Laser scribing equipment

By separating the beam splitting module, reflection module, and marking module of the laser marking device, and utilizing the combination of the driving unit and the reflection unit, the problems of excessive module weight and load were solved, thus achieving the stability of the device and the stability of laser reception.

CN224182314UActive Publication Date: 2026-05-01CHANGZHOU S C EXACT EQUIP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
CHANGZHOU S C EXACT EQUIP
Filing Date
2025-05-14
Publication Date
2026-05-01

AI Technical Summary

Technical Problem

Existing laser marking equipment has excessive module weight and load, making it prone to displacement and shaking, which affects equipment stability.

Method used

The beam splitting module, reflection module, and scribing module are set up separately. The scribing module is driven by the first driving unit to move along the y-axis and z-axis to scribing. The beam splitting module and reflection module do not move with it. A reflection unit is set in the scribing module to ensure stable laser reception.

Benefits of technology

This reduces the load on the driver, improves the stability of the device and the laser receiver, and reduces module displacement and shaking.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model belongs to the technical field of solar cell scribing, and particularly relates to laser scribing equipment which comprises an installation platform, a laser scribing device and a laser scribing device. The laser is arranged on the mounting platform and is used for emitting laser; the light splitting module is arranged on the mounting platform and is used for receiving the laser, splitting the laser into a plurality of sub-lasers and emitting the sub-lasers towards a z axis; the reflection module is arranged on the mounting frame and is used for changing the emission direction of each sub-laser so as to emit the sub-laser towards the y axis; a scribing module; according to the laser scribing equipment, the light splitting module, the reflecting module and the scribing module are separately arranged, when the laser scribing equipment works, only the scribing module needs to be driven to move along the y axis and the z axis for scribing, the light splitting module and the reflecting module do not move in the process, and therefore the load of a driver is reduced; and meanwhile, a reflecting unit is arranged in the scribing module, so that the scribing module can stably receive laser when moving along the y axis and the z axis.
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Description

Laser marking equipment Technical Field

[0001] This utility model belongs to the field of solar cell marking technology, specifically relating to laser marking equipment. Background Technology

[0002] Currently, perovskite solar cells are generally scribing lines using laser scribing equipment, and multiple lines need to be scribed at once.

[0003] In related technologies, laser marking equipment includes at least: a beam splitting module, a reflection module, and a marking module; existing laser marking equipment integrates the beam splitting module, the reflection module, and the marking module into one module, and when the laser marking equipment is working, it moves the entire module.

[0004] However, in the above scenario, the entire module is not only too heavy but also too overloaded. Over time, the module is prone to displacement and shaking.

[0005] Therefore, how to solve the above problems is a problem that urgently needs to be solved by those skilled in the art.

[0006] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Summary of the Invention

[0007] This disclosure provides at least one laser marking device, comprising: a mounting platform on which a mounting frame is disposed; a laser disposed on the mounting platform for emitting laser light; a beam splitting module disposed on the mounting platform for receiving the laser light and splitting it into several sub-lasers, and causing the sub-lasers to be emitted toward the z-axis; a reflection module disposed on the mounting frame for changing the emission direction of each sub-laser to be emitted toward the y-axis; and a marking module comprising: a first driving unit disposed on the mounting frame, a second driving unit disposed on the first driving unit, and several marking units disposed on the second driving unit; wherein the first driving unit is adapted to drive the second driving unit and each marking unit to move as a whole along the y-axis, and the second driving unit is adapted to drive each marking unit to move as a whole along the z-axis.

[0008] In one optional embodiment, the first drive unit includes: a first driver and a mounting frame; the first driver is disposed on the mounting frame, the mounting frame is disposed on the first driver, and the second drive unit and each scribing unit are disposed within the mounting frame; wherein, the first driver is adapted to move the second drive unit and each scribing unit as a whole along the y-axis by driving the mounting frame to move along the y-axis.

[0009] In one optional embodiment, the second drive unit includes: a second driver and a mounting plate; the second driver is disposed within the mounting frame, the mounting plate is disposed on the second driver, and each of the scribing units is disposed on the mounting plate; wherein, the second driver is adapted to drive the mounting plate to move along the z-axis so as to drive each scribing unit as a whole to move along the z-axis.

