings 47 are respectively fixedly installed on the guide plate. Around plate 49, the upper ends of the bearing rods of four sets of linear bearings 47 are respectively fixedly installed around the lower end of top plate 44. A lead screw seat 43 is fixedly installed in the opening in the middle of guide plate 49. Motor 41 is fixedly installed in the middle of lower fixed plate 48. Drive pulley 42 is fixedly installed at the lower end of motor 41's shaft and located below lower fixed plate 48. The upper and lower ends of lead screw 491 are respectively fixedly installed in the inner rings of bearings fixedly installed in the middle of the lower end of top plate 44 and the middle of the upper end of lower fixed plate 48. The middle of lead screw 491 and lead screw seat 43 are connected together by threads. Two sets of mounting brackets 45 are lower... The ends are respectively fixedly installed on the upper end of the top plate 44. Multiple support rods 46 are respectively distributed and fixedly installed on the inner side of the two sets of mounting brackets 45. The lower end of the screw 491 is fixedly installed on the lower side of the lower fixed plate 48. A ring synchronous transmission belt is rotatably installed between the driving pulley 42 and the driven pulley. The two sets of mounting brackets 45 and multiple support rods 46 are respectively distributed on the left and right sides between the two conveying rollers 101 of the carrier plate movement transmission mechanism and at a distance from the conveying rollers 101. The lower parts of the four sides of the lower fixed plate 48 are respectively fixedly installed on the frame plate.

