Lightweight conveying line for FOUP material boxes

Abstract

The utility model discloses a light-weight conveying line for FOUP material boxes, which comprises a plurality of conveying modules, the conveying modules are sequentially connected end to end to form the conveying line, each conveying module comprises a support and a belt conveying assembly, and the belt conveying assemblies are arranged on the supports and used for conveying the FOUP material boxes. The multiple conveying modules are sequentially connected end to end to form the conveying line, each conveying module comprises the support and the belt conveying assembly, the supports at the head and the tail of the conveying modules are in contact, a continuous conveying channel can be formed, the compact layout requirement of a factory is met, and light weight of the conveying line is achieved.

Description

Technical Field

[0001] This utility model relates to the field of FOUP box conveying technology, specifically to a lightweight conveying line for FOUP boxes. Background Technology

[0002] FOUP, or front-opening wafer transfer box, is a key carrier used in semiconductor manufacturing for storing and transferring wafers. It is integrated with AMHS (Automated Material Handling System) and automatically flows across processes (lithography, etching, deposition, etc.) within the wafer fab.

[0003] The conveyor line in AMHS (Automated Material Handling Systems) is the physical infrastructure for transporting FOUP (Flatpack-Up) containers. Existing conveyor lines typically employ heavy-duty structures, meaning long conveyor chains, which increases the volume and weight of the line. Furthermore, long chains require large tensioning devices and drive motors, resulting in high space occupancy and making them difficult to adapt to compact equipment layouts. Utility Model Content

[0004] The purpose of this invention is to provide a lightweight conveyor line for FOUP containers to solve the problems mentioned in the background art.

[0005] To solve the above-mentioned technical problems, this utility model provides a lightweight conveyor line for FOUP boxes, which includes multiple conveyor modules. The multiple conveyor modules are connected end to end in sequence to form a conveyor line. Each conveyor module includes a support and a belt conveyor assembly. The belt conveyor assembly is mounted on the support and is used to transport FOUP boxes.

[0006] Furthermore, the belt conveyor assembly includes a conveyor component, a drive shaft, and a motor. Two conveyor components are symmetrically arranged on both sides of the support. Each conveyor component includes a drive wheel, a driven wheel, a belt, and a support component. The drive wheel is mounted on the first end of the support, and the driven wheel is mounted on the second end of the support and rotatably connected to it. The two ends of the belt are respectively fitted onto the drive wheel and the driven wheel. The support component supports the FOUP hopper as it moves along the belt. The two ends of the drive shaft are detachably connected to the two drive wheels and rotatably connected to both sides of the support. The motor drives the drive shaft to rotate.

[0007] Furthermore, the belt conveyor assembly also includes a drive wheel, a timing wheel, and a timing belt. The drive wheel is connected to the output shaft of the motor. The timing wheel is sleeved on the drive shaft and detachably connected to the drive shaft. The two ends of the timing belt are respectively sleeved on the drive wheel and the timing wheel.

[0008] Furthermore, guide strips can be detachably installed on the top of both sides of the bracket, and the inner side of the guide strip is adapted to the outer side of the belt.

[0009] Furthermore, the support member comprises multiple rollers, which are equally spaced between the driving wheel and the driven wheel and located inside the belt. The top of each roller contacts the belt, and the roller is rotatably connected to the bracket.

[0010] Furthermore, the belt conveyor assembly also includes two tension adjustment components symmetrically arranged on both sides of the bracket. Each tension adjustment component includes an adjustment block, a movable wheel, and two fixed wheels. The adjustment block is slidably connected to the bracket longitudinally and fixed by screws. The movable wheel is located inside the belt and its bottom contacts the belt. The movable wheel is detachably connected to the adjustment block and rotatably connected to the bracket. The two fixed wheels are symmetrically arranged on both sides of the movable wheel. Both fixed wheels are located on the outer side of the belt and their tops contact the belt. The fixed wheels are rotatably connected to the bracket.

[0011] Furthermore, a positioning block and a positioning rod are provided above the adjustment block. The positioning block is detachably connected to the bracket. The first end of the positioning rod is fixedly connected to the top of the adjustment block, and the second end of the positioning rod passes through the positioning block and is slidably connected to the positioning block.

[0012] Furthermore, multiple through-beam photoelectric sensors are symmetrically arranged on both sides of the bracket to detect the position of the FOUP hopper.

