Photomask clamping device
By designing a photomask clamping device, the photomask can be rotated 360° and cleaned, which solves the problem of cumbersome photomask inspection and cleaning processes in the existing technology, improves inspection and cleaning efficiency, and enhances clamping stability and applicability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 捷捷微电(南通)科技有限公司
- Filing Date
- 2025-05-19
- Publication Date
- 2026-04-21
AI Technical Summary
The existing photomask inspection and cleaning process is cumbersome and inefficient. It cannot inspect both sides of the photomask at the same time, and the fixture fixation also results in low cleaning efficiency.
A photomask clamping device was designed, including a support assembly, a clamping assembly, and a rotary driver. The rotary driver enables 360° rotation of the photomask. Combined with the design of a cylinder and a limiting plate, it can simultaneously inspect both sides of the photomask and perform cleaning during rotation.
It improves the efficiency of photomask inspection and cleaning, adapts to photomasks of different sizes, and enhances clamping stability and usability.
Smart Images
Figure CN224152845U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor technology, and more specifically, to a photomask clamping device. Background Technology
[0002] In semiconductor chip manufacturing, the photomask is the core of the photolithography process; by designing different photomasks, various types of chips can be fabricated. However, during the photolithography process, as the photomask is used repeatedly, particles or other impurities that are indistinguishable to the naked eye accumulate on its surface. These particles and impurities not only prevent the desired pattern from being etched but also pose a risk of alarms and malfunctions during photomask transport. Therefore, regular photomask inspection and cleaning are essential measures.
[0003] The existing photomask inspection and cleaning solution involves using clamps to fix and secure the photomask on both sides for surface observation. After inspection, the photomask must be placed in a photomask box for cleaning, and the photomask must be manually flipped over. Because the photomask is fixed and clamped, only one side of the photomask can be inspected at a time. To inspect the other side, the photomask must be re-clamped, making the inspection process cumbersome. Furthermore, removing the photomask from the clamps for cleaning results in low cleaning efficiency. Utility Model Content
[0004] The purpose of this invention is to provide a photomask clamping device that can improve the applicability, efficiency, and cleaning efficiency of the photomask inspection process.
[0005] The embodiments of this utility model are implemented as follows:
[0006] In one aspect, this utility model provides a photomask clamping device, including a support assembly, a clamping assembly, and a rotary driver. The support assembly includes a handheld part and two supporting parts, which are arranged relatively apart, with one end connected to the handheld part and the other end connected to the clamping assembly. The rotary driver is disposed at the connection between the supporting parts and the clamping assembly, and is used to drive the clamping assembly to rotate around the axis extending in the direction of the supporting parts. The clamping assembly includes a frame, and a first cylinder is disposed at each of the four corners of the frame. The output end of the first cylinder is connected to a first limiting plate, which is perpendicular to the plane of the frame. Any two first cylinders arranged in a vertical direction can drive the two first limiting plates to move closer or further apart to clamp the photomask.
[0007] Optionally, the clamping assembly includes a second cylinder, which is disposed on the side of the first limiting plate opposite to the first cylinder; the output end of the second cylinder is connected to the second limiting plate, and the photomask is clamped between the frame and the second limiting plate; the second cylinder drives the second limiting plate to move along the length direction of the first limiting plate, so that the second limiting plate moves closer to or away from the first limiting plate.
[0008] Optionally, the handle, frame, and support are internally interconnected; the handle is connected to a vacuum pipe, which is connected to the internal cavity of the frame; multiple vacuum holes are evenly distributed in the contact area between the frame and the photomask, and the vacuum holes are connected to the vacuum pipe through the internal cavity of the frame to form a vacuum passage for adsorbing the photomask.
[0009] Optionally, the support includes a first connecting plate and a second connecting plate, one end of the first connecting plate is connected to the handheld part and the other end is perpendicularly connected to the second connecting plate; the end of the second connecting plate away from the first connecting plate is connected to the clamping assembly.
[0010] Optionally, there is a preset interval between the first cylinder and the second cylinder.
[0011] Optionally, a first buffer pad is provided in the contact area between the frame and the photomask; a second buffer pad is provided in the contact area between the first limiting plate and the photomask.
[0012] Optionally, a third buffer pad is provided in the contact area between the second limiting plate and the photomask.
