Transmission device for long-distance vacuum transmission

Abstract

The utility model discloses a transmission device for long-distance vacuum transmission, which comprises a fixed seat, a first moving module and a second moving module, the fixed seat is fixed in a vacuum chamber, the first moving module comprises at least one first support rod and at least one second support rod parallel to the first support rod, and the second support rod is fixed on the fixed seat. The first supporting rod is connected to the fixing base and can move in the axis direction of the first supporting rod relative to the fixing base, and the second moving module is movably connected to the second supporting rod and used for containing samples to be conveyed. The transmission device is long in transmission distance and simple and stable in structure.

Description

Technical Field

[0001] This utility model relates to the field of vacuum device technology, and in particular to a transmission device for long-distance vacuum transmission. Background Technology

[0002] Vacuum technology has been widely used in the semiconductor field. In order to ensure that the entire process from sample growth to testing is completed under ultra-high vacuum, a vacuum interconnection system is usually built between ultra-high vacuum systems with different functions such as growth and testing to realize the interconnection of samples between any chambers. Sample loading and unloading can be accomplished, for example, by magnetic rods or robotic arms.

[0003] The vacuum interconnection system is generally a linear transmission system, using a linear transmission cavity to transfer samples. In this structure, to allow sufficient operating space, the cavity of the linear interconnection transmission system is usually quite far from the chambers of each vacuum system, often close to one meter. This means that when placing or removing samples from the sample stage base within the vacuum system chamber, the operator and the sample stage are located on opposite sides of the linear interconnection transmission mechanism, making observation difficult. Therefore, one person cannot independently complete the sample transfer operation; one person must operate the magnetic rod on one side while another observes and directs from the side of the subsystem chamber to ensure alignment before sample transfer can proceed. The entire process is time-consuming and inconvenient.

[0004] Therefore, it is necessary to improve the existing vacuum interconnection system, simplify operation, and increase operational efficiency. Utility Model Content

[0005] To address some or all of the problems in the existing technology, this utility model provides a transmission device for long-distance vacuum transmission, comprising:

[0006] A mounting base, which is fixed inside the vacuum chamber;

[0007] The first mobile module includes:

[0008] At least one first support rod is connected to the fixed base and is movable relative to the fixed base along the axial direction of the first support rod; and

[0009] At least one second support rod, which is arranged parallel to the first support rod; and

[0010] The second moving module is movably connected to the second support rod and is used to place the sample to be transferred.

[0011] Furthermore, limit blocks are respectively provided at both ends of the first moving module, and the two ends of the first support rod and the second support rod are fixed to the limit blocks.

[0012] Furthermore, the fixing base includes:

[0013] The base plate has at least one first through hole inside along the axial direction of the first support rod. The size of the first through hole matches the first support rod so that the first support rod can move along the first through hole.

[0014] A side plate is disposed on the edge of the base plate and perpendicular to the base plate. The interior of the side plate is provided with at least one second through hole along the axial direction of the first support rod. The size of the second through hole matches the first support rod so that the first support rod can move along the second through hole.

[0015] Furthermore, the limiting block includes an opening facing the side of the base plate where no side plate is provided.

[0016] Furthermore, the second mobile module includes:

[0017] A base, used to hold the sample;

[0018] A top plate, which is movably connected to the second support rod; and

[0019] The sidewall is used to connect the base and the top plate.

[0020] Furthermore, the sample to be transferred is placed on a sample boat, the sample boat comprising:

[0021] The sample boat body includes at least one sample holder slot for placing a sample, the sample being secured by a spring clip; and

[0022] Handles are located on both sides of the main body of the sample boat.

[0023] Furthermore, the sample boat body has handle connecting parts on both sides, the handle connecting parts are hollow cylinders, and the handle connecting parts are provided with multiple bending grooves; and

[0024] The handle includes:

[0025] The handle body has multiple fixing bolts at one end, each fixing bolt corresponding to a bending groove, thereby allowing the handle to be detachably connected to the body; and a guide and elastic fastening post, which is fixed to the end face of the handle body by a spring.

