Target material heat treatment furnace capable of accurately measuring temperature on line

Abstract

The utility model discloses a target material heat treatment furnace capable of accurately measuring temperature on line, which comprises a furnace body, a temperature display instrument, a plurality of temperature measuring devices and a plurality of temperature measuring wires, the temperature measuring devices are respectively inserted into temperature measuring holes of a target material, the temperature display instrument is arranged outside the furnace body, and one side of the furnace body is provided with a threading hole communicated with a furnace cavity of the furnace body. One end of each temperature measuring line is connected with the temperature measuring device, the other end of each temperature measuring line penetrates through the threading hole to be connected with the temperature display instrument, fireproof heat insulation filler is filled between the threading hole and each temperature measuring line, and each temperature measuring device is provided with a sealing piece used for sealing the temperature measuring hole of the target material. A plurality of temperature measuring holes are formed in the target material, and the temperature measuring devices are respectively inserted into the temperature measuring holes, so that the actual temperature of the target material is directly detected, heat treatment process parameters can be accurately controlled, and the influence of a target material heating curve lagging behind the display temperature of a target material heat treatment furnace on the quality of the target material is reduced; the influence of different initial charging temperatures on the target material quality is reduced, and the target material grain uniformity is improved.

Description

A target material heat treatment furnace with online precise temperature measurement Technical Field

[0001] This utility model relates to the field of target material heat treatment furnace technology, and in particular to a target material heat treatment furnace with online precise temperature measurement. Background Technology

[0002] Heat treatment is a crucial step in sputtering target production, determining the final grain size and microstructure orientation of the target. Heat treatment temperature and time are key parameters. During heat treatment, the target is placed in a heat treatment furnace. In the heating process, the atmosphere is heated first, and then the heat is transferred to the target. Therefore, the actual temperature rise within the target lags behind the displayed temperature of the heat treatment furnace. There may also be differences between the displayed temperature and the actual temperature inside the furnace, all of which affect the microstructure of the target after heat treatment.

[0003] However, existing technologies often use temperature sensors inside the heat treatment furnace to monitor the furnace temperature, using this furnace temperature as the starting point for heat treatment holding time. However, when the furnace temperature reaches the required holding temperature, the target material's own temperature often fails to reach the required temperature due to limitations in heat conduction efficiency, especially for thick targets or targets with poor thermal conductivity, where the core temperature remains very low. To address this issue, the heat treatment holding time is often increased, but due to differences in target size and thermal conductivity, it is difficult to accurately determine the target material's own temperature based on time alone. Furthermore, after prolonged use, the heat treatment furnace may experience thermocouple aging, leading to localized temperatures higher or lower than other areas, or heating element damage, resulting in localized low temperatures. These factors can cause uneven temperature distribution during target heat treatment, leading to abnormal grain sizes.

[0004] On the other hand, in traditional heat treatment furnaces, a thick stainless steel plate is placed at the bottom of the furnace, and the target material is placed directly on the thick stainless steel plate. In this way, the lower part of the target material is in direct contact with the thick stainless steel plate. During heat treatment, the lower part of the target material undergoes heat conduction through the thick stainless steel plate, forming solid-solid heat transfer, while the upper part of the target material undergoes heat conduction through the air, forming gas-solid heat transfer. Due to the different heat conduction media, the heating temperature of the target material is uneven, so it is necessary to improve this method. Summary of the Invention

[0005] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a target material heat treatment furnace with online precise temperature measurement, so as to improve the accuracy of target material temperature measurement and improve the heating uniformity of the target material.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is: an online precision temperature measurement target material heat treatment furnace, comprising a furnace body, a temperature display instrument, multiple temperature sensors, multiple temperature measuring wires, and multiple protective tubes.

[0007] The temperature display is located on the outside of the furnace body. Temperature measuring holes are opened around the target material inside the furnace cavity. Each temperature sensor is inserted into the corresponding temperature measuring hole of the target material. The first end of each temperature measuring wire is connected to the temperature display, and the second end passes through the wire hole and is connected to the corresponding temperature sensor.

