Recyclable flange and end cover structure for metal rotating target material

Abstract

The utility model relates to the technical field of operating platforms, and discloses a recyclable flange and end cover structure for a metal rotating target material, which comprises a target material, a flange is arranged at one end of the target material, a fixing sleeve is fixedly arranged at one end, far away from the flange, of the target material, and an end cover is inserted into the inner wall of the fixing sleeve. When the end cover needs to be disassembled, the adjusting sleeve slides along the outer wall of the target material, the adjusting groove compresses the spring, in the process, the mounting ball moves out of the mounting groove, the mounting ball slides towards the inner wall of the inner groove along an inclined face groove formed in the outer wall of the fixing sleeve, the connecting rod rotates by a certain angle, and the connecting rod drives the mounting ball to enter the inner groove; after the lower end of the mounting ball leaves the mounting groove, the end cover slides outwards along the inner wall of the fixing sleeve, and then the end cover can be disassembled, so that when the device breaks down, the target material, the flange and the end cover can be independently replaced, the whole body does not need to be replaced, and the use cost of the target material is reduced.

Description

A recyclable flange and end cap structure for a metal rotating target. Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a flange and end cap structure for recyclable metal rotating target material. Background Technology

[0002] The rotating target adopts a unique cylindrical design. Its core advantage lies in achieving uniform utilization of the target surface through physical rotation. This design not only optimizes material consumption during the sputtering process, but also ensures uniform distribution of the deposited material through continuous rotation. The rotation mechanism of the cylinder allows the sputtering beam to form a more uniform erosion trajectory on the target surface, thereby greatly improving the utilization rate of the target and ensuring high efficiency and consistency in the thin film deposition process.

[0003] The metal rotating target consists of flanges and end caps at both ends. However, the existing flanges and end caps are often integrally formed with the metal rotating target, making it inconvenient to disassemble them. When the target fails, the entire target often needs to be replaced, increasing the cost of using the target. Summary of the Invention

[0004] Given that existing metal rotating targets consist of flanges and end caps at both ends, but these flanges and end caps are often integrally formed with the metal rotating target, making it inconvenient to disassemble them, and when the target malfunctions, the entire target often needs to be replaced, increasing the cost of using the target, this utility model is proposed.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution: a recyclable flange and end cap structure for a rotating metal target, comprising a target, a flange at one end of the target, a fixed sleeve fixedly provided at the end of the target away from the flange, an end cap inserted into the inner wall of the fixed sleeve, an adjusting sleeve fitted onto the outer wall of the target away from the flange, an adjusting groove formed on the inner wall of the adjusting sleeve at the end near the target, multiple sets of inner grooves formed on the inner wall of the middle section of the adjusting sleeve, a limiting groove formed on the outer wall of the adjusting sleeve at the end away from the target, a limiting sleeve inserted into the inner wall of the limiting groove, a connecting rod provided on one side of the inner wall of the inner groove, a mounting ball provided at the lower end of the connecting rod, multiple sets of inclined grooves formed on the outer wall of the end cap, multiple sets of mounting grooves formed on the outer wall of the fixed sleeve at the lower end of the inclined groove, and a spring fitted onto the outer wall of the fixed sleeve within the adjusting groove.

[0006] As a preferred embodiment of the recyclable flange and end cap structure of the metal rotating target of this utility model, wherein the flange is threadedly inserted into the inner wall of the target.

[0007] As a preferred embodiment of the recyclable flange and end cap structure of the metal rotating target of this utility model, the end cap is movably inserted into the inner wall of the fixed sleeve, the adjusting sleeve is movably sleeved on the outer wall of the target through the adjusting groove, and the inner wall of the adjusting sleeve at the end away from the target is movably sleeved on the outer wall of the fixed sleeve.

[0008] As a preferred embodiment of the recyclable flange and end cap structure of the metal rotating target material described in this utility model, wherein: the limiting sleeve is fixedly sleeved on the outer wall of the fixed sleeve, and the limiting sleeve is movably inserted into the limiting groove.

[0009] As a preferred embodiment of the recyclable flange and end cap structure of the metal rotating target material described in this utility model, the upper and lower ends of the connecting rod are respectively hinged to the inner wall of the inner groove and the outer wall of the mounting ball.

[0010] As a preferred embodiment of the recyclable flange and end cap structure of the metal rotating target of this utility model, the inclined groove is formed as an inclined surface inclined towards the connecting rod, and the mounting ball can slide along the inclined surface of the inclined groove towards the inner groove.

