Magnetic target distance adjusting structure and coating equipment

Abstract

The utility model provides a magnetic target distance adjusting structure and coating equipment, which belongs to the technical field of semiconductor production equipment and comprises a first mounting part, a Z-axis driving component, a second mounting part, a Y-axis driving component, a magnetron and an X-axis driving component. And at least one of a position between the Z-axis driving assembly and the first mounting part, a position between the Y-axis driving assembly and the second mounting part, and a position between the X-axis driving assembly and the magnetron is in floating connection. When the material of the sputtering surface is reduced and the distance between the magnetron and the sputtering surface of the target material is changed, the magnetron can be controlled to move upwards by utilizing the Z-axis driving assembly, so that the distance between the magnetron and the sputtering surface is adjusted, the distance is always kept consistent along with the prolonging of the processing time, and the coating consistency is further ensured. Wherein floating connection is adopted in the X-axis direction, the Y-axis direction and the Z-axis direction, so that the smoothness of movement adjustment is improved, and normal implementation of an adjustment mechanism is ensured.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, specifically relating to a magnetic target distance adjustment structure and coating equipment. Background Technology

[0002] Magnetron sputtering, as a highly efficient thin film deposition technology, is widely used in vacuum coating industries such as semiconductors and photovoltaics. Magnetron sputtering works by the interaction of an electric field and a magnetic field. Electrons, accelerated by the electric field, collide with argon atoms as they fly towards the substrate, ionizing into a large number of argon ions and electrons. The electrons then fly towards the substrate. The argon ions, accelerated by the electric field, bombard the target material, sputtering out a large number of target atoms and ions, which are then deposited on the substrate to form a film.

[0003] In existing technologies, the magnetron is controlled to move within a planar range. Over time, the sputtering surface of the target material is consumed, causing the distance between the sputtering surface and the magnetron to change, which affects the consistency of the coating. Utility Model Content

[0004] This invention aims to at least solve one of the aforementioned technical problems existing in the prior art. To this end, in a first aspect, this invention provides a magnetic target distance adjustment structure capable of adjusting the distance between the sputtering surface and the magnetron, thereby ensuring the consistency of the coating.

[0005] Secondly, this utility model provides a coating device that applies the above-mentioned magnetic target distance adjustment structure.

[0006] The magnetic target distance adjustment structure according to the first aspect of the present invention includes:

[0007] First Installation Department;

[0008] Z-axis drive assembly, which is connected to the first mounting part and is used to drive the first mounting part to adjust its height;

[0009] The second mounting part is movably and adjustably connected to the first mounting part along the Y-axis direction;

[0010] Y-axis drive assembly, the Y-axis drive assembly is connected to the second mounting part, and is used to drive the second mounting part to move and adjust along the Y-axis direction;

[0011] A magnetron, which is movably and adjustably connected to the second mounting portion along the X-axis direction;

[0012] An X-axis drive assembly is connected to the magnetron and is used to drive the magnetron to move and adjust along the X-axis direction.

[0013] Specifically, at least one of the following components is floatingly connected: between the Z-axis drive assembly and the first mounting part, between the Y-axis drive assembly and the second mounting part, and between the X-axis drive assembly and the magnetron.

[0014] The magnetic target distance adjustment structure according to the embodiment of this utility model has at least the following beneficial effects:

[0015] The magnetic target distance adjustment structure of this invention utilizes X-axis and Y-axis drive components to move the magnetron within a planar range, enabling normal sputtering operations. When the material on the sputtering surface decreases, causing a change in the distance between the magnetron and the target sputtering surface, the Z-axis drive component can be used to control the magnetron to move upwards, thereby adjusting the distance between the magnetron and the sputtering surface. This distance remains consistent over processing time, ensuring consistent coating quality.

[0016] Since each adjustment axis is equipped with multiple guide structures, floating connections are used in the X-axis, Y-axis, and Z-axis directions to improve the smoothness of movement adjustment and ensure the normal operation of the adjustment mechanism.