[0028] Figure 1 , 2As shown in 3, 4, 5, 6, 7, 8, and 9, the film-applying cylinder mechanism 3 is equipped with a cross-cutting device 31 (which cuts the adhesive layer of the double-layer adhesive film without cutting the release film at the bottom (achieved by adjusting the cutting depth of the cross-cutting device), a film-applying roller device 32 (which adheres the film to the carrier plate through the rolling action of the film-applying roller), and a film length adjustment device 33 (used to adjust the length of the film wrapped between the cutting point of the cross-cutting device and the release film separation tip, because the spacing between the two cross-cuttings needs to be adjusted according to the size of the carrier plate; that is, the length of each film cut out = the length of the film wrapped between the cutting point of the cross-cutting device and the release film separation tip), and the film-applying cylinder mechanism includes... Includes side plate 7 (the overall mounting base for the film-applying cylinder mechanism), new film cylinder 8 (for installing the new film), new film cylinder slider plate 9, new film cylinder sliding guide rail 10 (for guiding the up-and-down movement of the new film cylinder), cylinder guide wheel 11 (supporting the new film cylinder; under the action of gravity, the cut surface of the new film is always in contact with the cylinder guide wheel 11, so that the new film is not fluffy and messy when rolled up and the winding angle does not change during the film application process), gravity tension wheel 12 (keeping the film taut when pulled down), gravity tension wheel slider plate 13, gravity tension wheel lifting guide rail 14 (guiding the lifting movement of the gravity tension wheel 12), and cross-cutting blade bottom roller 15 (ensuring the film is taut on the cross-cutting blade bottom roller 15 for easy cross-cutting). The system includes: a film cutter, a film-applying roller 16 (for rolling and applying film), a release film separating blade 17 (whose pointed tip facilitates the separation of the adhesive layer from the release film, preparing for the subsequent application of the adhesive layer to the carrier plate), a release film separating blade rotary cylinder 18 (adjusting the appropriate angle so that the starting position of the adhesive film is better rolled onto the carrier plate by the film-applying roller), a film-winding guide roller 19 (film guide), a film-clamping roller lifting cylinder 20 (driving the lifting and lowering movement of the film-clamping roller 22 to achieve the clamping and releasing of the film-clamping knurling shaft 21 and the film-clamping roller 22), an electrically driven film-clamping knurling shaft 21, a film-clamping roller 22, a film-clamping roller cylinder connecting seat 23, and an electrically driven release film recycling cylinder 24 (for collecting unused release film). The frame of the release film roll-up, cross-cutting equipment 31, film-applying roller equipment 32, film length adjustment equipment 33, and the side plate 7, new film cylinder 8, new film cylinder slider plate 9, new film cylinder sliding guide rail 10, cylinder guide wheel 11, gravity tension wheel 12, gravity tension wheel slider plate 14, gravity tension wheel lifting guide rail 13, cross-cutting blade bottom roller 15, film-applying roller 16, release film separating blade 17, release film separating blade rotary cylinder 18, film-winding guide wheel 19, film clamping roller lifting cylinder 20, electric-driven film clamping knurling shaft 21, film clamping roller 22, film clamping roller cylinder connecting seat 23, and electric-driven release film recycling cylinder 24 are respectively fixedly installed between the inner ends of the two side plates 7.Two new film cylinder sliding guide rails 10 are horizontally fixed on both sides between the upper front inner sides of two side plates 7. Two ends of the new film cylinder slider plate 9 are fixed between the sliding blocks of the two new film cylinder sliding guide rails 10. Two ends of the new film cylinder 8 are horizontally rotatably mounted between the two sliding plates 9. Two cylinder guide wheels 11 are horizontally rotatably mounted at the lower front and rear ends of both sides of the new film cylinder 8. Two ends of the electrically driven release film recycling cylinder 24 are horizontally rotatably mounted at the lower front inner sides of the two side plates 7. The outer sides of two gravity tension wheel lifting guide rails 13 are fixedly mounted at the lower rear sides of the new film cylinder 8. Two gravity tension wheel slider plates 14 slide within the two gravity tension wheel lifting guide rails 13. The outer sides of the gravity tension wheel slider plates 14 have... The weight bar (spaced with the inner side of the side plate), the gravity tensioning wheel 12 is horizontally rotatably mounted between the inner sides of the two counterweight bars, the outer sides of the two film clamping roller lifting cylinders 20 are fixedly mounted on both sides of the rear end of the electrically driven release film recycling cylinder 24, the lower ends of the two film clamping roller cylinder connecting seats 23 are fixedly mounted on the upper ends of the piston rods of the two film clamping roller lifting cylinders 20, the electrically driven film clamping knurling shaft 21 and the two sides of the film clamping roller 22 are horizontally rotatably mounted between the connecting seats of the two film clamping roller cylinders 20, the two sides of the synchronous wheel at the end of the film applying roller 16 are horizontally rotatably mounted at the rear end of the slider plate of the two gravity tensioning rollers, and the two sides of the three film-winding guide wheels 19 are horizontally rotatably mounted at the rear end of the two film clamping roller lifting cylinders 20 and the rear end of the synchronous wheel at the end of the film applying roller. Two release film separating blade rotary cylinders 18 are horizontally fixedly installed on the outer sides between the lower middle parts of the two side plates 7. The front ends of the release film separating blade 17 and the inner sides of the shafts of the two release film separating blade rotary cylinders 18 are fixedly connected. Figure 6 The diagram shows a schematic of the film-applying cylinder mechanism (film winding section). Lines A and B in the diagram represent the winding direction of the adhesive film (double layer: adhesive film and release film), where line A is the adhesive film and line B is the separated release film. The adhesive film separates at the front end of the release film separation tip 17, and the release film continues to wind backward to the release film recycling cylinder 24.