[0013] Optionally, the handheld part is provided with a speed control component, which is connected to a rotary driver and is used to adjust the speed at which the rotary driver drives the clamping assembly to rotate about the axis extending in the support part.
[0014] Optionally, the handle, frame, and support are internally interconnected; the handle is connected to a compressed gas pipe, which is connected to the internal cavity of the frame for supplying compressed gas to the first cylinder; the handle is located in the first pressure regulating section for regulating the gas pressure of the compressed gas supplied to the first cylinder.
[0015] Optionally, the handle, frame, and support are internally interconnected; the handle is connected to a compressed gas pipe, which is connected to the internal cavity of the frame for supplying compressed gas to the second cylinder; the handle is located in the second pressure regulating section for regulating the gas pressure of the compressed gas supplied to the second cylinder.
[0016] The beneficial effects of this utility model include:
[0017] This application provides a photomask clamping device, including a support assembly, a clamping assembly, and a rotary driver. The support assembly includes a handheld part and two supporting parts, which are arranged relatively apart, with one end connected to the handheld part and the other end connected to the clamping assembly. The rotary driver is located at the connection between the supporting parts and the clamping assembly, and is used to drive the clamping assembly to rotate around the axis extending from the supporting parts. By setting the rotary driver, the clamping assembly and the photomask can be rotated 360°. Compared with the existing clamps that are fixedly connected to the photomask, this application can inspect both sides of the photomask simultaneously by rotation, improving inspection efficiency. Furthermore, during the rotation, the rotation can be stopped and cleaned in the area that needs to be cleaned. Compared with the existing method of rotating and cleaning inside the photomask box, this application improves cleaning efficiency. The rotating clamping assembly includes a frame, with a first cylinder arranged at each of the four corners of the frame. The output end of the first cylinder is connected to a first limiting plate, which is perpendicular to the plane of the frame. Any two first cylinders arranged in the vertical direction can drive the two first limiting plates to move closer or further apart to clamp the photomask. The inclusion of a first cylinder allows for the adaptation to different sizes of photomasks, improving clamping stability and usability. This photomask clamping device enhances the applicability, efficiency, and cleaning efficiency of the photomask inspection process. Attached Figure Description
[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0019] Figure 1 One of the structural schematic diagrams of the photomask clamping device provided in the embodiment of this utility model;
[0020] Figure 2 A second schematic diagram of the structure of the photomask clamping device provided in this embodiment of the utility model;
[0021] Figure 3 A side view of the photomask clamping device provided in an embodiment of this utility model;
[0022] Figure 4 A side view of the photomask clamping device provided in an embodiment of the present invention clamping a photomask.
[0023] Icons: 100-Photomask clamping device; 110-Support assembly; 111-Handheld part; 1111-Speed control component; 1112-First pressure regulating part; 1113-Second pressure regulating part; 1114-Vacuum switch; 1115-Vacuum gauge; 112-Support part; 1121-First connecting plate; 1122-Second connecting plate; 120-Clamping assembly; 121-Frame; 122-First limiting plate; 123-Second limiting plate; 124-Vacuum hole; 125-First buffer pad; 126-Second buffer pad; 127-Third buffer pad; 130-Rotary driver; 140-First cylinder; 150-Second cylinder; 200-Photomask. Detailed Implementation
[0024] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0026] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," and "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0027] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0028] Please refer to Figure 1 This embodiment provides a photomask clamping device 100, including a support assembly 110, a clamping assembly 120, and a rotary driver 130. The support assembly 110 includes a handheld part 111 and two support parts 112, which are arranged relatively apart, with one end connected to the handheld part 111 and the other end connected to the clamping assembly 120. The rotary driver 130 is disposed at the connection between the support part 112 and the clamping assembly 120, and is used to drive the clamping assembly 120 to rotate around the axis extending in the direction of the support part 112. The clamping assembly 120 includes a frame 121, and a first cylinder 140 is respectively disposed at the four corners of the frame 121. The output end of the first cylinder 140 is connected to a first limiting plate 122, which is perpendicular to the plane of the frame 121. Any two first cylinders 140 arranged in a vertical direction can drive the two first limiting plates 122 to move closer or further apart to clamp the photomask 200.
