Multi-chamber pump and vacuum pump arrangement

Abstract

The utility model provides a multi-cavity pump and vacuum pump equipment. A tail end oil cavity, a first stator plate, a processing cavity, a second stator plate and a gear oil cavity are sequentially arranged in the multi-cavity pump along a rotating shaft; a first sealing device is arranged between the first stator plate and the rotating shaft; a second sealing device is arranged between the second stator plate and the rotating shaft; the first stator plate is provided with a first interface; a first gas path is further arranged in the multi-cavity pump; the first gas path is communicated with the first interface and the tail end oil cavity; the vacuum pump equipment comprises two multi-cavity pumps; one multi-cavity pump is a booster pump, and the other multi-cavity pump is a vacuum pump; the first connectors of the two multi-cavity pumps are both externally connected with a nitrogen pipeline. Nitrogen purging of the oil cavities in the booster pump and the vacuum pump can be achieved, the air tightness is improved, and the pressure difference between the oil cavities and the manufacturing process cavity is improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum equipment technology, specifically to a multi-chamber pump and a vacuum pump device. Background Technology

[0002] Vacuum pumps are frequently used in semiconductor processes and play a crucial role in several key stages, such as thin film deposition, etching, ion implantation, and photolithography. Dry vacuum pumps are particularly prominent in semiconductor manufacturing, providing a stable and reliable vacuum environment to ensure purity and product quality during production.

[0003] Dry vacuum pump equipment (especially medium and large-sized ones) mainly consists of a booster pump and a dry pump. Both booster pumps and dry pumps have an internal shaft with a tail-end oil chamber, a process chamber, and a gear oil chamber arranged sequentially. After the process chamber completes evacuation, the tail-end oil chamber maintains a stable pressure differential through a sealing structure, while the gear oil chamber ensures lubrication of the transmission system. Each chamber is physically isolated through oil passages and sealing designs to prevent cross-contamination, such as oil entering the process chamber or process gas intruding into the oil passages. The tail-end oil chamber, process chamber, and gear oil chamber respectively perform the functions of sealing balance, evacuation isolation, and lubrication management, working together to ensure the stable operation of the vacuum pump in the high-cleanliness environment of semiconductor manufacturing. However, in actual use, severe contamination of the tail-end oil chamber may occur, leading to frequent alarms and shutdowns. This not only reduces the vacuum pump's operating time and production efficiency but also necessitates frequent pump replacements, increasing production costs.

[0004] Therefore, how to avoid contamination of the oil chamber at the tail end of vacuum pump equipment is an urgent problem to be solved by those skilled in the art. Utility Model Content

[0005] In view of this, the present invention provides a multi-chamber pump and vacuum pump device, which aims to modify the nitrogen supply of the pump body, increase the nitrogen purging of the oil chamber in the pump to improve the airtightness of the shaft seal, improve the pressure difference between the oil chamber and the process chamber, reduce the entry of process materials into the oil chamber, and prevent process materials from clogging the bearing.

[0006] To achieve the above objectives, this utility model provides a multi-chamber pump, wherein the multi-chamber pump has a tail end oil chamber, a first stator plate, a process chamber, a second stator plate, and a gear oil chamber arranged sequentially along the rotating shaft; a first sealing device is provided between the first stator plate and the rotating shaft; a second sealing device is provided between the second stator plate and the rotating shaft; a first interface is provided on the first stator plate for connecting to an external nitrogen pipeline; the multi-chamber pump also has a first gas passage; the first gas passage connects the first interface and the tail end oil chamber.

[0007] Optionally, the first stator plate is provided with a filter mounting cavity communicating with the process cavity; the first air passage extends radially from the filter mounting cavity and passes sequentially through the static filter, the first stator plate, the first sealing device and the rotating shaft in the filter mounting cavity, then extends axially through the shaft cavity of the rotating shaft and the static filter in the tail end of the rotating shaft, and finally extends radially through the rotating shaft and communicates with the tail end oil cavity.

