Door body sealing adjusting structure of vacuum coating machine

Abstract

The utility model provides a door body sealing and adjusting structure of a vacuum coating machine. The door body sealing and adjusting structure comprises a vacuum cavity, a door body and a plurality of hinge structures, the hinge structure comprises a first fixed seat locked on the door body, a second fixed seat locked on the outer wall of the vacuum cavity, and a connecting block; a first groove is formed in the front side of the first fixing base, the first end of the connecting block is rotationally installed in the first groove through a first pin shaft, and an assembling gap is formed between the connecting block and the inner bottom face of the first groove. The second end of the connecting block is rotationally connected with the second fixed seat through a second pin shaft; the two sides, corresponding to the first pin shaft, of the connecting block are in threaded fit with jackscrews abutting against the inner bottom face of the first groove. After the door body is closed, the connecting block can slightly rotate and deflect around the first pin shaft by adjusting the thread matching depth of the jackscrews on the left side and the right side of the first pin shaft, and deflection movement is conducted to the outer wall of the vacuum cavity through the second seat body connected with the connecting block, so that the door body and the vacuum cavity are tensioned or loosened, and the sealing performance of the door body and the vacuum cavity is adjusted.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, specifically to a door sealing adjustment structure for a vacuum coating machine. Background Technology

[0002] Vacuum coating machines are mainly used to coat the surfaces of various workpieces to enhance their properties. Before coating begins, moisture, oxygen, and impurities in the vacuum chamber must be removed to the greatest extent possible to prevent contamination during the deposition process. This ensures a pure, dense film with good adhesion. This process requires a very high vacuum level within the vacuum chamber, with the gas pressure needing to reach 10... -4 Pa -10 -3 The pressure is around 100 Pa. However, due to the large volume of the vacuum chamber, the height of the door alone can reach several meters. The door is usually mounted on the vacuum chamber by hinges. In this case, the inevitable assembly gaps in the hinges make it difficult for the door to achieve a high level of sealing, which in turn reduces the vacuuming effect and prolongs the vacuuming time. Utility Model Content

[0003] The purpose of this invention is to provide a door sealing adjustment structure that can improve the sealing performance of a vacuum cavity.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0005] A door sealing and adjusting structure for a vacuum coating machine includes a vacuum chamber arranged vertically along its axis. A door is located on the front side of the vacuum chamber. The door is rotatably mounted on the vacuum chamber via several hinge structures, and the door and the vacuum chamber have circumferentially aligned and correspondingly connected mating planes. The hinge structures include a first fixing seat locked to the door, a second fixing seat locked to the outer wall of the vacuum chamber, and a connecting block. A first groove is formed on the front side of the first fixing seat. The first end of the connecting block is rotatably mounted in the first groove via a vertical first pin, and the connecting block has an assembly gap with the inner bottom surface of the first groove. The second end of the connecting block is rotatably connected to the second fixing seat via a vertical second pin. The left and right sides of the connecting block corresponding to the first pin are respectively threaded with set screws that abut against the inner bottom surface of the first groove.

[0006] In a preferred embodiment, a second groove is formed on the front side of the second fixing seat, and the second end of the connecting block is rotatably mounted in the second groove.

[0007] In a preferred embodiment, the widths of the two ends of the connecting block are respectively adapted to the widths of the first groove and the second groove, so that the connecting block will not slide vertically.

[0008] In a preferred embodiment, the thickness of the connecting block is adapted to the depth of the first groove and the second groove, respectively, so that the connecting block does not protrude from the surfaces of the first fixing seat and the second fixing seat.

[0009] In a preferred embodiment, when the door is closed, the connecting block is substantially perpendicular to the second fixing seat.

[0010] In a preferred embodiment, corresponding to the hinge structure, the front side of the door has a first mounting surface parallel to the mating plane, and the first fixing seat is locked to the first mounting surface by a plurality of first screws, such that the inner bottom surface of the first groove is parallel to the first mounting surface.

[0011] In a preferred embodiment, corresponding to the hinge structure, the side of the vacuum cavity has a second mounting surface perpendicular to the mating plane, and the side of the second fixing seat is locked to the second mounting surface by a plurality of second screws.

