Auxiliary device for disassembling and assembling heavy object
Through the coordinated movement of the base, lifting, rotating and traversing components, the auxiliary device enables the precise disassembly and assembly of heavy components of semiconductor equipment, solving the problems of high load and precision in traditional manual operation, and improving disassembly and assembly efficiency and safety.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- PIOTECH (SHENYANG) SEMICONDUCTOR EQUIPMENT CO LTD
- Filing Date
- 2025-05-06
- Publication Date
- 2026-04-21
AI Technical Summary
When manually disassembling and assembling heavy components of semiconductor equipment, the workload for a single person is too heavy, and the limited space for two people to operate can easily lead to component misalignment, causing the sealing ring to fall off or be damaged by pressure. Repeated adjustments may cause equipment to be bumped, increasing maintenance costs.
Design an auxiliary device including a base, a lifting component, a rotating component, a lateral component, and a gripping component. Through multi-degree-of-freedom coordinated motion, it can achieve precise positioning and stable gripping of heavy objects, reduce manpower consumption, and avoid component displacement and collision.
It enables precise assembly and disassembly of heavy objects in confined spaces, reduces the number of manual adjustments, decreases the probability of collisions, solves the problems of high single-person load and precision control, and improves assembly and disassembly efficiency and safety.
Smart Images

Figure CN224147603U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor technology, and in particular to an auxiliary device for disassembling and assembling heavy objects. Background Technology
[0002] Heavy components such as spray plates, large baffles, and upper spray plates above semiconductor equipment chambers are core functional components ensuring process gas distribution, thermodynamic stability, and vacuum sealing. However, their large mass and high installation precision requirements present multiple challenges to traditional manual disassembly and assembly: single-person operation requires bearing significant weight, while two-person collaboration is prone to component misalignment due to space constraints, leading to sealing ring detachment or damage. Repeated adjustments may also cause components to collide with the chamber, resulting in equipment downtime and soaring maintenance costs. In other words, existing technologies, due to the compact structure of the equipment, lack dedicated auxiliary tooling, and urgently require a device integrating multi-degree-of-freedom adjustment to solve the problems of precise positioning and manpower load in the disassembly and assembly of heavy components within limited space. Utility Model Content
[0003] The embodiments of this utility model provide an auxiliary device for disassembling and assembling heavy objects, which solves the technical problems of large single-person load and inability to control accuracy during the disassembly and assembly process when relying on manual disassembly and assembly.
[0004] To address the aforementioned problems, according to one aspect of this application, an embodiment of the present invention provides an auxiliary device for disassembling and assembling heavy objects. The auxiliary device includes a base, a lifting assembly, a rotating assembly, a lateral moving assembly, and a gripping assembly. The base is located below the lifting assembly and is used to fix the auxiliary device to a pre-drilled hole in a chamber. One side of the rotating assembly is connected to the side of the lifting assembly, and the other side of the rotating assembly is connected to the lateral moving assembly. The gripping assembly is suspended below the lateral moving assembly for gripping heavy objects.
[0005] In some embodiments, the lifting assembly includes a handwheel, a transmission unit, and a trapezoidal lead screw. The input end of the transmission unit is connected to the handwheel, and the output end of the transmission unit is connected to the trapezoidal lead screw via a coupling. The rotating assembly is connected to the nut pair of the trapezoidal lead screw.
[0006] In some embodiments, the transmission unit includes a first bevel gear and a second bevel gear, the first bevel gear being connected to the output shaft of the handwheel, the first bevel gear meshing with the second bevel gear, and the second bevel gear being coaxially fixed to the trapezoidal lead screw via a flat key.
[0007] In some embodiments, the rotating assembly includes a double deep groove ball bearing and a rotating shaft, with the inner ring of the double deep groove ball bearing fixed to the bearing mounting section of the rotating shaft; the lateral assembly is bolted to the outer ring of the double deep groove ball bearing.
[0008] In some embodiments, the lateral movement assembly includes a support rod, a guide rail, and a slider. The support rod is connected to one side of the rotation assembly, the guide rail is disposed on the support rod, and the slider is slidably disposed on the support rod and has a mating part inside that matches the guide rail.
[0009] In some embodiments, the guide rail surface is provided with equidistantly distributed positioning grooves, and the slider is locked in place by a fixing member engaging with the positioning grooves.
