Chain type wet process equipment

Abstract

The utility model belongs to the technical field of photovoltaic sheet cleaning, and particularly relates to chain type wet process equipment. The equipment comprises a main groove, an air draft channel and a shell, a first seat plate is arranged on the shell, and a second seat plate extending outwards is arranged on the outer surface of the air draft channel; the main groove comprises a groove cover and a groove body, the axis end of the groove cover is rotationally connected with the second base plate, and the operation end of the groove cover is in lap joint with the first base plate. The groove body no longer shares the gravity of the groove cover, the deformation risk of the groove body is reduced, and the stability and the service life of the equipment are improved. Furthermore, the first seat plate is provided with a sliding groove used for installing the window, the gravity of the window is used for balancing the gravity of the cover plate, and the cover plate is supported more stably. The groove cover is structurally refined into the cover plate and the supporting strip arranged on the upper surface of the cover plate, the axis end is located on the supporting strip, the cover plate does not bear the rotating torque of the groove cover, and deformation of the cover plate due to external force is avoided.

Description

Technical Field

[0001] This utility model belongs to the field of photovoltaic cell cleaning technology, specifically relating to a chain-type wet cleaning device. Background Technology

[0002] Chain-type wet processing equipment is a crucial component in semiconductor manufacturing processes. In practical use, the tank structure of this equipment holds a large volume of acid solution for various wet processing steps. Acid mist diffuses outwards during these processes, so the main structure of wet processing equipment is typically made of corrosion-resistant engineering plastics, and large, continuous plate-like materials are used to minimize seams. In existing technology, Chinese patent CN109346425B proposes a multi-channel chain-type wet processing equipment. This equipment directly overlaps the cover plate with the edge of the tank to form a sealed structure, and support blocks are installed at the bottom of the tank for support. In this equipment, the force on the cover plate acts on both the tank and the bottom plate. With the expansion of production scale and the increasing demands of processes, current chain-type wet processing equipment has expanded the main tank station. This increases the workload on the bottom plate, which must also bear the weight of the cover plate, increasing the risk of tank deformation and consequently affecting the equipment's lifespan and process stability. Utility Model Content

[0003] In view of this, this utility model aims to propose a chain-type wet processing equipment with a reasonable stress design to reduce the risk of deformation of each panel.

[0004] This utility model is achieved through the following technical solution:

[0005] A chain-type wet scrubbing apparatus includes a main tank, an exhaust duct, and a housing at least partially surrounding the main tank and the exhaust duct, wherein the lower end of the exhaust duct is connected to the main tank, characterized in that:

[0006] The housing is provided with a first base plate;

[0007] The outer surface of the exhaust duct is provided with a second seat plate extending outward;

[0008] The main slot includes:

[0009] The groove cover includes a axial end rotatably connected to the second base plate, and an operating end that overlaps the first base plate;

[0010] The tank body includes a bottom plate and vertical plates surrounding the bottom edge of the tank body.

[0011] The main body of wet process equipment is made of corrosion-resistant engineering plastic, typically in the form of large-area plates, which are prone to deformation when subjected to uneven stress. In existing technology, the tank cover is directly attached to the vertical plate of the tank body, with the vertical plate bearing the stress on the bottom plate. The bottom plate also needs to support the weight of the process equipment and working fluid inside the tank, posing a high risk of deformation. This device optimizes the tank cover, with both ends of the cover overlapping a first base plate and a second base plate. The first base plate is connected to the exhaust duct, and the second base plate is connected to the shell. The tank body no longer shares the weight of the tank cover, reducing the risk of tank deformation and improving the stability and service life of the equipment.

[0012] Preferably, the groove cover includes a cover plate and a support strip disposed on the upper surface of the cover plate, with the axial end located on the support strip.

[0013] The cover plate is a large-area flat structure, which poses a higher risk of deformation. The support strips primarily act as reinforcing ribs to counteract deformation caused by the cover plate's own weight. In existing technologies, the axial end of the slot cover is located on the cover plate, and the entire slot cover is opened, closed, and rotated directly through the hinge structure on the edge of the cover plate. This solution places the axial end on the support strips, so the cover plate no longer bears the rotational torque, further preventing deformation of the cover plate due to external forces.