[0008] Optionally, the first sealing device includes a first shaft seal and a first shaft sleeve; the first shaft sleeve is radially located between the first stator plate and the rotating shaft; the first shaft seal is radially located between the first stator plate and the first shaft sleeve; a first bearing is provided between the first stator plate and the rotating shaft, and the first bearing is axially located on the side of the first sealing device away from the process cavity.

[0009] Optionally, the second stator plate is provided with a second interface for connecting to an external nitrogen pipeline; the multi-chamber pump is also provided with a second gas passage; the second gas passage connects the second interface and the gear oil chamber.

[0010] Optionally, the second air passage extends radially and passes sequentially through the second stator plate, the second sealing device, and the rotating shaft, then extends axially through the shaft cavity of the rotating shaft and the static filter in the front end of the rotating shaft, and finally extends radially through the rotating shaft to communicate with the gear oil cavity.

[0011] Optionally, the second sealing device includes a second shaft seal and a second shaft sleeve; the second shaft sleeve is radially located between the second stator plate and the rotating shaft; the second shaft seal is radially located between the second stator plate and the second shaft sleeve; a second bearing is provided between the second stator plate and the rotating shaft, and the second bearing is axially located on the side of the second sealing device away from the process cavity.

[0012] Optionally, the multi-chamber pump is a booster pump or a vacuum pump.

[0013] To achieve the above objectives, this utility model also provides a vacuum pump device, which includes any one of the multi-chamber pumps described above. There are two multi-chamber pumps, one of which is a booster pump and the other is a vacuum pump. The first interface of both multi-chamber pumps is externally connected to a nitrogen pipeline.

[0014] Optionally, the vacuum pump device further includes a nitrogen module, and all the nitrogen pipelines are connected to the nitrogen module.

[0015] Optionally, the second stator plate is provided with a second interface, and the multi-chamber pump is also provided with a second air passage, which connects the second interface and the gear oil chamber;

[0016] The vacuum pump device also includes a first tee port and a second tee port; the nitrogen module leads out two nitrogen pipelines through the first tee port, which are respectively connected to the first port and the second port on the booster pump; the nitrogen module also leads out two other nitrogen pipelines through the second tee port, which are respectively connected to the first port and the second port on the vacuum pump.

[0017] As described above, this utility model provides a multi-chamber pump. By setting a first interface on the first stator plate of the multi-chamber pump, nitrogen gas can be introduced into the first gas path inside the multi-chamber pump. The first gas path connects to the tail end oil chamber, thus introducing nitrogen gas into the tail end oil chamber. This not only improves the pressure difference between the tail end oil chamber and the process chamber, reducing the amount of process material entering the tail end oil chamber, but also solves the problem of process material clogging the bearing. At the same time, nitrogen gas easily forms an annular air curtain at the shaft seal, increasing the airtightness of the shaft seal. Furthermore, when applied to vacuum pump equipment, the vacuum pump equipment uses two such multi-chamber pumps, one of which is a booster pump and the other is a vacuum pump. After the modification, the service life of the vacuum pump and the booster pump is increased, the operating time of the vacuum pump equipment is extended, and the production cost is greatly reduced. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the internal structure of the multi-chamber pump in a preferred embodiment of the present invention;

[0019] Figure 2 for Figure 1 A schematic diagram of the partial structure of a multi-chamber pump corresponding to the tail end oil chamber and the process chamber;

[0020] Figure 3 for Figure 1 A schematic diagram of the partial structure of a multi-chamber pump corresponding to the process chamber and gear oil chamber;

[0021] Figure 4 This is a structural block diagram of a vacuum pump device supplying nitrogen in a preferred embodiment of the present invention.

[0022] [The annotations in the attached figures are explained below]:

[0023] 10-Shaft, 100-Multi-chamber pump, 11-Tail end oil chamber, 12-First stator plate, 13-Process chamber, 14-Second stator plate, 15-Gear oil chamber, 16-First sealing device, 161-First shaft seal, 162-Second shaft seal ring, 17-Second sealing device, 171-Second shaft seal, 172-Second shaft seal ring, 18-Static filter, 19-First bearing, 20-First interface, 21-Nitrogen pipeline, 22-Filter mounting chamber, 23-Second interface, 24-Second bearing, 30-Nitrogen module, 41-First tee interface, 42-Second tee interface. Detailed Implementation

[0024] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0025] The terms “center,” “longitudinal,” “lateral,” “length,” “width,” “thickness,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the mechanism or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0026] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "fixation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or a connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances. The terms "first," "second," etc., used in this specification are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature.

