Anti-corrosion gantry graphite boat diversion box

Abstract

The utility model provides an anti-corrosion gantry graphite boat diversion box which comprises a body in the shape of a circular tube, and an axial groove extending in the axial direction and an annular radial groove perpendicular to the axial groove are formed in the outer wall of the body. The section of the inner hole of the body is wedge-shaped. The beneficial effects of the arrangement are that: 1, residual liquid on the outer wall of the body can flow into the radial groove and the axial groove at the first time, so that the liquid is discharged outwards along the radial groove and the axial groove; liquid remaining on the inner wall of the body can be discharged outwards in time under the flow guide effect of the wedge-shaped structure of the inner hole of the body, so that the technical problem that strong acid remains on the body and is not easy to discharge during cleaning is solved, and the body is prevented from being corroded.

Description

Technical Field

[0001] This utility model relates to the field of graphite boat technology, specifically a corrosion-resistant gantry graphite boat flow guide box. Background Technology

[0002] The graphite boat in the gantry graphite boat is raised and lowered using a gantry lifting device. During coating, the uncoated silicon wafer is placed on the locking points of the graphite boat, and then the gantry lifting device places the graphite boat into the cavity of the PECVD vacuum coating equipment for electrostatic deposition (ESD). After coating is completed, the gantry lifting device removes the graphite boat from the cavity.

[0003] The distance between graphite boats is controlled by a flow guide box. The conventional flow guide box is in the shape of a round tube. When the gantry lifting device removes the graphite boat, strong acid is easy to remain on the flow guide box, which is not easy to drain and is easy to corrode the flow guide box. Utility Model Content

[0004] To address the technical problems in the background art, this utility model discloses a corrosion-resistant gantry graphite boat guide box.

[0005] This utility model provides a corrosion-resistant gantry graphite boat guide box, including a cylindrical body, an axially extending groove on the outer wall of the body, and a radial groove that is perpendicular to the axial groove and forms an annular shape.

[0006] The radial cross-section of the internal bore of the body is wedge-shaped;

[0007] Located in the radial projection of the body, the bottom of the axial groove is an outwardly arched arc.

[0008] The beneficial effects of the above design are: 1. Liquid remaining on the outer wall of the main body will flow into the radial and axial grooves immediately and then be discharged outward along the radial and axial grooves; 2. Liquid remaining on the inner wall of the main body can also be discharged outward in a timely manner under the guiding effect of the wedge-shaped structure of the inner hole of the main body, thus solving the technical problem of strong acid residue on the main body during cleaning and being difficult to discharge, and avoiding corrosion of the main body; 3. The arc-shaped structure of the axial groove allows the liquid in the axial groove to be discharged outward under the guiding effect of the axial groove, and will not remain at the bottom of the axial groove.

[0009] Since some liquid may still remain at the bottom of the axial groove, a further improvement is made: a recessed limiting groove is provided on the groove wall of the slot; a limiting block that engages with the limiting groove is provided on the outer side wall of the boss.

[0010] Because the two ends of the main body abut against graphite boats, the liquid is easily blocked by the graphite boats, making it difficult to drain the liquid in a timely manner. Therefore, a further improvement is made: the main body is composed of a left cylinder and a right cylinder joined together; one end of the inner wall of the left cylinder has a recessed groove; one end of the right cylinder has a protruding boss that engages with the groove. This design allows the liquid to drain outwards from the connection between the left and right cylinders; the interlocking structure of the left and right cylinders also facilitates assembly and disassembly.

[0011] When the left and right cylinders are engaged, their positions are unstable and they are prone to relative rotation. Based on this, a further improvement is made: a recessed limiting groove is provided on the groove wall of the slot; a limiting block for engaging the limiting groove is provided on the outer side wall of the boss.

[0012] To improve the drainage flow rate at the connection between the left and right cylinders, a further design is implemented: the outer walls of the connection surfaces of the left and right cylinders are respectively provided with arc-shaped left and right guide channels; the left and right guide channels are joined to form a semi-circular arc channel with an outward opening. The inner end of the axial channel on the left cylinder is connected to the left guide channel; the inner end of the axial channel on the right cylinder is connected to the right guide channel.