[0014] Preferably, the second seat plate includes a support portion relatively close to the exhaust duct and an overlapping portion relatively far from the exhaust duct; the support portion is provided with a connecting structure connecting to the shaft end, and the overlapping portion is located on the rotation path of the cover plate.

[0015] When the connection point at the shaft end is located in the support section, the overlapping part blocks the rotation path of the cover plate, limiting the rotation range of the shaft end and preventing the groove cover from overturning.

[0016] Preferably, a reinforcing plate is provided below the base plate, and the reinforcing plate has at least a supporting shape extending from one side of the vertical plate to the opposite side of the vertical plate.

[0017] The base plate is characterized by its large span and large area. A reinforcing plate is set between the base plate and the middle plate to act as a reinforcing rib, prevent the base plate from deforming, and improve the load-bearing capacity and service life of the equipment.

[0018] Preferably, the housing has a viewing window, and the first base plate is disposed at the lower edge of the viewing window.

[0019] When the first base plate is set at the lower edge of the viewing window, the operating end of the cover plate is exactly in the field of view of the viewing window, and there is no blind spot located below the viewing window or inside the housing, so that the equipment structure can be fully observed for deformation or damage; when opening the window, the position of the operating end of the cover plate is flush with the lower edge of the viewing window, which facilitates direct interaction.

[0020] Preferably, the first base plate is provided with a sliding groove, and the viewing window is installed in the sliding groove.

[0021] The function of the structure is expanded by taking advantage of the positional characteristics of the first base plate. The side of the first base plate closer to the shell is used to install the viewing window, and the side closer to the main groove is used to overlap the cover plate. The weight of the viewing window is used to balance the weight of the cover plate, making the support of the cover plate more stable.

[0022] Preferably, the vertical plate is connected to the housing via a sealing plate; the sealing plate includes a vertical limiting part disposed at the top of the vertical plate and a horizontal limiting part disposed on the inner side of the vertical plate.

[0023] In existing technologies, the tank cover directly overlaps with the vertical plate of the tank body to form a seal. In this solution, the basic function of the sealing plate is to connect the tank body and the shell to form a sealed structure, preventing the diffusion of acid mist. Furthermore, the sealing plate forms a limiting structure for the vertical plate based on its connection with the tank body. When the bottom plate deforms and sinks, the vertical plate located at the edge of the bottom plate may tilt upwards or inwards towards the tank. At this time, the sealing plate can control the shape of the vertical plate through the vertical limiting part and the horizontal limiting part, preventing the structural deformation from expanding further.

[0024] Preferably, a frame is provided below the main trough; the frame includes a plurality of support columns disposed below the base plate. The frame has support columns at the lower edge and inside of the base plate to provide support for weak points in the central area of ​​the base plate.

[0025] Preferably, a middle layer plate is provided between the frame and the main tank, and the middle layer plate has an edge that connects with the housing. The middle layer plate separates the main tank and the lower frame into two independent spaces to prevent acid mist leakage.

[0026] Preferably, the main tank has two sets of workstations arranged side by side.

[0027] A single station of the chain conveyor system includes several parallel drive rollers that rotate to transfer silicon wafers from the loading end to the unloading end of the station. Due to optimized stress structure, the tank can accommodate the load of two stations, with two sets of drive rollers arranged side-by-side in a main tank, allowing for the simultaneous processing of two batches of photovoltaic wafers, thus improving the equipment's production efficiency.