[0027] The present invention will now be described in detail with reference to the accompanying drawings and preferred embodiments. Unless otherwise specified, the following embodiments and features can complement or combine with each other.

[0028] like Figures 1 to 3 As shown, this embodiment of the present invention provides a multi-chamber pump 100, which is a booster pump or a vacuum pump. Optionally, the multi-chamber pump 100 is a Roots pump. The multi-chamber pump 100 has, along the rotating shaft 10, a tail end oil chamber 11, a first stator plate 12, a process chamber 13, a second stator plate 14, and a gear oil chamber 15 arranged sequentially. Since the first stator plate 12 is located in the high-pressure region, it is a high-vacuum stator plate. Since the second stator plate 14 is located in the low-pressure region, it is a low-vacuum stator plate.

[0029] A first sealing device 16 is provided between the first stator plate 12 and the rotating shaft 10, and a second sealing device 17 is provided between the second stator plate 14 and the rotating shaft 10. The first sealing device 16 is used to seal between the tail end oil chamber 11 and the process chamber 13. The second sealing device 17 is used to seal between the gear oil chamber 15 and the process chamber 13.

[0030] Generally, a static filter 18 is installed inside the first stator plate 12. The static filter 18 filters the process gases generated during the semiconductor process using internal filter media, such as filter screens or filter elements, to purify the process gases. In addition, filtering the process gases with the static filter 18 prevents process materials from entering the tail end oil chamber 11. Furthermore, the filtered process gases entering the tail end oil chamber 11 balance the pressure difference between the tail end oil chamber 11 and the process chamber 13. Balancing the pressure difference between the tail end oil chamber 11 and the process chamber 13 also reduces the risk of the first bearing 19 being blocked by process materials.

[0031] Specifically, the first bearing 19 is radially located between the first stator plate 12 and the rotating shaft 10, and axially located on the side of the first sealing device 16 away from the process chamber 13, providing support for the rotating shaft 10. However, in actual use, the static filter 18 is easily clogged, especially when the process gas volume is large.

[0032] If the static filter 18 becomes clogged, the pressure difference between the tail-end oil chamber 11 and the process chamber 13 will not be balanced. The processed material will then enter the first bearing 19 due to the pressure difference, clogging it, increasing ball wear, and friction. This can cause the multi-chamber pump 100 to malfunction, triggering alarms and other problems. In actual operation, cleaning the static filter 18 cannot completely solve these problems, and cleaning requires frequent disassembly and reassembly of the static filter 18, increasing downtime and reducing production efficiency.

[0033] To this end, the multi-chamber pump 100 provided by this utility model has a first interface 20 on the first stator plate 12, and a first air passage is also provided inside the multi-chamber pump 100. The first air passage directly connects the first interface 20 and the tail end oil chamber 11. Then, a nitrogen pipeline 21 is connected to the first interface 20, and nitrogen can be delivered to the first air passage through the nitrogen pipeline 21. This not only allows for nitrogen purging at the first sealing device 16, improving the airtightness of the first sealing device 16, but also improves the pressure difference between the tail end oil chamber 11 and the process chamber 13, reducing the entry of process material into the tail end oil chamber 11, and reducing the risk of process material clogging the first bearing 19, thereby reducing the wear of the first bearing 19, reducing friction, and ensuring the normal operation of the multi-chamber pump 100.

[0034] This invention does not impose any special restrictions on the path of the first gas path, as long as it connects the first interface 20 and the tail oil chamber 11. For example, optionally, the first gas path can be an existing process gas channel within the multi-chamber pump 100.