[0010] In one optional embodiment, the scribing module further includes: a plurality of reflective units; the reflective unit includes: a pair of first reflective mirrors; wherein the two first reflective mirrors are respectively disposed on the mounting frame and the mounting plate, and are adapted to receive the sub-laser reflected by the reflective module along the y-axis, and after being rotated and reflected along the z-axis, it is reflected again along the y-axis.

[0011] In one optional embodiment, the scribing unit includes: a third driver, a second reflector, and a focusing lens; wherein the third driver is disposed on a mounting plate, and the second reflector and the focusing lens are both disposed on the third driver; the third driver is adapted to adjust the spacing between adjacent sub-lasers by moving along the y-axis.

[0012] In one optional embodiment, the focusing mirror is disposed in front of or below the second reflecting mirror and is located in the optical path of the sub-laser; wherein the second reflecting mirror is adapted to receive the sub-laser emitted along the y-axis after being processed by the first reflecting mirror, and to reflect the sub-laser along the z-axis.

[0013] In one optional embodiment, the beam splitting module includes: a beam splitting unit; the beam splitting unit includes: a plurality of third reflectors and a plurality of beam splitters; the beam splitters are adapted to receive laser light and reflect a portion of the laser light and reflect a portion of the laser light, and the third reflectors are adapted to reflect the received laser light; wherein the laser light emitted by the laser is split into a plurality of beams of laser light by arranging the third reflectors and beam splitters as required.

[0014] In one optional embodiment, the beam splitting module further includes: a beam expander and a plurality of motorized waveplates; wherein the beam expander is located upstream of the beam splitting unit, and the motorized waveplates are located downstream of the beam splitting unit; the beam expander is adapted to receive laser light emitted by the laser and expand it before sending it to the beam splitting unit; the motorized waveplates are adapted to receive sub-lasers sent by the beam splitting unit and send them along the z-axis.

[0015] In one alternative embodiment, the reflection module includes: a plurality of fourth reflectors; each of the fourth reflectors is mounted on a mounting frame and is adapted to receive sub-laser transmitted via an electric waveplate and reflect it toward the y-axis.

[0016] In one alternative embodiment, the mounting platform is provided with a fourth drive; wherein the fourth drive is adapted to move the product being processed along the x-axis.

[0017] The beneficial effects of this utility model are that, by separating the beam splitting module, the reflection module, and the scribing module, the scribing device only needs to move the scribing module along the y-axis and z-axis to scribing during operation. During this process, the beam splitting module and the reflection module do not move, thereby reducing the load on the driver. At the same time, by setting a reflection unit in the scribing module, the scribing module can stably receive laser light when moving along the y-axis and z-axis.

[0018] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0019] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0020] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0021] Figure 1 is a schematic diagram of the structure of a laser scribing device provided in an embodiment of this disclosure;

[0022] Figure 2 is a schematic diagram of the structure of a line drawing module provided in an embodiment of this disclosure;

[0023] Figure 3 is a schematic diagram of the structure of a scribing unit provided in an embodiment of this disclosure;

[0024] Figure 4 is a schematic diagram of the structure of a beam splitting module provided in an embodiment of this disclosure.

[0025] In the picture:

[0026] Installation platform 1, installation rack 11;

[0027] Laser 2;

[0028] Beam splitter module 3, third reflecting mirror 31, beam splitter 32, beam expander 33, motorized waveplate 34;

[0029] Reflection module 4, fourth reflector 41;

[0030] Line drawing module 5;

[0031] First drive unit 51, first driver 510, mounting frame 511;

[0032] Second drive unit 52, second driver 521, mounting plate 522;

[0033] The marking unit 53, the third actuator 531, the second reflector 532, and the focusing lens 533;

[0034] Reflecting unit 54, first reflecting mirror 54a;

[0035] Fourth drive 6;

[0036] 7. Processed product. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0038] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the figures, the thickness of parts may be exaggerated or reduced for the purpose of effectively depicting the technical content.