[0010] In some embodiments, the gripping assembly includes a flexible steel chain, a quick-release hook, and a quick-coupler unit. The upper end of the flexible steel chain is connected to the bottom of the slider, and the lower end of the flexible steel chain is connected to the quick-release hook. The quick-coupler unit is movably mounted on the quick-release hook for attaching a weight to the gripping assembly.
[0011] In some embodiments, the quick-release hook includes a central disc and support arms radiating outward along the central disc, wherein there are at least three support arms distributed circumferentially.
[0012] In some embodiments, the quick coupling unit is a quick-release screw, which corresponds one-to-one with the support arm and is respectively disposed at the end of the corresponding support arm.
[0013] In some embodiments, the base includes a base body, the upper surface of which has an outwardly extending fixed end with a fixing hole. The base also includes a positioning member that passes through the fixing hole and the reserved hole to enable the installation of the auxiliary device.
[0014] Compared with the prior art, the auxiliary device for disassembling and assembling heavy objects of this utility model has at least the following beneficial effects:
[0015] The present invention provides an auxiliary device for disassembling and assembling heavy objects, comprising a base, a lifting assembly, a rotating assembly, a lateral moving assembly, and a gripping assembly. The base is located below the lifting assembly and is used to fix the auxiliary device to a reserved hole in the chamber. One side of the rotating assembly is connected to the side of the lifting assembly, and the other side of the rotating assembly is connected to the lateral moving assembly. The gripping assembly is suspended below the lateral moving assembly for gripping heavy objects.
[0016] In this invention, the lifting component replaces manual lifting, and the stable gripping component avoids uneven force distribution when multiple people are working together, fundamentally reducing the operator's physical exertion. The rotating component allows the heavy object to freely turn in the horizontal plane, and the lateral movement component provides high-precision translation. Together, they enable the operation of "rotating to avoid obstacles first, then fine-tuning the alignment" in narrow spaces, avoiding component displacement caused by space congestion when two people are operating. This embodiment, through the coordinated movement of multiple degrees of freedom of lifting, rotating, and lateral movement, allows the device to plan the optimal assembly and disassembly path, reducing the number of repeated manual adjustments and lowering the probability of collisions. It also solves the technical problems of high single-person load and uncontrollable precision during manual installation and disassembly.
[0017] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description
[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 A schematic diagram of the structure of an auxiliary device for disassembling and assembling heavy objects provided in an embodiment of this utility model is shown.
[0020] Figure 2 This illustration shows a schematic diagram of the internal structure of a lifting component in an auxiliary device for disassembling and assembling heavy objects, provided by an embodiment of the present invention.
[0021] Figure 3 A cross-sectional view of a rotating component in an auxiliary device for disassembling and assembling heavy objects, provided by an embodiment of the present invention, is shown.
[0022] Figure 4 An exploded view of the base in an auxiliary device for disassembling and assembling heavy objects, provided by an embodiment of the present invention, is shown.
[0023] Figure 5 This illustration shows a first structural diagram of an auxiliary device for disassembling and assembling heavy objects in a working state, according to an embodiment of the present invention.
[0024] Figure 6 This illustration shows a second structural diagram of an auxiliary device for disassembling and assembling heavy objects in a working state, according to an embodiment of the present invention.
[0025] Figure label:
[0026] 1. Base; 11. Base body; 12. Fixed end; 13. Fixed hole; 14. Positioning component; 2. Lifting assembly; 21. Handwheel; 22. Transmission unit; 23. Trapezoidal lead screw; 221. First bevel gear; 222. Second bevel gear; 3. Rotating assembly; 31. Double deep groove ball bearing; 32. Rotating shaft; 4. Lateral movement assembly; 41. Support rod; 42. Guide rail; 43. Slider; 44. Mating part; 45. Positioning groove; 46. Fixing component; 5. Gripping assembly; 51. Flexible steel chain; 52. Quick-release hook; 53. Quick coupling unit; 521. Center plate; 522. Support arm. Detailed Implementation
[0027] To further illustrate the technical means and effects adopted by this utility model to achieve its intended purpose, the specific implementation methods, structures, features, and effects according to this utility model application are described in detail below with reference to the accompanying drawings and preferred embodiments. In the following description, different "an embodiment" or "an embodiment" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.
