Crimping device of wafer test equipment and wafer test equipment

Abstract

The utility model provides a crimping device of wafer testing equipment and the wafer testing equipment, and relates to the technical field of wafer testing. Each movable mechanism comprises a connecting rod assembly and a pressing block which are connected with each other, and the connecting rod assembly is rotationally connected with the first support and connected with the driving rod. When the driving rod moves in the first direction, the connecting rod assembly extends in the second direction, so that the pressing block is driven to move in the second direction and exert acting force on the testing clamp, and the testing clamp makes contact with the probe base. And when the driving rod moves in the direction opposite to the first direction, the connecting rod assembly shrinks in the second direction, so that the pressing block cancels the acting force applied to the test fixture. According to the technical scheme, one driving piece drives the pressing blocks of the multiple sets of movable mechanisms to apply acting force to the testing clamp, the acting force of the driving piece is amplified through the driving rod and the connecting rod assembly, the number of the driving pieces is reduced, and therefore the overall size of the wafer testing equipment is reduced.

Description

Technical Field

[0001] This utility model relates to the field of wafer testing technology, and in particular to a crimping device and wafer testing equipment for wafer testing. Background Technology

[0002] During wafer testing, the wafer testing device, which contains the wafer under test, needs to be pressed against the test probes on the probe holder in order to obtain the signal from the wafer under test. Due to the large size of the wafer testing device, existing technologies require multiple cylinders to be installed on the top of the wafer testing device to provide sufficient pressing force. However, this approach occupies too much space in the wafer testing equipment, which is not conducive to controlling the overall size of the equipment. Utility Model Content

[0003] One objective of this invention is to provide a crimping device for wafer testing equipment, which solves the technical problem that existing crimping cylinders are numerous and occupy a large amount of space.

[0004] A further objective of this invention is to prevent the pressure block from shaking during movement.

[0005] Specifically, this utility model provides a crimping device for a wafer testing equipment. The wafer testing equipment includes a test fixture, a probe holder, and a crimping device. The test fixture and the probe holder are arranged opposite to each other. The crimping device is disposed on the side of the test fixture away from the probe holder and includes:

[0006] The first support extends along the first direction;

[0007] The driving component is mounted on the first bracket;

[0008] A drive rod is connected to the drive member and configured to reciprocate along the first direction under the drive of the drive member;

[0009] Multiple sets of movable mechanisms, each set of movable mechanisms including interconnected linkage assemblies and pressure blocks, wherein the linkage assemblies are rotatably connected to the first bracket and connected to the drive rod;

[0010] When the drive rod moves along the first direction, the linkage assembly extends along the second direction, thereby driving the pressure block to move along the second direction and apply a force to the test fixture, causing the test fixture to contact the probe holder; when the drive rod moves in a direction opposite to the first direction, the linkage assembly retracts along the second direction, causing the pressure block to remove the force applied to the test fixture, the second direction being perpendicular to the first direction.

[0011] Optionally, each set of the link assembly includes:

[0012] The first connecting rod is rotatably connected at one end to the first bracket;

[0013] The second link has one end rotatably connected to the first link and the other end rotatably connected to the pressure block. The first link and the second link are configured to rotate relative to each other when the drive rod moves, so as to adjust the length of the link assembly along the second direction, thereby driving the pressure block to rise and fall.

[0014] Optionally, each set of the link assembly further includes:

[0015] A first rotating shaft passes through the first connecting rod and the second connecting rod, and the first rotating shaft is engaged with the drive rod so as to drive the first connecting rod and the second connecting rod to rotate relative to each other when the drive rod reciprocates along the first direction.

[0016] Optionally, the drive rod is provided with at least one first limiting hole, and first waist-shaped holes arranged along the second direction are respectively provided on opposite sides of the first limiting hole. Each group of the connecting rod assembly passes through a first limiting hole, and the two ends of the first rotating shaft pass through a first waist-shaped hole respectively, and can move along the first waist-shaped hole.

[0017] Optionally, it further includes a second support, which is arranged perpendicularly to and connected to the first support; each of the pressure blocks further includes at least one protruding first limiting post, and each set of the movable mechanism further includes:

[0018] A first guide member is mounted on the second bracket. The first guide member has at least one second oblong hole arranged along the second direction. At least a portion of each first limiting post is located in one of the second oblong holes and is configured to move along the second oblong holes when the pressure block moves along the second direction, thereby guiding the pressure block.

[0019] Optionally, each of the first guide members is provided with a plurality of second waist-shaped holes arranged at intervals along the first direction, and each of the second waist-shaped holes is provided with the first limiting post.