[0039] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0040] As shown in Figures 1 and 2, at least one embodiment provides a laser marking device, including: a mounting platform 1 on which a mounting frame 11 is disposed; a laser 2 disposed on the mounting platform 1 for emitting laser light; a beam splitting module 3 disposed on the mounting platform 1 for receiving the laser light and splitting it into several sub-lasers, and causing the sub-lasers to be emitted toward the z-axis; a reflection module 4 disposed on the mounting frame 11 for changing the emission direction of each sub-laser to be emitted toward the y-axis; and a marking module 5, which includes: a first driving unit 51 disposed on the mounting frame 11, a second driving unit 52 disposed on the first driving unit 51, and several marking units 53 disposed on the second driving unit 52; wherein the first driving unit 51 is adapted to drive the second driving unit 52 and each marking unit 53 to move as a whole along the y-axis, and the second driving unit 52 is adapted to drive each marking unit 53 to move as a whole along the z-axis.

[0041] In this embodiment, the beam splitting module 3, the reflection module 4, and the scribing module 5 are set separately. When the laser scribing device is working, it is only necessary to drive the scribing module 5 to move along the y-axis and z-axis to scribing. During this process, the beam splitting module 3 and the reflection module 4 will not move, thereby reducing the load on the driver.

[0042] As shown in Figure 2, in some embodiments, the first drive unit 51 includes: a first driver 510 and a mounting frame 511; the first driver 510 is disposed on the mounting bracket 11, the mounting frame 511 is disposed on the first driver 510, and the second drive unit 52 and each scribing unit 53 are disposed within the mounting frame 511; wherein, the first driver 510 is adapted to move the second drive unit 52 and each scribing unit 53 as a whole along the y-axis by driving the mounting frame 511 to move along the y-axis.

[0043] In this embodiment, since the beam splitting module 3 and the reflection module 4 do not move with the scribing module 5, it is necessary to ensure that the scribing module 5 can always stably receive the laser during its movement. Therefore, in this embodiment, the scribing module 5 is divided into a first driving unit 51, a second driving unit 52, and several scribing units 53. The first driving unit 51 moves in the y-axis direction, which is the same as the direction of the sub-laser reflected by the reflection module 4, thereby ensuring that the scribing units 53 can always stably receive the laser.

[0044] As shown in Figure 2, in some embodiments, the second drive unit 52 includes a second driver 521 and a mounting plate 522; the second driver 521 is disposed within the mounting frame 511, the mounting plate 522 is disposed on the second driver 521, and each scribing unit 53 is disposed on the mounting plate 522; wherein, the second driver 521 is adapted to drive the mounting plate 522 to move along the z-axis so as to drive each scribing unit 53 to move as a whole along the z-axis.

[0045] In this embodiment, the second driving unit 52 is used to drive the scribing unit 53 to move along the z-axis. This direction is orthogonal to the direction of the sub-laser reflected by the reflection module 4. When the second driving unit 52 drives the scribing unit 53 to move along the z-axis, the scribing unit 53 will not receive the laser.

[0046] Therefore, in order to solve the above problems, as shown in Figure 2, the scribing module 5 also includes: a plurality of reflective units 54; the reflective unit 54 includes: a pair of first reflective mirrors 54a; wherein the two first reflective mirrors 54a are respectively disposed on the mounting frame 511 and the mounting plate 522, and are adapted to receive the sub-laser reflected by the reflective module 4 along the y-axis, and after being rotated and reflected along the z-axis, it is reflected again along the y-axis.

[0047] In this embodiment, each scribing unit 53 is equipped with a reflection unit 54. The reflection unit 54 uses a pair of first reflectors 54a respectively set on the mounting frame 511 and the mounting plate 522 to reflect the sub-laser reflected by the reflection module 4 along the y-axis, rotates it along the z-axis, and then reflects it along the y-axis again. This ensures that when the second driving unit 52 moves the scribing unit 53 along the z-axis, it only adjusts the distance of the reflection unit 54 rotating along the z-axis and does not affect the sub-laser reflected along the y-axis. This ensures that the scribing unit 53 can always stably receive the laser when the second driving unit 52 is working.