[0012] In a preferred embodiment, one vertical edge of the door is hinged to the vacuum cavity via four sets of hinge structures evenly distributed vertically.

[0013] The beneficial effects of this utility model are as follows: when the door is closed, by adjusting the thread engagement depth of the set screws on the left and right sides of the first pin, the connecting block can be slightly rotated and deflected around the first pin, and the deflection movement is transmitted to the outer wall of the vacuum chamber through the second seat connected to the connecting block, so as to tighten or loosen the door and the vacuum chamber, thereby adjusting the sealing performance of the two. Attached Figure Description

[0014] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0015] Figure 1 This is a schematic diagram of the overall installation structure of the vacuum cavity and the door in the embodiment;

[0016] Figure 2 for Figure 1 Enlarged view of section A in the middle;

[0017] Figure 3 This is a schematic diagram of the hinge structure in the embodiment;

[0018] Figure 4 This is a schematic diagram of the horizontal cross-sectional structure of the hinge structure in the embodiment. Detailed Implementation

[0019] The present invention will be further described below with reference to the accompanying drawings:

[0020] refer to Figures 1 to 4This embodiment discloses a door sealing and adjustment structure for a vacuum coating machine, comprising a vacuum chamber 1 arranged vertically along its axis, a door 2 located on the front side of the vacuum chamber 1, the door 2 being rotatably mounted on the vacuum chamber 1 via a plurality of hinge structures 3, and a circumferentially arranged and correspondingly connected joint plane 100 between the door 2 and the vacuum chamber 1; the hinge structure 3 includes a first fixing seat 31 locked to the door 2, a second fixing seat 32 locked to the outer wall of the vacuum chamber 1, and a connecting block 33; a first groove 311 is formed on the front side of the first fixing seat 31, the first end of the connecting block 33 is rotatably mounted in the first groove 311 via a vertical first pin 312, and the connecting block 33 has an assembly gap with the inner bottom surface of the first groove 311; the second end of the connecting block 33 is rotatably connected to the second fixing seat 32 via a vertical second pin 321; the left and right sides of the connecting block 33 corresponding to the first pin 312 are respectively threaded with set screws 331 that abut against the inner bottom surface of the first groove 311.

[0021] During the opening or closing of the door 2, the connecting block 33 in the hinge structure 3 rotates around the second pin 321. When the door 2 is closed, the door 2 and the mating plane 100 of the vacuum chamber 1 are in contact. At this time, due to the error of the hinge structure 3, the degree of contact at each hinge structure 3 is inconsistent. At this time, by adjusting the thread engagement depth of the set screws 331 on the left and right sides of the first pin 312 of each hinge structure 3, the connecting block 33 can be slightly rotated and deflected around the first pin 312. This deflection is transmitted to the outer wall of the vacuum chamber 1 through the second seat connected to the connecting block 33, so as to tighten or loosen the door 2 and the vacuum chamber 1, thereby adjusting the sealing performance of the two.

[0022] In a preferred embodiment, a second groove 322 is formed on the front side of the second fixing seat 32, and the second end of the connecting block 33 is rotatably mounted in the second groove 322. The second groove 322 facilitates the installation of the second pin 321 and the connecting block 33, and makes the hinge structure 3 more compact. In other embodiments, the second groove 322 may also be arranged facing the first fixing seat 31.

[0023] In a preferred embodiment, the widths of the two ends of the connecting block 33 are respectively adapted to the widths of the first groove 311 and the second groove 322, so that the connecting block 33 will not slide vertically.

[0024] In a preferred embodiment, the thickness of the connecting block 33 is adapted to the depth of the first groove 311 and the second groove 322, so that the connecting block 33 does not protrude from the surfaces of the first fixing seat 31 and the second fixing seat 32.

[0025] In a preferred embodiment, when the door 2 is closed, the connecting block 33 is substantially perpendicular to the second fixing seat 32. When the connecting block 33 is perpendicular to the second fixing seat 32, not only is the space occupied by the hinge structure 3 smaller, but the rotational sway of the connecting block 33 also makes it easier for the door 2 to shift relative to the vacuum cavity 1 to adjust the sealing performance of both.