[0013] To improve the flow guiding capacity of the guide groove, the following design is proposed: the distance from the bottom of the axial groove on the left cylinder to the outer wall of the left cylinder increases from the center to both sides; the distance from the bottom of the axial groove on the right cylinder to the outer wall of the right cylinder increases from the center to both sides.

[0014] To simplify the structure of the left and right cylinders and facilitate machining, the following design is proposed: the radial cross-section of the inner hole of the left cylinder is wedge-shaped, and its constricted end connects to the right cylinder; the radial cross-section of the inner hole of the right cylinder is also wedge-shaped, and its constricted end connects to the left cylinder.

[0015] The beneficial effects of this utility model are: 1. The liquid remaining on the outer wall of the body will flow into the radial groove and axial groove in the first time, and then be discharged outward along the radial groove and axial groove; 2. The liquid remaining on the inner wall of the body can also be discharged outward in time under the guiding effect of the wedge structure of the inner hole of the body, thereby solving the technical problem that strong acid remains on the body during cleaning and is not easy to be discharged, and avoiding corrosion of the body. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0017] Figure 1 This is a schematic diagram of the structure of this utility model;

[0018] Figure 2 This is the right view of this utility model;

[0019] Figure 3 yes Figure 2 Sectional view of AA;

[0020] Figure 4 This is an exploded view of this utility model;

[0021] Figure 5 This is a schematic diagram of the installation structure of this utility model in a graphite boat;

[0022] Figure 6 yes Figure 5 Enlarged view of point B in the middle;

[0023] In the diagram: 1. Body; 2. Axial groove; 3. Radial groove; 4. Left cylinder; 5. Right cylinder; 6. Graphite boat; 7. Connecting rod; 8. Nut; 41. Slot; 42. Limiting groove; 43. Left guide groove; 51. Boss; 52. Limiting block; 53. Right guide groove. Detailed Implementation

[0024] The present invention will be further described in detail below with reference to the embodiments:

[0025] This utility model is not limited to the following specific embodiments. Those skilled in the art can implement this utility model using various other specific embodiments based on the disclosed content. Any modifications or alterations to the design structure and concept of this utility model also fall within the protection scope of this utility model. It should be noted that, unless otherwise specified, the embodiments and features described in this utility model can be combined with each other.

[0026] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0027] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0028] like Figure 5 and Figure 6 As shown, this utility model discloses a corrosion-resistant gantry graphite boat guide box, which is installed between two adjacent graphite boat pieces 6 of the graphite boat. A connecting rod 7 passes through the graphite boat piece 6 and the guide box in sequence. Both ends of the connecting rod 7 are provided with external threads. The outermost graphite boat piece 6 is provided with a nut 8 that is threadedly connected to the graphite boat piece 6. The graphite boat piece 6 is connected and fixed by locking it with the nut 8.

[0029] like Figure 1-4 As shown, this utility model includes a cylindrical body 1. The body 1 is constructed by splicing a left cylindrical body 4 and a right cylindrical body 5 together via a snap-fit ​​mechanism for easy assembly and disassembly. The specific snap-fit ​​structure is as follows: Figure 3 In the baseline view, a recessed annular groove 41 is provided at the right end of the inner wall of the left cylinder 4; a raised circular annular boss 51 is provided at the left end of the right cylinder 5, which engages with the groove 41. The groove 41 has four evenly distributed, recessed limiting grooves 42 on its wall, extending axially along the left cylinder 4; a limiting block 52 engaging with the limiting grooves 42 is provided on the outer wall of the boss 51. This prevents relative rotation between the left and right cylinders 4 and 5 when they are engaged, thus avoiding positional instability. The arrangement of the left and right cylinders 4 and 5 allows liquid to drain outwards from the connection point, improving the drainage capacity of the main body 1.

