Pipeline connecting piece and exhaust device of semiconductor equipment

By designing a cube structure with multi-plane connections and flexible interface pipe connectors, the problems of low space utilization, complex installation, and poor sealing of traditional cylindrical exhaust ducts have been solved, realizing an efficient and flexible exhaust system and improving the production efficiency and equipment performance of semiconductor equipment.

CN224150407UActive Publication Date: 2026-04-21ZHEJIANG ICSPROUT SEMICONDUCTOR CO LTD
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Patent Information

Application Number
CN202521160526.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-06-06
Publication Date
2026-04-21
Estimated Expiration
2035-06-06

AI Technical Summary

Technical Problem

Traditional cylindrical exhaust ducts suffer from low space utilization, complex installation, poor sealing, and low exhaust efficiency in semiconductor manufacturing, making it difficult to meet the needs of modern semiconductor production.

Method used

Design a pipe connector that adopts a cubic structure composed of multiple planes, with an internal cavity and a through-hole interface. The interface is sealed to the exhaust duct, supporting direct or indirect connection. Combined with a telescopic tube and an elastic ring, it achieves flexible combination and sealing.

Benefits of technology

It improves storage space utilization, simplifies the installation process, enhances sealing and ventilation efficiency, is highly adaptable, meets the diverse process layout requirements of semiconductor equipment, and reduces connection costs and equipment maintenance time.

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Abstract

The utility model provides a pipeline connecting piece and an exhaust device of semiconductor equipment, the pipeline connecting piece comprises a connecting piece body, the connecting piece body is formed by mutually connecting a plurality of planes, and the connecting piece body is internally provided with a cavity; the connector penetrates through the plane and is communicated with the cavity, and the connector is used for being connected with an exhaust pipeline in a sealed mode; by means of the design, the storage space can be greatly optimized, convergence and extension of multiple sets of pipelines can be completed through simple operation in the using process, the installation efficiency and the space utilization rate are improved, meanwhile, the good sealing performance and the good air exhaust effect are guaranteed, and therefore the requirement for air exhaust of the modern semiconductor technology is better met.
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