[0029] Figure 1 , 2As shown in 3, 4, 5, 6, 7, 8, and 9, the cross-cutting equipment includes a cross-cutting blade mechanism mounting base plate 311, a cross-cutting blade moving guide rail 312 (for guiding the lateral movement of the cross-cutting blade), a cross-cutting blade moving base block 313, and a precision displacement fine-tuning slide 314. (Working in conjunction with the micrometer head 3110 to precisely adjust the cutting depth of the cross-cutting blade), cross-cutting blade fixing block 315, cross-cutting blade 316, electric drive synchronous belt pulley drive pulley 317, synchronous belt 318; synchronous belt pulley driven pulley 319, micrometer head 3110, synchronous belt connecting block 3111, the two ends of the cross-cutting blade mechanism mounting base 311 are laterally distributed and fixedly installed at the lower rear end of the two new film cylinder sliding guide rails 10, the rear side of the cross-cutting blade moving guide rail 312 is laterally distributed and fixedly installed at the lower front end of the cross-cutting blade mechanism mounting base 311, the rear side of the cross-cutting blade moving base block 313 is fixedly installed on the slider of the cross-cutting blade moving guide rail 312, and the lower end of the precision displacement fine-tuning slide table 314 is fixedly installed on the cross-cutting blade moving base block 313. The lower end of the cross-cutting blade fixing block 315 is fixedly installed on the upper part of the moving end of the precision displacement fine-tuning slide 314. The upper end of the cross-cutting blade 316 is fixedly installed on the lower part of the cross-cutting blade fixing block 315. The electric drive synchronous belt pulley drive wheel 317 and the synchronous belt pulley driven wheel 319 are respectively rotatably installed on both sides of the upper end of the cross-cutting blade mechanism mounting base 311. The synchronous belt 318 is annularly rotated and sleeved on the outside of the drive wheel 317 and the driven wheel 319. The lower end of the micrometer head 3110 is installed on the cross-cutting blade moving base block 313. The lower end of its measuring head is abutted above the moving end of the precision displacement fine-tuning slide 3144 (the working principle of the micrometer head: by adjusting the micrometer, the precise displacement data of the object in contact with its measuring head can be obtained). The synchronous belt connecting block 3111 fixes the lower right side of the synchronous belt to the top of the cross-cutting blade moving base block 313.