[0030] Both the left cylinder 4 and the right cylinder 5 have axially extending axial grooves 2 and annular radial grooves 3 perpendicular to the axial grooves 2 on their outer walls. Liquid remaining on the outer wall of the main body 1 will immediately flow into the radial grooves 3 and axial grooves 2, and then be discharged outwards along them. The axial grooves 2 are arc-shaped, with the height of the bottom decreasing from the center to both sides. This prevents liquid from easily remaining in the axial grooves 2.

[0031] The outer walls of the connecting surfaces of the left cylinder 4 and the right cylinder 5 are respectively provided with arc-shaped left guide groove 43 and right guide groove 53; the left guide groove 43 and right guide groove 53 are joined to form a semi-circular arc groove with an outward opening. The inner end of the axial groove 2 on the left cylinder 4 is connected to the left guide groove 43; the inner end of the axial groove 2 on the right cylinder 5 is connected to the right guide groove 53. This increases the flow area at the connection between the left cylinder 4 and the right cylinder 5, thereby increasing the discharge flow rate.

[0032] The inner cross-section of the left cylinder 4 is wedge-shaped, and its constricted end connects to the right cylinder 5; the inner cross-section of the right cylinder 5 is also wedge-shaped, and its constricted end connects to the left cylinder 4. With this configuration, the liquid remaining on the inner wall of the main body 1 can also flow outward under the action of the wedge-shaped inner hole.

[0033] Compared with the prior art, under the action of the above structure, the liquid in this embodiment can be separated from the body 1 in time, thereby solving the technical problem that strong acid residue remains on the body 1 during cleaning and is not easy to be discharged, thus avoiding corrosion of the body 1.

[0034] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A corrosion resistant gantry graphite boat flow guide box, characterized in that: The body (1) is in the shape of a circular tube. The outer wall of the body (1) is provided with an axially extending axial groove (2) and a radial groove (3) that is perpendicular to the axial groove (2) and is in the shape of an annulus. The radial cross-section of the inner hole of the body (1) is wedge-shaped; Located in the radial projection of the body (1), the bottom of the axial groove (2) is an outwardly arched arc.

2. The corrosion resistant gantry graphite boat flow guide box of claim 1, wherein: The main body (1) is composed of a left cylindrical body (4) and a right cylindrical body (5) joined together; A recessed slot (41) is provided at one end of the inner wall of the left cylinder (4); One end of the right cylinder (5) is provided with a protruding boss (51) that engages with the slot (41).

3. The corrosion resistant gantry graphite boat flow guide box of claim 2, wherein: The groove (41) has a recessed limiting groove (42) on its groove wall; The outer wall of the boss (51) is provided with a limiting block (52) with a snap-fit ​​limiting groove (42).

4. The corrosion resistant gantry graphite boat flow box of claim 3, wherein: The outer walls of the connecting surfaces of the left cylinder (4) and the right cylinder (5) are respectively provided with arc-shaped left guide groove (43) and right guide groove (53); The left guide groove (43) and the right guide groove (53) are joined together to form a semi-circular arc groove with the opening facing outward.

5. The corrosion resistant gantry graphite boat flow box of claim 4, wherein: The inner end of the axial groove (2) on the left cylinder (4) is connected to the left guide groove (43); the inner end of the axial groove (2) on the right cylinder (5) is connected to the right guide groove (53).

6. The corrosion resistant gantry graphite boat flow box of claim 5, wherein: The distance from the bottom of the axial groove (2) on the left cylinder (4) to the outer wall of the left cylinder (4) increases from the center to both sides; The distance from the bottom of the axial groove (2) on the right cylinder (5) to the outer wall of the right cylinder (5) increases from the center to both sides.

7. The corrosion resistant gantry graphite boat flow box of claim 6, wherein: The radial cross-section of the inner hole of the left cylinder (4) is wedge-shaped, and its constricted end is connected to the right cylinder (5); The radial cross section of the inner hole of the right cylinder (5) is also wedge-shaped, and its constricted end is connected to the left cylinder (4).

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