[0048] As shown in Figure 3, in some embodiments, the scribing unit 53 includes: a third driver 531, a second reflector 532, and a focusing lens 533; wherein the third driver 531 is disposed on the mounting plate 522, and the second reflector 532 and the focusing lens 533 are both disposed on the third driver 531; the third driver 531 is adapted to adjust the spacing between adjacent sub-lasers by moving along the y-axis.

[0049] In this embodiment, the scribing unit 53 reflects the received sub-laser in the y-axis direction into the z-axis direction through the second reflector 532, thereby scribing lines onto the product 7 being processed.

[0050] As shown in Figure 3, in some embodiments, the focusing mirror 533 is disposed in front of or below the second reflecting mirror 532 and is located in the optical path of the sub-laser; wherein the second reflecting mirror 532 is adapted to receive the sub-laser emitted along the y-axis after being processed by the first reflecting mirror 54a, and reflect the sub-laser along the z-axis.

[0051] As shown in Figure 4, in some embodiments, the beam splitting module 3 includes: a beam splitting unit; the beam splitting unit includes: a plurality of third reflectors 31 and a plurality of beam splitters 32; the beam splitters 32 are adapted to receive laser light and reflect part of the laser light and reflect part of the laser light, and the third reflectors 31 are adapted to reflect the received laser light; wherein, by arranging the third reflectors 31 and the beam splitters 32 as required, the laser light emitted by the laser 2 is split into a plurality of laser beams.

[0052] In this embodiment, the third reflector 31 and the beam splitter 32 are arranged according to requirements to divide a whole laser beam into several sub-beams. The arrangement position and method are conventional technical means.

[0053] As shown in Figure 4, in some embodiments, the beam splitting module 3 further includes: a beam expander 33 and a plurality of motorized waveplates 34; wherein the beam expander 33 is located upstream of the beam splitting unit, and the motorized waveplates 34 are located downstream of the beam splitting unit; the beam expander 33 is adapted to receive the laser emitted by the laser 2 and expand it before sending it to the beam splitting unit; the motorized waveplates 34 are adapted to receive the sub-lasers sent by the beam splitting unit and send them to the z-axis.

[0054] As shown in Figure 1, in some embodiments, the reflection module 4 includes: a plurality of fourth reflectors 41; each fourth reflector 41 is disposed on the mounting frame 11 and is adapted to receive the sub-laser transmitted by the electric waveplate 34 and reflect it to the y-axis.

[0055] In some embodiments, a fourth driver 6 is provided on the mounting platform 1; wherein the fourth driver 6 is adapted to drive the processed product 7 to move along the x-axis.

[0056] In summary, this laser marking device separates the beam splitting module 3, the reflection module 4, and the marking module 5. When the laser marking device is working, only the marking module 5 needs to be moved along the y-axis and z-axis to mark lines. During this process, the beam splitting module 3 and the reflection module 4 do not move, thereby reducing the load on the driver. At the same time, by setting a reflection unit in the marking module 5, the marking module 5 can stably receive laser light when moving along the y-axis and z-axis.

[0057] In this document, when it is said that the first component is located on the second component, this can mean that the first component can be directly formed on the second component, or that the third component can be inserted between the first component and the second component.

[0058] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.

[0059] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0060] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.

[0061] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0062] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0063] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.

[0064] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature illustrated in the figures and another element or feature. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0065] In the above discussion, unless otherwise stated, when used to describe numerical values, the terms “about,” “approximately,” “basically,” etc., indicate a change of + / - 10% in that value.

[0066] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A laser marking device, characterized in that, include: Mounting platform (1), on which mounting frame (11) is provided; laser (2), on which mounting platform (1) is provided, for emitting laser; beam splitting module (3), on which mounting platform (1) is provided, for receiving laser and splitting laser into several sub-lasers, and for making the sub-lasers emit toward the z-axis; reflection module (4), on which mounting frame (11) is provided, for changing the emission direction of each sub-laser to emit toward the y-axis; scribing module (5), which includes: a first driving unit (51) on which mounting frame (11) is provided, a second driving unit (52) on which the first driving unit (51) is provided, and several scribing units (53) on which the second driving unit (52) is provided; wherein the first driving unit (51) is adapted to drive the second driving unit (52) and each scribing unit (53) to move together along the y-axis, and the second driving unit (52) is adapted to drive each scribing unit (53) to move together along the z-axis.