[0029] Specifically, such as Figure 1 As shown, the support assembly 110 includes a handheld part 111 and two support parts 112. The handheld part 111 has a rod-shaped structure for easy gripping by the operator. Preferably, the handheld part 111 may be partially covered with an anti-slip layer or have anti-slip texture to improve the comfort and stability of the operator's grip. The support parts 112 are preferably made of high-strength and lightweight material, which can ensure sufficient support strength to prevent deformation during the clamping of the photomask 200, thus affecting the operating accuracy, while also reducing the overall weight of the device and facilitating handheld operation by the operator.
[0030] In one possible implementation of this application, such as Figure 2As shown, the support portion 112 includes a first connecting plate 1121 and a second connecting plate 1122. One end of the first connecting plate 1121 is connected to the handheld portion 111, and the other end is perpendicularly connected to the second connecting plate 1122, making the support portion 112 have an L-shaped structure. The end of the second connecting plate 1122 away from the first connecting plate 1121 is connected to the clamping assembly 120, and the clamping assembly 120 can rotate around the axis of the second connecting plate 1122. This arrangement ensures both the stable connection of the clamping assembly 120 and prevents interference between the clamping assembly 120 and the support portion 112 when rotating around its axis, thus improving the reliability of rotation.
[0031] The rotary driver 130 is preferably a rotary motor, servo motor, stepper motor, etc. During operation, the rotary driver 130 can convert the rotational motion of the motor into the precise rotation of the clamping assembly 120 around the axis of the support 112 to achieve a rotation of 0-360 degrees, thereby inspecting both sides of the photomask 200 during the clamping rotation process and improving the detection efficiency.
[0032] like Figure 1 As shown, the frame 121 of the clamping assembly 120 has an open structure in the middle to accommodate the photomask 200; the first cylinder 140 set at the four corners of the frame 121 is preferably a pneumatic cylinder. Under the drive of the first cylinder 140, the first limiting plate 122 can limit and clamp the photomask 200 from the vertical direction. This clamping method can apply pressure evenly to the edge of the photomask 200, avoid damage to the surface of the photomask 200, and ensure the stability of the clamping. In addition, it can flexibly adapt to photomasks 200 of different sizes, improving the applicability of the photomask clamping device 100.
[0033] It should be noted that, in one possible implementation of this application, firstly, as... Figure 3 and Figure 4 As shown, a first buffer pad 125 is provided in the contact area between the frame 121 and the photomask 200; a second buffer pad 126 is provided in the contact area between the first limiting plate 122 and the photomask 200.
[0034] Specifically, such as Figure 3 and Figure 4 As shown, to prevent the hard surface of the frame 121 from scratching or colliding with the photomask 200, a first buffer pad 125 is provided in the contact area between the two. The material of the first buffer pad 125 is usually selected from materials with high elasticity, low coefficient of friction and stable chemical properties, such as silicone and rubber, which have good flexibility and wear resistance. It can effectively absorb and disperse external forces during the placement and clamping of the photomask 200, and reduce the impact of impact on the photomask 200. This application does not impose any restrictions on the size and shape of the first buffer pad 125.
[0035] The first buffer pad 125 can be a rectangular block or a circle, as long as it can buffer and protect the photomask 200. There can be multiple first buffer pads 125, which are evenly distributed in the contact area between the frame 121 and the photomask 200.
[0036] Similarly, as Figure 3 and Figure 4 As shown, to prevent the hard surface of the first limiting plate 122 from scratching or colliding with the photomask 200, a second buffer pad 126 is provided in the contact area between the two. The material of the second buffer pad 126 is usually selected from materials with high elasticity, low coefficient of friction and stable chemical properties, such as silicone and rubber. It has good flexibility and wear resistance, and can effectively absorb and disperse external forces during the placement and clamping of the photomask 200, reducing the impact of impact on the photomask 200. This application does not impose any restrictions on the size and shape of the second buffer pad 126. The second buffer pad 126 can be a rectangular block or a circle, as long as it can provide buffering and protection for the photomask 200. There can be multiple second buffer pads 126, which are evenly distributed in the contact area between the first limiting plate 122 and the photomask 200.
