Large-scale preparation equipment for high-vacuum plasma nano powder

Abstract

The utility model provides large-scale preparation equipment for high-vacuum plasma nano powder. The preparation equipment can comprise a vacuum chamber, a cathode assembly and an anode assembly, the cathode assembly and the anode assembly are oppositely arranged on the two sides of the vacuum chamber, the anode assembly comprises a first driving component, a rotating disc connected with the first driving component and a plurality of anodes, and the anodes are arranged on the rotating disc in the circumferential direction of the rotating disc. The equipment disclosed by the utility model is simple in structure, and can be used for efficiently preparing the nano powder with uniform texture on a large scale.

Description

A high-vacuum plasma nanopowder large-scale preparation equipment Technical Field

[0001] This utility model relates to the field of nanopowder material preparation, and more specifically, to a high-vacuum plasma nanopowder large-scale preparation equipment. Background Technology

[0002] Nanoparticles, due to their unique application properties, have become a hot research topic in materials science. Plasma powder preparation technology is a rapidly developing nanoparticle preparation technique in recent years. Plasma is a state of gaseous matter composed of ions, electrons, and neutral atoms, exhibiting macroscopic electrical neutrality. Due to its characteristics of high temperature, high enthalpy, high chemical reactivity, and controllable reaction atmosphere, plasma, as a heat source, is an efficient and feasible technique for synthesizing nanoparticles. Despite significant progress in plasma nanoparticle preparation, large-scale industrial application has not yet been achieved due to limitations in equipment and production costs, as well as existing technical challenges. Summary of the Invention

[0003] In view of the shortcomings of the existing technology, one of the objectives of this utility model is to solve one or more problems existing in the prior art. For example, one objective of this utility model is to provide a device with a simple structure, high production efficiency, and the ability to prepare uniform nanopowders on a large scale.

[0004] This invention provides a high-vacuum plasma nanopowder large-scale preparation device. The preparation device may include a vacuum chamber, and a cathode assembly and an anode assembly disposed opposite each other on both sides of the vacuum chamber. The anode assembly includes a first driving component, a rotating disk connected to the first driving component, and a plurality of anodes, which are disposed on the rotating disk circumferentially.

[0005] Furthermore, the rotating disk may have several openings, with the anode positioned inside the openings.

[0006] Furthermore, the radially vertical side of the rotating disk can be provided with several hollow components, and the anode is disposed through the hollow components.

[0007] Furthermore, the cathode assembly may include a second driving member, a cathode, and a sleeve fitted on the surface of the cathode. The second driving member is connected to the cathode and is used to drive the cathode to extend and retract within the sleeve.

[0008] Furthermore, the sleeve may have an air inlet for the reaction gas to enter the vacuum chamber.

[0009] Furthermore, it may also include a powder collection platform located at the bottom of the vacuum chamber and a disturbance mechanism connected to the powder collection platform.

[0010] Furthermore, it may also include an observation window located on the vacuum chamber.

[0011] Furthermore, it may also include a pressure reducing valve disposed on the vacuum chamber.

[0012] Compared with the prior art, the beneficial effects of this utility model include at least one of the following:

[0013] (1) The equipment of this utility model has a simple structure, can achieve high efficiency, and can prepare uniform nanopowder on a large scale.

[0014] (2) The equipment of this utility model can change the reaction gas and the type of anode to prepare different types of nanopowders, thus achieving clean production.

[0015] (3) The device of this utility model can utilize the high temperature characteristics of plasma during operation, and no waste is generated in the entire purification process, which is environmentally friendly. Attached Figure Description

[0016] The above and other objects and features of this utility model will become clearer from the following description taken in conjunction with the accompanying drawings, wherein:

[0017] Figure 1 shows a schematic diagram of the high-vacuum plasma nanopowder preparation equipment of this invention.

[0018] Figure 2 shows a left view of the anode mechanism of this utility model.

[0019] Figure 3 shows a top view of the cathode mechanism of this utility model.

[0020] Explanation of reference numerals in the attached figures:

[0021] 1-Vacuum chamber, 2-Cathode assembly, 3-Anode assembly, 4-Powder collection platform, 5-Cathode, 6-Air inlet, 7-Second drive component, 8-Rotating disk, 9-Anode, 10-Pressure reducing valve, 11-Observation window, 12-Sleeve, 13-First drive component. Detailed Implementation

[0022] The high-vacuum plasma nanopowder preparation apparatus according to the present invention will be described in detail below with reference to the accompanying drawings and exemplary embodiments.

[0023] This invention provides a high-vacuum plasma nanopowder large-scale preparation device. In an exemplary embodiment of the high-vacuum plasma nanopowder large-scale preparation device, as shown in FIG1, it may include a vacuum chamber 1, a cathode assembly 2, and an anode assembly 3. The cathode assembly 2 and the anode assembly 3 may be arranged opposite each other on both sides of the vacuum chamber 1. The anode assembly 3 may include a first driving component 13, a rotating disk 8, and an anode 9. The rotating disk 8 and the anode 9 are located inside the vacuum chamber 1. The first driving component 13 is connected to the rotating disk 8 and is used to drive the rotating disk 8 to rotate. A plurality of anodes 9 are arranged on the rotating disk 8. The anodes 9 may be vertically arranged on the rotating disk 9. When a certain anode is consumed, the rotating disk 8 can be rotated using the first driving component 13 to replace the next anode, which facilitates the preparation operation and accelerates the preparation speed of nanopowder. The first driving component 13 may be driven by a stepper motor. The anode 9 may be the raw material for generating nanopowder.