[0028] This chain-type wet processing equipment optimizes the tank cover connection method, with both ends of the tank cover overlapping the first and second support plates respectively. The tank body does not bear the weight of the tank cover, reducing the risk of tank deformation. Simultaneously, the axial end of the tank cover is connected via a support and an overlapping section. The overlapping section restricts the rotation range of the axial end, preventing excessive overturning. Support strips are installed on the upper surface of the cover plate, which not only strengthens the cover plate and resists deformation caused by its own weight, but also simplifies the stress source of the cover plate, avoiding deformation caused by external forces, and keeps the axial end away from acid mist, preventing contamination of the connection structure. A reinforcing plate is installed below the base plate to prevent deformation due to its large span and area, improving the load-bearing capacity and service life of the equipment. Furthermore, the vertical plates are connected to the shell via sealing plates. The vertical and horizontal limiting parts of the sealing plate can control the shape of the vertical plates when the base plate deforms, preventing further structural deformation. Support columns are installed under the base plate of the frame to provide support for the weak areas in the middle of the base plate. These design features work together to make the overall structure of the equipment more stable and less prone to deformation, thereby increasing the service life and operational reliability of the equipment and improving production efficiency. Attached Figure Description

[0029] Figure 1 This is the front view of the device;

[0030] Figure 2 This is a schematic diagram of the overall device;

[0031] Figure 3 for Figure 2 A magnified structural diagram of region A in the middle area;

[0032] Figure 4 for Figure 2 A magnified schematic diagram of the middle region B.

[0033] Legend

[0034] 1 Main groove, 110 Groove body, 111 Bottom plate, 112 Vertical plate, 120 Groove cover, 121 Cover plate, 122 Support bar, 123 Shaft end, 124 Operating end, 130 Reinforcing plate;

[0035] 2. Ventilation duct, 210. Second seat plate, 211. Support part, 212. Overlap part, 220. Hinge seat;

[0036] 3 secondary slots;

[0037] 4. Housing, 410 First base plate, 411 Slide groove, 420 Viewing window, 430 Middle layer plate, 440 Sealing plate, 441 Vertical limiting part, 442 Horizontal limiting part;

[0038] 5-frame support columns, 510;

[0039] 6 workstations. Detailed Implementation

[0040] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Those skilled in the art will be able to implement the present invention based on these descriptions. Furthermore, the embodiments of the present invention described below are generally only a part of the embodiments of the present invention, and not all of the embodiments. Therefore, all other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort should fall within the scope of protection of the present invention. Example

[0041] This embodiment is a chain-type wet processing equipment.

[0042] Please see Figure 1 The basic structure of this device includes an exhaust duct 2, a main tank 1, a secondary tank 3, and an external casing 4. The main tank 1 comprises a base plate 111 and a tank body 110 formed by vertical plates 112 surrounding the base plate 111, used to contain the working fluid and process photovoltaic cells. The secondary tank 3 is located below the main tank 1 and performs different functions such as working fluid circulation and purification in different specific processes. During the photovoltaic cell processing, the tank body 110 of the main tank 1 generates acid mist, so this device provides a tank cover 120 above the tank body 110 to limit the diffusion of acid mist and configures an exhaust duct 2 to guide the acid mist out. The lower end of the exhaust duct 2 is provided with an exhaust port located below the tank cover 120; the upper end of the exhaust duct 2 is connected to an external air duct.

[0043] Since the tank cover 120 needs to be opened and closed, the existing tank cover 120 is usually a rotating flip-top design, that is, one side of the tank cover 120 is the axial end 123, and the other side is the operating end 124, which rotates around the axial end 123. In the prior art, the axial end 123 of the tank cover 120 overlaps the vertical plate 112 of the tank body 110, and the tank cover 120 and the tank body 110 are directly connected to form a chamber-like structure for containing acid mist. For the vertical plate 112 and the bottom plate 111, the force on the tank cover 120 is not a necessary force for the process, which will increase the additional load. Therefore, this device optimizes the force relationship between the tank cover 120 and the side plate.

[0044] Please see Figure 3 The device has a first base plate 410 on the housing 4, and a second base plate 210 extending outward on the outer surface of the exhaust channel 2. The axial end 123 of the trough cover 120 is connected to the second base plate 210, and the operating end 124 is attached to the first base plate 410. At this time, the trough body 110 no longer bears the pressure of the trough cover 120, and the risk of deformation is reduced.

[0045] The aforementioned solution initially adjusted the load-bearing structure of cover plate 121, and now it is being further optimized.