[0017] According to some embodiments of the present invention, the Z-axis drive assembly includes:

[0018] Multiple lifting guide shafts are vertically arranged around the periphery of the first mounting part;

[0019] A lifting screw, which is vertically inserted through the edge of the first mounting part and threadedly connected to the first mounting part;

[0020] Z-axis motor, the Z-axis motor being drivenly connected to the lifting lead screw;

[0021] The lifting guide shaft and the first mounting part have a horizontal floating gap.

[0022] According to some embodiments of the present invention, the Z-axis drive assembly provides the lifting lead screws on both sides opposite to the first mounting portion. The Z-axis drive assembly also includes a lifting synchronous shaft, which is disposed between the lifting lead screws on both sides. The lifting synchronous shaft is provided with threaded gears that intersect at 90° to engage the lifting lead screws. The Z-axis motor is connected to the lifting synchronous shaft.

[0023] According to some embodiments of the present invention, the Y-axis drive assembly includes:

[0024] Y-axis lead screw, wherein the Y-axis lead screw is arranged along the Y-axis direction;

[0025] The Y-axis adjustment part is sleeved on the Y-axis lead screw and threadedly connected to the Y-axis lead screw;

[0026] The Y-axis connecting shaft is vertically disposed in the second mounting part and also vertically passes through the Y-axis adjusting part;

[0027] The Y-axis motor is driven and connected to the Y-axis lead screw.

[0028] According to some embodiments of the present invention, the Y-axis adjustment part is provided with a Y-axis connecting sleeve, the Y-axis connecting shaft passes through the Y-axis connecting sleeve, and there is a gap between the Y-axis connecting sleeve and the Y-axis connecting shaft.

[0029] According to some embodiments of the present invention, the first mounting part is provided with a plurality of Y-axis guide rails, the Y-axis guide rails extend along the Y-axis direction, and the second mounting part is slidably connected to the Y-axis guide rails.

[0030] According to some embodiments of the present invention, the X-axis drive assembly includes:

[0031] X-axis lead screw, wherein the X-axis lead screw is arranged along the X-axis direction;

[0032] X-axis adjustment part, which can be moved and adjusted along the X-axis direction and is threadedly connected to the X-axis lead screw;

[0033] The X-axis connecting part is fixedly connected to the magnetron and is also movable and adjustable along the Y-axis direction to the X-axis adjusting part.

[0034] According to some embodiments of the present invention, the X-axis drive assembly further includes an X-axis guide rail, which is arranged along the X-axis direction, and the X-axis adjustment part is slidably disposed on the X-axis guide rail.

[0035] According to some embodiments of this utility model, the X-axis connecting part includes:

[0036] A floating connecting block is slidably connected to the X-axis adjustment part, and the floating connecting block is provided with a snap-fit ​​groove in the vertical direction;

[0037] A card holder, one end of which is fixedly connected to the magnetron, and the other end of which is snapped into the card slot;

[0038] The locking seat is capable of moving up and down relative to the floating connecting block, and there is a gap between the locking seat and the locking slot.

[0039] The coating apparatus according to a second aspect of the present invention includes a magnetic target distance adjustment structure of any of the above structures.

[0040] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and some of these additional aspects and advantages will become apparent from the description or may be learned by practice of the invention. Attached Figure Description

[0041] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0042] Figure 1 This is a schematic diagram of the overall top view structure of this application;

[0043] Figure 2 This is an overall sectional view of this application;

[0044] Figure 3 This is a schematic diagram showing a connection between the Y-axis drive assembly and the second mounting part.

[0045] Figure 4 A schematic diagram of a structure for an X-axis drive assembly;

[0046] Figure 5 A top view schematic diagram of an X-axis drive assembly;

[0047] Figure 6 This is a schematic diagram of a floating connection block. Detailed Implementation

[0048] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0049] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0050] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0051] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0052] In the description of this utility model, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0053] Reference Figures 1 to 6 An embodiment of this utility model proposes a magnetic target distance adjustment structure, comprising:

[0054] First installation section 100;

[0055] Z-axis drive assembly 400 is connected to the first mounting part 100 and is used to drive the first mounting part 100 to lift and adjust.