[0013] The beneficial effects of this utility model are as follows: This utility model forms a conveyor line by connecting multiple conveyor modules end to end in sequence. Each conveyor module includes a support and a belt conveyor assembly. When the supports at the beginning and end of the conveyor module contact each other, a continuous conveyor channel can be formed, which can adapt to the needs of compact factory layout and realize the lightweighting of the conveyor line. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of an embodiment of the present utility model.

[0015] Figure 2 This is a three-dimensional structural diagram of the conveying module according to an embodiment of the present utility model.

[0016] Figure 3 This is a partial three-dimensional structural diagram of an embodiment of the present utility model.

[0017] Figure 4 This is a partial exploded structural diagram of an embodiment of the present invention.

[0018] The components include: 1. Conveying module; 2. FOUP material box; 3. Guide bar; 4. Through-beam photoelectric sensor.

[0019] 11. Support frame; 12. Belt conveyor assembly;

[0020] 121. Conveyor component; 122. Drive shaft; 123. Motor; 124. Drive wheel; 125. Synchronous pulley; 126. Synchronous belt; 127. Tension adjustment component;

[0021] 1211. Drive wheel; 1212. Driven wheel; 1213. Belt; 1214. Roller; 1271. Adjusting block; 1272. Moving wheel; 1273. Fixed wheel; 1274. Screw; 1275. Positioning block; 1276. Positioning rod. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only one embodiment of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and specific embodiments.

[0024] In the following description, references to "an embodiment," "an embodiment," "an example," "example," etc., indicate that the described embodiment or example may include a particular feature, structure, characteristic, property, element, or limitation, but not every embodiment or example necessarily includes that particular feature, structure, characteristic, property, element, or limitation. Furthermore, the repeated use of the phrase "an embodiment according to this application," while possibly referring to the same embodiment, does not necessarily refer to the same embodiment.

[0025] like Figure 1-4 As shown, this utility model discloses a lightweight conveyor line for FOUP tin boxes 2, including multiple conveyor modules 1 connected end-to-end to form a conveyor line. Each conveyor module 1 includes a support 11 and a belt conveyor assembly 12, which is mounted on the support 11 and used to transport the FOUP tin boxes 2. The conveyor line is composed of multiple independent conveyor modules 1 connected in series, each module including a support 11 and a belt conveyor assembly 12. The supports 11 at both ends of the module contact each other to form a continuous conveying channel. Simultaneously, the support 11 can be made of lightweight metal material, and the belt 1213 assembly replaces the chain, reducing material density and the weight of a single module. Furthermore, the conveyor module 1 can be rotated by a rotating device to support L-shaped, circular, and other conveying paths, adapting to the needs of compact factory layouts. The rotating device is prior art and will not be described in detail here.

[0026] This utility model forms a conveyor line by connecting multiple conveyor modules 1 end to end in sequence. Each conveyor module 1 includes a support 11 and a belt conveyor assembly 12. When the supports 11 at the beginning and end of the conveyor module 1 come into contact, a continuous conveying channel can be formed, which can adapt to the needs of compact factory layout and realize the lightweighting of the conveyor line.

[0027] In one embodiment, the belt conveyor assembly 12 includes a conveyor 121, a drive shaft 122, and a motor 123. There are two conveyor 121s, which are symmetrically arranged on both sides of the bracket 11. Each conveyor 121 includes a drive wheel 1211, a driven wheel 1212, a belt 1213, and a support member. The drive wheel 1211 is installed at the first end of the bracket 11, and the driven wheel 1212 is installed at the second end of the bracket 11 and is rotatably connected to the bracket 11. The two ends of the belt 1213 are respectively sleeved on the drive wheel 1211 and the driven wheel 1212. The support member is used to support the FOUP box 2 to move along the belt 1213. The two ends of the drive shaft 122 are detachably connected to the two drive wheels 1211 and are rotatably connected to both sides of the bracket 11. The motor 123 is used to drive the drive shaft 122 to rotate.

[0028] The motor 123 outputs torque to control the rotation of the drive shaft 122. The drive shaft 122 drives the two drive wheels 1211 to rotate, thereby moving the belt 1213 and rotating the driven wheel 1212, causing the FOUP box 2 to move on the belt 1213. The support can be a roller assembly or a slide rail, forming a continuous support surface under the belt 1213 to distribute the gravity load of the FOUP box 2 and reduce local stress concentration on the belt 1213.