[0035] In this embodiment, the first stator plate 12 is provided with a filter mounting cavity 22, in which a static filter 18 is placed. The filter mounting cavity 22 is also connected to the process cavity 13. Furthermore, a static filter 18 may also be provided inside the tail end of the rotating shaft 10. Thus, in one embodiment, the first air passage extends radially from the filter mounting cavity 22 and sequentially passes through the static filter 18, the first stator plate 12, the first sealing device 16, and the rotating shaft 10 within the filter mounting cavity 22. Then, it extends axially through the shaft cavity of the rotating shaft 10 and the static filter 18 inside the tail end of the rotating shaft 10, and finally extends radially through the rotating shaft 10, communicating with the tail end oil cavity 11.

[0036] It is easy to understand that the first stator plate 12, the first sealing device 16 and the rotating shaft 10 are all provided with air holes. These air holes are used as part of the first air passage. The rotating shaft 10 is provided with air holes at the positions corresponding to the first sealing device 16 and the tail end oil cavity 11. The air holes on the rotating shaft 10 are opened on the side of the rotating shaft 10 and communicate with the shaft cavity.

[0037] Preferably, the rotating shaft 10 has a plurality of circumferentially distributed air holes corresponding to the position of the first sealing device 16, and the plurality of air holes are preferably symmetrically distributed. Optionally, the rotating shaft 10 has two symmetrically distributed air holes corresponding to the position of the first sealing device 16.

[0038] Preferably, the rotating shaft 10 has a plurality of circumferentially distributed vents corresponding to the position of the tail end oil cavity 11, and these vents are preferably symmetrically distributed. Optionally, the rotating shaft 10 has two symmetrically distributed vents corresponding to the position of the tail end oil cavity 11.

[0039] Therefore, the air holes in the first air path can be distributed in a ring shape, forming a ring-shaped air curtain at the first sealing device 16, thereby increasing air tightness.

[0040] In this embodiment, the first sealing device 16 may include a first shaft seal 161, which is radially located between the rotating shaft 10 and the first stator plate 12. The first shaft seal 161 is mainly made of a soft material, such as silicone or rubber. Generally, a first bushing (not shown) may be provided between the first shaft seal 161 and the rotating shaft 10, with the first bushing radially located between the first stator plate 12 and the rotating shaft 10, and the first shaft seal 161 radially located between the first stator plate 12 and the first bushing. Therefore, both the first shaft seal 161 and the first bushing are provided with air holes.

[0041] refer to Figure 2 Nitrogen gas introduced through the first interface 20 passes sequentially through the static filter 18 in the first stator plate 12, the air holes on the first stator plate 12, and the air holes on the first shaft seal 161, reaching the space between the first shaft seal 161 and the rotating shaft 10 to form an annular air curtain (see arrow in the figure), thereby improving the airtightness at the first shaft seal 161. The nitrogen gas continues to pass through the air holes on the first bushing and the corresponding air holes on the rotating shaft 10, then enters the shaft cavity of the rotating shaft 10, and along the shaft cavity into the static filter 18 at the tail end. After filtration, it enters the tail end oil cavity 11 through the air holes at the tail end of the rotating shaft 10, ultimately achieving the function of balancing the pressure difference. The term "annular air curtain" refers to the nitrogen gas arranged 360° around the circumference of the rotating shaft 10.

[0042] Multiple pores on the first shaft seal 161 may be evenly distributed circumferentially, such as two, three, four or more, preferably four. Similarly, multiple pores on the first stator plate 12 and the first bushing are also evenly distributed circumferentially. The pores on the first stator plate 12, the first shaft seal 161, the first bushing, and the rotating shaft 10 may be aligned or staggered, and their numbers may be the same or different.

[0043] refer to Figure 1 and Figure 2 In one embodiment, the first sealing device 16 further includes a first shaft sealing ring 162; the first shaft sealing ring 162 is radially located between the rotating shaft 10 and the first stator plate 12, and axially located on one side of the first shaft seal 161 and the first bushing. The first shaft sealing ring 162 is made of various common hard iron materials. The first shaft sealing ring 162 is used for both sealing and positioning. A gap exists between the first shaft sealing ring 162 and the rotating shaft 10. Thus, the tail end oil chamber 11 and the process chamber 13 are sealed by the first shaft seal 161 and the first shaft sealing ring 162, and the rotating shaft 10 is positioned and supported by the first bushing and the first shaft sealing ring 162.