[0056] The second mounting part 200 is movably and adjustably connected to the first mounting part 100 along the Y-axis direction;

[0057] Y-axis drive assembly 500 is connected to the second mounting part 200 and is used to drive the second mounting part 200 to move and adjust along the Y-axis direction.

[0058] Magnetron 300 is movably and adjustably connected to the second mounting part 200 along the X-axis direction;

[0059] X-axis drive assembly 600 is connected to magnetron 300 and is used to drive magnetron 300 to move and adjust along the X-axis direction;

[0060] Among them, at least one of the following is floatingly connected: between the Z-axis drive assembly 400 and the first mounting part 100, between the Y-axis drive assembly 500 and the second mounting part 200, and between the X-axis drive assembly 600 and the magnetron 300.

[0061] In application, the Z-axis drive assembly 400, Y-axis drive assembly 500, and X-axis drive assembly 600 are all mounted on the coating chamber. The first mounting part 100 is fixed in the coating chamber via the Z-axis drive assembly 400. The second mounting part 200 is mounted on the first mounting part 100 and is driven to move along the Y-axis only via the Y-axis drive assembly 500. The magnetron 300 is mounted on the second mounting part 200 and is driven to move along the X-axis only via the X-axis drive assembly 600.

[0062] The X-axis and Y-axis are the two vertical directions in the horizontal direction, while the Z-axis is the vertical direction.

[0063] The magnetic target distance adjustment structure of this invention utilizes the X-axis drive assembly 600 and the Y-axis drive assembly 500 to move the magnetron 300 within a planar range, enabling normal sputtering operations. When the material on the sputtering surface decreases, causing a change in the distance between the magnetron 300 and the sputtering surface of the target, the Z-axis drive assembly 400 can be used to control the magnetron 300 to move upward, thereby adjusting the distance between the magnetron 300 and the sputtering surface. This distance remains consistent as the processing time increases, thus ensuring the consistency of the coating.

[0064] Since each adjustment axis is equipped with multiple guide structures, floating connections are used in the X-axis, Y-axis, and Z-axis directions to improve the smoothness of movement adjustment and ensure the normal operation of the adjustment mechanism.

[0065] In some embodiments of this utility model, the Z-axis drive assembly 400 includes four lifting guide shafts 404, a lifting lead screw 401, and a Z-axis motor 405. The four lifting guide shafts 404 are vertically inserted at the four corners of the first mounting portion 100 to ensure the stability of the first mounting portion 100 and to avoid the central area, facilitating controlled movement of the magnetron 300 within the plane. The lifting lead screw 401 is vertically inserted at the edge of the first mounting portion 100 and threadedly connected to it. Similarly, by positioning the lifting lead screw 401 at the edge of the first mounting portion 100, under the guidance of the lifting guide shafts 404, the lifting lead screw 401 can effectively control the lifting and lowering adjustment of the first mounting portion 100, while avoiding the central area, facilitating controlled movement of the magnetron 300 within the plane. The Z-axis motor 405 is driven by the lifting lead screw 401 and is used to drive the lifting lead screw 401 to rotate forward or reverse, thereby driving the first mounting portion 100 to rise or fall.

[0066] The lifting guide shaft 404 and the first mounting part 100 have a horizontal floating gap. This effectively prevents interference or jamming between the first mounting part 100 and any of the four lifting guide shafts 404. Utilizing this floating gap, the first mounting part 100 can quickly rise or fall along the lifting guide shaft 404 under the drive of the lifting screw 401, ensuring smooth adjustment.

[0067] Specifically, a linear bearing is provided on the first mounting part 100, and the lifting guide shaft 404 passes through the linear bearing. A large fitting clearance is adopted between the linear bearing and the lifting guide shaft 404, so that there is a large clearance between the lifting guide shaft 404 and the linear bearing in the circumferential direction, thereby achieving the aforementioned floating clearance.

[0068] The specific gap value can be flexibly set as needed without affecting the lifting and adjusting of the first mounting part 100, and is not specifically limited here.