[0026] Furthermore, the first moving module is driven by a first driving module, the first driving module comprising:

[0027] First rotary injector;

[0028] A first drive shaft, the first end of which is connected to the rotating shaft of the first rotary inlet, and the second end of which is provided with a first coupling;

[0029] A drive gear, connected to the first coupling, to rotate under the drive of the first rotary inlet; and

[0030] The driven rack has its two ends fixed to the limiting blocks at both ends of the first moving module and coupled to the drive gear.

[0031] Furthermore, the second moving module is driven by a second driving module, the second driving module comprising:

[0032] Second rotary injector;

[0033] The second drive shaft has a first end connected to the rotating shaft of the second rotary inlet, and a second coupling is provided at the second end.

[0034] A wire drive wheel is connected to the second coupling to rotate under the drive of the second rotary inlet;

[0035] Steel wire guide wheels are respectively disposed on the limiting blocks at both ends of the first moving module; and

[0036] The steel wire rope is fixed to the second moving module and forms a loop via the steel wire drive wheel and the steel wire guide wheel.

[0037] Furthermore, the transmission device also includes:

[0038] A vacuum flange is fixed at the opening of a vacuum chamber. The fixed base is connected to the first surface of the vacuum flange by at least one support column. The first rotary inlet and the second rotary inlet are disposed on the second surface of the vacuum flange opposite to the first surface. The first drive shaft and the second drive shaft pass through the vacuum flange and are connected to the first coupling and the second coupling.

[0039] This invention provides a transmission device for long-distance vacuum transmission. By incorporating a first moving module and a second moving module that can move relative to it, the transmission distance is effectively increased. It also enables bidirectional transmission and is suitable for sample transfer between two vacuum systems. The transmission device has a simple and stable overall structure and occupies little space. Attached Figure Description

[0040] To further illustrate the above and other advantages and features of the various embodiments of the present invention, a more specific description of the various embodiments of the present invention will be presented with reference to the accompanying drawings. It is understood that these drawings depict only typical embodiments of the present invention and are therefore not intended to limit its scope. In the drawings, for clarity, the same or corresponding parts will be indicated by the same or similar reference numerals.

[0041] Figure 1 This diagram illustrates the structure of a transmission device for long-distance vacuum transmission according to an embodiment of the present invention.

[0042] Figure 2 This diagram shows a rear view of a transmission device for long-distance vacuum transmission according to an embodiment of the present invention; and

[0043] Figure 3 A schematic diagram of the sample boat according to an embodiment of the present invention is shown. Detailed Implementation

[0044] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be noted that the components in the drawings may be shown exaggeratedly for illustrative purposes and are not necessarily to scale. In the drawings, the same reference numerals are used for components that are identical or have the same function.

[0045] In this invention, unless otherwise specified, "arranged on," "arranged above," and "arranged on top of" do not exclude the possibility of an intermediate element between them. Furthermore, "arranged on or above" merely indicates the relative positional relationship between two components, and in certain cases, such as when the product orientation is reversed, it can also be converted to "arranged below or under," and vice versa.

[0046] In this utility model, the various embodiments are merely intended to illustrate the solution of this utility model and should not be construed as limiting.

[0047] In this utility model, unless otherwise specified, the quantifiers “one” and “one” do not exclude scenarios involving multiple elements.

[0048] It should also be noted that in the embodiments of this utility model, only a portion of the parts or components may be shown for clarity and simplicity. However, those skilled in the art will understand that, under the teachings of this utility model, the required parts or components can be added according to the specific scenario.

[0049] It should also be noted that within the scope of this utility model, the terms "same," "equal," and "equal to" do not mean that the two values ​​are absolutely equal, but rather allow for a certain reasonable error. That is to say, the terms also cover "substantially the same," "substantially equal," and "substantially equal to." Similarly, in this utility model, the terms indicating direction, such as "perpendicular to" and "parallel to," also cover the meaning of "substantially perpendicular to" and "substantially parallel to."

[0050] To enable sample transfer between two vacuum systems that are far apart, this invention provides a transfer device for long-distance vacuum transfer, which increases the transfer distance by setting up two sets of motion mechanisms.

[0051] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0052] Figure 1 This diagram illustrates the structure of a transmission device for long-distance vacuum transmission according to an embodiment of the present invention. Figure 1 As shown, a transmission device for long-distance vacuum transmission includes a fixed base 101, a first moving module 102, and a second moving module 103. The first moving module 102 is connected to the fixed base 101 and is movable relative to the fixed base 101, and the second moving module 103 is connected to the first moving module 102 and is movable relative to the first moving module 102. In one embodiment of this invention, the fixed base 101 is fixed within a vacuum chamber.