[0011] As a preferred embodiment of the recyclable flange and end cap structure of the metal rotating target of this utility model, the spring is movably sleeved on the outer wall of the fixed sleeve, the spring is located in the adjustment groove, and the two ends of the spring are respectively fixedly connected to the inner wall of the adjustment groove and the outer wall of the target.

[0012] Compared with the prior art, the present invention has at least the following beneficial effects:

[0013] In this invention, when the end cap needs to be disassembled, the adjusting sleeve slides along the outer wall of the target material, compressing the spring in the adjusting groove. During this process, the mounting ball moves out of the mounting groove and slides along the inclined groove on the outer wall of the fixing sleeve towards the inner wall of the inner groove. The connecting rod rotates at a certain angle, and the connecting rod drives the mounting ball into the inner groove. After the lower end of the mounting ball leaves the mounting groove, the end cap slides outward along the inner wall of the fixing sleeve, thus completing the disassembly of the end cap. Therefore, when the device malfunctions, the target material, flange, and end cap can be replaced individually without replacing the entire device, reducing the cost of using the target material. Attached Figure Description

[0014] Figure 1 is a schematic diagram of the overall three-dimensional structure of the flange and end cap structure of the recyclable metal rotating target of this utility model.

[0015] Figure 2 is a three-dimensional cross-sectional view of the overall front view of the flange and end cap structure of the recyclable metal rotating target of this utility model.

[0016] Figure 3 is an enlarged three-dimensional structural diagram of the flange and end cap structure of the recyclable metal rotating target of this utility model at point A.

[0017] Figure 4 is a partial cross-sectional three-dimensional structural diagram of the flange and end cap structure of the recyclable metal rotating target of this utility model.

[0018] Explanation of reference numerals in the attached figures:

[0019] 1. Target material; 2. Flange; 3. Fixing sleeve; 4. End cap; 5. Adjusting sleeve; 6. Adjusting groove; 7. Inner groove; 8. Limiting groove; 9. Limiting sleeve; 10. Connecting rod; 11. Mounting ball; 12. Mounting groove; 13. Angled groove; 14. Spring. Detailed Implementation

[0020] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0021] Example 1

[0022] Referring to Figures 1-4, the first embodiment of this utility model provides a recyclable flange and end cap structure for a rotating metal target. This recyclable flange and end cap structure for a rotating metal target includes a target 1, a flange 2 at one end of the target 1, a fixing sleeve 3 fixedly provided at the end of the target 1 away from the flange 2, an end cap 4 inserted into the inner wall of the fixing sleeve 3, an adjusting sleeve 5 fitted on the outer wall of the target 1 away from the flange 2, an adjusting groove 6 opened on the inner wall of the adjusting sleeve 5 near the target 1, multiple sets of inner grooves 7 opened on the inner wall of the middle section of the adjusting sleeve 5, a limiting groove 8 opened on the outer wall of the adjusting sleeve 5 away from the target 1, a limiting sleeve 9 inserted into the inner wall of the limiting groove 8, a connecting rod 10 provided on one side of the inner wall of the inner groove 7, an installation ball 11 provided at the lower end of the connecting rod 10, multiple sets of inclined grooves 13 provided on the outer wall of the end cap 4, multiple sets of installation grooves 12 opened on the outer wall of the fixing sleeve 3 at the lower end of the inclined grooves 13, and a spring 14 fitted on the outer wall of the fixing sleeve 3 located in the adjusting groove 6.

[0023] Flange 2 is threaded into the inner wall of target 1.

[0024] The end cap 4 is movably inserted into the inner wall of the fixed sleeve 3, and the adjusting sleeve 5 is movably fitted onto the outer wall of the target material 1 through the adjusting groove 6. The inner wall of the adjusting sleeve 5 away from the target material 1 is movably fitted onto the outer wall of the fixed sleeve 3.

[0025] The limiting sleeve 9 is fixedly sleeved on the outer wall of the fixed sleeve 3, and the limiting sleeve 9 is movably inserted into the limiting groove 8.

[0026] The upper and lower ends of the connecting rod 10 are respectively hinged to the inner wall of the inner groove 7 and the outer wall of the mounting ball 11.

[0027] The inclined groove 13 is formed as an inclined surface that slopes towards the connecting rod 10, and the mounting ball 11 can slide along the inclined surface of the inclined groove 13 towards the inner groove 7.

[0028] Spring 14 is movably sleeved on the outer wall of fixed sleeve 3. Spring 14 is located in adjustment groove 6. Both ends of spring 14 are fixedly connected to the inner wall of adjustment groove 6 and the outer wall of target material 1, respectively.