[0020] Optionally, the drive rod is provided with at least one third oblong hole arranged along the first direction, and the crimping device further includes:

[0021] At least one second guide member, each second guide member being connected to the first bracket and having at least one second limiting post protruding into the third oblong hole;

[0022] The drive rod is configured such that when it moves under the drive of the drive member, the third oblong hole moves relative to the second limiting post.

[0023] Optionally, the drive rod is further provided with at least one second limiting hole, and the third waist-shaped hole is provided on each of the opposite sides of the second limiting hole;

[0024] Each of the second guide members corresponds to a second limiting hole and is at least partially located within the second limiting hole. Each of the second guide members has two second limiting posts, each of the second limiting posts protruding into one of the third waist-shaped holes.

[0025] Optionally, the driving component is a cylinder and is located at the end of the driving rod, with the piston rod of the cylinder connected to one end of the driving rod.

[0026] Specifically, this utility model also provides a wafer testing device, comprising:

[0027] A test fixture, wherein the wafer to be tested is placed inside the test fixture, and a PCB board is provided;

[0028] At least one probe holder is arranged opposite to the test fixture and has a transfer probe;

[0029] Both of the above-mentioned crimping devices are disposed on the side of the test fixture away from the probe holder, and are configured to apply pressure to the test fixture in a controlled manner, so that the PCB board of the test fixture contacts the adapter probe of the probe holder, and the two crimping devices are arranged at intervals on opposite sides of the test fixture.

[0030] In this invention, each set of movable mechanisms includes interconnected linkage assemblies and pressure blocks. The linkage assembly is rotatably connected to the first support and also connected to the drive rod. When the drive rod moves along a first direction, the linkage assembly extends along a second direction, thereby driving the pressure block to move along the second direction and apply a force to the test fixture, causing the test fixture to contact the probe holder. When the drive rod moves in the opposite direction to the first direction, the linkage assembly retracts along the second direction, causing the pressure block to release the force applied to the test fixture. This technical solution uses a single drive component to drive the pressure blocks of multiple sets of movable mechanisms to apply a force to the test fixture, and the linkage assembly amplifies the force of the drive component, thereby reducing the number of drive components and thus reducing the overall size of the wafer testing equipment.

[0031] Furthermore, each set of movable mechanisms in this invention also includes a first guide member mounted on a second bracket. The first guide member has at least one second oblong hole arranged along a second direction. At least a portion of each first limiting post is located within one of the second oblong holes and is configured to move along the second oblong hole when the pressure block moves along the second direction, thereby guiding the pressure block. The above technical solution, by guiding the pressure block, can prevent the pressure block from shaking during movement.

[0032] The above and other objects, advantages and features of this utility model will become more apparent to those skilled in the art from the following detailed description of specific embodiments of this utility model in conjunction with the accompanying drawings. Attached Figure Description

[0033] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0034] Figure 1 This is a schematic exploded view of a wafer testing device according to an embodiment of the present invention;

[0035] Figure 2 yes Figure 1 A schematic diagram of the wafer testing equipment in an uncrimped state;

[0036] Figure 3 yes Figure 1 A schematic diagram of the crimping device in the wafer testing equipment shown, in the crimping state;

[0037] Figure 4 This is a schematic structural diagram of a crimping device according to an embodiment of the present invention;

[0038] Figure 5 yes Figure 4 A schematic structural diagram of section A;

[0039] Figure 6 This is a schematic structural diagram of a wafer testing device according to an embodiment of the present invention.

[0040] Figure label:

[0041] 1000-Wafer testing equipment, 100-Crimping device, 200-Test fixture, 300-Probe holder, 310-Adapter probe, 10-First support, 20-Driver, 30-Drive rod, 40-Link assembly, 41-First link, 42-Second link, 43-Pressure block, 50-Second support, 60-First guide, 70-Second guide, 31-Third oblong hole, 32-First oblong hole, 33-First limiting hole, 34-Second limiting hole, 61-Second oblong hole, 411-Second rotating shaft, 421-Third rotating shaft, 44-First rotating shaft, 431-First limiting post, 71-Second limiting post. Detailed Implementation

[0042] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0043] In the description of this utility model, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0044] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature, that is, include one or more of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. When a feature "includes or contains" one or more of the features it encompasses, unless otherwise specifically described, this indicates that other features are not excluded and may be further included.