[0037] Second, such as Figure 2 As shown, the handheld part 111 is equipped with a speed control component 1111, which is connected to the rotary driver 130 and used to adjust the speed at which the rotary driver 130 drives the clamping assembly 120 to rotate around the axis extending from the support part 112. The speed control component 1111 can have various structural forms, such as a knob, a button, or a dial. In one specific embodiment of this application, the speed control component 1111 is a dial type. By rotating the speed control component 1111 left or right, the rotation speed of the photomask 200 can be decreased or increased. This method is intuitive and allows the operator to quickly find the appropriate speed setting. By setting the speed control component 1111, the rotation speed of the photomask 200 can be adjusted according to actual testing needs for better inspection of the photomask 200 surface.
[0038] Third, such as Figure 2 As shown, the handle 111, the frame 121 and the support 112 are internally interconnected; the handle 111 is connected to a compressed gas pipe, which is connected to the internal cavity of the frame 121 for supplying compressed gas to the first cylinder 140; the handle 111 is disposed on the first pressure regulating part 1112 for regulating the gas pressure of the compressed gas supplied to the first cylinder 140.
[0039] Specifically, such as Figure 2As shown, the end of the handheld part 111 is provided with a port for connecting a compressed gas pipeline to supply gas to the first cylinder 140. The first pressure regulating part 1112 is used to precisely control the gas supply pressure to the first cylinder 140. In actual operation, the operator can adjust the pressure of the compressed gas supplied to the first cylinder 140 through the first pressure regulating part 1112 according to the material, size, and clamping requirements of the photomask 200. For photomasks 200 that are brittle and small in size, a lower clamping pressure is required to prevent the photomask 200 from being damaged; while for photomasks 200 that are harder and larger in size, the clamping pressure needs to be appropriately increased to ensure that the photomask 200 does not loosen during operation. By precisely adjusting the gas pressure, not only can the photomask 200 be effectively protected, but the stability and reliability of clamping can also be improved, meeting the diverse needs of clamping the photomask 200 under different process conditions.
[0040] The photomask clamping device 100 provided in this application includes a support assembly 110, a clamping assembly 120, and a rotary driver 130. The support assembly 110 includes a handheld part 111 and two support parts 112, which are arranged relatively apart, with one end connected to the handheld part 111 and the other end connected to the clamping assembly 120. The rotary driver 130 is disposed at the connection between the support part 112 and the clamping assembly 120, and is used to drive the clamping assembly 120 to rotate around the axis extending from the support part 112. Through the arrangement of the rotary driver 130, the clamping assembly 120 and the photomask can be rotated 200°. Compared with the prior art where the clamp and photomask are fixedly connected, this application can achieve... By simultaneously inspecting both sides of the photomask 200 through rotation, inspection efficiency is improved. Furthermore, during rotation, the device can stop rotating in areas requiring cleaning and perform cleaning within the designated area. Compared to existing methods that involve rotating and cleaning within the photomask box, this method significantly improves cleaning efficiency. The rotating clamping assembly 120 includes a frame 121, with first cylinders 140 positioned at each of its four corners. The output ends of the first cylinders 140 are connected to first limiting plates 122, which are perpendicular to the plane of the frame 121. Any two first cylinders 140 positioned vertically can drive the two first limiting plates 122 to move closer or further apart to clamp the photomask 200. The use of first cylinders 140 allows for the adaptation of photomasks 200 of different sizes, improving clamping stability and usability. The aforementioned photomask clamping device 100 enhances the applicability, efficiency, and cleaning efficiency of the photomask 200 inspection process.
[0041] In one possible implementation of this application, such as Figure 3As shown, the clamping assembly 120 includes a second cylinder 150, which is disposed on the side of the first limiting plate 122 opposite to the first cylinder 140. The output end of the second cylinder 150 is connected to a second limiting plate 123, and the photomask 200 is clamped between the frame 121 and the second limiting plate 123. The second cylinder 150 drives the second limiting plate 123 to move along the length direction of the first limiting plate 122, so that the second limiting plate 123 moves closer to or further away from the first limiting plate 122. Preferably, as shown... Figure 3 As shown, the second limiting plate 123 has an L-shaped structure.
[0042] The second limiting plate 123 allows for horizontal positioning and fixation of the photomask 200, ensuring that both sides of the photomask 200 abut against the end faces of the frame 121 and the second limiting plate 123, thereby improving the stability of the photomask 200 clamping. The second cylinder 150 allows for adjustable distance between the second limiting plate 123 and the frame 121, facilitating not only the disassembly and assembly of the photomask 200 but also adapting to photomasks of different sizes, thus enhancing the flexibility of the photomask clamping device 100.