[0029] In one embodiment, the belt conveyor assembly 12 further includes a drive wheel 124, a timing wheel 125, and a timing belt 126. The drive wheel 124 is connected to the output shaft of the motor 123. The timing wheel 125 is sleeved on the drive shaft 122 and is detachably connected to the drive shaft 122. The two ends of the timing belt 126 are respectively sleeved on the drive wheel 124 and the timing wheel 125, which helps to reduce the load on a single component, while improving the synchronization and efficiency of the transmission and reducing the conveying error of multiple conveying modules 1.

[0030] In one embodiment, guide strips 3 can be detachably installed on the top of both sides of the bracket 11. The inner side of the guide strip 3 is adapted to the outer side of the belt 1213 to provide lateral restraint for the FOUP box 2 and prevent the FOUP box 2 from deviating during operation. In this embodiment, the guide strip 3 is connected to the bracket 11 by fixing screws 1274.

[0031] In one embodiment, the support consists of multiple rollers 1214, which are equally spaced between the driving pulley 1211 and the driven pulley 1212 and located inside the belt 1213. The top of each roller 1214 contacts the belt 1213, and the rollers 1214 are rotatably connected to the bracket 11. The rollers 1214 reduce friction, allowing the belt 1213 to run more smoothly, reducing energy loss, and extending the belt 1213's lifespan. Simultaneously, they ensure the belt 1213 remains taut during operation and prevent sagging or vibration.

[0032] In one embodiment, the belt conveyor assembly 12 further includes two tension adjustment members 127 symmetrically arranged on both sides of the bracket 11. Each tension adjustment member 127 includes an adjustment block 1271, a movable wheel 1272, and two fixed wheels 1273. The adjustment block 1271 is slidably connected to the bracket 11 longitudinally and fixed by screws 1274. The movable wheel 1272 is located inside the belt 1213, with its bottom contacting the belt 1213. The movable wheel 1272 is detachably connected to the adjustment block 1271 and rotatably connected to the bracket 11. The two fixed wheels 1273 are symmetrically arranged on both sides of the movable wheel 1272, with both fixed wheels 1273 located on the outer side of the belt 1213 and their tops contacting the belt 1213. The fixed wheels 1273 are rotatably connected to the bracket 11. In this embodiment, a mounting opening adapted to the sliding direction of the adjustment block 1271 is provided for mounting the screw 1274, allowing the screw 1274 to slide within the mounting opening, thus achieving a sliding connection between the adjustment block 1271 and the bracket 11. The bracket 11 also has a mounting opening that matches the end of the movable wheel 1272. The end of the movable wheel 1272 is threadedly connected to the adjusting block 1271, so that the threaded end of the screw 1274 is threadedly connected to the bracket 11. The nut end of the screw 1274 presses against the adjusting block 1271, thereby fixing the adjusting block 1271. When the adjusting block 1271 moves, the position of the movable wheel 1272 also changes. In conjunction with the fixed support of the fixed wheel 1273, the tension of the belt 1213 is adjusted to ensure the stable operation of the transmission assembly.

[0033] In one embodiment, a positioning block 1275 and a positioning rod 1276 are provided above the adjusting block 1271. The positioning block 1275 is detachably connected to the bracket 11. The first end of the positioning rod 1276 is fixedly connected to the top of the adjusting block 1271, and the second end of the positioning rod 1276 passes through the positioning block 1275 and is slidably connected to the positioning block 1275. In this embodiment, the positioning block 1275 is connected to the bracket 11 by a fixing screw 1274. The positioning block 1275 has a longitudinally penetrating insertion hole that is adapted to the positioning rod 1276. The second end of the positioning rod 1276 passes through the insertion hole and is connected to a nut to prevent the positioning rod 1276 from coming out. This arrangement makes the movement of the adjusting block 1271 more stable and prevents the adjusting block 1271 from rotating or shifting during sliding.

[0034] In one embodiment, multiple through-beam photoelectric sensors are symmetrically arranged on both sides of the bracket 11 to detect the position of the FOUP box 2.