[0030] Figure 1 , 2As shown in Figures 3, 4, 5, 6, 7, 8, and 9, the film-applying roller device includes a film-applying roller mechanism mounting base plate 321, a film-applying roller mechanism side plate 322, a film-applying roller lifting drive cylinder 323 (providing power for the lifting and lowering movement of the film-applying roller, realizing the pressing and releasing of the film-applying roller), a film-applying roller fixing side plate 324, a film-applying roller fixing side plate 325, a film-applying roller 326, a film-applying roller drive motor 327 (providing power for the rotational movement of the film-applying roller, realizing the rolling of the film-applying roller), a drive motor end synchronous wheel 328, and a film-applying roller end synchronous wheel 329 (the combined action of the drive motor end synchronous wheel 328 and the film-applying roller end synchronous wheel 329 provides power transmission between the drive motor 327 and the film-applying roller). The two ends of the film-applying roller mechanism mounting base plate 321 are respectively fixedly installed between the inner rear ends of the two side plates 7, and the two film-applying roller mechanism side plates 322 and 323 are respectively fixedly installed. On the outer side of the mounting base plate 7 of the film-applying roller mechanism, the cylinders of the two film-applying roller lifting drive cylinders 323 are respectively fixedly installed on the outer sides of the two film-applying roller mechanism side plates 322 and 323. The film-applying roller fixing side plate 324 and the inner side of the film-applying roller fixing side plate 324 are respectively fixedly installed on the outer ends of the two sets of film-applying roller lifting drive cylinders 323. The film-applying rollers 326 are respectively rotatably installed on the lower ends of the film-applying roller fixing side plates 324 and 325. The film-applying roller drive motor 327 is fixedly installed on the inner front side of the film-applying roller fixing side plate 325. The drive motor end synchronous wheel 328 and the film-applying roller end synchronous wheel 329 are respectively fixedly installed on the outer side of the rotating shaft of the film-applying roller 326 and the drive motor end synchronous wheel 328 and located between the right outer end of the film-applying roller fixing side plate 325. An annular synchronous belt is rotatably sleeved on the outer side of the drive motor end synchronous wheel 328 and the film-applying roller end synchronous wheel 329.The film length adjustment device includes an outer plate 331, an inner plate 332, a slider 333, a slide rail 324 (serving as a guide for the forward and backward movement of the film length adjustment mechanism), a film clamping roller telescopic cylinder 325 (driving the telescopic movement of the film clamping roller 328 to achieve the clamping and loosening of the film clamping knurling shaft 327 and the film clamping roller 328), a film clamping knurling shaft cylinder connector 326, a film clamping knurling shaft 327, a film clamping roller 328, and a film clamping roller rotation drive motor 329 (providing power for the rotation of the film clamping roller 328, and connecting the film clamping knurling shaft 327 and the film clamping roller 328). When the clamping roller 328 is clamped, the rotation of the clamping roller 328 can drive the clamping knurling shaft 327 to rotate synchronously in the opposite direction, which can realize the movement of the film), rack 3210, motor 3211, gear 3212 (motor 3211 drives gear 3212 to rotate, due to the meshing of rack and gear, the gear will roll on rack under the drive of motor, realizing the forward and backward movement of film length adjustment mechanism), two slide rails 324 are respectively fixedly installed at the rear end of the cross-cutting equipment, each slide rail has 324 sliders 333, film length adjustment mechanism outer plate 331, film length adjustment The inner side plate 332 of the mechanism is fixedly installed on the inner side of the sliding blocks 333 of the two slide rails. The two film clamping roller telescopic cylinders 325 are fixedly installed on the outer side of the film length adjustment mechanism outer side plate 331 and the outer side of the film length adjustment mechanism inner side plate 332. The rear side of the two film clamping knurling shaft cylinder connectors 326 is fixedly installed on the rear end of the piston rods of the two film clamping roller telescopic cylinders 325. The two ends of the film clamping knurling shaft 337 are led outward through the openings in the middle of the film length adjustment mechanism outer side plate 331 and the film length adjustment mechanism inner side plate 332, and rotate on the inner side of the rear side of the two ink knurling shaft cylinder connectors 336 respectively. The film clamping rollers are mounted together (with allowance in the opening, allowing both sides of the film clamping knurling shaft 337 to move back and forth along the opening). The left end of the film clamping roller 338 is rotatably mounted on the rear of the outer plate 331 of the film length adjustment mechanism and located at the rear end of the film clamping knurling shaft 337. The right end of the film clamping roller 338 and the shaft of the rotating drive motor of the film clamping roller 339 are fixedly mounted together. The rotating drive motor 339 of the film clamping roller is fixedly mounted on the lower rear outer side of the inner plate 332 of the film length adjustment mechanism. The right end of the motor 3311 is fixedly mounted on the upper rear inner side of the right side plate. The gear 3312 is fixedly mounted on the left front end of the shaft of the motor 3311. The rack 3310 is fixedly mounted on the upper right end of the inner plate of the film length adjustment mechanism, and the lower part of the gear 3312 meshes with the upper end of the rack.

[0031] Figure 1 , 2As shown in Figures 3, 4, 5, 6, 7, 8, and 9, 1 represents the carrier plate motion conveying mechanism; this mechanism is used to convey the carrier plate 101 throughout the entire film application process. The carrier plate motion conveying mechanism 1 consists of a row of conveyor wheels, forming a "conveyor belt," and the conveying function is accomplished by the rotation of the conveyor wheels; each conveyor wheel is fixed to a sprocket bearing seat at both ends by bearings and can rotate relative to each other, and each end has a sprocket connected and fixed to the conveyor wheel. The sprocket bearing seats at both ends are respectively fixed to the mounting bases at both ends. The entire "conveyor belt" can be driven by sprockets. Multiple drive motors can be set to realize the segmented movement of the conveyor belt. Through the limiting and stopping mechanism, for example, a feeding section, a film application section, and a unloading section can be set, and different movement speeds can be set for each section without interference. From the perspective of the entire conveying mechanism, the carrier plate 102 passes through the feeding section, the film application section, and the unloading section sequentially from front to back; a limiting mechanism is provided between the feeding section and the film application section. Before the previous carrier plate is finished being filmed and enters the unloading section, the next carrier plate will be blocked in the feeding section by the limiting and blocking mechanism until the previous carrier plate is finished being filmed and enters the unloading section. Only then will the next carrier plate be released and enter the film-applying section for film application. After the carrier plate enters the film-applying section, the carrier plate position deviation calibration mechanism first calibrates the left and right position deviation of the carrier plate. When the carrier plate reaches the film application start position, the film application start position limiting mechanism first limits the carrier plate. After the film is pasted with the start position of the film, the film application start position limiting mechanism will release the carrier plate for film application. After the film application is completed, the carrier plate will continue to move backward to the unloading section of the conveyor mechanism, and then enter one of the layers of the carrier plate unloading and storage mechanism for temporary storage.