[0024] In some implementations, a number of openings may be formed on the rotating disk 8. The openings may or may not penetrate the rotating disk 8. The anode 9 is disposed within the opening.

[0025] In some implementations, the outer side of the rotating disk 8 may be provided with several hollow components, as shown in Figure 2. The anode 9 is disposed through the hollow components. There may be more than two hollow components. For example, as shown in Figure 2, there are 6 hollow components, and 6 anodes can be disposed simultaneously.

[0026] In some implementations, vacuum chamber 1 can be configured with a front-opening door structure, double-layer water cooling, made of stainless steel, argon arc welded, and the surface is electrochemically polished and then passivated. The interface is sealed with a fluororubber ring.

[0027] In some implementations, the vacuum chamber 1 may also have an observation window 11. The observation window 11 may be externally connected to an arc light protection device.

[0028] In some embodiments, as shown in Figures 1 and 3, the cathode assembly 2 may include a second driving member 7, a cathode 5, and a sleeve 12 fitted onto the surface of the cathode 5. The second driving member 7 is connected to the cathode 5 and is used to drive the cathode 5 to extend and retract within the sleeve 12. An air inlet 6 may also be provided on the sleeve 12 to allow reactive gas to enter the vacuum chamber, enabling the gas to circulate around the graphite cathode. The cathode assembly 2 may be equipped with a water-cooled electric arc gun, which can be placed horizontally, uses an electric arc initiation method, employs a plasma powder-making power supply, and uses circulating ventilation near the graphite cathode. The long-term operating current can be 400-600A, and the cathode diameter can be set to 10mm. The driving member 7 may include a stepper motor and a worm gear reducer.

[0029] In some embodiments, the apparatus may further include a powder collection stage 4 disposed at the bottom of the vacuum chamber 1. The nanopowder is collected on the collection stage after preparation. The collection stage 4 may be configured as a funnel-shaped structure.

[0030] In some implementations, a disturbance mechanism may be provided at the lower part of the powder collection platform 4. The disturbance mechanism can cause the powder collection platform 4 to vibrate to prevent excessive accumulation of powder in one place.

[0031] In some embodiments, the apparatus may further include a feeding mechanism for adding material into the vacuum chamber 1. The feeding mechanism may be a water-cooled copper feeding mechanism.

[0032] In some embodiments, the device may also include a pressure reducing valve 10 disposed on the vacuum chamber 1.

[0033] Specifically, as shown in Figure 1, six graphite rods to be processed are placed on the rotating disk 8 of the anode assembly 3 as anodes 9, and 10mm diameter graphite rods are placed as cathodes 5. The water-cooled copper feeding mechanism is located in the powder-making vacuum chamber. The arc gun of the cathode assembly 2 is placed horizontally, and electric arc ignition is used. After circulating the gas to a vacuum, buffer gas is introduced into the vacuum chamber through the air inlet 6 until the total pressure reaches 500-1000Pa. The buffer gas is argon. The gas filling valve is then closed, and the chamber waits for arc ignition. The gas is blown at a low temperature. The current is increased to 500A through the electronic control system. The vacuum chamber 1 is observed through the observation window 11. After the anode 9 consumes one graphite rod, the current is reduced. Then, the cathode 5 is retracted by operating the second drive component 7 (stepper motor). The rotating disk 8 is operated to rotate the anode mechanism 3 60° and realign it with the cathode 5. Then, the cathode is re-extended and the current is adjusted to 500A again. The above process is repeated until all 6 graphite rods are processed. The nanoparticles fall onto the powder collection stage. After cooling, the power is turned off. The pressure is reduced to atmospheric pressure through the pressure reducing valve 10. The equipment is then turned on to collect the carbon nanoparticles.

[0034] Although the present invention has been described above in conjunction with exemplary embodiments, those skilled in the art will understand that various modifications and changes can be made to the exemplary embodiments of the present invention without departing from the spirit and scope defined by the claims.

Claims

1. A high-vacuum plasma nanopowder large-scale preparation device, characterized in that, It includes a vacuum chamber, and cathode and anode assemblies disposed opposite each other on both sides of the vacuum chamber. The anode assembly includes a first driving member, a rotating disk connected to the first driving member, and a plurality of anodes disposed on the rotating disk circumferentially.

2. The high-vacuum plasma nanopowder large-scale preparation equipment according to claim 1, characterized in that, The rotating disk has several openings, and the anode is placed inside the openings.

3. The high-vacuum plasma nanopowder large-scale preparation equipment according to claim 1, characterized in that, Several hollow components are arranged on the radially vertical side of the rotating disk, and the anode is arranged through the hollow components.

4. The high-vacuum plasma nanopowder large-scale preparation equipment according to any one of claims 1 to 3, characterized in that, The cathode assembly includes a second driving member, a cathode, and a sleeve fitted on the surface of the cathode. The second driving member is connected to the cathode and is used to drive the cathode to extend and retract within the sleeve.

5. The high-vacuum plasma nanopowder large-scale preparation equipment according to any one of claims 1 to 3, characterized in that, The sleeve has an air inlet for the reaction gas to enter the vacuum chamber.

6. The high-vacuum plasma nanopowder large-scale preparation equipment according to any one of claims 1 to 3, characterized in that, It also includes a powder collection platform located at the bottom of the vacuum chamber and a disturbance mechanism connected to the powder collection platform.

7. The high-vacuum plasma nanopowder large-scale preparation equipment according to any one of claims 1 to 3, characterized in that, It also includes observation windows located on the vacuum chamber.

8. The high-vacuum plasma nanopowder mass production apparatus according to any one of claims 1 to 3, characterized in that, It also includes a pressure reducing valve installed on the vacuum chamber.

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