[0028] In the description of this utility model, it should be clarified that the terms "first," "second," etc., in the specification, claims, and drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence; the terms "vertical," "lateral," "longitudinal," "front," "back," "left," "right," "up," "down," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing this utility model, and do not mean that the device or element referred to must have a specific orientation or position, and therefore should not be construed as a limitation of this utility model.
[0029] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0030] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.
[0031] This embodiment provides an auxiliary device for disassembling and assembling heavy objects, such as... Figure 1-6As shown, the auxiliary device includes a base 1, a lifting assembly 2, a rotating assembly 3, a lateral moving assembly 4, and a gripping assembly 5. The base 1 is located below the lifting assembly 2 and is used to fix the auxiliary device to the reserved hole in the chamber. One side of the rotating assembly 3 is connected to the side of the lifting assembly 2, and the other side of the rotating assembly 3 is connected to the lateral moving assembly 4. The gripping assembly 5 is suspended below the lateral moving assembly 4 and is used to grip heavy objects.
[0032] In this embodiment, the base 1 is located at the bottom of the entire device and is directly fixed to the pre-drilled holes in the semiconductor equipment chamber. Its core function is to serve as the supporting foundation for the entire auxiliary device, ensuring the stability of the device during operation through a rigid connection with the chamber structure and preventing shaking caused by weight or movement. The lifting assembly 2 is vertically mounted above the base 1, and its side is connected to the rotating assembly 3. Its function is to adjust the height of the gripping assembly 5 through vertical lifting movement, thereby adapting to the installation requirements of heavy objects (such as spray plates) in different positions within the chamber, replacing manual lifting actions to reduce the physical burden on the operator. The rotating assembly 3 is connected to one side of the lifting assembly 2 and the other side is connected to the lateral movement assembly 4, enabling horizontal rotation around the vertical axis. Its function is to adjust the horizontal angle of the gripping assembly 5, allowing the heavy object to flexibly turn within the narrow chamber space and avoid structural obstacles. The lateral movement assembly 4 is mounted on the other side of the rotating assembly 3, with the gripping assembly 5 suspended below it, responsible for precise translation and fine-tuning in the horizontal direction to avoid component displacement caused by human error. The gripping component 5 serves as the end effector, directly fixing the heavy object through mechanical grippers, vacuum suction cups, or electromagnetic adsorption. It is equipped with a flexible buffer structure (such as springs or pneumatic damping) to protect the surface precision of the heavy object and ensure that the sealing ring is subjected to uniform force during the pressing process.
[0033] When disassembling a heavy object, first fix the base 1 to the pre-drilled hole in the chamber to ensure a rigid connection between the device and the chamber. Then, through the cooperation of the rotating assembly 3 and the lifting assembly 2, the gripping assembly 5 contacts the heavy object (such as a spray plate), clamping or locking it. After the operator releases the mechanical connection between the heavy object and the chamber (e.g., by removing bolts), the lifting assembly 2 and the lateral movement assembly 4 work together to remove the heavy object from its original position, avoiding friction with the chamber. If there are restrictions on the direction of the chamber opening, the rotating assembly 3 can adjust the horizontal angle of the heavy object to align it with the removal path. Finally, the lifting assembly 2 slowly lowers the heavy object to a safe height, and then it is removed by external equipment or manual assistance.
[0034] The installation process is a reverse operation: After the gripping component 5 grips the weight and raises it to the preset height, the rotation component 3 is used to adjust the orientation of the component so that it is aligned with the cavity installation position. The lateral movement component 4 moves horizontally, and in conjunction with the vertical adjustment of the lifting component 2, it ensures that the weight is completely in contact with the cavity interface. After the weight is accurately positioned, the operator locks the fixing mechanism, and the gripping component 5 releases the weight.
[0035] In this embodiment, the lifting component 2 replaces manual lifting, and the stable gripping of the grasping component 5 avoids uneven force distribution when multiple people are working together, fundamentally reducing the physical exertion of the operator. The rotating component 3 allows the heavy object to freely turn in the horizontal plane, and the lateral movement component 4 provides high-precision translation. The two work together to achieve the operation of "rotating to avoid obstacles first, and then fine-tuning the alignment" in narrow spaces, avoiding component displacement caused by space congestion when two people are operating. This embodiment, through the multi-degree-of-freedom coordinated motion of lifting, rotating, and lateral movement, can plan the optimal disassembly and assembly path, reduce the number of repeated manual adjustments, reduce the probability of collisions, and also solve the technical problems of high single-person load and uncontrollable precision during manual installation and disassembly.
