Compound eye structure for photoetching machine

Abstract

The utility model discloses a compound eye structure for a photoetching machine, which relates to the technical field of photoetching machines and comprises a mounting adapter plate, a first focus lens is arranged on one side of the mounting adapter plate, a second focus lens is arranged on one side of the first focus lens, and a third focus lens is arranged on one side of the second focus lens. A first outer protection assembly is arranged outside the second focus lens, a second outer protection assembly is arranged outside the third focus lens, compound eye mechanical parts are arranged at the upper end and the lower end of the first outer protection assembly correspondingly, and the first outer protection assembly moves to adjust the distance between the first outer protection assembly and the second outer protection assembly. Each of the first outer protection assembly and the second outer protection assembly comprises an outer sheath, a first side plate and a second side plate. According to the scheme, the problems that an existing compound eye structure for the photoetching machine is inconvenient to adjust the light source angle and adjust the distance between optical parts, and the optical efficiency is low in a four-inch optical system are solved.

Description

Technical Field

[0001] This utility model relates to the field of lithography machine technology, specifically to a compound eye structure for a lithography machine. Background Technology

[0002] A lithography machine compound eye refers to a system composed of multiple small lithography machine units, similar to the structure of a compound eye. This system improves the overall processing efficiency and precision through the coordinated work of multiple small lithography machines.

[0003] For example, the Chinese authorized patent (photolithography machine) with announcement number CN211123620U includes a photolithography plate floatingly connected to a frame, and a carrier unit capable of moving relative to the photolithography plate to bring a silicon wafer on the carrier unit into contact with the photolithography plate; a photolithography machine in which the photolithography plate is floatingly connected to a frame; the carrier unit is provided with a second sealing part, the second sealing part surrounding the silicon wafer; when the carrier unit moves to bring the silicon wafer into contact with the photolithography plate, a vacuum adsorption region is formed between the second sealing part and the photolithography plate, and the silicon wafer is accommodated in the vacuum adsorption region; by creating a vacuum between the photolithography plate and the silicon wafer to bring the photolithography plate into contact with the silicon wafer, a tight fit between the silicon wafer and the photolithography plate is ensured, thereby ensuring the positional accuracy of photolithography on the silicon wafer.

[0004] However, the existing compound eye structure used in lithography machines is inconvenient for adjusting the light source angle and the spacing between optical components, resulting in low optical efficiency in a four-inch optical system. Therefore, it does not meet the current requirements. To address this, we propose a compound eye structure for lithography machines. Utility Model Content

[0005] The purpose of this invention is to provide a compound eye structure for lithography machines to solve the problems mentioned in the background art, such as the inconvenience of adjusting the light source angle and the spacing between optical components, and the low optical efficiency in a four-inch optical system.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a compound eye structure for a lithography machine, comprising: a mounting adapter plate, a first focusing lens disposed on one side of the mounting adapter plate, a second focusing lens disposed on one side of the first focusing lens, a third focusing lens disposed on one side of the second focusing lens, a first outer protective assembly disposed outside the second focusing lens, a second outer protective assembly disposed outside the third focusing lens, compound eye mechanical parts disposed at the upper and lower ends of the first outer protective assembly, and the first outer protective assembly can move along the axis to adjust the distance between itself and the second outer protective assembly.

[0007] Preferably, both the first outer protective assembly and the second outer protective assembly include an outer sheath, a first side plate, and a second side plate, with the first side plate and the second side plate located on both sides of the outer sheath, respectively.

[0008] Preferably, one side surface of the outer sheath, the first side plate, and the second side plate is provided with a side plate mounting hole, and the outer sheath, the first side plate, and the second side plate are fixed by external bolts through the side plate mounting holes.

[0009] Preferably, the outer edge surface of the outer sheath is provided with a sleeve mounting hole, and the upper surface center of the compound eye mechanical component is provided with an adjustment groove, and multiple adjustment grooves are provided. The adjustment grooves correspond to the sleeve mounting holes of the first outer sheath assembly and are fixed by external bolts, and the bolts move along the adjustment grooves.