[0008] The heat treatment furnace has wire-passing holes on its four sides, each hole connecting to the furnace cavity.

[0009] Each protective tube is threaded through its corresponding wiring hole and extends into the furnace cavity, while each temperature measuring wire is threaded through its corresponding protective tube.

[0010] The space between the wire hole and each temperature measuring wire is filled with fire-resistant and heat-insulating filler.

[0011] Each thermometer is equipped with a seal to seal the temperature measuring hole of the target material.

[0012] The wire hole is equipped with a sealing door, which is hinged to the outer side of the furnace body and is sealed to the wire hole.

[0013] The temperature sensor uses an armored thermocouple. The first end of the armored thermocouple is inserted into the temperature measuring hole, and the second end of the armored thermocouple is connected to the temperature measuring wire. The diameter of the armored thermocouple is 0.3 to 2 mm.

[0014] The first end of each of the protective tubes extends to the outside of the furnace body, and the second end extends to the temperature measuring hole. Each temperature measuring wire located in the furnace cavity is completely inserted into the corresponding protective tube.

[0015] The gap between the protective tube and the wiring hole is filled with the fire-resistant and heat-insulating filler.

[0016] The gap between the protective tube and the temperature measuring wire running through the protective tube is filled with fire-resistant and heat-insulating filler. All the temperature measuring wires inside the protective tube are wrapped with fire-resistant and heat-insulating filler and are relatively centrally positioned inside the protective tube.

[0017] The protective pipe is made of stainless steel corrugated pipe; the fire-resistant and heat-insulating filler is made of fire-resistant cotton; and the sealing element is made of fire-resistant cement that can be crushed.

[0018] The furnace cavity is provided with a placement platform, which is located in the middle of the furnace cavity. The placement platform includes multiple transverse support plates spaced apart in the transverse direction and multiple longitudinal support plates arranged in the longitudinal direction. Each transverse support plate is intersected with each longitudinal support plate to form a grid-shaped placement platform.

[0019] Each of the horizontal support plates is arranged perpendicularly to each of the vertical support plates. Each horizontal support plate intersects with each vertical support plate to form multiple rectangular hollow areas that run through the placement platform in a rectangular arrangement, forming a grid-shaped support surface on the top surface of the placement platform. The distance between adjacent horizontal support plates is 50-300mm, the distance between adjacent vertical support plates is 50-300mm, and the vertical height of the placement platform is 80-500mm.

[0020] The furnace cavity is provided with a placement rack, and the placement platform is fixedly installed on the upper part of the placement rack. The placement rack includes a fixed frame and multiple support rods. The fixed frame is fixedly installed on the upper part of each support rod, and the placement platform is fixedly installed inside the fixed frame.

[0021] Each side wall of the fixed frame has a heat insulation gap with the corresponding inner wall of the furnace body, and the heat insulation gap is set to 100-350mm.

[0022] The fixed frame is a rectangular frame consisting of four side plates. A support rod is fixedly installed at each of the four corners of the fixed frame. The heat insulation gap between the outer wall of each side plate and the corresponding inner wall of the furnace body is set to 150-200mm.

[0023] The advantages of this invention compared to the prior art are as follows: This invention opens multiple temperature measuring holes on the target material, inserts each temperature sensor into each temperature measuring hole, thereby directly detecting the actual temperature of the target material itself. This enables precise control of heat treatment process parameters, reduces the impact of the target material heating curve lagging behind the temperature displayed in the target material heat treatment furnace on the target material quality, reduces the impact of different initial charging temperatures on the target material quality, improves the uniformity of target material grains, and ensures the consistency of target material quality in different batches.

[0024] After the thermometer is inserted into the temperature measuring hole, the temperature measuring hole is sealed by a sealing element to isolate the temperature measuring hole from the furnace body and furnace cavity, thereby further improving the accuracy of temperature measurement. The sealing element is made of refractory cement, which facilitates the sealing operation. After the heat treatment is completed, the refractory cement can be broken by tapping to remove the thermometer. In addition, the refractory cement has high temperature resistance and heat insulation properties, which improves the accuracy of temperature measurement.