[0035] The workflow of this utility model is as follows:

[0036] Multiple conveyor modules 1 are connected end-to-end to form a conveyor line. Furthermore, each conveyor module 1 can be rotated via a rotating device to support L-shaped, circular, and other conveying paths. The motor 123 is started, driving the drive wheel 124 to rotate. The drive wheel 124 drives the synchronous belt 126 and synchronous pulley 125 to rotate, thereby driving the drive shaft 122 to rotate. The drive shaft 122 drives the two side drive wheels 1211 to rotate, thereby moving the belt 1213 and rotating the driven wheel 1212, causing the FOUP hopper 2 to move on the belt 1213. The roller 1214 supports the belt 1213, thus supporting the FOUP hopper 2, making the belt 1213 run more smoothly. A through-beam photoelectric sensor on the bracket 11 monitors the FOUP hopper 2 on the belt 1213 in real time to prevent it from shifting position. Simultaneously, in non-linear conveyor lines, the rotating device is activated in real time when a change in direction is required.

[0037] This invention forms a conveyor line by sequentially connecting multiple conveyor modules 1 end-to-end. Each conveyor module 1 includes a support 11 and a belt conveyor assembly 12. The supports 11 at both ends of the conveyor module 1 contact each other to form a continuous conveying channel, adapting to the compact layout requirements of factories and achieving lightweight conveyor lines. The above description of the disclosed embodiments enables those skilled in the art to implement or use this invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, this invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A lightweight transfer line for FOUP pods, characterized by: It includes multiple conveying modules, which are connected end to end in sequence to form a conveyor line. Each conveying module includes a support and a belt conveyor assembly. The belt conveyor assembly is mounted on the support and is used to transport FOUP boxes.

2. The lightweight transfer line for FOUPs according to claim 1, characterized by: The belt conveyor assembly includes a conveyor, a drive shaft, and a motor. Two conveyor components are symmetrically arranged on both sides of the support. Each conveyor component includes a drive wheel, a driven wheel, a belt, and a support. The drive wheel is mounted at the first end of the support, and the driven wheel is mounted at the second end of the support and rotatably connected to it. The two ends of the belt are respectively fitted onto the drive wheel and the driven wheel. The support supports the FOUP hopper as it moves along the belt. The two ends of the drive shaft are detachably connected to the two drive wheels and rotatably connected to both sides of the support. The motor drives the drive shaft to rotate.

3. The lightweight transfer line for FOUPs of claim 2, wherein: The belt conveyor assembly further includes a drive wheel, a timing wheel, and a timing belt. The drive wheel is connected to the output shaft of the motor. The timing wheel is sleeved on the drive shaft and is detachably connected to the drive shaft. The two ends of the timing belt are respectively sleeved on the drive wheel and the timing wheel.

4. The lightweight transfer line for FOUPs of claim 1, wherein: Guide strips can be detachably installed on the top of both sides of the bracket, and the inner side of the guide strip is adapted to the outer side of the belt.

5. The lightweight transfer line for FOUPs of claim 2, wherein: The support consists of multiple rollers, which are equally spaced between the driving wheel and the driven wheel and located inside the belt. The top of each roller contacts the belt, and the roller is rotatably connected to the bracket.

6. The lightweight transfer line for FOUPs of claim 2, wherein: The belt conveyor assembly further includes two tension adjustment components symmetrically arranged on both sides of the bracket. Each tension adjustment component includes an adjustment block, a movable wheel, and two fixed wheels. The adjustment block is slidably connected to the bracket longitudinally and fixed by screws. The movable wheel is located inside the belt and its bottom contacts the belt. The movable wheel is detachably connected to the adjustment block and rotatably connected to the bracket. The two fixed wheels are symmetrically arranged on both sides of the movable wheel. Both fixed wheels are located on the outer side of the belt and their tops contact the belt. The fixed wheels are rotatably connected to the bracket.

7. The lightweight transfer line for FOUPs of claim 6, wherein: A positioning block and a positioning rod are provided above the adjustment block. The positioning block is detachably connected to the bracket. The first end of the positioning rod is fixedly connected to the top of the adjustment block, and the second end of the positioning rod passes through the positioning block and is slidably connected to the positioning block.

8. The lightweight transfer line for FOUPs of claim 1, wherein: The bracket is symmetrically equipped with multiple through-beam photoelectric sensors on both sides for detecting the position of the FOUP hopper.

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