2. The laser marking device as described in claim 1, characterized in that, The first drive unit (51) includes: a first driver (510) and a mounting frame (511); the first driver (510) is disposed on the mounting bracket (11), the mounting frame (511) is disposed on the first driver (510), and the second drive unit (52) and each scribing unit (53) are disposed within the mounting frame (511); wherein, the first driver (510) is adapted to move the second drive unit (52) and each scribing unit (53) as a whole along the y-axis by driving the mounting frame (511) to move along the y-axis.

3. The laser marking device as described in claim 2, characterized in that, The second drive unit (52) includes: a second driver (521) and a mounting plate (522); the second driver (521) is disposed within the mounting frame (511), the mounting plate (522) is disposed on the second driver (521), and each of the scribing units (53) is disposed on the mounting plate (522); wherein, the second driver (521) is adapted to drive the mounting plate (522) to move along the z-axis so as to drive each scribing unit (53) to move as a whole along the z-axis.

4. The laser marking device as described in claim 3, characterized in that, The marking module (5) further includes: a plurality of reflection units (54); the reflection unit (54) includes: a pair of first reflectors (54a); wherein the two first reflectors (54a) are respectively mounted on the mounting frame (511) and the mounting plate (522), and are adapted to receive the sub-laser reflected by the reflection module (4) along the y-axis, and after being rotated and reflected along the z-axis, it is reflected again along the y-axis.

5. The laser marking device as described in claim 4, characterized in that, The scribing unit (53) includes: a third driver (531), a second reflector (532), and a focusing lens (533); wherein the third driver (531) is disposed on the mounting plate (522), and the second reflector (532) and the focusing lens (533) are both disposed on the third driver (531); the third driver (531) is adapted to adjust the spacing between adjacent sub-lasers by moving along the y-axis.

6. The laser marking device as described in claim 5, characterized in that, The focusing mirror (533) is disposed in front of or below the second reflecting mirror (532) and located in the optical path of the sub-laser; wherein the second reflecting mirror (532) is adapted to receive the sub-laser emitted along the y-axis after being processed by the first reflecting mirror (54a), and reflect the sub-laser along the z-axis.

7. The laser marking device as described in claim 1, characterized in that, The beam splitting module (3) includes: a beam splitting unit; the beam splitting unit includes: a plurality of third reflectors (31) and a plurality of beam splitters (32); the beam splitters (32) are adapted to receive laser light and reflect part of the laser light and reflect part of the laser light, and the third reflectors (31) are adapted to reflect the received laser light; wherein, the laser light emitted by the laser (2) is split into a plurality of beams of laser light by arranging the third reflectors (31) and the beam splitters (32) according to the required requirements.

8. The laser marking device as described in claim 7, characterized in that, The beam splitting module (3) further includes: a beam expander (33) and several motorized waveplates (34); wherein the beam expander (33) is located upstream of the beam splitting unit, and the motorized waveplates (34) are located downstream of the beam splitting unit; the beam expander (33) is adapted to receive the laser emitted by the laser (2) and send it to the beam splitting unit after beam expansion; the motorized waveplates (34) are adapted to receive the sub-laser sent by the beam splitting unit and send it to the z-axis.

9. The laser marking device as described in claim 8, characterized in that, The reflection module (4) includes: a plurality of fourth reflectors (41); each of the fourth reflectors (41) is mounted on the mounting frame (11) and is adapted to receive the sub-laser transmitted by the electric waveplate (34) and reflect it to the y-axis.

10. The laser marking device as described in claim 9, characterized in that, The mounting platform (1) is provided with a fourth driver (6); wherein the fourth driver (6) is adapted to drive the processed product (7) to move along the x-axis.