[0069] In some embodiments of this utility model, the Z-axis drive assembly 400 has a lifting screw 401 on each of the opposite sides of the first mounting portion 100. The Z-axis drive assembly 400 also includes a lifting synchronous shaft 403, which is disposed between the lifting screws 401 on both sides, and the lifting synchronous shaft 403 is provided with a 90° intersecting threaded gear 402 that meshes with the lifting screws 401. The Z-axis motor 405 is connected to the lifting synchronous shaft 403.

[0070] The structural configuration of this embodiment, using two lifting screws 401 to drive the first mounting part 100, effectively ensures that both sides of the first mounting part 100 are simultaneously raised and lowered, avoiding wear on the lifting guide shaft 404 that may be caused by unilateral driving. Utilizing the lifting synchronization shaft 403 for synchronous driving ensures driving consistency and effectively reduces the reaction force of the lifting screws 401 on the Z-axis motor 405, thus helping to extend its service life.

[0071] In some embodiments of this utility model, the Y-axis drive assembly 500 includes a Y-axis lead screw 501, a Y-axis adjusting part 502, a Y-axis connecting shaft 201, and a Y-axis motor 503. The Y-axis lead screw 501 is disposed within the coating cavity along the Y-axis direction. The Y-axis adjusting part 502 is sleeved on the Y-axis lead screw 501 and threadedly connected to it, thereby allowing it to move and adjust along the axial direction (i.e., the Y-axis direction) of the Y-axis lead screw 501 when it rotates. The Y-axis connecting shaft 201 is vertically disposed on the second mounting part 200 and simultaneously passes vertically through the Y-axis adjusting part 502. The Y-axis motor 503 is drively connected to the Y-axis lead screw 501 to drive the Y-axis lead screw 501 to rotate forward or backward.

[0072] It is understandable that, since the second mounting part 200 is slidably mounted on the first mounting part 100, it will rise and fall synchronously with the lifting and lowering adjustment of the first mounting part 100. However, the Y-axis lead screw 501 is mounted on the coating cavity and will not rise or fall with it. In this embodiment, a Y-axis connecting shaft 201 is vertically mounted on the second mounting part 200 and passes through the Y-axis adjusting part 502. When lifting and lowering is performed, the Y-axis connecting shaft 201 moves up and down within the Y-axis adjusting part 502. When the Y-axis lead screw 501 controls the Y-axis adjusting part 502 to move and adjust along the Y-axis direction, it can also drive the Y-axis connecting shaft 201 to move synchronously, thereby driving the second mounting part 200 to move synchronously along the Y-axis direction.

[0073] This embodiment, by mounting the drive on the coating cavity, helps to reduce the overall weight of the first mounting part 100, the second mounting part 200, and the magnetron 300, thereby reducing the requirement for driving force and improving transmission accuracy and efficiency.

[0074] Based on the structure of the above embodiments, in some embodiments of this utility model, the Y-axis adjustment part 502 is provided with a Y-axis connecting sleeve 101. The Y-axis connecting shaft 201 passes through the Y-axis connecting sleeve 101, and a large fitting clearance is adopted between the inner diameter of the Y-axis connecting sleeve 101 and the Y-axis connecting shaft 201, so that there is a floating clearance between the Y-axis connecting sleeve 101 and the Y-axis connecting shaft 201.

[0075] Similarly, by increasing the fitting clearance between the Y-axis connecting sleeve 101 and the Y-axis connecting shaft 201, this embodiment can effectively improve the smoothness of the lifting and adjusting process and the Y-axis direction adjustment process.

[0076] In some embodiments of this utility model, the first mounting part 100 is provided with a plurality of Y-axis guide rails, which extend along the Y-axis direction and are arranged along the X-axis direction. The second mounting part 200 slidably connects all the Y-axis guide rails.

[0077] This embodiment uses multiple Y-axis guide rails to install the second mounting part 200, which effectively ensures installation stability. Combined with the clearance fit described in the previous embodiment, this reduces precision requirements and controls production costs.