[0025] By opening wire-passing holes in the side wall of the furnace body, the various temperature measuring wires do not need to pass through the furnace door, preventing heat loss caused by poor furnace door sealing. Furthermore, the wire-passing holes are sealed with refractory insulation filler to further prevent heat loss from the wire-passing holes and reduce the temperature difference in the furnace body and furnace cavity.

[0026] By using a grid-shaped placement platform to support the target material, the contact area between the target material and the placement platform is reduced, allowing the lower part of the target material to remain in contact with the air. This enables air to be used as the heating medium for gas-solid heat transfer in both the upper and lower parts of the target material, improving the uniformity of heating of the target material and further enhancing the accuracy of temperature measurement.

[0027] The temperature measuring wire is wrapped with a protective tube to prevent it from coming into contact with the inner wall of the furnace and causing damage, and to prevent high-temperature oxidation and aging. Attached Figure Description

[0028] Figure 1 is a structural schematic diagram of this utility model;

[0029] Figure 2 is a schematic diagram of the connection between the thermometer and the thermometer of this utility model;

[0030] Figure 3 is an exploded view of the placement rack and placement platform of this utility model.

[0031] Marked in the image:

[0032] 1. Furnace body; 11. Wiring holes; 12. Sealing door;

[0033] 2. Temperature display instrument;

[0034] 3. Temperature sensor;

[0035] 4. Temperature measuring wires;

[0036] 5. Protective tubes;

[0037] 6. Placement platform; 61. Horizontal support plate; 62. Vertical support plate;

[0038] 7. Placement rack, 71. Fixing frame, 72. Support rod;

[0039] 8 target materials, 81 temperature measuring holes. Detailed Implementation

[0040] A target material heat treatment furnace with online precise temperature measurement, as shown in Figures 1 to 3, includes a furnace body 1, a temperature display instrument 2, multiple temperature sensors 3 for being inserted into various temperature measuring holes 81 of the target material 8, and multiple temperature measuring wires 4. The temperature display instrument 2 is located outside the furnace body 1. The side walls around the furnace body 1 are respectively provided with wire-passing holes 11 that communicate with the furnace cavity of the furnace body 1. One end of each temperature measuring wire 4 is connected to the temperature sensor 3, and the other end passes through the wire-passing hole 11 and is connected to the temperature display instrument 2. The wire-passing hole 11 and each temperature measuring wire 4 are filled with refractory heat-insulating filler. Each temperature sensor 3 is provided with a sealing element for sealing the temperature measuring hole 81 of the target material 8.

[0041] Traditional sputtering target heat treatment furnaces only measure the temperature of the furnace cavity within the furnace body 1. Since there is a temperature difference between the sputtering target 8 and the furnace cavity, the temperature measurement is inaccurate, making it impossible to precisely control the heat treatment process parameters and affecting the quality of the sputtering target. This invention, however, directly detects the actual temperature of the sputtering target 8 by opening multiple temperature measuring holes 81 around its perimeter and inserting thermometers 3 into each hole. This allows for precise control of the heat treatment process parameters, reducing the lag between the sputtering target 8's heating curve and the furnace's displayed temperature, thus minimizing the impact on the quality of the sputtering target 8. The initial charging temperature affects the quality of the target material, improves the uniformity of the target grains, and ensures the consistency of the target material quality in different batches. After the temperature sensor 3 is inserted into the temperature measuring hole 81, the temperature measuring hole 81 is sealed by the sealing element to isolate the temperature measuring hole from the furnace body and furnace cavity, further improving the accuracy of temperature measurement. By opening the wire hole 11 on the side wall of the furnace body 1, each temperature measuring wire 4 does not need to pass through the furnace door of the furnace body 1, preventing heat loss caused by poor furnace door sealing. The wire hole 11 is sealed by refractory heat insulation filler to further prevent heat loss from the wire hole 11 and reduce the temperature difference in the furnace body and furnace cavity.