[0053] In one embodiment of the present invention, the transmission device is fixed to the vacuum chamber by a vacuum flange 106, the vacuum flange 106 is fixed to the opening of the vacuum chamber, and the fixing base 101 is connected to the first surface of the vacuum flange 106 by at least one support column 107.

[0054] In one embodiment of the present invention, the fixing base 101 includes a base plate 111 and a side plate 112. The side plate 112 is disposed on the edge of the base plate 111 and is perpendicular to the base plate 111.

[0055] In one embodiment of this utility model, the first moving module 102 includes at least one first support rod 121 and at least one second support rod 122. For example... Figure 1As shown, each of the first support rods 121 is parallel to each other and movably connected to the fixed base 101. In one embodiment of this utility model, the bottom plate 111 of the fixed base 101 has at least one first through hole along the axial direction of the first support rod 121. The size of the first through hole matches the first support rod 121, and the first support rod 121 passes through the first through hole and can move along the first through hole. The side plate 112 may also have at least one second through hole along the axial direction of the first support rod 121. The size of the second through hole matches the first support rod 121, and the first support rod 121 passes through the second through hole and can move along the second through hole. Figure 1 As shown, in one embodiment of the present invention, the first moving module 102 includes three first support rods 121, one of which passes through the base plate 111 and the other two pass through the side plate 112.

[0056] like Figure 1 As shown, to limit the travel distance, limit blocks 123 are respectively provided at both ends of the first moving module 102. The ends of the first support rod 121 and the second support rod 122 are fixed to the limit blocks 123, thereby limiting the displacement travel of the first moving module 102 and the second moving module 103 to the inner sidewalls of the two limit blocks 123. In one embodiment of this utility model, to facilitate sample placement, the limit block 123 includes an opening facing the side of the base plate 111 where the side plate 112 is not provided.

[0057] In one embodiment of this utility model, the first moving module 102 is driven by a first driving module, such as... Figure 1 and Figure 2As shown, the first drive module includes a first rotary inlet 141, a first transmission shaft 142, a first coupling 143, a drive gear 144, and a driven rack 145. The first rotary inlet 141 is disposed on the second surface of the vacuum flange 106 relative to its first surface, i.e., it is not located in the vacuum chamber but is disposed in the atmosphere. It transmits the rotational motion around the axis in the atmosphere to the vacuum chamber through magnetic force. The first end of the first drive shaft 142 is connected to the rotating shaft of the first rotary inlet 141, and the second end is provided with a first coupling 143. The drive gear 144 is connected to the first coupling 143 by fasteners such as bolts, and can rotate under the drive of the first rotary inlet 141. The first coupling 143 can provide a certain degree of eccentricity compensation. The two ends of the driven rack 145 are respectively fixed to the limiting blocks 123 at both ends of the first moving module 102 and coupled with the drive gear 144. Under the drive of the drive gear 144, the first moving module 102 can be moved relative to the fixed seat along the axial direction of the first support rod 121. By operating the first rotary inlet 141 to rotate in different directions, the first moving module 102 can be driven to move in two directions.

[0058] like Figure 1 As shown, the second support rod 122 is arranged parallel to the first support rod 121, and the second moving module 103 is movably connected to the second support rod 122, and the second moving module 103 is used to place the sample to be transferred. In one embodiment of this utility model, the second moving module 103 includes a base 131, a top plate 132, and a side wall 133, wherein the base 131 is used to place the sample, the top plate 132 is movably connected to the second support rod 122, and the side wall 133 is used to connect the base 131 and the top plate 132. Figure 1 As shown, in one embodiment of the present invention, at least one third through hole is provided on the top plate 132 along the axial direction of the second support rod 122. The size of the third through hole matches the second support rod 122. The second support rod 122 passes through the third through hole, allowing the second moving module 103 to move along the second support rod 122. In another embodiment of the present invention, at least one fourth through hole may also be provided on the side plate 133. The size of the fourth through hole matches the second support rod 122. The second support rod 122 passes through the third through hole, allowing the second moving module 103 to move along the second support rod 122. Figure 1 As shown, in one embodiment of the present invention, the first moving module 102 includes three second support rods 122, one of which passes through the side plate 133 and the other two pass through the top plate 132.