[0046] The shape of the second base plate 210 is designed. Please refer to [link / reference]. Figure 3 The second base plate 210 includes a support portion 211 closer to the exhaust duct 2 and an overlapping portion 212 relatively farther away from the exhaust duct 2. Both share a smooth lower surface, but the thickness of the support portion 211 is greater than the thickness of the overlapping portion 212, forming a stepped structure on the upper surface of the second base plate 210. The connection structure between the support portion 211 and the axial end 123 of the cover 120 is fixed to the support portion 211. The greater thickness and structural strength of the support portion 211 provide more stable support for the axial end 123. Simultaneously, the overlapping portion 212 blocks the potential rotation path of the cover 121, limiting the rotation range of the cover 120 and preventing excessive overturning. In some embodiments, the lower surface of the second base plate 210 and the lower surface of the cover 121 can be smoothly connected, reducing acid mist deposition.

[0047] The specific connection structure between the cover plate 121 and the second seat plate 210 is designed. Please refer to [link / reference]. Figure 3 The structure of the slot cover 120 is further refined into a cover plate 121 and multiple sets of support bars 122 disposed on the upper surface of the cover plate 121, with a central end 123 disposed on the support bars 122. The central end 123 is connected to a hinge seat 220 on the second seat plate 210 and can rotate around the hinge seat 220. The cover plate 121 itself is a large-area flat plate structure with a higher risk of deformation. The support bars 122 firstly act as reinforcing ribs to resist the deformation of the cover plate 121 due to its own weight. Secondly, they simplify the stress source of the cover plate 121, further avoiding deformation of the cover plate 121 caused by external forces. In addition, the support bars 122 are away from the acid mist below the cover plate 121, preventing the connection structure between the central end 123 and the second seat plate 210 from being contaminated by acid mist.

[0048] Design the first base plate 410. Please refer to [link / reference]. Figure 4 The housing 4 has a transparent viewing window 420 for observing and operating the equipment, and the first base plate 410 is positioned at the lower edge of the viewing window 420. At this time, the operating end 124 of the cover plate 121 is exactly in the field of view of the viewing window 420, and there is no blind spot located below the viewing window 420 or inside the housing 4, so the equipment structure and operation can be fully observed; when the window is opened, the position of the operating end 124 of the cover plate 121 is flush with the lower edge of the viewing window 420, which facilitates direct interaction.

[0049] Furthermore, the function of this structure is expanded by utilizing the positional characteristics of the first base plate 410. A sliding groove 411 is formed on the first base plate 410, and the lower end of the transparent window 420 is installed in the sliding groove 411. The transparent window 420 opens and closes by sliding. At this time, the side of the first base plate 410 near the groove 110 bears the weight of the cover plate 121, and the side near the shell 4 bears the weight of the window 420, forming a lever-like force-bearing structure, which provides stronger support for the cover plate 121.

[0050] The aforementioned solution has essentially eliminated the load on the tank 110 other than its own working load. Now, we need to prevent the deformation caused by the working load of the tank 110 itself.

[0051] Please see Figure 1 , Figure 4 A reinforcing plate 130 is provided below the bottom plate 111 of the tank 110, extending from below the vertical plate 112 on the left side of the figure to below the vertical plate 112 on the right side of the figure. The center position between the two vertical plates 112 is prone to sinking in the bottom plate 111; therefore, the reinforcing plate 130 is added to distribute the stress and resist deformation of the bottom plate 111. A frame 5 is provided below the reinforcing plate 130, providing overall support for the tank 110. Specifically, the frame 5 has support columns at the lower edge and interior of the bottom plate 111, providing support for the weakest part in the middle of the bottom plate 111. In a preferred embodiment, a middle layer plate 430 is provided between the reinforcing plate 130 and the frame 5. The edge of the middle layer plate 430 connects to the shell 4, separating the main tank 1 and the lower frame 5 into two independent spaces to prevent acid mist leakage.