[0042] Specifically, the wire hole 11 is equipped with a sealing door 12, which is hinged to the outer side of the furnace body 1 and seals against the wire hole 11. When online real-time temperature measurement is not required, the sealing door 12 seals the wire hole 11 to prevent heat loss from the wire hole 11, making it convenient to use.

[0043] Specifically, the furnace cavity of the furnace body 1 is equipped with a protective tube 5, and each temperature measuring wire 4 is passed through the protective tube 5. The protective tube 5 is inserted into the wire hole 11, and refractory heat-insulating filler is filled between the wire hole 11 and the protective tube 5, as well as inside the protective tube 5. Each protective tube 5 is passed through the corresponding wire hole 11 and extends into the furnace cavity. Each temperature measuring wire 4 is passed through the corresponding protective tube 5, and refractory heat-insulating filler is filled between the wire hole 11 and each temperature measuring wire 4. Each thermometer 3 is equipped with a sealing element for sealing the temperature measuring hole 81 of the target material 8. Because there are heating elements around the furnace body 1, the inner wall temperature of the furnace body 1 is relatively high, which will affect the life of the temperature measuring wire 4. The protective tube 5 is used to wrap the temperature measuring wire 4 to prevent the temperature measuring wire 4 from contacting the inner wall of the furnace body 1 and causing damage, and to prevent high-temperature oxidation and aging.

[0044] Specifically, each protective tube 5 has its first end extending to the outside of the furnace body 1 and its second end extending to the temperature measuring hole 81. Each temperature measuring wire 4 located within the furnace cavity is completely inserted into the corresponding protective tube 5. The gap between the protective tube 5 and the wire hole 11 is filled with refractory insulation filler. The gap between the protective tube 5 and the temperature measuring wire 4 inserted within the protective tube 5 is also filled with refractory insulation filler. All temperature measuring wires 4 within the protective tube 5 are completely wrapped by the refractory insulation filler and are relatively centrally positioned within the protective tube 5. The protective tube 5 is made of stainless steel corrugated pipe. Stainless steel corrugated pipe has strong structural strength and can be bent for easy wiring. The diameter of the stainless steel corrugated pipe is 10-65mm.

[0045] Specifically, the temperature sensor 3 uses an armored thermocouple. The first end of the armored thermocouple is inserted into the temperature sensing hole 81, and the second end is connected to the temperature sensing wire 4. The diameter of the armored thermocouple is 0.3–10 mm. The first end of the armored thermocouple is inserted into the temperature sensing hole 81 and made to fit against the inner wall of the temperature sensing hole 81. The temperature sensing hole 81 is then sealed using a sealing element to improve temperature measurement accuracy. Preferably, the diameter of the armored thermocouple is 0.5–8 mm.

[0046] Specifically, the refractory insulation filler is made of refractory cotton, and the sealing element is made of refractory cement. The use of refractory cement for the sealing element facilitates the sealing operation. After heat treatment, the refractory cement can be broken by simply tapping to remove the thermometer 3. Furthermore, the refractory cement has high temperature resistance and heat insulation properties, improving the accuracy of temperature measurement.

[0047] The furnace cavity of the furnace body 1 is provided with a placement platform 6. The placement platform 6 has a vertical height of 80-500mm and is located in the middle of the furnace cavity of the furnace body 1. The placement platform 6 includes multiple transverse support plates 61 spaced apart in the transverse direction and multiple longitudinal support plates 62 arranged in the longitudinal direction. The transverse support plates 61 and longitudinal support plates 62 are intersected to form a grid-shaped placement platform 6. Specifically, each transverse support plate 61 is perpendicular to each longitudinal support plate 62, and the intersection of each transverse support plate 61 and longitudinal support plate 62 forms multiple rectangular hollow areas that are arranged in a rectangular array and penetrate the placement platform 6, forming a grid-shaped support surface on the top surface of the placement platform 6. The distance between adjacent transverse support plates 61 is 50-300mm, and the distance between adjacent longitudinal support plates 62 is 50-300mm.