[0059] In one embodiment of this utility model, the sample to be transferred is placed on a sample boat 300, and the sample boat 300 is placed on a base 131. Specifically, the base 131 is provided with a standard slot for the sample boat 300 to be inserted, and is secured by a spring clip. Figure 3 A schematic diagram of the sample boat according to an embodiment of the present invention is shown. Figure 3 As shown, the sample boat includes a sample boat body 301 and handles 302, with the handles 302 disposed on both sides of the sample boat body 301. Figure 3 As shown, the sample boat body 301 is provided with at least one sample holder slot 311 for placing a sample, which is secured by a spring clip. In one embodiment of the present invention, the sample holder slot 311 is a standard flag-shaped sample holder slot. In one embodiment of the present invention, the handle 302 is detachably provided on both sides of the sample boat body 301. Specifically, the sample boat body 301 is provided with handle connecting portions 312 on both sides, such as... Figure 3As shown, the handle connecting part 312 is a hollow cylinder, containing a guide block inside, and multiple bending grooves 3121 are provided on the side wall of the handle connecting part 312. The handle 302 includes a handle body 321, one end of which is provided with multiple fixing bolts 3211. The fixing bolts 3211 correspond one-to-one with the bending grooves 3121, thereby allowing the handle 302 to be detachably connected to the sample boat body 301. In addition, a guide and elastic fastening post 322 is connected to the end face of the handle body 321 on the side where the fixing bolts 3211 are provided. The guide and elastic fastening post 322 is fixed to the end face of the handle body 321 by a spring. In one embodiment of this utility model, the handle 302 can be fixed to a magnetic rod or a robotic arm. When the sample boat 300 is grasped by the magnetic rod or the robotic arm, the sample boat 300 should be in a state where it is fixed by a spring in the base 131. First, adjust the handle 302 to be coaxial with the handle connection part 312, then insert it axially into the guide hole of the handle connection part 312 until the fixing bolt 3211 reaches the corner of the bending groove 3121. At this time, the spring between the guide and elastic fastening post 322 and the handle body 321 is in a compressed state. However, since the fastening force of the sample boat 300 in the base 131 is greater than the spring force, the sample boat 300 will not be displaced at this time. Then, rotate 60 degrees clockwise, and the fixing bolt 3211 will reach the second corner of the bending groove 3121. At this time, release the axial force applied to the magnetic rod or the manipulator, and the spring will push the fixing bolt 3211 into the recess of the bending groove 3121. At this time, the gripping is completed, and the sample boat 300 can be pulled out of the base 131. When releasing, after inserting the sample boat 300 into the correct position of the base 131 using a magnetic rod or robotic arm, apply a slight axial force to the magnetic rod or robotic arm to push the fixing bolt 3211 to the corner of the bent slide groove 3121, and then rotate it 60 degrees counterclockwise to remove it.

[0060] In one embodiment of this utility model, the second moving module 103 is driven by the second driving module, such as... Figure 1 and Figure 2As shown, the second drive module includes a second rotary inlet 151, a second drive shaft 152, a second coupling 153, a wire drive wheel 154, a wire guide wheel 155, and a wire rope (not shown in the figure). The second rotary inlet 151 is disposed on the second surface of the vacuum flange 106 relative to its first surface, i.e., it is not located in the vacuum chamber but is disposed in the atmosphere. It transmits the rotational motion around the axis in the atmosphere to the vacuum chamber through magnetic force. The first end of the second drive shaft 152 is connected to the rotating shaft of the second rotary inlet 151, and the second end is provided with a second coupling 153. The wire drive wheel 154 is connected to the second coupling 153, and can rotate under the drive of the second rotary inlet 151. The second coupling 153 can provide a certain degree of eccentricity compensation. The wire guide wheels 154 are respectively disposed on the limiting blocks 123 at both ends of the first moving module 102. The wire rope is fixed to the second moving module 103 by fasteners such as bolts, and forms a loop through the wire drive wheel 154 and the wire guide wheel 155. By operating the second rotary inlet 151 to rotate in different directions, the second moving module 103 can be driven to move in two directions.