[0026] In a preferred embodiment, corresponding to the hinge structure 3, the front side of the door body 2 has a first mounting surface 2a parallel to the mating plane 100. The first fixing seat 31 is locked to the first mounting surface 2a by a plurality of first screws 313, making the inner bottom surface of the first groove 311 parallel to the first mounting surface 2a. The first mounting surface 2a makes the inner bottom surface of the first groove 311 parallel to the mating plane 100, facilitating that the connecting block 33 of the hinge structure 3 is perpendicular to the second fixing seat 32.

[0027] In a preferred embodiment, corresponding to the hinge structure 3, the side of the vacuum cavity 1 has a second mounting surface 1a perpendicular to the joint plane 100. The side of the second fixing seat 32 is locked to the second mounting surface 1a by a plurality of second screws 323. The side of the second fixing seat 32 is fixed to the second mounting surface 1a of the vacuum cavity 1, which increases the joint area while ensuring a compact structure, thereby improving the joint strength.

[0028] In a preferred embodiment, one vertical edge of the door 2 is hinged to the vacuum cavity 1 via four sets of hinge structures 3 evenly distributed vertically. The sealing performance of the door 2 and the vacuum cavity 1 can be adjusted from multiple positions to achieve the best sealing effect.

[0029] The above description does not limit the technical scope of this utility model. Any modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of this utility model shall still fall within the scope of the technical solution of this utility model.

Claims

1. A door sealing and adjusting structure for a vacuum coating machine, comprising a vacuum chamber arranged vertically along its axis, a door body provided on the front side of the vacuum chamber, the door body being rotatably mounted in the vacuum chamber via a plurality of hinge structures, and the door body and the vacuum chamber having circumferentially correspondingly arranged mating planes; characterized in that: The hinge structure includes a first fixing seat locked to the door body, a second fixing seat locked to the outer wall of the vacuum cavity, and a connecting block; a first groove is formed on the front side of the first fixing seat, and the first end of the connecting block is rotatably installed in the first groove through a vertical first pin, and the connecting block and the inner bottom surface of the first groove have an assembly gap; the second end of the connecting block is rotatably connected to the second fixing seat through a vertical second pin; the left and right sides of the connecting block corresponding to the first pin are respectively threaded with set screws that abut against the inner bottom surface of the first groove.

2. The door sealing adjustment structure of a vacuum coating machine according to claim 1, characterized in that: A second groove is formed on the front side of the second fixing seat, and the second end of the connecting block is rotatably installed in the second groove.

3. The door sealing adjustment structure of a vacuum coating machine according to claim 2, characterized in that: The widths at both ends of the connecting block are adapted to the widths of the first groove and the second groove, respectively, so that the connecting block will not slide vertically.

4. The door sealing adjustment structure of a vacuum coating machine according to claim 3, characterized in that: The thickness of the connecting block is adapted to the depth of the first groove and the second groove, so that the connecting block does not protrude from the surface of the first fixing seat and the second fixing seat.

5. The door sealing adjustment structure of a vacuum coating machine according to claim 1, characterized in that: When the door is closed, the connecting block is substantially perpendicular to the second fixed seat.

6. The door sealing adjustment structure of a vacuum coating machine according to claim 5, characterized in that: Corresponding to the hinge structure, the front side of the door has a first mounting surface parallel to the mating plane. The first fixing seat is locked to the first mounting surface by a plurality of first screws, so that the inner bottom surface of the first groove is parallel to the first mounting surface.

7. The door sealing adjustment structure of a vacuum coating machine according to claim 6, characterized in that: Corresponding to the hinge structure, the side of the vacuum cavity has a second mounting surface perpendicular to the joint plane, and the side of the second fixing seat is locked to the second mounting surface by a plurality of second screws.

8. The door sealing adjustment structure of a vacuum coating machine according to claim 1, characterized in that: One vertical edge of the door is hinged to the vacuum cavity via four sets of hinge structures evenly distributed vertically.

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