[0010] Preferably, both sides of the adjustment groove are provided with connection holes, the first focusing lens is provided with an installation sleeve, and the outer edge surface of the installation sleeve is also provided with a sleeve installation hole, and the external bolt of the connection hole is threadedly fixed to the sleeve installation hole.

[0011] Preferably, a mounting side plate is provided on one side of the mounting sleeve, and the external bolts of the mounting side plate are fixed to the mounting sleeve.

[0012] Preferably, one side surface of the mounting adapter plate is provided with a plate hole, and the plate hole penetrates the mounting adapter plate, and a bolt is inserted into one end of the plate hole to fix it to the mounting sleeve.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] (1) This utility model sets up a first focusing lens, a second focusing lens and a third focusing lens. The ultraviolet light emitted by the light source passes through the first focusing lens and is distributed at the most suitable angle on the second focusing lens. Then, the second focusing lens evenly splits each beam of light and focuses it onto the third focusing lens. Finally, after passing through the third focusing lens, it is emitted into the subsequent optical system. The distance between the second focusing lens and the third focusing lens is controlled by the second focusing lens to adjust the optical quality of the final optical system output, improve the efficiency of this conventional combination, and increase the power density output of the device. The maximum improvement can reach three times, which greatly improves the customer's production capacity. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0016] Figure 2 This is a schematic diagram of the connection structure between the second focusing lens and the second outer protective assembly of this utility model;

[0017] Figure 3 This is a top view of the overall structure of this utility model;

[0018] Figure 4 This is a schematic diagram of the disassembled structure of the mounting adapter plate and mounting sleeve of this utility model;

[0019] In the diagram: 1. Mounting adapter plate; 2. Compound eye mechanical component; 3. First focusing lens; 4. Second focusing lens; 5. Third focusing lens; 6. Mounting sleeve; 7. First outer protective assembly; 8. Second outer protective assembly; 9. First side plate; 10. Outer protective sleeve; 11. Second side plate; 12. Side plate mounting hole; 13. Adjustment groove; 14. Connection hole; 15. Mounting side plate; 16. Plate hole; 17. Sleeve mounting hole. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0021] Please see Figure 1-4 This utility model provides an embodiment of a compound eye structure for a lithography machine, comprising: a mounting adapter plate 1; a first focusing lens 3 disposed on one side of the mounting adapter plate 1; a mounting sleeve 6 disposed outside the first focusing lens 3; a second focusing lens 4 disposed on one side of the first focusing lens 3; a third focusing lens 5 disposed on one side of the second focusing lens 4; a first outer protective assembly 7 disposed outside the second focusing lens 4; and a second outer protective assembly 8 disposed outside the third focusing lens 5. Compound eye mechanical parts 2 are disposed at both the upper and lower ends of the first outer protective assembly 7, and the first outer protective assembly 7 can move along the axis to adjust the distance between itself and the second outer protective assembly 8. Each of the components 8 includes an outer sheath 10, a first side plate 9, and a second side plate 11. The first side plate 9 and the second side plate 11 are located on both sides of the outer sheath 10. Each of the outer sheath 10, the first side plate 9, and the second side plate 11 has a side plate mounting hole 12 on one side surface. The outer sheath 10, the first side plate 9, and the second side plate 11 are fixed by external bolts through the side plate mounting holes 12. The first focusing lens 3, the second focusing lens 4, and the third focusing lens 5 are respectively embedded in the center of the mounting sleeve 6 and the outer sheath 10. The two sides of the outer sheath 10 are protected by the first side plate 9 and the second side plate 11. The two sides of the mounting sleeve 6 are protected by the mounting adapter plate 1 and the mounting side plate 15, thereby improving safety.

[0022] The outer edge surface of the outer sheath 10 is provided with a sleeve mounting hole 17. The upper surface center of the compound eye mechanical component 2 is provided with an adjustment groove 13, and multiple adjustment grooves 13 are provided. The adjustment grooves 13 correspond to the sleeve mounting holes 17 of the first outer sheath component 7 and are fixed by external bolts. The bolts move along the adjustment grooves 13. Both sides of the adjustment grooves 13 are provided with connection holes 14. The outer edge surface of the mounting sleeve 6 is also provided with a sleeve mounting hole 17. The external bolts of the connection holes 14 are threaded to the sleeve mounting holes 17. One side of the mounting sleeve 6 is provided with a mounting side plate 15, and the external bolts of the mounting side plate 15 are fixed to the mounting sleeve 6. One side surface of the mounting adapter plate 1 is provided with a plate hole 16, and the plate hole 16 penetrates the mounting adapter plate 1. One end of the plate hole 16 is inserted into a bolt and fixed to the mounting sleeve 6.