[0032] Figure 1 , 2As shown in 3, 4, 5, 6, 7, 8, and 9, the working process of this new type is as follows. (1) The carrier plate 102 to be coated is placed manually on the front conveyor wheel of the carrier plate motion conveyor; after the carrier plate motion conveyor is started, the conveyor wheel begins to slowly convey the carrier plate backward; during the conveying process, the carrier plate position deviation calibration mechanism will calibrate the left and right position deviation of the carrier plate to prevent manual placement (specifically, the PLC controls the electric linear slide 221 to drive the two sliding blocks 24 to move towards each other and clamp the carrier plate in the middle position, and then the PLG controls the two sliding blocks to move to the outer end and no longer clamp the carrier plate 101; the carrier plate 101 moves When the film application starts, the limiting mechanism will stop the movement (the PLC-controlled electric push rod pushes the stop bar 51 to a higher height, which blocks the carrier plate). Then the film application mechanism will start the film application action. (3) While the film application mechanism is working, the next carrier plate can be placed. Before the previous carrier plate is finished applying the film, the next carrier plate will be blocked by the limiting stop mechanism, which will not affect the previous carrier plate applying the film. After the previous carrier plate is finished applying the film, the next carrier plate will be released into the film application area. (5) The carrier plate that has been finished applying the film will continue to be conveyed to the rear. The substrate is temporarily placed on the carrier plate support rod 46 of the carrier plate unloading and storage mechanism. During operation, the PLC controls the motor 41, which drives the lead screw 491 to rotate via the drive pulley 42, synchronous belt, and driven belt. The lead screw 491 pushes the mounting bracket on the top plate upwards, allowing each film-coated carrier plate to gradually enter the four support rods 46 from front to back, providing support for the carrier plate. In this new invention, the film-coating cylinder mechanism works as follows: the cross-cutting blade 316 of the cross-cutting device pre-cuts the film, removing the tape from the double-layer film. The adhesive layer is cut off, but the release film at the bottom is not. When the cut edge of the film reaches the release film separation tip 17, the adhesive layer will separate from the release film and be applied to the surface of the carrier plate 101 by the rolling of the film application roller. At the same time as the adhesive layer separates from the release film, the cross-cutting machine will cut again, and so on. The distance between the two cross-cuts (i.e., the length of each cut film = the length of the film wrapped around the cut edge of the cross-cutting machine to the release film separation tip) needs to be adjusted according to the size of the carrier plate to avoid the film being too long or too short. Figure 8 The intermediate film length adjustment device is used to adjust the length of the film winding between the cutting point of the cross-cutting blade and the release film separation tip 316, according to... Figure 5 As shown in the schematic diagram of the film-threading equipment, when the film length adjustment mechanism moves to the left, the length of the film wrapped around the release film between the cutting point of the cross-cutting blade and the release film separation tip will become shorter, and when the film length adjustment mechanism moves to the right, the length of the film wrapped around the release film between the cutting point of the cross-cutting blade and the release film separation tip will become longer.

[0033] Figure 1 , 2As shown in sections 3, 4, 5, 6, 7, 8, and 9, through the combined action of the relevant mechanisms, after the operator places the wafer product on the carrier plate moving and conveying mechanism, the limiting mechanism ensures that the wafer product enters the lamination station and the finished product station one by one. The carrier plate position deviation calibration mechanism can automatically correct the left and right positions of the wafer plate, ensuring the accuracy of the wafer position when the lamination cylinder mechanism applies the film. The carrier plate unloading, storage, and collection mechanism can automatically collect the laminated wafer products in multiple layers. This new invention brings convenience to the operator and correspondingly improves work efficiency.