[0036] In a specific embodiment, the lifting assembly 2 includes a handwheel 21, a transmission unit 22, and a trapezoidal lead screw 23. The input end of the transmission unit 22 is connected to the handwheel 21, and the output end of the transmission unit 22 is connected to the trapezoidal lead screw 23 through a coupling. The rotating assembly 3 is connected to the nut pair of the trapezoidal lead screw 23.
[0037] Handwheel 21 is located on the operating side of lifting assembly 2, typically designed in an area convenient for manual operation. Its function is to input driving force through manual rotation of the handwheel, converting manual operation into a power source for the mechanical transmission system. The rotation angle and speed of handwheel 21 directly control the amplitude and rate of lifting motion. Transmission unit 22 connects handwheel 21 and trapezoidal screw 23, typically composed of a gear set, chain, or belt drive mechanism. Its function is to convert the rotational motion input by handwheel 21 into speed or torque, thereby adapting to the driving requirements of trapezoidal screw 23 and improving the control accuracy of lifting motion. Trapezoidal screw 23 is vertically mounted above base 1, its screw portion coaxially connected to the output end of transmission unit 22 via a coupling, while the nut pair is fixed to rotating assembly 3. The function of trapezoidal screw 23 is to convert the rotational motion transmitted by transmission unit 22 into linear lifting motion of the nut pair. Utilizing the self-locking characteristic of its trapezoidal thread, it maintains a stable lifting position when no external force is applied, preventing the heavy object from sliding due to its own weight.
[0038] The lifting function of the gripping component 5 relies on the coordinated operation of the handwheel 21, the transmission unit 22, and the trapezoidal screw 23. Manually rotating the handwheel 21 drives the input end of the transmission unit 22 via its shaft. The transmission mechanism inside the transmission unit 22 converts the high-speed, low-torque rotation of the handwheel 21 into a low-speed, high-torque output, which is then transmitted to the screw of the trapezoidal screw 23 via a coupling. When the screw of the trapezoidal screw 23 rotates, the nut pair mating with it moves (rises or falls) along the screw axis due to thread engagement. Since the nut pair is fixedly connected to the rotating component 3, the rotating component 3, the lateral component 4, and the gripping component 5 rise and fall synchronously.
[0039] When a heavy object needs to be lifted, the operator rotates the handwheel 21 clockwise. Power, after being reduced in speed and torque by the transmission unit 22, drives the trapezoidal lead screw 23 to rotate clockwise. The nut assembly moves upward along the screw, lifting the gripping component 5 and the heavy object. Conversely, rotating the handwheel 21 counterclockwise allows the heavy object to descend smoothly. The entire process achieves labor-saving operation and controllable movement trajectory through mechanical transmission, solving the problems of excessive load and inaccurate positioning in traditional manual handling.
[0040] In a specific embodiment, the transmission unit 22 includes a first bevel gear 221 and a second bevel gear 222. The first bevel gear 221 is connected to the output shaft of the handwheel 21, and the first bevel gear 221 meshes with the second bevel gear 222. The second bevel gear 222 is coaxially fixed to the trapezoidal lead screw 23 via a flat key.
[0041] The first bevel gear 221 is located at the end of the output shaft of the handwheel 21 and is fixed coaxially with the handwheel 21. Its function is to convert the rotational motion input by the operator through the handwheel from the horizontal axis to the vertical axis, and to transmit power through meshing with the second bevel gear 222. The inclined tooth surface design of the bevel gear enables it to efficiently complete axially intersecting power steering. The second bevel gear 222 meshes with the first bevel gear 221 and is fixed coaxially with the top of the trapezoidal lead screw 23 via a flat key. Its function is to receive rotational motion from the first bevel gear 221 and transmit power vertically to the trapezoidal lead screw 23. Since the second bevel gear 222 is rigidly connected to the trapezoidal lead screw 23, its rotation directly drives the screw of the trapezoidal lead screw 23 to rotate synchronously, providing power input for subsequent linear lifting and lowering motion.