[0048] The target material 8 is supported by a grid-shaped placement platform 6, which reduces the contact area between the target material 8 and the placement platform 6. This keeps the lower part of the target material 8 in contact with the air, allowing air to be used as the heating medium for gas-solid heat transfer in both the upper and lower parts of the target material 8. This improves the uniformity of heating of the target material 8 and further enhances the accuracy of temperature measurement.

[0049] Specifically, the furnace cavity of furnace body 1 is also equipped with a placement rack 7, and a placement platform 6 is fixedly installed on the upper part of the placement rack 7. The placement rack 7 includes a fixed frame 71 and four support rods 72. The fixed frame 71 is a rectangular frame formed by four side plates. A support rod 72 is fixedly installed at each of the four corners of the fixed frame 71. The four support rods 72 are respectively located at the four corners of the fixed frame 71 and connected to the lower part of the fixed frame 71. The placement platform 6 is fixedly installed inside the fixed frame 71 and is located in the middle of the furnace cavity of furnace body 1. By fixing the placement platform 6 with the placement rack 7, the height of the placement platform 6 is at half the height of the furnace cavity of furnace body 1, thereby ensuring that the target material 8 is located in the center of the furnace cavity of furnace body 1, further improving the uniformity of heating.

[0050] Specifically, the distance between adjacent transverse support plates 61 is 50–300 mm, the distance between adjacent longitudinal support plates 62 is 50–300 mm, and each side wall of the placement rack 7 has a heat insulation gap with the inner wall of the furnace body 1, the heat insulation gap being 100–350 mm. Preferably, the heat insulation gap between the outer wall of each side plate and the corresponding inner wall of the furnace body 1 is set to 150–200 mm.

[0051] The distance between adjacent transverse support plates 61 is 100-200mm, the distance between adjacent longitudinal support plates 62 is 100-200mm, and the heat insulation gap is 150-300mm.

[0052] The working principle of this utility model is as follows:

[0053] Three to six temperature measuring holes 81 are drilled at equal intervals around the target material 8 using a drilling machine. The direction of each temperature measuring hole 81 is from the outer circumference to the center. The diameter of the temperature measuring hole 81 is 1.5 to 10 mm and the depth is 1 to 6 mm. The location is at 1 / 2 thickness of the target material 8. The depth of the temperature measuring holes 81 around the target material 8 is the machining allowance thickness. Therefore, the temperature measuring holes 81 will not cause excessive material loss.

[0054] Insert each armored thermocouple into the corresponding temperature measuring hole 81 and make the armored thermocouple adhere tightly to the inner wall of the temperature measuring hole 81, and use refractory cement to fill the temperature measuring hole 81 to fix the armored thermocouple.

[0055] Each temperature measuring wire 4 and the armored thermocouple are threaded through the protective tube 5, and the temperature measuring wire 4 is connected to the temperature display instrument 2, so that the temperature value of each armored thermocouple can be read through the temperature display instrument 2 for online real-time temperature measurement.

[0056] After the heat treatment is completed, the hardened refractory cement is broken by tapping, and then the armored thermocouple is removed.

[0057] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. A target material heat treatment furnace with online precise temperature measurement, characterized in that: The furnace includes a furnace body (1), a temperature display (2), multiple thermometers (3), multiple temperature measuring wires (4), and multiple protective tubes (5). The temperature display (2) is located outside the furnace body (1). Temperature measuring holes (81) are opened around the target material (8) inside the furnace cavity. Each thermometer (3) is inserted into the corresponding temperature measuring hole (81) of the target material (8). The first end of each temperature measuring wire (4) is connected to the temperature display (2), and the second end passes through the wire hole (11) and is connected to the corresponding thermometer (3). The furnace body (1) of the processing furnace has wire holes (11) on its side walls. Each wire hole (11) is connected to the furnace cavity of the furnace body (1). Each protective tube (5) is inserted into the corresponding wire hole (11) and extends into the furnace cavity. Each temperature measuring wire (4) is inserted into the corresponding protective tube (5). The wire hole (11) and each temperature measuring wire (4) are filled with refractory heat insulation filler. Each thermometer (3) is provided with a sealing element for sealing the temperature measuring hole (81) of the target material (8).