[0034] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. It will be apparent to those skilled in the art that this utility model is limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this utility model.

[0035] Furthermore, it should be understood that although this specification describes the embodiments, the embodiments do not necessarily contain only one independent technical solution. This way of describing the specification is only for clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in the embodiments can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A wafer carrier film bonding device, characterized in that, The system includes a carrier plate motion conveying mechanism, a carrier plate position deviation calibration mechanism, a film-applying cylinder mechanism, a carrier plate unloading and storage mechanism, a limiting mechanism, a PLC, an air compressor, a frame plate, and an air blowing pipe mechanism. The carrier plate motion conveying mechanism is an electric roller conveyor. The frame plate is installed at the lower end of the carrier plate motion conveying mechanism. There are at least two sets of limiting mechanisms, which are installed laterally on the upper front and middle parts of the frame plate. The carrier plate position deviation calibration mechanism is installed longitudinally on the frame plate located between the two sets of limiting mechanisms. The air blowing pipe mechanism is installed laterally on the frame plate located at the front end of the second set of limiting mechanisms. The film-applying cylinder mechanism is installed on the frames on both sides of the front middle part of the carrier plate motion conveying mechanism. The carrier plate unloading and storage mechanism is installed on the upper rear end of the frame plate. The air compressor's air tank solenoid valve and the air inlet pipe of the air blowing pipe mechanism are connected by pipelines.

2. The wafer carrier film bonding device according to claim 1, characterized in that, The carrier plate position deviation calibration mechanism includes a calibration mechanism mounting base, a linear slide rail, a slider plate, and carrier plate positioning wheels. The linear slide rail has two sliding blocks, and two sliding plates are respectively mounted on the two sliding blocks. Multiple carrier plate positioning wheels are rotatably mounted on the outer side of the upper end of each sliding plate.

3. The wafer carrier film bonding device according to claim 1, characterized in that, The limiting mechanism includes an electric push rod and a stop rod. A connecting rod is horizontally mounted on the piston rod of the electric push rod, and the lower ends of multiple stop rods are respectively mounted on the connecting rod.

4. The wafer carrier film bonding device according to claim 1, characterized in that, The air blowing mechanism includes an air inlet pipe and an air jet pipe. There are multiple air jet pipes, each of which is installed on the air inlet pipe. The lower end of the air inlet pipe is connected to the other end of the solenoid valve.

5. The wafer carrier film attaching apparatus according to claim 1, wherein The carrier plate unloading and storage mechanism includes a motor, a drive pulley, a driven pulley, a lead screw, a top plate, a mounting frame, support rods, linear bearings, a lower fixed plate, a guide plate, and a lead screw. Multiple sets of linear bearings have their bearing rods installed around the lower fixed plate. The outer sides of the bearing sleeves of multiple sets of linear bearings are installed around the guide plate. The upper ends of the bearing rods of multiple sets of linear bearings are installed around the lower end of the top plate. The lead screw is installed in the opening in the center of the guide plate. The motor is installed in the center of the lower fixed plate. The drive pulley is installed at the lower end of the motor shaft. The upper and lower ends of the lead screw are installed in the inner rings of the bearings in the center of the lower end of the top plate and the center of the upper end of the lower fixed plate, respectively. The middle part of the lead screw and the lead screw are connected together by threads. The lower ends of two mounting frames are installed on the upper end of the top plate. Multiple support rods are installed inside the two mounting frames. The driven pulley is installed at the lower end of the lead screw. A transmission belt is rotatably installed between the drive pulley and the driven pulley.