[0042] When the operator rotates handwheel 21, its output shaft drives the first bevel gear 221 to rotate around the horizontal axis. The tooth surface of the first bevel gear 221 meshes with the tooth surface of the second bevel gear 222, converting the rotational motion in the horizontal axis into rotational motion in the vertical axis. For example, if the handwheel rotates clockwise, the rotation of the first bevel gear 221 will drive the second bevel gear 222 to rotate clockwise or counterclockwise around the vertical axis (the specific direction is determined by the helix angle of the bevel gears). The second bevel gear 222 is rigidly connected to the screw of the trapezoidal lead screw 23 via a flat key. When the second bevel gear 222 rotates, the screw of the trapezoidal lead screw 23 rotates synchronously. When the screw of the trapezoidal lead screw 23 rotates, its nut pair moves up and down along the screw axis due to the thread engagement, thereby driving the rotating assembly 3, the lateral moving assembly 4, and the gripping assembly 5 to rise and fall as a whole.
[0043] When the operator turns handwheel 21 clockwise, the first bevel gear 221 rotates horizontally, driving the second bevel gear 222 to rotate vertically (assuming counterclockwise), which in turn drives the trapezoidal screw 23 to rotate counterclockwise. The nut assembly rises along the screw under the action of the thread, ultimately lifting the gripping component 5. Reversing the handwheel lowers the gripping component. The entire process transforms manual operation into stable vertical lifting motion through the meshing of the bevel gears.
[0044] In a specific embodiment, the rotating assembly 3 includes a double deep groove ball bearing 31 and a rotating shaft 32, with the inner ring of the double deep groove ball bearing 31 fixed to the bearing mounting section of the rotating shaft 32; the transverse assembly 4 is bolted to the outer ring of the double deep groove ball bearing 31.
[0045] The double deep groove ball bearing 31 is a standard rolling bearing with a circular arc-shaped deep groove structure for the raceways of its inner and outer rings, filled with steel balls as rolling elements. Its characteristic is that it can simultaneously withstand radial loads (forces perpendicular to the axis) and a certain degree of axial loads (forces along the axis). A double deep groove ball bearing specifically refers to a combination of two parallel deep groove ball bearings, which enhances load-bearing capacity, improves rotational stability, and reduces runout or vibration caused by uneven force distribution on a single bearing.
[0046] In this embodiment, the inner ring of the double deep groove ball bearing 31 is fixed to the bearing mounting section of the rotating shaft 32 by an interference fit or locking device, and its outer ring is connected to the transverse assembly 4 by bolts. Its function is to support the entire weight and external load of the rotating shaft 32 and the transverse assembly 4, replacing sliding friction with rolling friction, enabling the rotating shaft 32 to rotate around its axis with low resistance and high precision, while simultaneously bearing the radial and axial forces from the transverse assembly 4. The lower end of the rotating shaft 32 is connected to the nut pair of the trapezoidal lead screw 23 of the lifting assembly 2 via a mechanical interface, and the upper end is fixed to the inner ring of the double deep groove ball bearing 31. Its function is to transmit the vertical movement of the lifting assembly 2 to the rotating assembly 3, and through its own rotation, drive the transverse assembly 4 and the gripping assembly 5 to rotate around their axis, thereby achieving horizontal angle adjustment of the load.
[0047] The inner ring of the double deep groove ball bearing 31 is fixed to the rotating shaft 32, and the outer ring is connected to the transverse assembly 4 by bolts. When the rotating shaft 32 rotates around its own axis, the inner ring rotates synchronously with the shaft, while the outer ring, because it is fixed to the transverse assembly 4, drives the transverse assembly 4 to rotate around the shaft as a whole.
[0048] When the horizontal angle of the load needs to be adjusted, the operator applies a rotational force to the rotating shaft 32. The rotation of the rotating shaft 32 is transmitted to the outer ring through the inner ring of the double deep groove ball bearing 31. Since the outer ring is rigidly connected to the lateral assembly 4, the lateral assembly 4 and the gripping assembly 5 rotate around the shaft accordingly. The rolling friction characteristics of the double deep groove ball bearing 31 make the rotation process smooth and effortless, and the preload or clearance design inside the bearing can adapt to the accuracy requirements under different load conditions.