2. The target material heat treatment furnace with online precise temperature measurement according to claim 1, characterized in that: The wire hole (11) is provided with a sealing door (12), which is hinged to the outer side of the furnace body (1) and is sealed to the wire hole (11).

3. The target material heat treatment furnace with online precise temperature measurement according to claim 1, characterized in that: The thermometer (3) uses an armored thermocouple. The first end of the armored thermocouple is inserted into the temperature measuring hole (81), and the second end of the armored thermocouple is connected to the temperature measuring wire (4). The diameter of the armored thermocouple is 0.3 to 2 mm.

4. The target material heat treatment furnace with online precise temperature measurement according to claim 1, characterized in that: The first end of each of the protective tubes (5) extends to the outside of the furnace body (1) and the second end extends to the temperature measuring hole (81). Each temperature measuring wire (4) located in the furnace cavity is completely inserted into the corresponding protective tube (5). The gap between the protective tube (5) and the wire hole (11) is filled with the refractory heat insulation filler. The gap between the protective tube (5) and the temperature measuring wire (4) inserted in the protective tube (5) is filled with refractory heat insulation filler. All the temperature measuring wires (4) in the protective tube (5) are wrapped by the refractory heat insulation filler and are relatively centered in the protective tube (5).

5. The online precision temperature measurement target heat treatment furnace according to claim 4, characterized in that: The protective pipe (5) is made of stainless steel corrugated pipe; the fire-resistant and heat-insulating filler is made of fire-resistant cotton; and the sealing element is made of fire-resistant cement that can be crushed.

6. A target material heat treatment furnace with online precise temperature measurement according to any one of claims 1 to 5, characterized in that: The furnace cavity is provided with a placement platform (6), which is located in the middle of the furnace cavity of the furnace body (1). The placement platform (6) includes multiple transverse support plates (61) spaced apart in the transverse direction and multiple longitudinal support plates (62) arranged in the longitudinal direction. Each transverse support plate (61) is intersected with each longitudinal support plate (62) to form a grid-shaped placement platform (6).

7. The online precision temperature measurement target heat treatment furnace according to claim 6, characterized in that: Each of the horizontal support plates (61) is arranged perpendicularly to each of the vertical support plates (62). Each horizontal support plate (61) intersects with each vertical support plate (62) to form multiple rectangular hollow areas that are arranged in a rectangular array and penetrate the placement platform (6). A grid-shaped support surface is formed on the top surface of the placement platform (6). The distance between adjacent horizontal support plates (61) is 50-300mm, the distance between adjacent vertical support plates (62) is 50-300mm, and the height of the placement platform (6) in the vertical direction is 80-500mm.

8. The target material heat treatment furnace with online precise temperature measurement according to claim 6, characterized in that: The furnace cavity is provided with a placement rack (7), and the placement platform (6) is fixedly installed on the upper part of the placement rack (7). The placement rack (7) includes a fixed frame (71) and multiple support rods (72). The fixed frame (71) is fixedly installed on the upper part of each support rod (72), and the placement platform (6) is fixedly installed inside the fixed frame (71).

9. The online precision temperature measurement target heat treatment furnace according to claim 8, characterized in that: Each side wall of the fixed frame (71) has a heat insulation gap with the inner wall of the furnace body (1), and the heat insulation gap is set to 100-350mm.

10. A target material heat treatment furnace with online precise temperature measurement according to claim 8, characterized in that: The fixed frame (71) is a rectangular frame formed by fixing four side plates. A support rod (72) is fixedly installed at each of the four corners of the fixed frame (71). The heat insulation gap between the outer wall of each side plate and the inner wall of the furnace body (1) is set to 150-200mm.

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