[0061] This invention provides a transmission device for long-distance vacuum transmission. By incorporating a first moving module and a second moving module that can move relative to it, the transmission distance is effectively increased. It also enables bidirectional transmission and is suitable for sample transfer between two vacuum systems. The transmission device has a simple and stable overall structure and occupies little space.

[0062] Although various embodiments of the present invention have been described above, it should be understood that they are presented by way of example only and not as limitations. It will be apparent to those skilled in the art that various combinations, modifications, and alterations can be made without departing from the spirit and scope of the present invention. Therefore, the breadth and scope of the present invention disclosed herein should not be limited by the exemplary embodiments disclosed above, but should be defined solely by the appended claims and their equivalents.

Claims

1. A transport device for long distance vacuum transport, characterized in that include: A mounting base, which is fixed inside the vacuum chamber; The first mobile module includes: At least one first support rod is connected to the fixed base and is movable relative to the fixed base along the axial direction of the first support rod; as well as At least one second support rod is arranged parallel to the first support rod; and a second moving module is movably connected to the second support rod, the second moving module being configured to hold the sample to be transferred.

2. The transmission apparatus of claim 1, wherein, The fixing base includes: The base plate has at least one first through hole inside along the axial direction of the first support rod. The size of the first through hole matches the first support rod so that the first support rod can move along the first through hole. A side plate is disposed on the edge of the base plate and perpendicular to the base plate. The interior of the side plate is provided with at least one second through hole along the axial direction of the first support rod. The size of the second through hole matches the first support rod so that the first support rod can move along the second through hole.

3. The transmission apparatus of claim 2, wherein, Limiting blocks are provided at both ends of the first moving module, and the two ends of the first support rod and the second support rod are fixed to the limiting blocks.

4. The transmission device of claim 3, wherein, The limiting block includes an opening facing the side of the base plate where no side plate is provided.

5. The transmission device of claim 1, wherein, The second mobile module includes: A base, configured to hold the sample; A top plate, which is movably connected to the second support rod; and The sidewall is configured to connect the base and the top plate.

6. The transmission device of claim 5, wherein, The sample to be transferred is placed on a sample boat, which is placed on the base. The sample boat includes: A sample boat body comprising at least one sample holder slot configured to hold a sample, the sample being secured by a spring clip; and Handles are located on both sides of the main body of the sample boat.

7. The transmission apparatus of claim 6, wherein, The sample boat body has handle connecting parts on both sides. Each handle connecting part is a hollow cylinder and has multiple bent grooves. The handle includes: The handle body has multiple fixing bolts at one end, each fixing bolt corresponding to a bent sliding groove, thereby allowing the handle to be detachably connected to the body; and A guide and elastic fastening post is fixed to the end face of the handle body by a spring.

8. The transmitting apparatus of claim 3, wherein, The first moving module is driven by a first driving module, which includes: First rotary injector; A first drive shaft, the first end of which is connected to the rotating shaft of the first rotary inlet, and the second end of which is provided with a first coupling; A drive gear, connected to the first coupling, to rotate under the drive of the first rotary inlet; and The driven rack has its two ends fixed to the limiting blocks at both ends of the first moving module and coupled with the drive gear to drive the first moving module to move relative to the fixed base.

9. The transmission device of claim 8, wherein, The second moving module is driven by a second driving module, which includes: Second rotary injector; The second drive shaft has a first end connected to the rotating shaft of the second rotary inlet, and a second coupling is provided at the second end. A wire drive wheel is connected to the second coupling to rotate under the drive of the second rotary inlet; Steel wire guide wheels are respectively disposed on the limiting blocks at both ends of the first moving module; and A steel wire rope, which is fixed to the second moving module, forms a loop via the steel wire drive wheel and the steel wire guide wheel to drive the second moving module to move along the second support rod.

10. The transmission device of claim 9, wherein, Also includes: A vacuum flange is fixed at the opening of a vacuum chamber. The fixed base is connected to the first surface of the vacuum flange by at least one support column. The first rotary inlet and the second rotary inlet are disposed on the second surface of the vacuum flange opposite to the first surface. The first drive shaft and the second drive shaft pass through the vacuum flange and are connected to the first coupling and the second coupling.

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