[0049] In a specific embodiment, the transverse component 4 includes a support rod 41, a guide rail 42, and a slider 43. The support rod 41 is connected to one side of the rotating component 3, the guide rail 42 is disposed on the support rod 41, and the slider 43 is slidably disposed on the support rod 41, and has a mating part 44 inside that matches the guide rail 42.
[0050] The support rod 41 is laterally fixed to one side of the rotating component 3. As the rigid main structure of the transverse component 4, the support rod provides a mounting base for the guide rail 42 and the slider 43. The guide rail 42 is fixed to the surface of the support rod 41 along its length. The guide rail defines the sliding path of the slider 43, constraining it to move only in a single horizontal direction through its high hardness and low friction surface characteristics, ensuring the linear accuracy of the transverse movement. The slider 43 is fitted onto the support rod 41, and its interior has a mating part 44 (e.g., a groove, ball circulation groove, or sliding bushing) that matches the shape of the guide rail 42. The slider 43 serves as the direct load-bearing component of the gripping component 5. Through the precise fit between the mating part 44 and the guide rail 42, sliding friction is converted into rolling friction or low-resistance sliding friction, achieving smooth, low-wear transverse movement.
[0051] The support rod 41 is connected to the lifting assembly 2 via the rotating assembly 3, forming a stable spatial frame. The guide rail 42 is installed along the extension direction of the support rod 41, providing a high-precision linear motion reference for the slider 43. When the position of the gripping assembly 5 needs to be adjusted laterally, the operator applies a horizontal pushing force to the slider 43 by manually pushing or pulling or using auxiliary tools. The mating part 44 inside the slider 43 engages with the guide rail 42, converting the external driving force into rolling friction, allowing the slider to slide smoothly along the guide rail direction.
[0052] When it is necessary to move the gripping component 5 laterally to the target position, the operator pushes the slider 43, which slides along the guide rail 42. Due to the precise fit between the guide rail 42 and the mating part 44, the gripping component 5 moves the weight horizontally to the designated position.
[0053] In a specific embodiment, the guide rail 42 is provided with equidistantly distributed positioning grooves 45, and the slider 43 is locked in place by a fixing member 46 in cooperation with the positioning grooves 45.
[0054] Positioning grooves 45 are located on the surface of the guide rail 42 and are evenly distributed along the length of the guide rail. Their function is to provide positioning reference points for the slider 43, enabling rapid positioning during lateral movement. The evenly distributed design allows the operator to select fixed intervals of movement according to requirements, adapting to different installation positions. The fixing component 46 is integrated on the slider 43 and is typically a manually or automatically operated locking mechanism. Its function is to rigidly lock the slider 43 to the guide rail 42 through physical engagement with the positioning grooves 45, preventing accidental slippage of the slider during heavy object handling or installation, and ensuring the positional stability of the gripping component 5 and the heavy object.
[0055] The specific implementations of fastener 46 include, but are not limited to, the following types:
[0056] For example, there's the spring pin: a pin with a built-in spring that retracts when pressed and springs into a groove when released, making it easy to operate and tool-free. In semiconductor equipment assembly and disassembly, the operator moves the spray plate to the target position, presses the spring pin to engage it in the positioning groove 45, and the positioning is completed instantly. During disassembly, a light pull on the pin handle releases the lock and allows for further adjustment. Another example is the locking bolt: a bolt that screws into a threaded hole on the side wall of the groove, providing high-rigidity locking, but requires manual tightening. Yet another example is the pin-type snap-fit: a U-shaped pin passes through the slider and groove, secured by a cotter pin or snap ring; the structure is simple but requires manual insertion and removal.
[0057] In a specific embodiment, the gripping component 5 includes a flexible steel chain 51, a quick-release hook 52, and a quick-coupler unit 53. The upper end of the flexible steel chain 51 is connected to the bottom of the slider 43, and the lower end of the flexible steel chain 51 is connected to the quick-release hook 52. The quick-coupler unit 53 is movably mounted on the quick-release hook 52 for mounting heavy objects onto the gripping component 5.