[0023] The outer sleeve 10 corresponding to the mounting sleeve 6 and the second outer protective component 8 is connected to the connecting hole 14 by an external bolt, thereby fixing it to the compound eye mechanical component 2. The first outer protective component 7 is installed between the mounting sleeve 6 and the second outer protective component 8, and the adjusting groove 13 corresponds to the sleeve mounting hole 17 of the first outer protective component 7 and is fixed by an external bolt. The bolt moves along the adjusting groove 13 to achieve the spacing between the first outer protective component 7 and the second outer protective component 8.

[0024] The entire assembly is mounted on the lithography machine using an adapter plate 1. The ultraviolet light emitted from the light source passes through the first focusing lens 3 and is distributed at the most suitable angle onto the second focusing lens 4. Then, the second focusing lens 4 evenly splits each beam of light and focuses it onto the third focusing lens 5. Finally, after passing through the third focusing lens 5, the light exits into the subsequent optical system. By controlling the distance between the second focusing lens 4 and the third focusing lens 5, the optical quality of the final optical system output is adjusted, improving the efficiency of this conventional combination and increasing the power density output of the equipment by up to three times, greatly increasing customer productivity.

[0025] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A compound eye structure for a lithography machine, comprising a mounting adapter plate (1), characterized in that: A first focusing lens (3) is provided on one side of the mounting adapter plate (1), a second focusing lens (4) is provided on one side of the first focusing lens (3), a third focusing lens (5) is provided on one side of the second focusing lens (4), a first outer protective assembly (7) is provided outside the second focusing lens (4), and a second outer protective assembly (8) is provided outside the third focusing lens (5). Compound eye mechanical parts (2) are provided at the upper and lower ends of the first outer protective assembly (7), and the first outer protective assembly (7) moves along the edge to adjust the distance between it and the second outer protective assembly (8).

2. The compound eye structure for a lithography machine according to claim 1, characterized in that: The first outer protective assembly (7) and the second outer protective assembly (8) both include an outer sheath (10), a first side plate (9) and a second side plate (11), and the first side plate (9) and the second side plate (11) are located on both sides of the outer sheath (10).

3. The compound eye structure for a lithography machine according to claim 2, characterized in that: The outer sheath (10), the first side plate (9), and the second side plate (11) are all provided with side plate mounting holes (12) on one side surface, and the outer sheath (10), the first side plate (9), and the second side plate (11) are fixed by external bolts through the side plate mounting holes (12).

4. The compound eye structure for a lithography machine according to claim 2, characterized in that: The outer edge surface of the outer sheath (10) is provided with a sleeve mounting hole (17), and the upper surface center of the compound eye mechanical component (2) is provided with an adjustment groove (13), and there are multiple adjustment grooves (13). The adjustment grooves (13) correspond to the sleeve mounting hole (17) of the first outer sheath component (7), and are fixed by external bolts, and the bolts move along the adjustment grooves (13).

5. The compound eye structure for a lithography machine according to claim 4, characterized in that: Both sides of the adjustment groove (13) are provided with connection holes (14), the first focusing lens (3) is provided with an installation sleeve (6), and the outer edge surface of the installation sleeve (6) is also provided with a sleeve installation hole (17), and the external bolt of the connection hole (14) is threadedly fixed to the sleeve installation hole (17).

6. The compound eye structure for a lithography machine according to claim 5, characterized in that: The mounting sleeve (6) has a mounting side plate (15) on one side, and the mounting side plate (15) is fixed to the mounting sleeve (6) by external bolts.

7. The compound eye structure for a lithography machine according to claim 5, characterized in that: The mounting adapter plate (1) has a hole (16) on one side surface, and the hole (16) penetrates the mounting adapter plate (1), and a bolt is inserted into one end of the hole (16) to fix it to the mounting sleeve (6).

Images