[0044] The first shaft seal ring 162 is located on the side of the first shaft seal 161 away from the first bearing 19, and / or the first shaft seal ring 162 is located on the side of the first shaft seal 161 close to the first bearing 19.

[0045] Figure 1 and Figure 3 As shown, preferably, the multi-chamber pump 100 provided by this utility model has a second interface 23 on the second stator plate 14, and the multi-chamber pump 100 also has a second air passage, which connects the second interface 23 and the gear oil chamber 15.

[0046] In addition, by connecting the second interface 23 to the nitrogen pipeline 21, nitrogen can be supplied to the second gas path through the nitrogen pipeline 21. Nitrogen purging can be performed at the second sealing device 17 to improve the airtightness of the second sealing device 17. It can also improve the pressure difference between the gear oil chamber 15 and the process chamber 13, prevent oil leakage into the process chamber 13, reduce the entry of process materials into the gear oil chamber 15, and reduce the risk of process materials clogging the second bearing 24.

[0047] Similarly, this invention does not impose specific restrictions on the path of the second air passage, as long as it can connect the second interface 23 and the gear oil chamber 15. For example, optionally, the second air passage is a previously reserved process gas channel.

[0048] In this embodiment, the second air passage extends radially and passes through the second stator plate 14, the second sealing device 17 and the rotating shaft 10 in sequence, then extends axially through the shaft cavity of the rotating shaft 10 and the static filter 18 in the front end of the rotating shaft 10, and finally extends radially through the rotating shaft 10 and communicates with the gear oil cavity 15.

[0049] More specifically, the second stator plate 14, the second sealing device 17, and the rotating shaft 10 are all provided with air holes as part of the second air passage. The rotating shaft 10 is provided with air holes at the positions corresponding to the second sealing device 17 and the gear oil chamber 15.

[0050] Optionally, a one-way valve (not shown) is provided inside the front end of the rotating shaft 10. The one-way valve is located in the second air passage and is used to control the opening and closing of the second air passage.

[0051] Preferably, the rotating shaft 10 has a plurality of circumferentially distributed air holes corresponding to the position of the second sealing device 17, and the plurality of air holes are preferably symmetrically distributed. Optionally, the rotating shaft 10 has two symmetrically distributed air holes corresponding to the position of the second sealing device 17.

[0052] Preferably, the rotating shaft 10 has a plurality of circumferentially distributed air holes corresponding to the position of the gear oil cavity 15, and these air holes are preferably symmetrically distributed. Optionally, the rotating shaft 10 has two symmetrically distributed air holes corresponding to the position of the gear oil cavity 15.

[0053] Therefore, the air holes in the second air path can be distributed in a ring shape, forming an annular air curtain at the second sealing device 17, thereby increasing airtightness.

[0054] In this embodiment, the second sealing device 17 may include a second shaft seal 171, which is radially located between the rotating shaft 10 and the second stator plate 14. The second shaft seal 171 is mainly made of a soft material, such as silicone or rubber. Optionally, a second bushing (not shown) is installed between the second shaft seal 171 and the rotating shaft 10, with the second bushing radially located between the second stator plate 14 and the rotating shaft 10, and the second shaft seal 171 radially located between the second stator plate 14 and the second bushing. For this purpose, both the second shaft seal 171 and the second bushing are provided with air holes.

[0055] refer to Figure 3 Nitrogen gas introduced through the second interface 23 passes sequentially through the second stator plate 14 and the second shaft seal 171, reaching the space between the second shaft seal 171 and the rotating shaft 10 to form an annular air curtain (see arrow in the figure), improving the airtightness of the second shaft seal 171. Nitrogen gas continues to pass through the air holes on the second shaft sleeve and the air holes on the rotating shaft 10 corresponding to the positions of the second shaft sleeve, enters the shaft cavity, and then flows along the shaft cavity towards the front end, passing through the one-way valve, the front static filter 18, and the air holes, before entering the gear oil cavity 15.