[0045] Unless otherwise expressly specified and limited, the terms "connection," "installation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art should be able to understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0046] Unless otherwise specified, all terms (including technical and scientific terms) used in the description of this embodiment have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0047] Figure 1 This is a schematic exploded view of a wafer testing device 1000 according to an embodiment of the present invention. Figure 2 yes Figure 1 The diagram shows the wafer testing equipment 100 in an uncrimped state, with the crimping device 100 in the shown configuration. Figure 3 yes Figure 1 This is a schematic diagram of the crimping device 100 in the wafer testing equipment 1000 in the crimping state. Figures 1 to 3As shown, in one specific embodiment, the wafer testing equipment 1000 includes a test fixture 200, a probe holder 300, and a crimping device 100. The test fixture 200 and the probe holder 300 are arranged opposite to each other, and the crimping device 100 is disposed on the side of the test fixture 200 away from the probe holder 300. The crimping device 100 includes a first support 10, a drive member 20, a drive rod 30, and multiple sets of movable mechanisms. The first support 10 extends along a first direction, and the drive member 20 is mounted on the first support 10. The drive rod 30 is connected to the drive member 20 and is configured to reciprocate along the first direction under the drive of the drive member 20. Each set of movable mechanisms includes an interconnected linkage assembly 40 and a pressure block 43. The linkage assembly 40 is rotatably connected to the first support 10 and connected to the drive rod 30. When the drive rod 30 moves along the first direction, the connecting rod assembly 40 extends along the second direction, thereby causing the pressure block 43 to move along the second direction and apply a force to the test fixture 200, causing the test fixture 200 to contact the probe holder 300. When the drive rod 30 moves in the opposite direction to the first direction, the connecting rod assembly 40 retracts along the second direction, causing the pressure block 43 to release the force applied to the test fixture 200. The second direction is perpendicular to the first direction. Here, Figure 2 In the diagram, the X direction represents the first direction, and the Y direction represents the second direction. When the crimping device 100 is in an uncrimped state, there is a certain gap between the test fixture 200 and the probe holder 300. When the crimping device 100 is in a crimped state, the test fixture 200 and the adapter probe 310 of the probe holder 300 are tightly fitted together, thereby performing electrical performance testing on the wafer under test.

[0048] In this embodiment, a driving component 20 drives multiple sets of movable mechanism pressure blocks 43 to apply force to the test fixture 200. The force of the driving component 20 is amplified by the linkage assembly 40, reducing the number of driving components 20 and thus reducing the overall size of the wafer testing equipment 1000.

[0049] In some embodiments, the test fixture 200 is located above the probe holder 300, and the crimping device 100 is located above the test fixture 200. In other embodiments, the positions of the test fixture 200, the probe holder 300, and the crimping device 100 can be determined according to specific design requirements.

[0050] In this embodiment, multiple sets of movable mechanisms are arranged at intervals along the first direction, and the number of movable mechanisms is three. In other embodiments, the number of movable mechanisms can be determined according to specific design requirements, such as four, five, or six. The number of movable mechanisms needs to be set to ensure that the test fixture 200 can be pressed onto the adapter probe 310 of the probe holder 300. For example, the larger the size and weight of the test fixture 200, the more movable mechanisms are needed.

[0051] In a preferred embodiment, multiple sets of moving mechanisms are evenly arranged along a first direction, thereby ensuring that the test fixture 200 is subjected to uniform force.

[0052] In some embodiments, each linkage assembly 40 includes a first link 41 and a second link 42. One end of the first link 41 is rotatably connected to the first bracket 10. One end of the second link 42 is rotatably connected to the first link 41, and the other end of the second link 42 is rotatably connected to the pressure block 43. The first link 41 and the second link 42 are configured to rotate relative to each other when the drive rod 30 moves, so as to adjust the length of the linkage assembly 40 along the second direction, thereby driving the pressure block 43 to rise and fall. Here, when the crimping device 100 is in the non-crimping state, the included angle between the first link 41 and the second link 42 is the first included angle. When the crimping device 100 is in the crimping state, the included angle between the first link 41 and the second link 42 is the second included angle. The first included angle is smaller than the second included angle, which can be understood as adjusting the included angle between the first link 41 and the second link 42 to adjust the length of the linkage assembly 40 along the second direction.

[0053] In some embodiments, each link assembly 40 further includes a first pivot 44 passing through the first link 41 and the second link 42. The first pivot 44 is engaged with the drive rod 30 to drive the first link 41 and the second link 42 to rotate relative to each other when the drive rod 30 reciprocates along a first direction.

[0054] Specifically, the drive rod 30 is provided with at least one first limiting hole 33, and first oblong holes 32 arranged along the second direction are respectively provided on opposite sides of the first limiting hole 33. Each connecting rod assembly 40 passes through one first limiting hole 33, and the two ends of the first rotating shaft 44 pass through the two first oblong holes 32 respectively, and can move along the first oblong holes 32. It can be understood that when the drive rod 30 moves along the first direction, the first rotating shaft 44 moves along the first oblong holes 32, thereby driving the first connecting rod 41 and the second connecting rod 42 to rotate relative to each other.