6. The wafer carrier film attaching apparatus according to claim 1, wherein The film-applying cylinder mechanism is equipped with a cross-cutting device, a film-applying roller device, and a film length adjustment device. The film-applying cylinder mechanism includes a side plate, a new film cylinder, a new film cylinder slider plate, a new film cylinder sliding guide rail, cylinder guide wheels, a gravity tensioning wheel, a gravity tensioning wheel slider plate, a gravity tensioning wheel lifting guide rail, a cross-cutting blade bottom roller, a cross-cutting blade, film-applying rollers, a release film separating blade, a release film separating blade rotary cylinder, a wrapping guide wheel, a clamping roller lifting cylinder, a clamping knurling shaft, an electrically driven clamping roller, a clamping roller cylinder connecting seat, and an electrically driven release film recycling cylinder. The frame of the cutting equipment, film-applying roller equipment, and film length adjustment equipment, as well as the side plates, new film cylinder, new film cylinder slider plate, new film cylinder sliding guide rail, cylinder guide wheel, gravity tension wheel, gravity tension wheel slider plate, gravity tension wheel lifting guide rail, cross-cutting blade bottom roller, cross-cutting blade, film-applying roller, release film separating blade, release film separating blade rotary cylinder, film-wrapping guide wheel, film clamping roller lifting cylinder, film clamping knurling shaft, electrically driven film clamping roller, film clamping roller cylinder connecting seat, and electrically driven release film recycling cylinder are respectively installed between the inner ends of the two side plates.

7. The wafer carrier film attaching apparatus according to claim 1, wherein Two new film cylinder sliding guide rails are horizontally mounted on the outer sides of the upper inner sides of the two side plates. The two ends of the new film cylinders are horizontally rotatably mounted between the sliding blocks of the two new film cylinder sliding guide rails. The two ends of the two cylinder guide wheels are horizontally rotatably mounted at the lower front and rear ends of the two sides of the new film cylinders. The two ends of the electrically driven release film recycling cylinder are horizontally rotatably mounted on the lower inner sides of the two side plates. The outer sides of the two gravity tension wheel lifting guide rails are mounted at the lower rear sides of the new film cylinders. The slider plates of the two gravity tension wheels slide on the two gravity tension wheels. Inside the lifting guide rail, there is a counterweight rod on the outside of the gravity tension wheel slider plate. The gravity tension wheel is installed horizontally between the inner sides of the two counterweight rods. The outer sides of the two film clamping roller lifting cylinders are respectively installed on both sides of the rear end of the electric drive release film recycling cylinder. The lower ends of the connecting seats of the two film clamping roller cylinders are respectively installed on the upper ends of the piston rods of the two film clamping roller lifting cylinders. The film clamping knurling shaft is installed on the inner side of the two side plates. The film clamping rollers are installed between the connecting parts of the two film clamping roller cylinders. The two sides of the film-wrapping guide wheel are respectively installed horizontally at the rear end of the two film clamping roller lifting cylinders. The outer sides of the two release film separating knife rotating cylinders are respectively installed horizontally between the middle of the lower end of the two side plates. The two ends of the front side of the release film separating knife and the inner sides of the shafts of the two release film separating knife rotating cylinders are respectively installed together.

8. The wafer carrier film attaching apparatus according to claim 1, wherein The cross-cutting equipment includes a cross-cutting mechanism mounting base, a cross-cutting blade moving guide rail, a cross-cutting blade moving base block, a precision displacement fine-tuning slide, a cross-cutting blade fixing block, a cross-cutting blade, an electrically driven synchronous belt pulley drive pulley, a synchronous belt, a synchronous belt pulley driven pulley, a micrometer head, and a synchronous belt connecting block. The two ends of the cross-cutting mechanism mounting base are laterally distributed and mounted at the lower rear positions of the two new film cylinder sliding guide rails. The rear side of the cross-cutting blade moving guide rail is laterally distributed and mounted at the lower front end of the cross-cutting mechanism mounting base. The rear side of the cross-cutting blade moving base block is mounted on the slider of the cross-cutting blade moving guide rail. The lower end mounting seat of the precision displacement fine-tuning slide is mounted on the cross-cutting blade moving base block. The lower end of the cross-cutting blade fixing block is installed on the upper part of the moving end of the precision displacement fine-tuning slide. The upper end of the cross-cutting blade is installed on the lower part of the cross-cutting blade fixing block. The electric drive synchronous belt pulley driving wheel and the synchronous belt pulley driven wheel are respectively rotatably installed on both sides of the upper end of the cross-cutting blade mechanism mounting base. The synchronous belt is annularly rotated and sleeved on the outside of the connecting driving wheel and the driven wheel. The lower end of the micrometer head is installed on the moving base of the cross-cutting blade, and the lower end of its measuring head is placed on top of the moving end of the precision displacement fine-tuning slide. The synchronous belt connecting block installs the lower right side of the synchronous belt on the top of the moving base of the cross-cutting blade.