[0078] In some embodiments of this utility model, the X-axis drive assembly 600 includes an X-axis lead screw 601, an X-axis adjustment part 602, an X-axis connecting part, and an X-axis motor 603. The X-axis lead screw 601 is disposed within the coating cavity along the X-axis direction. Referring to the figures, since the distance of X-axis movement adjustment is limited, the X-axis lead screw 601 does not need to span the coating cavity like the Y-axis lead screw 501; it only needs to cover the movement adjustment distance in the X-axis direction. The X-axis adjustment part 602 can be moved and adjusted along the X-axis direction and is threadedly connected to the X-axis lead screw 601, thereby driving the movement and adjustment along the X-axis direction via the X-axis lead screw 601. The X-axis connecting part is fixedly connected to the magnetron 300 and is also movable and adjustable along the Y-axis direction, connected to the X-axis adjustment part 602. The X-axis motor 603 is driven by the X-axis lead screw 601.

[0079] During operation, when the magnetron 300 is controlled to move and adjust in the Y-axis direction, the X-axis connecting part can move along the Y-axis direction on the X-axis adjusting part 602. When the magnetron 300 is controlled to move and adjust in the X-axis direction, it is only necessary to control the X-axis lead screw 601 to rotate, thereby driving the X-axis adjusting part 602 to move along the X-axis direction, and the magnetron 300 can be moved through the X-axis connecting part.

[0080] In some embodiments of this invention, the X-axis drive assembly 600 further includes two X-axis guide rails 604, both of which are arranged along the X-axis direction and distributed on both sides of the coating chamber along the Y-axis direction. An X-axis adjustment part 602 is slidably disposed on the two X-axis guide rails 604. That is, the X-axis adjustment part 602 has a certain length along the Y-axis direction to accommodate the sliding of the X-axis connecting part.

[0081] In some embodiments of this utility model, the X-axis connecting part includes a floating connecting block 605 and a locking seat 606. A guide portion is provided on the side of the X-axis adjusting part 602, extending along the Y-axis direction. This guide portion has an upper inclined surface and a lower inclined surface that are symmetrically arranged, and a cylindrical surface connecting the upper and lower inclined surfaces. The floating connecting block 605 is locked onto this cylindrical surface and slides therewith. The floating connecting block 605 has a locking groove 6051 arranged vertically. One end of the locking seat 606 is fixedly connected to the magnetron 300, and the other end is locked into the locking groove 6051. The locking seat 606 can move up and down relative to the floating connecting block 605, and the size of the locking groove 6051 is larger than the portion of the locking seat 606 that engages with the locking groove 6051, thereby creating a floating gap between the two.

[0082] Since the floating connecting block 605 is snapped onto the cylindrical surface of the X-axis adjusting part 602, it also has a floating gap that can swing around the axis of the cylindrical surface.

[0083] It is understandable that the magnetic target distance adjustment structure in this invention, by setting floating gaps in three axes, can effectively reduce the machining accuracy requirements for adjustment in each axis, as well as the difficulty of assembly and debugging. The gap fit also improves the smoothness of adjustment, thereby reducing errors caused by machining accuracy and installation accuracy.

[0084] Based on this, the materials of the structure can be further designed. For example, the floating connecting block 605 and the Y-axis connecting sleeve 101 can be made of engineering plastics such as nylon, acetal, PEEK, Teflon, and X1082, while the mating parts can be made of metal. The friction between the metal and the plastic can play a shock-absorbing role, reducing the impact caused by the high-speed movement of the magnetron 300. At the same time, it can also reduce the generation of dust during the friction process.

[0085] Furthermore, an oil groove can be provided between two structures with a sliding fit to store lubricating oil. For example, an oil groove can be provided on the groove wall of the snap-fit ​​groove 6051, or on the inner wall of the Y-axis connecting sleeve 101.

[0086] An embodiment of this utility model also proposes a coating apparatus, including a magnetic target distance adjustment structure of any of the above-described structures. Clearly, by applying the aforementioned magnetic target distance adjustment structure, this coating apparatus can effectively ensure coating consistency and overcome the shortcomings of traditional structures.