[0055] Figure 4 This is a schematic structural diagram of a crimping device 100 according to an embodiment of the present invention. Figure 5 yes Figure 4 A schematic structural diagram of section A. (See attached diagram.) Figure 4 and Figure 5As shown, in one embodiment, the crimping device 100 further includes a second bracket 50, which is arranged perpendicularly to and connected to the first bracket 10. Each pressing block 43 also includes at least one protruding first limiting post 431, and each set of movable mechanisms also includes a first guide member 60, which is mounted on the second bracket 50. The first guide member 60 is provided with at least one second oblong hole 61 arranged in a second direction. At least a portion of each first limiting post 431 is located in one of the second oblong holes 61 and is configured to move along the second oblong hole 61 when the pressing block 43 moves in the second direction, thereby guiding the pressing block 43.

[0056] This embodiment guides the pressure block 43 to prevent it from shaking during movement.

[0057] In a preferred embodiment, each first guide member 60 is provided with a plurality of second oblong holes 61 arranged at intervals along a first direction, and each second oblong hole 61 is provided with a first limiting post 431. This embodiment improves the stability of the pressure block 43 during movement by providing multiple second oblong holes 61 to guide the pressure block 43 simultaneously. In one embodiment, the number of second oblong holes 61 is two. In other embodiments, the number of second oblong holes 61 can be determined according to specific design requirements.

[0058] In some embodiments, the top of the first connecting rod 41 is provided with a second rotating shaft 411, which is rotatably connected to the first bracket 10. The bottom of the second connecting rod 42 is provided with a third rotating shaft 421, which is rotatably connected to the pressure block 43.

[0059] In some embodiments, the drive rod 30 is provided with at least one third oblong hole 31 arranged along a first direction, and the crimping device 100 further includes at least one second guide member 70, each second guide member 70 being connected to the first bracket 10 and having at least one second limiting post 71 protruding into the third oblong hole 31. The drive rod 30 is configured such that when it moves under the drive of the drive member 20, the third oblong hole 31 moves relative to the second limiting post 71.

[0060] This embodiment uses a second guide member 70 to guide the drive rod 30, thereby improving the stability of the drive rod 30 during movement.

[0061] In some embodiments, the number of second guide members 70 is two, and the two second guide members 70 are arranged at a distance from each other along the first direction. In other embodiments, the number of second guide members 70 may be determined according to specific design requirements.

[0062] In some embodiments, the drive rod 30 is further provided with at least one second limiting hole 34, and third oblong holes 31 are respectively provided on opposite sides of the second limiting hole 34. Each second guide member 70 corresponds to one second limiting hole 34 and is at least partially located within the second limiting hole 34. Each second guide member 70 has two second limiting posts 71, and each second limiting post 71 protrudes into one third oblong hole 31. This embodiment, by installing the second guide member 70 through opening holes in the drive rod 30, makes the crimping device 100 more compact. When the drive rod 30 reciprocates along the first direction, the second limiting hole 34 and the third oblong hole 31 move relative to the second guide member 70, thereby guiding the drive rod 30. In addition, the design of the second limiting hole 34 and the third oblong hole 31 can also limit the movement of the drive rod 30, restricting its travel.

[0063] In some embodiments, the drive element 20 is a cylinder located at the end of the drive rod 30, and the piston rod of the cylinder is connected to one end of the drive rod 30. In other embodiments, the drive element 20 may be other components capable of providing power.

[0064] In this embodiment, the cylinder is positioned horizontally to provide horizontal driving force. The driving rod 30 and connecting rod assembly 40 then convert this horizontal force into a vertical force, enabling the pressing of the testing device and effectively reducing the overall vertical space occupied by the equipment. Furthermore, only one cylinder is needed; the driving force is amplified by the driving rod 30 and connecting rod assembly 40, saving on the number of cylinders and reducing the overall cost of the equipment.

[0065] Figure 6 This is a schematic structural diagram of a wafer testing device 1000 according to an embodiment of the present invention. Figure 6 As shown, in some embodiments, the wafer testing equipment 1000 includes a test fixture 200, at least one probe holder 300, and two of the aforementioned crimping devices 100. The test fixture 200 houses the wafer to be tested and has a PCB board. The probe holder 300 is arranged opposite to the test fixture 200 and has an adapter probe 310. Both crimping devices 100 are located on the side of the test fixture 200 away from the probe holder 300 and are configured to apply controlled pressure to the test fixture 200, causing the PCB board of the test fixture 200 to contact the adapter probe 310 of the probe holder 300. The two crimping devices 100 are spaced apart on opposite sides of the test fixture 200.

