Pipeline connecting piece and exhaust device of semiconductor equipment

Abstract

The utility model provides a pipeline connecting piece and an exhaust device of semiconductor equipment, the pipeline connecting piece comprises a connecting piece body, the connecting piece body is formed by mutually connecting a plurality of planes, and the connecting piece body is internally provided with a cavity; the connector penetrates through the plane and is communicated with the cavity, and the connector is used for being connected with an exhaust pipeline in a sealed mode; by means of the design, the storage space can be greatly optimized, convergence and extension of multiple sets of pipelines can be completed through simple operation in the using process, the installation efficiency and the space utilization rate are improved, meanwhile, the good sealing performance and the good air exhaust effect are guaranteed, and therefore the requirement for air exhaust of the modern semiconductor technology is better met.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor process equipment technology, specifically to a pipe connector and an exhaust device for semiconductor equipment. Background Technology

[0002] With the continuous advancement of semiconductor manufacturing processes, the ventilation requirements in semiconductor production are becoming increasingly complex. Traditional semiconductor equipment process ventilation ducts typically employ a cylindrical design, which has several limitations in practical applications. First, cylindrical ducts occupy a significant amount of space during storage and transportation, leading to increased storage costs and low space utilization. Their fixed shape and connection methods make it difficult to flexibly change direction during actual installation, requiring multiple connectors to achieve complex duct layouts. This not only increases installation complexity and workload but may also lead to inadequate sealing at connections, affecting ventilation efficiency.

[0003] Traditional exhaust duct systems are proving inadequate for the diverse needs of modern semiconductor manufacturing. When multiple connection points are required, the use of cylindrical connectors further exacerbates space constraints and installation difficulties. Furthermore, the uneven airflow distribution within cylindrical ducts easily generates eddies and energy losses, reducing exhaust efficiency. These issues make it difficult for traditional exhaust duct systems to meet the combined requirements of space efficiency, ease of installation, and exhaust performance in modern semiconductor manufacturing.

[0004] To address these issues, there is an urgent need for a new type of exhaust duct connector that can optimize space utilization, improve installation efficiency, and has good sealing and adaptability. Utility Model Content

[0005] The present invention addresses the problem of providing a pipe connector and an exhaust device for semiconductor equipment. The connector body has an internal cavity, and each surface is provided with an interface for sealing connection with adjacent connectors or exhaust ducts. This design not only greatly optimizes storage space but also allows for the convergence and extension of multiple pipes through simple operation, improving installation efficiency and space utilization. Simultaneously, it ensures good sealing and exhaust performance, thus better meeting the exhaust requirements of modern semiconductor processes.

[0006] This utility model provides a pipe connector, comprising: a connector body, the connector body being formed by multiple planes connected to each other, the connector body having a cavity inside; and an interface penetrating the planes and communicating with the cavity, the interface being used for a sealed connection with an exhaust pipe.

[0007] Optionally, the interface is directly or indirectly connected to the exhaust duct. When the interface is directly connected to the exhaust duct, the exhaust duct is threadedly connected to the interface.

[0008] Optionally, when the interface is indirectly connected to the exhaust duct, it further includes an interface device located on the interface, the exhaust duct is connected to the interface device, and the interface device is retractably connected to the plane.

[0009] Optionally, the interface is directly connected to the exhaust duct, and one of the interfaces has an elastic ring on its surface, which protrudes from the surface of the plane for mutual connection between adjacent connector bodies.

[0010] Optionally, it also includes a telescopic tube, one end of which is connected to the interface, and the other end of which is connected to the interface device.

[0011] Optionally, the connector body is a cube structure.

[0012] Optionally, it may also include a sealing cap connected to the plane, the sealing cap having a protrusion on its surface facing the plane corresponding to the interface, the protrusion being used to achieve a sealed connection between the sealing cap and the interface.

[0013] Optionally, the sealing cap is detachably connected to the plane.

[0014] Optionally, the connector body is a plastic connector body.

[0015] Optionally, it also includes: a plurality of the planes facing the inner wall of the cavity are respectively provided with guide grooves, the guide grooves being curved or spiral.

[0016] Accordingly, the present invention also provides an exhaust device for a semiconductor device, including the aforementioned pipe connector.

[0017] Compared with the prior art, the technical solution of this utility model has the following advantages:

[0018] In the technical solution of the pipe connector of this utility model, the pipe connector includes: a connector body, which is composed of multiple planes connected to each other, and the connector body has a cavity inside; an interface that penetrates the planes and communicates with the cavity, the interface being used for a sealed connection with an exhaust duct; this design gives the pipe connector a regular geometric shape, which is convenient for standardized production and greatly optimizes the storage space of the pipe connector. At the same time, in use, it is only necessary to connect the exhaust duct to the interface to complete the convergence and extension of multiple sets of exhaust ducts, which is highly adaptable and has a wide range of applications.