[0058] The upper end of the flexible steel chain 51 is fixed to the bottom of the slider 43, and the lower end is connected to the quick-release hook 52. Its function is to allow the gripping component 5 to swing or tilt slightly in the vertical and horizontal directions through the flexible structure of the multi-section steel chain, thereby compensating for alignment deviations between the load and the gripping mechanism and avoiding stress concentration or surface scratches caused by rigid connections. Simultaneously, the high strength of the steel chain can bear the full weight of the load, ensuring safety. The quick-release hook 52 is located at the lower end of the flexible steel chain 51. Its function is to temporarily connect with the lifting ring, groove, or flange on the top of the load through a quick-opening and closing mechanism, enabling rapid gripping and release of the load and reducing manual installation time. The quick-coupler unit 53 locks the quick-release hook 52 mechanically after it contacts the load, ensuring that the load will not accidentally fall off during handling, rotation, or lateral movement.
[0059] In a specific embodiment, the quick-release hook 52 includes a central disk 521 and support arms 522 radiating outward along the central disk 521. There are at least three support arms 522, which are distributed circumferentially.
[0060] The center plate 521 is located at the center of the quick-release hook 52. Its top is connected to the slider 43 via a flexible steel chain 51, and its outer side is integrally formed with the support arm 522. Its function includes: evenly distributing the lifting force transmitted by the flexible steel chain 51 to each support arm 522, avoiding stress concentration that could lead to localized deformation. The support arms 522 radiate outwards from the outer edge of the center plate 521, with at least three arms distributed at equal angles along the circumference. Their function includes: distributing the weight of the load through multiple support points, reducing pressure at individual contact points, and preventing localized deformation or surface damage to the load. The polygonal support surface (such as a triangle or quadrilateral) formed by the support arms 522 can resist the tilting moment caused by eccentricity or inertia of the load, maintaining a stable lifting posture.
[0061] In a specific embodiment, the quick-coupling unit 53 is a quick-release screw, which corresponds one-to-one with the support arm 522 and is respectively located at the end of the corresponding support arm 522. Quick-release screws (such as quarter-turn screws or spring-loaded screws) simplify the tightening action, significantly reducing the operation time for a single screw. They are particularly suitable for scenarios requiring simultaneous fixing at multiple points, optimizing the traditional screw-by-screw tightening process into "synchronous pressing-quick locking," significantly improving disassembly and assembly efficiency. The operator aligns the support arm 522 of the quick-release hook 52 with the threaded hole on the edge of the spray plate, presses the quick-release screw handle to quickly screw it in and lock it.
[0062] In a specific embodiment, the base 1 includes a base body 11, the upper surface of the base body 11 has an outwardly extending fixed end 12, the fixed end 12 has a fixed hole 13, the base 1 also includes a positioning member 14, the positioning member 14 passes through the fixed hole 13 and the reserved hole to realize the installation of the auxiliary device.
[0063] The base body 11 is the main structure of the base 1, typically a rigid metal plate or frame, located at the bottom of the device. Its function is to provide a mounting surface for the lifting assembly 2 and to distribute the overall load of the device through its own weight and structural rigidity, preventing overturning due to a shift in the center of gravity. The fixed end 12 is a flange or wing plate extending outward from the upper surface of the base body 11. Its function is to increase the contact area with the chamber, improving stability, and providing mounting positions for the fixing holes 13, adapting to the distribution of different chamber pre-drilled holes. The fixing holes 13 are formed on the surface of the fixed end 12, coaxially aligned with the chamber pre-drilled holes. Their function, in conjunction with the positioning component 14, is to achieve precise alignment between the base 1 and the chamber, ensuring that the movement axis of the subsequent lifting and rotating components is perpendicular to the chamber's process surface, avoiding mechanical interference during assembly and disassembly. The positioning component 14 is a mechanical connector passing through the fixing holes 13 and the chamber pre-drilled holes, typically a high-precision pin, threaded bolt, or quick-release pin. Its function is to rigidly fix the base 1 to the chamber through interference fit or threaded locking, eliminating relative displacement between the device and the chamber. During installation, the operator places the base 1 on top of the chamber, visually aligns the fixed end 12 with the reserved hole, and inserts two guide pins for initial positioning. Then, a wrench is used to tighten the remaining bolts to ensure there are no gaps between the base and the chamber surface. During disassembly, simply loosen the bolts and pull out the guide pins to remove the entire auxiliary device; no special tools are required throughout the process.