[0043] It should be noted that, firstly, in one possible embodiment of this application, there is a preset interval between the first cylinder 140 and the second cylinder 150, so as to ensure that when the second cylinder 150 drives the second limiting plate 123 to move in the horizontal direction, it will not interfere with the setting position of the first limiting plate 122.
[0044] Second, such as Figure 3 and Figure 4 As shown, in one possible embodiment of this application, a third buffer pad 127 is provided in the contact area between the second limiting plate 123 and the photomask 200.
[0045] Specifically, such as Figure 3 and Figure 4 As shown, to prevent the hard surface of the second limiting plate 123 from scratching or colliding with the photomask 200, a third buffer pad 127 is provided in the contact area between the two. The material of the third buffer pad 127 is usually selected from materials with high elasticity, low coefficient of friction and stable chemical properties, such as silicone and rubber. It has good flexibility and wear resistance, and can effectively absorb and disperse external forces during the placement and clamping of the photomask 200, reducing the impact of impact on the photomask 200. This application does not impose any restrictions on the size and shape of the third buffer pad 127.
[0046] The third buffer pad 127 can be a rectangular block or a circle, as long as it can buffer and protect the photomask 200. There can be multiple third buffer pads 127, which are evenly distributed in the contact area between the second limiting plate 123 and the photomask 200.
[0047] Third, such as Figure 2 As shown, in one possible embodiment of this application, the handle 111, the frame 121 and the support 112 are internally interconnected; the handle 111 is connected to a compressed gas pipe, which is connected to the internal cavity of the frame 121 for supplying compressed gas to the second cylinder 150; the handle 111 is disposed on the second pressure regulating part 1113 for regulating the gas pressure of the compressed gas supplied to the second cylinder 150.
[0048] Specifically, such as Figure 2 As shown, the end of the handheld part 111 is provided with a port for connecting a compressed gas pipeline to supply gas to the second cylinder 150. The second pressure regulating part 1113 is used to precisely control the gas supply pressure to the second cylinder 150. In actual operation, the operator can adjust the pressure of the compressed gas supplied to the second cylinder 150 through the second pressure regulating part 1113 according to the material, size, and clamping requirements of the photomask 200. For photomasks 200 that are brittle and small in size, a lower clamping pressure is required to prevent the photomask 200 from being damaged; while for photomasks 200 that are harder and larger in size, the clamping pressure needs to be appropriately increased to ensure that the photomask 200 does not loosen during operation. By precisely adjusting the gas pressure, not only can the photomask 200 be effectively protected, but the stability and reliability of clamping can also be improved, meeting the diverse needs of photomask 200 clamping under different process conditions.
[0049] For example, such as Figure 2 As shown, the handheld part 111, the frame 121 and the support part 112 are internally interconnected; the handheld part 111 is connected to a vacuum pipe, which is connected to the internal cavity of the frame 121; the contact area between the frame 121 and the photomask 200 is evenly distributed with a plurality of vacuum holes 124, which are connected to the vacuum pipe through the internal cavity of the frame 121 to form a vacuum passage for adsorbing the photomask 200.
[0050] Specifically, the end of the handheld part 111 is provided with a port for connecting a vacuum pipe. The vacuum pipe can form a vacuum passage with the vacuum hole 124, and the photomask 200 can be adsorbed onto the frame 121 through the vacuum hole 124, further improving the clamping stability of the photomask clamping device 100. There can be multiple vacuum holes 124, which are evenly distributed on the contact surface between the frame 121 and the photomask 200 to improve the uniformity of adsorption.
[0051] Among them, such as Figure 2As shown, the handheld part 111 is also connected to a vacuum switch 1114 and a vacuum gauge 1115. The vacuum switch 1114 is used to control the connection or disconnection of the vacuum channel. When it is necessary to adsorb the photomask 200, the vacuum switch 1114 can connect the vacuum channel and the vacuum hole 124 to form a vacuum passage; when it is necessary to remove the photomask 200, the vacuum switch 1114 can disconnect the vacuum channel and the vacuum hole 124, at which time the vacuum hole 124 will no longer adsorb the photomask 200. In addition, the vacuum gauge 1115 can detect and display the current vacuum level in real time. By adjusting the vacuum level, the amount of vacuum entering the vacuum channel can be adjusted to prevent the photomask 200 from falling due to insufficient adsorption force or being damaged due to excessive adsorption force, thereby further improving the clamping reliability of the photomask clamping device 100.
