Improved structure of semi-automatic furnace tube and furnace body loading and unloading equipment

Abstract

An improved structure of semi-automatic furnace tube and furnace body loading and unloading equipment relates to the technical field of semiconductor automatic robots and comprises a vehicle, a lifting power mechanism, an adjusting mechanism, a rotating table and a tube rack vehicle, a V-shaped roller set is arranged on the tube rack vehicle, a positioning structure is arranged on the rotating table, and the positioning structure comprises a tube rack vehicle position positioning device and a tube rack vehicle fixing device. Compared with the prior art, the pipe rack trolley has the advantages that the pipe rack trolley can be conveniently moved in or out of the rotating table, and meanwhile, the pipe rack trolley can be conveniently positioned on the rotating table and fixed, and the pipe rack trolley is prevented from moving relative to the rotating table.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor automation robots, and in particular to an improved structure for semi-automatic loading and unloading equipment for furnace tubes and furnace bodies. Background Technology

[0002] Most existing chemical deposition (CVD) furnaces and diffusion furnaces in the semiconductor and photovoltaic industries use quartz glass furnace tubes. After a period of use, the inner wall of the tubes becomes chemically contaminated by the reactant gases inside the furnace, and temperature changes cause cracks. This necessitates frequent disassembly and replacement of the furnace tubes. Current technologies rely on manual replacement of these tubes. Due to the long length and weight of the tubes, and the high position required for replacement, 6-8 workers are needed to lift and lower them, which is time-consuming, labor-intensive, and inefficient. Furthermore, cracked tubes are easily broken during manual handling, posing a safety hazard to workers. Additionally, the furnace body used to hold the tubes also requires maintenance and replacement, which necessitates disassembly and removal from the base. Existing technologies also require manual lifting and lowering of these components, which is not only labor-intensive but also inefficient. The furnace tubes and furnace body have low efficiency and are difficult to repair and replace. To address this, the applicant invented a semi-automatic loading and unloading device for furnace tubes and furnace body with patent application number 202411344718.2. This device achieves the technical effects of saving personnel, reducing operating effort, increasing efficiency, and preventing injury to operators. However, since the tube rack trolley is positioned on the rotating platform by a positioning structure, and the patent application does not disclose the specific structure of this positioning structure or its usage effect, it is unclear how to achieve this technical effect. In actual use, the tube rack trolley needs to be moved in or out of the rotating platform to facilitate the transfer of furnace tubes and furnace body without affecting the disassembly and assembly of furnace tubes and furnace body from chemical deposition furnaces (CVD) and diffusion furnaces. Therefore, while facilitating the movement of the tube rack trolley in or out of the rotating platform, it is also possible to easily position and fix the tube rack trolley on the rotating platform to prevent it from moving relative to the rotating platform. Since the existing technology does not disclose the specific structure of the positioning structure, it is unclear how to achieve this technical effect. Summary of the Invention

[0003] The purpose of this utility model is to provide an improved structure for a semi-automatic loading and unloading device for furnace tubes and furnace body that facilitates the movement of the tube rack cart in or out of the rotating platform, while also conveniently positioning and fixing the tube rack cart on the rotating platform to prevent the tube rack cart from moving relative to the rotating platform.

[0004] The improved structure of the semi-automatic loading and unloading equipment for furnace tubes / furnace bodies of this utility model is achieved as follows: It includes a cart, a lifting power mechanism mounted on the cart, an adjustment mechanism driven by the lifting power mechanism capable of fine-tuning left and right movement, fine-tuning up and down movement, and fine-tuning rotation of the angle, a rotating table driven by the adjustment mechanism, and a tube rack cart mounted on the rotating table. A V-shaped roller group for slidingly conveying furnace tubes and furnace bodies is mounted on the tube rack cart. A positioning structure is provided on the rotating table. The key feature is that the positioning structure includes a tube rack cart position positioning device and a tube rack cart fixing device. The tube rack cart position positioning device includes two or more pairs of limiting blocks mounted on the rotating table, with the spacing between each pair of limiting blocks being... The width of the square frame of the tube rack vehicle is matched. The tube rack vehicle fixing device includes a base, a swing arm that is laterally swayed on the vertical plate of the base, a handle that is vertically swayed on the base, and a pressure block that is swayed on the body of the handle. A soft pressure block is provided on the free end of the swing arm. The hinge end of the swing arm is fork-shaped. The side of the vertical plate of the base facing the tube rack vehicle is an inclined surface. The fork-shaped hinge end of the swing arm is hinged to the upper part of the inclined surface of the vertical plate of the base. The handle hinge end is fork-shaped. After the fork-shaped handle hinge end passes over the hinge end of the swing arm, it is hinged to the lower part of the inclined surface of the vertical plate of the base. One end of the pressure block is hinged to the upper end of the fork of the fork-shaped handle hinge end, and the other end of the pressure block is hinged to the body of the fork-shaped hinge end of the swing arm.