9. The wafer carrier film attaching apparatus according to claim 1, wherein The film-applying roller device includes a film-applying roller mechanism mounting base, film-applying roller mechanism side plates, film-applying roller lifting drive cylinders, film-applying roller fixed side plates, film-applying rollers, film-applying roller drive motors, drive motor end synchronous pulleys, and film-applying roller end synchronous pulleys. The two ends of the film-applying roller mechanism mounting base are respectively installed between the inner rear ends of the two side plates. The two film-applying roller mechanism side plates are respectively installed on the outer sides of the film-applying roller mechanism mounting base. The cylinders of the two film-applying roller lifting drive cylinders are respectively installed on the outer sides of the two film-applying roller mechanism side plates. The inner sides of the two film-applying roller fixed side plates are respectively installed on the outer ends of the two sets of film-applying roller lifting drive cylinders. The two ends of the film-applying rollers are rotatably mounted on the lower ends of the two film-applying roller fixed side plates. The film-applying roller drive motor is installed on the inner front side of the film-applying roller fixed side plate. The drive motor end synchronous pulley and the film-applying roller end synchronous pulley are respectively installed on the outer sides of the rotating shafts of the film-applying roller and the drive motor end synchronous pulley, located between the right outer ends of the film-applying roller fixed side plates. The synchronous pulleys at the drive motor end and the film-applying roller end are fitted with synchronous belts on their outer rotating sides.

10. The wafer carrier film attaching apparatus according to claim 1, wherein The film length adjustment device includes an outer plate of the film length adjustment mechanism, an inner plate of the film length adjustment mechanism, a slider, a slide rail, a film clamping roller telescopic cylinder, a film clamping knurling shaft cylinder connector, a film clamping knurling shaft, film clamping rollers, a film clamping roller rotation drive motor, a rack, a motor, and gears. Two slide rails are respectively installed at the rear end of the cross-cutting device. Each slide rail has a slider. The outer sides of the outer and inner plates of the film length adjustment mechanism are respectively installed on the inner ends of the sliding blocks of the two slide rails. Two film clamping roller telescopic cylinders are respectively installed on the outer ends of the outer and inner plates of the film length adjustment mechanism. The rear sides of the two film clamping knurling shaft cylinder connectors are respectively installed on the rear ends of the piston rods of the two film clamping roller telescopic cylinders. The two ends of the film knurling shaft are led outward through the opening in the middle of the outer plate and inner plate of the film length adjustment mechanism, and are rotatably installed together with the inner rear ends of the two ink-adding knurling shaft cylinder connectors. The left end of the film clamping roller is rotatably installed at the rear of the outer plate of the film length adjustment mechanism and located at the rear end of the film knurling shaft. The right end of the film clamping roller is installed together with the shaft of the film clamping roller rotation drive motor. The film clamping roller rotation drive motor is installed at the lower rear outer end of the inner plate of the film length adjustment mechanism. The right end of the motor is installed at the upper rear inner end of the right side plate. The gear is installed at the front end of the motor shaft. The rack is installed at the upper right end of the inner plate of the film length adjustment mechanism, and the lower part of the gear meshes with the upper end of the rack.

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