[0064] Traditional disassembly and assembly methods rely on manual handling of heavy components (such as spray panels). When operating alone, the operator bears an immense weight load, while two-person collaboration is prone to uneven force distribution or component slippage due to the confined space of the chamber, posing safety hazards. This embodiment replaces manual lifting with a lifting assembly, utilizing mechanical force amplification to reduce manpower requirements. Simultaneously, the gripping assembly employs a combination of quick-release hooks and flexible steel chains, achieving automatic gripping and stable hoisting of heavy objects through multi-point quick-release screw locking, completely eliminating the need for manual lifting.
[0065] Traditional manual operation is difficult for two people to work together due to the narrow space of the chamber, and components are prone to misalignment, causing damage to the sealing rings or collisions with the chamber. This embodiment achieves precise positioning through the coordinated adjustment of three axes: lifting, rotation, and lateral movement. The lifting component adjusts the vertical height, the rotation component supports steering, and the lateral movement component provides lateral fine-tuning capability. The combined action of these three components allows heavy objects to move in multiple directions within a narrow space. Combined with the locking function of the slider positioning groove and the fixing component, the position can be quickly locked after each movement, reducing the number of repeated adjustments. Ultimately, collision-free assembly and disassembly of heavy objects can be achieved within a compact space.
[0066] This embodiment combines dynamic error compensation with static stability through a composite design of floating connection and rigid reference, thus solving the defects of traditional hinge screw solutions.
[0067] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.
Claims
1. An auxiliary device for the disassembly of heavy objects, characterized in that, The auxiliary device includes a base, a lifting assembly, a rotating assembly, a lateral moving assembly, and a gripping assembly. The base is located below the lifting assembly and is used to fix the auxiliary device to a reserved hole in the chamber. One side of the rotating assembly is connected to the side of the lifting assembly, and the other side of the rotating assembly is connected to the lateral moving assembly. The gripping assembly is suspended below the lateral moving assembly for gripping heavy objects.
2. The device for assisting in the disassembly of a heavy object of claim 1, wherein, The lifting assembly includes a handwheel, a transmission unit, and a trapezoidal lead screw. The input end of the transmission unit is connected to the handwheel, and the output end of the transmission unit is connected to the trapezoidal lead screw via a coupling. The rotating assembly is connected to the nut pair of the trapezoidal lead screw.
3. The device for assisting in the disassembly of a heavy object of claim 2, wherein, The transmission unit includes a first bevel gear and a second bevel gear. The first bevel gear is connected to the output shaft of the handwheel and meshes with the second bevel gear. The second bevel gear is coaxially fixed to the trapezoidal lead screw via a flat key.
4. The device for assisting in the disassembly of a heavy object of claim 1, wherein, The rotating assembly includes a double deep groove ball bearing and a rotating shaft, with the inner ring of the double deep groove ball bearing fixed to the bearing mounting section of the rotating shaft; the transverse assembly is bolted to the outer ring of the double deep groove ball bearing.
5. The device for assisting in the disassembly of a heavy object of claim 1, wherein, The lateral movement assembly includes a support rod, a guide rail, and a slider. The support rod is connected to one side of the rotation assembly, the guide rail is disposed on the support rod, and the slider is slidably disposed on the support rod, and has a mating part inside that matches the guide rail.
6. The device for assisting in the disassembly of a heavy object of claim 5, wherein, The guide rail surface is provided with equidistantly distributed positioning grooves, and the slider is locked in place by a fixing component cooperating with the positioning grooves.
7. The device for assisting in the disassembly of a heavy object of claim 5, wherein, The gripping assembly includes a flexible steel chain, a quick-release hook, and a quick-coupler unit. The upper end of the flexible steel chain is connected to the bottom of the slider, and the lower end of the flexible steel chain is connected to the quick-release hook. The quick-coupler unit is movably mounted on the quick-release hook for attaching a heavy object to the gripping assembly.
8. The device for assisting in the disassembly of a heavy object of claim 7, wherein, The quick-release hook includes a central disc and support arms radiating outward from the central disc, wherein there are at least three support arms distributed circumferentially.
9. The device for assisting in the disassembly of a heavy object of claim 8, wherein, The quick coupling unit is a quick-release screw, which corresponds one-to-one with the support arm and is respectively located at the end of the corresponding support arm.
10. The device for assisting in the disassembly of a heavy object according to any one of claims 1-9, characterized in that, The base includes a base body, the upper surface of which has an outwardly extending fixed end with a fixing hole. The base also includes a positioning member that passes through the fixing hole and the reserved hole to enable the installation of the auxiliary device.