[0005] In use, the furnace tube is placed on the V-shaped roller set on the tube rack carriage. The tube rack carriage moves the furnace tube between each pair of limit blocks of the tube rack carriage positioning device on the rotating table of the semi-automatic loading and unloading equipment. Then, the handle is swung, which drives the swing arm to swing, causing the soft pressure block to press down on the square frame of the tube rack carriage, pressing and fixing the tube rack carriage on the rotating table to prevent it from sliding relative to the rotating table. Then, the tube is transported to the furnace tube installation inlet of the chemical deposition furnace (CVD) or diffusion furnace by the semi-automatic loading and unloading equipment. The lifting power mechanism raises the forward and backward moving mechanism to raise the furnace tube to the furnace tube installation inlet, so that the furnace tube and the furnace tube installation inlet are on the same horizontal line. The tube rack carriage is finely adjusted left and right, up and down, and angle by the adjustment mechanism so that the furnace tube is facing the furnace tube installation inlet and the axis of the furnace tube coincides with the axis of the furnace tube installation inlet. Then, it can be manually pushed into the furnace precisely along the axis by the V-shaped roller set.

[0006] The side of the base vertical plate facing the tube rack carriage is inclined, so that the pressure block is not disturbed by the vertical plate when it is pressed down at the hinge end of the swing arm.

[0007] The principle behind swinging the handle, which in turn drives the swing arm to swing, causing the soft pressure block to press down on the square frame of the tube rack trolley, is as follows: The handle, through the pressure block, drives the swing arm to swing, pressing the soft pressure block down onto the square frame of the tube rack trolley. Simultaneously, the point where the pressure block intersects with the fork-shaped hinge end of the swing arm is located on the outer side of the line connecting the pressure block's hinge point on the handle and the handle's hinge point on the vertical plate, away from the tube rack trolley. This causes the reverse force of the soft pressure block acting on the swing arm to push the pressure block, driven by the handle, onto the square frame of the tube rack trolley, thus locking the soft pressure block. When it is necessary to release the soft pressure block from the tube rack trolley, swing the handle away from the tube rack trolley, causing the swing arm to swing upwards, moving the soft pressure block away from the tube rack trolley, allowing the tube rack trolley to be moved away from the turntable.

[0008] Compared with existing technologies, this utility model has the advantages of facilitating the movement of the tube rack trolley in or out of the rotating platform, while also conveniently positioning and fixing the tube rack trolley on the rotating platform to prevent it from moving relative to the rotating platform. Attached Figure Description

[0009] Figure 1 This is a schematic diagram of the improved structure of the semi-automatic loading and unloading equipment for furnace tubes and furnace body of this utility model.

[0010] Figure 2 This is a structural diagram of the positioning structure;

[0011] Figure 3 This is a schematic diagram of transferring furnace tubes to a chemical vapor deposition furnace.

[0012] Explanation of reference numerals in the attached drawings: A-Positioning structure; B-Furnace tube; C-Chemical deposition furnace (CVD) or diffusion furnace; 1-Cart; 2-Lifting power mechanism; 3-Adjusting mechanism; 4-Rotating table; 5-Tube rack cart; 501-Square frame cart; 6-V-shaped roller group; 7-Tube rack cart positioning device; 701-Limit block; 702-Positioning column; 8-Tube rack cart fixing device; 801-Base; 802-Vertical plate; 803-Swing rod; 804-Handle; 805-Pressure block; 806-Soft pressure block; 9-Furnace tube installation inlet. Detailed Implementation

[0013] The improved structure of the semi-automatic loading and unloading equipment for furnace tubes and furnace body of this utility model will now be described in further detail with reference to the accompanying drawings and embodiments:

[0014] like Figure 1 , 2As shown, the improved structure of the semi-automatic loading and unloading equipment for furnace tubes and furnace body of this utility model is achieved as follows: It includes a cart 1, a lifting power mechanism 2 mounted on the cart 1, an adjustment mechanism 3 driven by the lifting power mechanism 2 capable of fine-tuning left and right movement, fine-tuning up and down movement, and fine-tuning rotation of the angle, a rotating platform 4 driven by the adjustment mechanism 3, and a tube rack cart 5 mounted on the rotating platform 4. A V-shaped roller group 6 for slidingly conveying the furnace tubes and furnace body is mounted on the tube rack cart 5. A positioning structure A is mounted on the rotating platform 4, as shown... Figure 2 As shown, its special feature is that the positioning structure A includes a tube rack carriage positioning device 7 and a tube rack carriage fixing device 8. The tube rack carriage positioning device 7 includes two or more pairs of limiting blocks 701 set on the rotating table 4. The spacing between each pair of limiting blocks 701 matches the width of the square frame 501 of the tube rack carriage 5. The tube rack carriage fixing device 8 includes a base 801, a swing rod 803 that is laterally swingable on the vertical plate 802 of the base 801, a handle 804 that is vertically swingable on the base 801, and a pressure block 805 that swings the body of the handle 804. The swing rod 803 has a free swing end. A soft pressure block 806 is provided on the top. The hinge end of the swing arm 803 is fork-shaped. The side of the vertical plate 802 of the base 801 facing the tube rack 5 is inclined. The fork-shaped hinge end of the swing arm 803 is hinged to the upper part of the inclined surface of the vertical plate 802 of the base 801. The handle hinge end of the handle 804 is fork-shaped. After the fork-shaped handle hinge end crosses the hinge end of the swing arm 803, it is hinged to the lower part of the inclined surface of the vertical plate 802 of the base 801. One end of the pressure block 805 is hinged to the upper end of the fork of the fork-shaped handle hinge end of the handle 804, and the other end of the pressure block 805 is hinged to the body of the fork-shaped hinge end of the swing arm 803.

[0015] Preferably, a positioning post 702 is provided on the rotating table 4 at the position matching the positioning block 701. The positioning block 701 is sleeved on the positioning post 702. The pipe rack trolley 5 is placed on it first, and then the positioning block 701 is placed. This facilitates the placement and removal of the pipe rack trolley 5, and also facilitates the positioning of the pipe rack trolley 5.

[0016] like Figure 3As shown, in use, the furnace tube B is placed on the V-shaped roller group 6 on the tube rack trolley 5. The tube rack trolley 5 moves the furnace tube B between each pair of limit blocks 701 of the tube rack trolley position positioning device 7 on the rotating table 4 of the semi-automatic loading and unloading equipment. Then, the handle 804 is swung, which drives the swing rod 803 to swing, causing the soft pressing block 806 to press down on the square frame 501 of the tube rack trolley 5, pressing and fixing the tube rack trolley 5 on the rotating table 4 to prevent the tube rack trolley 5 from sliding relative to the rotating table 4. Then, the furnace tube B is loaded onto the rotating table 4 by the trolley 1 of the semi-automatic loading and unloading equipment. Tube B is transported to the inlet 9 of the chemical deposition furnace (CVD) or diffusion furnace C. The lifting mechanism 2 raises the forward and backward moving mechanism to raise tube B to the inlet 9, ensuring that tube B and inlet 9 are precisely on the same horizontal line. The tube rack 5 is then finely adjusted left and right, up and down, and angled by the adjusting mechanism 3, so that tube B is directly facing inlet 9 and the axis of tube B coincides with the axis of inlet 9. Then, it can be manually pushed precisely into the furnace along the axis using the V-shaped roller group 6.

Claims

1. An improved structure for a semi-automatic loading and unloading device for furnace tubes and furnace body, comprising a cart, a lifting power mechanism mounted on the cart, an adjustment mechanism driven by the lifting power mechanism capable of fine-tuning left and right movement, fine-tuning up and down movement, and fine-tuning rotation of angle, a rotating table driven by the adjustment mechanism, a tube rack cart mounted on the rotating table, a V-shaped roller group for slidingly conveying furnace tubes and furnace body being provided on the tube rack cart, and a positioning structure being provided on the rotating table, characterized in that... The positioning structure includes a tube rack trolley positioning device and a tube rack trolley fixing device. The tube rack trolley positioning device includes two or more pairs of limiting blocks set on the rotating platform. The spacing between each pair of limiting blocks matches the width of the tube rack trolley's square frame. The tube rack trolley fixing device includes a base, a swing arm that is laterally swayed on the base's vertical plate, a handle that is vertically swayed on the base, and a pressure block that is swayed on the body of the handle. A soft pressure block is provided on the free end of the swing arm. The hinge end of the swing arm is fork-shaped. The side of the base's vertical plate facing the tube rack trolley is inclined. The fork-shaped hinge end of the swing arm is hinged to the upper part of the inclined surface of the base's vertical plate. The handle hinge end of the handle is fork-shaped. After the fork-shaped handle hinge end passes over the swing arm hinge end, it is hinged to the lower part of the inclined surface of the base's vertical plate. One end of the pressure block is hinged to the upper end of the fork of the fork-shaped handle hinge end, and the other end of the pressure block is hinged to the body of the fork-shaped hinge end of the swing arm.

2. The improvement in a furnace tube, furnace body semi-automatic handling apparatus according to claim 1, characterized in that, A positioning post is provided at the position matching the limit block on the rotating platform, and the limit block is sleeved on the positioning post.

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