[0052] The above description is merely an optional embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
[0053] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable way without contradiction. In order to avoid unnecessary repetition, this utility model will not describe the various possible combinations separately.
Claims
1. A reticle clamping device, characterized by, The device includes a support assembly (110), a clamping assembly (120), and a rotary driver (130). The support assembly (110) includes a handle (111) and two support parts (112), which are arranged at intervals relative to each other. One end of the support part (112) is connected to the handle (111), and the other end is connected to the clamping assembly (120). The rotary driver (130) is located at the connection between the support part (112) and the clamping assembly (120) and is used to drive the clamping assembly (120) to rotate around the support part. (112) Rotation of the axis in the extension direction; the clamping assembly (120) includes a frame (121), and a first cylinder (140) is respectively provided at the four corners of the frame (121). The output end of the first cylinder (140) is connected to a first limiting plate (122), and the first limiting plate (122) is perpendicular to the plane where the frame (121) is located; any two first cylinders (140) arranged in the vertical direction can drive the two first limiting plates (122) to move closer or further away from each other to clamp the photomask (200).
2. The reticle clamping device of claim 1, wherein The clamping assembly (120) includes a second cylinder (150), which is disposed on the side of the first limiting plate (122) away from the first cylinder (140); the output end of the second cylinder (150) is connected to a second limiting plate (123), and the photomask (200) is clamped between the frame (121) and the second limiting plate (123); the second cylinder (150) drives the second limiting plate (123) to move along the length direction of the first limiting plate (122) so that the second limiting plate (123) moves closer to or further away from the first limiting plate (122).
3. The reticle clamp apparatus of claim 1, wherein The handheld part (111), the frame (121), and the support part (112) are interconnected internally; the handheld part (111) is connected to a vacuum pipe, which is connected to the internal cavity of the frame (121); the contact area between the frame (121) and the photomask (200) is evenly distributed with a plurality of vacuum holes (124), which are connected to the vacuum pipe through the internal cavity of the frame (121) to form a vacuum passage for adsorbing the photomask (200).
4. The reticle clamp apparatus of claim 1, wherein, The support part (112) includes a first connecting plate (1121) and a second connecting plate (1122). One end of the first connecting plate (1121) is connected to the handheld part (111), and the other end is perpendicularly connected to the second connecting plate (1122). The end of the second connecting plate (1122) away from the first connecting plate (1121) is connected to the clamping assembly (120).
5. The reticle clamping device of claim 2, wherein There is a preset interval between the first cylinder (140) and the second cylinder (150).
6. The reticle clamp apparatus of claim 1, wherein, A first buffer pad (125) is provided in the contact area between the frame (121) and the photomask (200); a second buffer pad (126) is provided in the contact area between the first limiting plate (122) and the photomask (200).
7. The reticle clamp apparatus of claim 2, wherein A third buffer pad (127) is provided in the contact area between the second limiting plate (123) and the photomask (200).
8. The reticle clamp apparatus of claim 1, wherein, The handheld part (111) is provided with a speed control element (1111), which is connected to the rotary driver (130) and is used to adjust the speed at which the rotary driver (130) drives the clamping assembly (120) to rotate around the axis extending in the direction of the support part (112).
9. The reticle clamp apparatus of claim 1, wherein, The handle (111), the frame (121), and the support (112) are internally interconnected; the handle (111) is connected to a compressed gas pipe, which is connected to the internal cavity of the frame (121) for introducing compressed gas into the first cylinder (140); the handle (111) is disposed on the first pressure regulating part (1112) for regulating the gas pressure of the compressed gas introduced into the first cylinder (140).
10. The reticle clamp apparatus of claim 2, wherein, The handle (111), the frame (121), and the support (112) are internally interconnected; the handle (111) is connected to a compressed gas pipe, which is connected to the internal cavity of the frame (121) for introducing compressed gas into the second cylinder (150); the handle (111) is disposed on the second pressure regulating part (1113) for regulating the gas pressure of the compressed gas introduced into the second cylinder (150).