[0087] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention. Furthermore, the embodiments of the present invention and the features thereof can be combined with each other unless otherwise specified.

Claims

1. A magnetic target distance adjustment structure, characterized in that, include: First Installation Department; Z-axis drive assembly, which is connected to the first mounting part and is used to drive the first mounting part to adjust its height; The second mounting part is movably and adjustably connected to the first mounting part along the Y-axis direction; Y-axis drive assembly, the Y-axis drive assembly is connected to the second mounting part, and is used to drive the second mounting part to move and adjust along the Y-axis direction; A magnetron, which is movably and adjustably connected to the second mounting portion along the X-axis direction; An X-axis drive assembly is connected to the magnetron and is used to drive the magnetron to move and adjust along the X-axis direction. Specifically, at least one of the following components is floatingly connected: between the Z-axis drive assembly and the first mounting part, between the Y-axis drive assembly and the second mounting part, and between the X-axis drive assembly and the magnetron.

2. The magnetic target distance adjustment structure according to claim 1, characterized in that, The Z-axis drive assembly includes: Multiple lifting guide shafts are vertically arranged around the periphery of the first mounting part; A lifting screw, which is vertically inserted through the edge of the first mounting part and threadedly connected to the first mounting part; Z-axis motor, the Z-axis motor being drivenly connected to the lifting lead screw; The lifting guide shaft and the first mounting part have a horizontal floating gap.

3. The magnetic target distance adjustment structure according to claim 2, characterized in that, The Z-axis drive assembly has the lifting screws arranged on both sides opposite to the first mounting part. The Z-axis drive assembly also includes a lifting synchronous shaft, which is arranged between the lifting screws on both sides. The lifting synchronous shaft is provided with threaded gears that cross at 90° to engage the lifting screws. The Z-axis motor is connected to the lifting synchronous shaft.

4. The magnetic target distance adjustment structure according to claim 1, characterized in that, The Y-axis drive component includes: Y-axis lead screw, wherein the Y-axis lead screw is arranged along the Y-axis direction; The Y-axis adjustment part is sleeved on the Y-axis lead screw and threadedly connected to the Y-axis lead screw; The Y-axis connecting shaft is vertically disposed in the second mounting part and also vertically passes through the Y-axis adjusting part; The Y-axis motor is driven and connected to the Y-axis lead screw.

5. The magnetic target distance adjustment structure according to claim 4, characterized in that, The Y-axis adjustment part is provided with a Y-axis connecting sleeve, the Y-axis connecting shaft passes through the Y-axis connecting sleeve, and there is a gap between the Y-axis connecting sleeve and the Y-axis connecting shaft.

6. The magnetic target distance adjustment structure according to claim 1, characterized in that, The first mounting part is provided with multiple Y-axis guide rails, which extend along the Y-axis direction, and the second mounting part is slidably connected to the Y-axis guide rails.

7. The magnetic target distance adjustment structure according to claim 1, characterized in that, The X-axis drive component includes: X-axis lead screw, wherein the X-axis lead screw is arranged along the X-axis direction; X-axis adjustment part, which can be moved and adjusted along the X-axis direction and is threadedly connected to the X-axis lead screw; The X-axis connecting part is fixedly connected to the magnetron and is also movable and adjustable along the Y-axis direction to the X-axis adjusting part.

8. The magnetic target distance adjustment structure according to claim 7, characterized in that, The X-axis drive assembly also includes an X-axis guide rail, which is arranged along the X-axis direction, and the X-axis adjustment part is slidably disposed on the X-axis guide rail.

9. The magnetic target distance adjustment structure according to claim 7, characterized in that, The X-axis connecting part includes: A floating connecting block is slidably connected to the X-axis adjustment part, and the floating connecting block is provided with a snap-fit ​​groove in the vertical direction; A card holder, one end of which is fixedly connected to the magnetron, and the other end of which is snapped into the card slot; The locking seat is capable of moving up and down relative to the floating connecting block, and there is a gap between the locking seat and the locking slot.

10. A coating apparatus, characterized in that, Includes the magnetic target distance adjustment structure as described in any one of claims 1 to 9.

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