[0056] The second shaft seal 171 may have multiple pores evenly distributed circumferentially, such as two, three, four or more, preferably four. Similarly, the second stator plate 14 and the second bushing also have multiple pores evenly distributed circumferentially. The pores on the second stator plate 14, the second shaft seal 171, the second bushing, and the rotating shaft 10 may be aligned or staggered, and their numbers may be the same or different; this is not limited.

[0057] refer to Figure 1 and Figure 3 In one embodiment, the second sealing device 17 further includes a second shaft sealing ring 172; the second shaft sealing ring 172 is radially located between the second stator plate 14 and the rotating shaft 10, and axially located on one side of the second shaft seal 171 and the second shaft sleeve; and a second bearing 24 is provided between the second stator plate 14 and the rotating shaft 10, the second bearing 24 being axially located on the side of the second sealing device 17 away from the process cavity 13. The function of the second shaft sealing ring 172 is similar to that of the first shaft sealing ring 162, and will not be described again.

[0058] There is a gap between the second shaft seal ring 172 and the rotating shaft 10. The second shaft seal ring 172 is located on the side of the second shaft seal 171 away from the second bearing 24, and / or, the second shaft seal ring 172 is located on the side of the second shaft seal 171 close to the second bearing 24.

[0059] Furthermore, this utility model embodiment also provides a vacuum pump device, which includes two multi-chamber pumps 100, one multi-chamber pump 100 being a booster pump and the other multi-chamber pump 100 being a vacuum pump, and the first interface 20 of both multi-chamber pumps 100 being externally connected to a nitrogen pipeline 21.

[0060] like Figure 4 As shown, in one embodiment, all the nitrogen lines 21 are connected to the nitrogen module 30. The nitrogen module 30 is an existing device that integrates many nitrogen lines and is a modular component. Thus, during modification, only the nitrogen lines 21 need to be connected to the existing nitrogen module 30 to achieve the function of nitrogen purging of the tail end oil chamber 11 and the gear oil chamber 15.

[0061] It should be noted that the nitrogen module 30 is located outside the multi-chamber pump 100, and can be optionally installed on the multi-chamber pump 100. The nitrogen module 30 is connected to a gas source, through which nitrogen is supplied centrally. In this embodiment, the nitrogen module 30 is a module component integrated into an existing vacuum pump device.

[0062] Preferably, the vacuum pump device further includes two T-junction interfaces, specifically a first T-junction interface 41 and a second T-junction interface 42; the nitrogen module 30 leads out two nitrogen pipelines 21 through the first T-junction interface 41, which are respectively connected to the first interface 20 and the second interface 23 on the booster pump; the nitrogen module 30 also leads out two more nitrogen pipelines 21 through the second T-junction interface 42, which are respectively connected to the first interface 20 and the second interface 23 on the vacuum pump. In this way, with a simple modification to the nitrogen module 30, it can be adapted to various semiconductor interference vacuum pump products and various models of nitrogen modules. The modified pump body nitrogen pipeline includes two T-junction pipelines, which are extensions of the original pipelines.

[0063] In practical use, adjusting the flow rate of the nitrogen module 30 allows nitrogen to be supplied to the vacuum pump and booster pump simultaneously while the vacuum pump is drawing a vacuum. This nitrogen is used to purge the tail-end oil chamber 11 and, further, the gear oil chamber 15, effectively improving the problem of oil chamber contamination. In a specific application scenario, the flow rate of the nitrogen module 30 is increased from 96 SLM to 106 SLM, but this is not the only practical application.

[0064] Furthermore, this application does not limit the model of the vacuum pump equipment and the model of the nitrogen module 30. For example, optionally, the model of the vacuum pump is IXH3030TX and the model of the nitrogen module 30 is MM96.