[0019] Furthermore, the interface is directly or indirectly connected to the exhaust duct. When the interface is directly connected to the exhaust duct, the exhaust duct is threaded to the interface. The direct threaded connection provides a simple, robust, and well-sealed connection solution, eliminating the need for additional connectors, reducing connection costs and assembly complexity, and improving connection efficiency and reliability.

[0020] Furthermore, it also includes an interface device located on the interface, the exhaust duct being connected to the interface device, and the interface device being retractably connected to the plane; this increases the flexibility and adaptability of the duct connector. The interface device can extend or retract according to actual needs, providing a stable and reliable connection point when needed, while saving space when not in use, avoiding the risk of damage from exposed interfaces, and improving the practicality and versatility of the connector.

[0021] Furthermore, the interface devices of adjacent connector bodies are interconnected; this design allows multiple connectors to be flexibly combined to construct complex and varied exhaust duct systems, meeting the needs of different semiconductor equipment and process layouts, and enhancing the scalability and adaptability of the entire exhaust system.

[0022] Furthermore, it also includes a telescopic tube, one end of which is connected to the interface, and the other end of which is connected to the interface device. The application of the telescopic tube further improves the flexibility and adaptability of the pipe connector, can compensate for positional deviations during installation, absorb vibrations generated during equipment operation, extend the service life of pipe connectors and exhaust pipes, and provide greater convenience when the pipe layout needs to be adjusted. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the pipe connector in one embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of the pipe connector in another embodiment of the present invention;

[0025] Figure 3 This is a structural schematic diagram of the pipe connector in another embodiment of the present invention. Detailed Implementation

[0026] Currently, the overall design of existing pipe fittings is relatively fixed, resulting in a lot of unusable space during warehouse storage. The direction is difficult to change during machine installation and connection. When multiple connection ports are needed, connecting multiple cylindrical pipe fittings results in poor space utilization of the installation location.

[0027] Based on this, the present technical solution provides a pipe connector comprising: a connector body, the connector body being composed of multiple interconnected planes, the connector body having an internal cavity; and an interface penetrating the planes and communicating with the cavity, the interface being used for a sealed connection with an exhaust duct. This design gives the pipe connector a regular geometric shape, facilitating standardized production and greatly optimizing the storage space of the pipe connector. Furthermore, in use, only the exhaust duct needs to be connected to the interface to complete the merging and extension of multiple exhaust ducts, demonstrating strong adaptability and a wide range of applications.

[0028] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0029] First Embodiment

[0030] Please refer to Figure 1 A pipe connector 100 includes: a connector body 101, the connector body 101 being formed by multiple planes 101a interconnected, the connector body 101 having a cavity (not marked in the figure) inside; and an interface 102 penetrating the planes 101a and communicating with the cavity, the interface 102 being used for a sealed connection with an exhaust duct.

[0031] In this embodiment, this design gives the pipe connector 100 a regular geometric shape, which facilitates standardized production and greatly optimizes the storage space of the pipe connector 100. At the same time, when in use, it is only necessary to connect the exhaust pipe to the interface 102 to complete the convergence and extension of multiple sets of exhaust pipes. It is highly adaptable and has a wide range of applications.

[0032] In this embodiment, the interface 102 is directly connected to the exhaust duct, that is, the exhaust duct is threadedly connected to the interface 102.

[0033] In this embodiment, the threaded connection has the advantages of simple structure, strong connection and good sealing performance. It does not require additional connecting parts, which reduces the connection cost to a certain extent. It also simplifies the assembly process, improves the efficiency and reliability of the overall connection, and makes the connection operation more convenient and faster, and can better adapt to different on-site installation conditions and needs.

[0034] In some embodiments, the exhaust duct and the interface 102 may also be plugged in or snapped together, etc.

[0035] In this embodiment, the surface of the interface 102 is provided with an elastic ring 103, which protrudes from the surface of the plane 101a and is used for connection between adjacent connector bodies 101.

[0036] In this embodiment, only one of the surfaces of the interface 102 corresponding to the plane 101a has the elastic ring 103. After two adjacent connecting bodies are connected, the elastic ring 103 and the interface 102 form an interference fit.

[0037] In this embodiment, the interfaces 102 of adjacent connector bodies 101 are interconnected by elastic rings 103. This connection method further enhances the sealing performance between the pipe connectors 100. The elastic rings 103 form a reliable sealing barrier between the pipe connectors 100, effectively preventing gas leakage and ensuring the airtightness of the exhaust system. Simultaneously, the elastic rings 103 possess a certain elastic deformation capacity, adapting to minor dimensional differences and installation errors between the pipe connectors 100, improving the compatibility and reliability of the connection, and ensuring the stable operation of the entire exhaust duct system.