[0066] Therefore, those skilled in the art should recognize that although many exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications conforming to the principles of the present invention can be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.

Claims

1. A crimping device for a wafer testing equipment, characterized in that, The wafer testing equipment includes a test fixture, a probe holder, and a crimping device. The test fixture and the probe holder are arranged opposite to each other. The crimping device is located on the side of the test fixture away from the probe holder and includes: The first support extends along the first direction; The driving component is mounted on the first bracket; A drive rod is connected to the drive member and configured to reciprocate along the first direction under the drive of the drive member; Multiple sets of movable mechanisms, each set of movable mechanisms including interconnected linkage assemblies and pressure blocks, wherein the linkage assemblies are rotatably connected to the first bracket and connected to the drive rod; When the drive rod moves along the first direction, the linkage assembly extends along the second direction, thereby driving the pressure block to move along the second direction and apply a force to the test fixture, causing the test fixture to contact the probe holder; when the drive rod moves in a direction opposite to the first direction, the linkage assembly retracts along the second direction, causing the pressure block to remove the force applied to the test fixture, the second direction being perpendicular to the first direction.

2. The crimping device of claim 1, wherein Each of the aforementioned link assemblies includes: The first connecting rod is rotatably connected at one end to the first bracket; The second link has one end rotatably connected to the first link and the other end rotatably connected to the pressure block. The first link and the second link are configured to rotate relative to each other when the drive rod moves, so as to adjust the length of the link assembly along the second direction, thereby driving the pressure block to rise and fall.

3. The crimping device of claim 2, wherein Each of the aforementioned link assemblies also includes: A first rotating shaft passes through the first connecting rod and the second connecting rod, and the first rotating shaft is engaged with the drive rod so as to drive the first connecting rod and the second connecting rod to rotate relative to each other when the drive rod reciprocates along the first direction.

4. The crimping device according to claim 3, characterized in that, The drive rod is provided with at least one first limiting hole, and on the opposite sides of the first limiting hole, there are first waist-shaped holes arranged along the second direction. Each group of the connecting rod assembly passes through a first limiting hole, and the two ends of the first rotating shaft pass through a first waist-shaped hole and can move along the first waist-shaped hole.

5. The crimping device according to any one of claims 1-4, characterized in that, It also includes a second support, which is arranged perpendicularly to and connected to the first support; each of the pressure blocks also includes at least one protruding first limiting post, and each set of the movable mechanism further includes: A first guide member is mounted on the second bracket. The first guide member has at least one second oblong hole arranged along the second direction. At least a portion of each first limiting post is located in one of the second oblong holes and is configured to move along the second oblong holes when the pressure block moves along the second direction, thereby guiding the pressure block.

6. The crimping device according to claim 5, characterized in that, Each of the first guide members is provided with a plurality of second waist-shaped holes arranged at intervals along the first direction, and each of the second waist-shaped holes is provided with the first limiting post.

7. The crimping device of claim 4, wherein The drive rod is provided with at least one third oblong hole arranged along the first direction, and the crimping device further includes: At least one second guide member, each second guide member being connected to the first bracket and having at least one second limiting post protruding into the third oblong hole; The drive rod is configured such that when it moves under the drive of the drive member, the third oblong hole moves relative to the second limiting post.

8. The crimping device according to claim 7, characterized in that, The drive rod is also provided with at least one second limiting hole, and the third waist-shaped hole is provided on each of the opposite sides of the second limiting hole; Each of the second guide members corresponds to a second limiting hole and is at least partially located within the second limiting hole. Each of the second guide members has two second limiting posts, each of the second limiting posts protruding into one of the third waist-shaped holes.

9. The crimping device according to any one of claims 1-4, characterized in that, The driving component is a cylinder, located at the end of the driving rod, and the piston rod of the cylinder is connected to one end of the driving rod.

10. A wafer testing apparatus, characterized by comprising: include: A test fixture, wherein the wafer to be tested is placed inside the test fixture, and a PCB board is provided; At least one probe holder is arranged opposite to the test fixture and has a transfer probe; Two crimping devices as described in any one of claims 1-9 are each disposed on the side of the test fixture away from the probe holder and are configured to apply pressure to the test fixture in a controlled manner, such that the PCB board of the test fixture contacts the adapter probe of the probe holder, and the two crimping devices are arranged at intervals on opposite sides of the test fixture.

Images