[0052] Please see Figure 4 A sealing plate 440 is provided between the vertical plate 112 and the housing 4, including a vertical limiting part 441 disposed at the top of the vertical plate 112 and a horizontal limiting part 442 disposed inside the side plate. The vertical limiting part 441 and the horizontal limiting part 442 are L-shapedly joined together. The basic function of the sealing plate 440 is to connect the tank 110 and the housing 4 to form a sealing structure and prevent acid mist diffusion. Furthermore, the sealing plate 440 forms a limiting structure for the vertical plate 112 based on its connection relationship with the tank 110. When the bottom plate 111 deforms and sinks, the vertical plate 112 located at the edge of the bottom plate 111 may tilt upward or tilt inward towards the tank. At this time, the sealing plate 440 can control the shape of the vertical plate 112 through the vertical limiting part 441 and the horizontal limiting part 442 to prevent the structural deformation from expanding further.

[0053] After the structural optimization of the tank 110, its load-bearing capacity is improved, which can further expand the capacity of workstation 6.

[0054] Please see Figure 1 , Figure 2This device is a chain-type equipment, with each station 6 consisting of several parallel drive rollers. After the capacity of station 6 is expanded, two sets of drive rollers can be accommodated side by side in a single tank 110, allowing two batches of photovoltaic cells to be processed simultaneously, thus improving the production efficiency of the equipment.

Claims

1. A chain-type wet processing device, comprising a main tank (1), an exhaust duct (2), and a housing (4) at least partially surrounding the main tank (1) and the exhaust duct (2), wherein the lower end of the exhaust duct (2) is connected to the main tank (1), characterized in that: The housing (4) is provided with a first base plate (410); The outer surface of the exhaust duct (2) is provided with a second seat plate (210) extending outward; The main slot (1) includes: The groove cover (120) includes a axial end (123) rotatably connected to the second base plate (210) and an operating end (124) overlapping the first base plate (410); The trough (110) includes a bottom plate (111) at the bottom and a vertical plate (112) surrounding the edge of the bottom of the trough.

2. The chain-type wet processing equipment according to claim 1, characterized in that, The groove cover (120) includes a cover plate (121) and a support strip (122) disposed on the upper surface of the cover plate (121), and the axial end (123) is located on the support strip (122).

3. The chain-type wet processing equipment according to claim 2, characterized in that, The second seat plate (210) includes a support portion (211) relatively close to the exhaust channel (2) and an overlapping portion (212) relatively far away from the exhaust channel (2); the support portion (211) is provided with a connecting structure connecting the shaft end (123), and the overlapping portion (212) is located on the rotation path of the cover plate (121).

4. The chain-type wet processing equipment according to claim 1, characterized in that, A reinforcing plate (130) is provided below the base plate (111), and the reinforcing plate (130) has at least a supporting shape that extends from one side of the vertical plate (112) to the opposite side of the vertical plate (112).

5. The chain-type wet processing equipment according to claim 1, characterized in that, A viewing window (420) is provided on the housing (4), and the first base plate (410) is located at the lower edge of the viewing window (420).

6. The chain-type wet processing equipment according to claim 5, characterized in that, The first base plate (410) is provided with a slide groove (411), and the window (420) is installed in the slide groove (411).

7. The chain-type wet processing equipment according to claim 1, characterized in that, The vertical plate (112) is connected to the housing (4) via a sealing plate (440); the sealing plate (440) includes a vertical limiting part (441) disposed on the top of the vertical plate (112) and a horizontal limiting part (442) disposed on the inner side of the vertical plate (112).

8. The chain-type wet processing equipment according to claim 1, characterized in that, A frame (5) is provided below the main channel (1); the frame (5) includes a plurality of support columns (510) disposed below the base plate (111).

9. The chain-type wet processing equipment according to claim 8, characterized in that, A middle layer plate (430) is provided between the frame (5) and the main groove (1), and the middle layer plate (430) has an edge that connects with the shell (4).

10. The chain-type wet processing equipment according to any one of claims 1 to 9, characterized in that, The main tank (1) has two sets of workstations (6) arranged side by side.

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