[0038] In this embodiment, the connector body 101 is a cube. On the one hand, the cube structure can achieve tight stacking during warehousing and transportation, greatly improving space utilization and reducing transportation and storage costs. On the other hand, during actual installation, the cube connector can be easily spliced ​​and combined to easily construct a regular, efficient and complex exhaust duct network, meeting the requirements of different semiconductor equipment and process layouts for the duct system.

[0039] In some embodiments, the connector body 101 may also be a cuboid, etc.

[0040] In this embodiment, the material of the connector body 101 is plastic.

[0041] In this embodiment, a sealing cap (not shown in the figure) connected to the plane 101a is also included. The sealing cap has a protrusion on the surface facing the plane 101a that corresponds to the interface 102. The protrusion is used to achieve a sealed connection between the sealing cap and the interface 102.

[0042] In this embodiment, the sealing cap and the plane 101a are detachably connected. This design gives the pipe connector 100 greater flexibility and maintainability. In actual use, the interface 102 can be opened or closed at any time as needed without destructive operations, making the adjustment of the interface 102 status more convenient and rapid. This effectively reduces equipment maintenance costs and downtime, and improves the overall operating efficiency of the equipment.

[0043] In this embodiment, the diameter of the protrusion is smaller than the diameter of the elastic ring 103, and is tangent to the inner diameter of the elastic ring 103.

[0044] In this embodiment, the sealing cap is detachably connected to the plane 101a, specifically through a threaded connection.

[0045] In some embodiments, the sealing cap may also be snapped onto the plane 101a.

[0046] In this embodiment, a plurality of flow guide grooves (not shown in the figure) are respectively provided on the inner wall of the cavity facing the plane 101a. The flow guide grooves are curved or spiral.

[0047] In this embodiment, curved or spiral guide grooves are provided on the inner wall of multiple planes 101a facing the cavity, which can effectively organize and guide the internal airflow. By optimizing the airflow path, the airflow flows smoothly in the cavity according to a predetermined trajectory, which can significantly reduce eddy phenomena and energy loss, effectively reduce wind resistance, thereby improving exhaust efficiency, ensuring that the exhaust system can operate stably and efficiently, and reducing energy consumption.

[0048] Accordingly, this utility model also provides an exhaust device for a semiconductor device that uses the aforementioned pipe connector 100.

[0049] In this embodiment, the pipe connector 100 effectively meets the stringent requirements of semiconductor equipment in terms of exhaust. It effectively guarantees excellent sealing performance, reliable connection performance, flexible layout adjustment capabilities, and high exhaust efficiency, which is of great significance for improving the production efficiency, operational stability, and product yield of semiconductor equipment, and powerfully promotes the improvement of semiconductor equipment performance.

[0050] Second Embodiment

[0051] Please refer to Figure 2 A pipe connector 200 includes: a connector body 201, the connector body 201 being formed by multiple planes 201a interconnected, the connector body 201 having a cavity (not marked in the figure) inside; and an interface 202 penetrating the planes 201a and communicating with the cavity, the interface 202 being used for a sealed connection with an exhaust pipe.

[0052] In this embodiment, the interface 202 is indirectly connected to the exhaust duct, and specifically includes an interface device 204 located on the interface 202. The exhaust duct is connected to the interface device 204, and the interface device 204 is retractably connected to the plane 201a.

[0053] In this embodiment, the interface device 204 is a flange.

[0054] In this embodiment, the flexibility and adaptability of the pipe connector 200 are significantly improved. In actual use, the interface device 204 can be flexibly extended or retracted as needed. When it needs to be connected to the exhaust duct, it is extended to provide a stable connection point; when not in use, it is retracted into the cavity, which can effectively save space and avoid the risk of damage caused by the exposed interface device 204. This enhances the practicality and versatility of the connector in complex environments and broadens its application scenarios.

[0055] In this embodiment, a telescopic tube 203 is also included. One end of the telescopic tube 203 is connected to the interface 202, and the other end of the telescopic tube 203 is connected to the interface device 204.

[0056] In this embodiment, the addition of a telescopic pipe 203 connecting interface 202 and interface device 204 greatly improves the flexibility and adaptability of the pipe connector 200. The telescopic pipe 203 can compensate for positional deviations during installation and effectively absorb vibrations generated during equipment operation, thereby extending the service life of the pipe connector 200 and the exhaust duct. Furthermore, the telescopic pipe 203 provides greater convenience when adjustments or optimizations to the duct layout are needed, enabling the entire exhaust system to more flexibly respond to different operating conditions and changing demands.