[0065] In summary, this invention, by providing a first interface 20 on the first stator plate 12 of the multi-chamber pump 100, allows nitrogen to be introduced into the first gas path within the multi-chamber pump 100. This first gas path connects to the tail-end oil chamber 11, thus introducing nitrogen into the tail-end oil chamber 11. This configuration not only improves the pressure difference between the tail-end oil chamber 11 and the process chamber 13, reducing the amount of workpiece entering the tail-end oil chamber 11, but also reduces the risk of workpiece clogging the first bearing 19, thereby reducing wear and friction on the first bearing 19 and ensuring the normal operation of the multi-chamber pump 100. Furthermore, the nitrogen also forms an annular air curtain at the first shaft seal 161, increasing the airtightness of the first shaft seal 161. Moreover, when applied to vacuum pump equipment, it increases the operating time of the vacuum pump equipment, improves production efficiency, and reduces production costs.

[0066] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the present utility model.

Claims

1. A multiple cavity pump characterized by, The multi-chamber pump has a tail end oil chamber, a first stator plate, a process chamber, a second stator plate, and a gear oil chamber arranged sequentially along the rotating shaft; a first sealing device is provided between the first stator plate and the rotating shaft; a second sealing device is provided between the second stator plate and the rotating shaft; a first interface is provided on the first stator plate for connecting to an external nitrogen pipeline; the multi-chamber pump also has a first gas passage; the first gas passage connects the first interface and the tail end oil chamber.

2. The multiple cavity pump of claim 1 wherein, The first stator plate has a filter mounting cavity that communicates with the process cavity; the first air passage extends radially from the filter mounting cavity and passes sequentially through the static filter, the first stator plate, the first sealing device and the rotating shaft in the filter mounting cavity, then extends axially through the shaft cavity of the rotating shaft and the static filter in the tail end of the rotating shaft, and finally extends radially through the rotating shaft and communicates with the tail end oil cavity.

3. The multiple cavity pump of claim 2 wherein, The first sealing device includes a first shaft seal and a first shaft sleeve; the first shaft sleeve is radially located between the first stator plate and the rotating shaft; the first shaft seal is radially located between the first stator plate and the first shaft sleeve; a first bearing is provided between the first stator plate and the rotating shaft, and the first bearing is axially located on the side of the first sealing device away from the process cavity.

4. The multiple cavity pump of claim 1 wherein, The second stator plate is provided with a second interface for connecting to an external nitrogen pipeline; the multi-chamber pump is also provided with a second gas passage; the second gas passage connects the second interface and the gear oil chamber.

5. The multiple cavity pump of claim 4 wherein, The second air passage extends radially and passes sequentially through the second stator plate, the second sealing device and the rotating shaft, then extends axially through the shaft cavity of the rotating shaft and the static filter in the front end of the rotating shaft, and finally extends radially through the rotating shaft and communicates with the gear oil cavity.

6. The multiple cavity pump of claim 5 wherein, The second sealing device includes a second shaft seal and a second shaft sleeve; the second shaft sleeve is radially located between the second stator plate and the rotating shaft; the second shaft seal is radially located between the second stator plate and the second shaft sleeve; a second bearing is provided between the second stator plate and the rotating shaft, and the second bearing is axially located on the side of the second sealing device away from the process cavity.

7. A multiple cavity pump as claimed in any one of claims 1 to 6, wherein, The multi-chamber pump is a booster pump or a vacuum pump.

8. A vacuum pumping apparatus, characterized by, The pump includes a multi-chamber pump as described in any one of claims 1-7, wherein there are two multi-chamber pumps, one of which is a booster pump and the other is a vacuum pump, and the first interface of both multi-chamber pumps is externally connected to a nitrogen pipeline.

9. Vacuum pump apparatus according to claim 8, characterized in that The vacuum pump device also includes a nitrogen module, and all the nitrogen pipelines are connected to the nitrogen module.

10. Vacuum pump apparatus according to claim 9, characterized in that The second stator plate is provided with a second interface, and the multi-chamber pump is also provided with a second air passage, which connects the second interface and the gear oil chamber; The vacuum pump device also includes a first tee port and a second tee port; the nitrogen module leads out two nitrogen pipelines through the first tee port, which are respectively connected to the first port and the second port on the booster pump; the nitrogen module also leads out two other nitrogen pipelines through the second tee port, which are respectively connected to the first port and the second port on the vacuum pump.

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