[0057] In this embodiment, the connector body 201 is a cube. On the one hand, the cube structure can achieve tight stacking during warehousing and transportation, greatly improving space utilization and reducing transportation and storage costs. On the other hand, during actual installation, the cube connector can be easily spliced ​​and combined to easily construct a regular, efficient and complex exhaust duct network, meeting the requirements of different semiconductor equipment and process layouts for the duct system.

[0058] In some embodiments, the connector body 201 may also be a cuboid, etc.

[0059] In this embodiment, the material of the connector body 201 is plastic.

[0060] In this embodiment, a sealing cap (not shown in the figure) connected to the plane 201a is also included. The sealing cap has a protrusion on the surface facing the plane 201a that corresponds to the interface 202. The protrusion is used to achieve a sealed connection between the sealing cap and the interface 202.

[0061] In this embodiment, the sealing cap and the plane 201a are detachably connected, which gives the pipe connector 200 greater flexibility and maintainability. In actual use, the interface 202 can be opened or closed at any time as needed without destructive operation, making the adjustment of the interface 202 status more convenient and rapid. This effectively reduces equipment maintenance costs and downtime, and improves the overall operating efficiency of the equipment.

[0062] In this embodiment, the sealing cap is detachably connected to the plane 201a, specifically through a threaded connection.

[0063] In some embodiments, the sealing cap may also be snapped onto the plane 201a.

[0064] In this embodiment, a plurality of flow guide grooves (not shown in the figure) are respectively provided on the inner wall of the cavity facing the plane 201a. The flow guide grooves are curved or spiral.

[0065] In this embodiment, curved or spiral guide grooves are provided on the inner wall of the cavity facing multiple planes 201a, which can effectively organize and guide the internal airflow. By optimizing the airflow path, the airflow flows smoothly in the cavity according to a predetermined trajectory, which can significantly reduce eddy phenomena and energy loss, effectively reduce wind resistance, thereby improving exhaust efficiency, ensuring that the exhaust system can operate stably and efficiently, and reducing energy consumption.

[0066] Accordingly, this utility model also provides an exhaust device for a semiconductor device that uses the aforementioned pipe connector 200.

[0067] In this embodiment, the pipe connector 200 effectively meets the stringent requirements of semiconductor equipment in terms of exhaust. It effectively guarantees excellent sealing performance, reliable connection performance, flexible layout adjustment capabilities, and high exhaust efficiency, which is of great significance for improving the production efficiency, operational stability, and product yield of semiconductor equipment, and powerfully promotes the improvement of semiconductor equipment performance.

[0068] Third Embodiment

[0069] The third embodiment differs from the first embodiment only in that none of the interfaces have the elastic ring on their surfaces. Please refer to [link / reference needed]. Figure 3 .

[0070] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A pipe coupling, comprising: include: The connector body is composed of multiple interconnected planes and has a cavity inside. An interface that penetrates the plane and communicates with the cavity, the interface being used for a sealed connection with an exhaust duct.

2. The pipe coupling according to Claim 1, wherein, The interface is directly or indirectly connected to the exhaust duct. When the interface is directly connected to the exhaust duct, the exhaust duct is threadedly connected to the interface.

3. The pipe coupling according to Claim 2, wherein, When the interface is indirectly connected to the exhaust duct, it also includes an interface device located on the interface, the exhaust duct is connected to the interface device, and the interface device is retractably connected to the plane.

4. The pipe coupling according to Claim 2, wherein, The interface is directly connected to the exhaust duct, and the surface of one of the interfaces has an elastic ring that protrudes from the surface of the plane for mutual connection between adjacent connector bodies.

5. The pipe coupling according to Claim 3, wherein, It also includes a telescopic tube, one end of which is connected to the interface, and the other end of which is connected to the interface device.

6. The pipe coupling according to Claim 1, wherein, The connector body has a cube structure.

7. The pipe coupling according to Claim 1, wherein, It also includes a sealing cap connected to the plane, the sealing cap having a protrusion on its surface facing the plane corresponding to the interface, the protrusion being used to achieve a sealed connection between the sealing cap and the interface.

8. The pipe coupling according to Claim 7, wherein, The sealing cap is detachably connected to the plane.

9. The pipe coupling according to Claim 1, wherein, Also includes: Multiple planes are respectively provided with guide grooves on the inner wall of the cavity, and the guide grooves are curved or spiral.

10. An exhaust apparatus for a semiconductor device, characterized by comprising: Includes the pipe connector as described in any one of claims 1 to 9.

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