[0029] During use, the inner wall of one end of the target material 1 is threaded to match the flange 2. By rotating the flange 2, the flange 2 and the target material 1 can be separated. When the end cover 4 needs to be separated, the adjusting sleeve 5 slides along the outer wall of the target material 1, and the adjusting groove 6 compresses the spring 14. During this process, the mounting ball 11 moves out of the mounting groove 12 and slides along the inclined groove 13 on the outer wall of the fixing sleeve 3 toward the inner wall of the inner groove 7. Since the lower and upper ends of the connecting rod 10 are hinged to the inner groove 7 and the mounting ball 11 respectively, the connecting rod 10 rotates at a certain angle and drives the mounting ball 11 into the inner groove 7. When the lower end of the mounting ball 11 leaves the mounting groove 12, the end cover 4 slides outward along the inner wall of the fixing sleeve 3, thus completing the disassembly of the end cover 4. Therefore, when the device malfunctions, the target material 1, flange 2, and end cover 4 can be replaced individually without replacing the whole device, reducing the usage cost of the target material 1.

[0030] When it is necessary to install the end cap 4, insert the end cap 4 into the fixing sleeve 3, loosen the adjusting sleeve 5, and under the reverse elastic force of the spring 14, the spring 14 drives the adjusting sleeve 5 to move away from the target material 1 until the limiting groove 8 and the limiting sleeve 9 contact. At this time, the inclined groove 13 and the mounting groove 12 are on the same vertical line. Under the action of gravity, the mounting ball 11 slides along the inner wall of the inclined groove 13 and is inserted into the mounting groove 12. At this time, the docking installation of the end cap 4 and the target material 1 is completed.

[0031] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A flange and end cap structure for recyclable metal rotating target material, comprising a target material (1), characterized in that: The target (1) has a flange (2) at one end, and a fixing sleeve (3) is fixedly provided at the end of the target (1) away from the flange (2). An end cap (4) is inserted into the inner wall of the fixing sleeve (3). An adjusting sleeve (5) is fitted on the outer wall of the target (1) away from the flange (2). An adjusting groove (6) is opened on the inner wall of the adjusting sleeve (5) near the target (1). Multiple sets of inner grooves (7) are opened on the inner wall of the middle section of the adjusting sleeve (5). The adjusting sleeve (5) away from the target (1) has an adjusting groove (6) at one end. A limiting groove (8) is provided on the outer wall of one end, and a limiting sleeve (9) is inserted into the inner wall of the limiting groove (8). A connecting rod (10) is provided on one side of the inner wall of the inner groove (7). An installation ball (11) is provided at the lower end of the connecting rod (10). Multiple sets of inclined grooves (13) are provided on the outer wall of the end cap (4). Multiple sets of installation grooves (12) are provided on the outer wall of the fixing sleeve (3) at the lower end of the inclined groove (13). A spring (14) is sleeved on the outer wall of the fixing sleeve (3) located in the adjustment groove (6).

2. The recyclable flange and end cap structure for a rotating metal target according to claim 1, characterized in that: The flange (2) is threaded into the inner wall of the target material (1).

3. The metal rotating target recyclable flange and end cap structure of claim 1, wherein: The end cap (4) is movably inserted into the inner wall of the fixed sleeve (3), and the adjusting sleeve (5) is movably fitted onto the outer wall of the target material (1) through the adjusting groove (6). The inner wall of the adjusting sleeve (5) away from the target material (1) is movably fitted onto the outer wall of the fixed sleeve (3).

4. The recyclable flange and end cap structure for a rotating metal target according to claim 1, characterized in that: The limiting sleeve (9) is fixedly sleeved on the outer wall of the fixed sleeve (3), and the limiting sleeve (9) is movably inserted into the limiting groove (8).

5. The metal rotating target recyclable flange and end cap structure of claim 1, wherein: The upper and lower ends of the connecting rod (10) are respectively hinged to the inner wall of the inner groove (7) and the outer wall of the mounting ball (11).

6. The recyclable flange and end cap structure for a rotating metal target according to claim 1, characterized in that: The inclined groove (13) is formed as an inclined surface that is inclined toward the connecting rod (10), and the mounting ball (11) can slide along the inclined surface of the inclined groove (13) toward the inner groove (7).

7. The metal rotating target recyclable flange and end cap structure of claim 1, wherein: The spring (14) is movably sleeved on the outer wall of the fixed sleeve (3). The spring (14) is located in the adjustment groove (6). The two ends of the spring (14) are fixedly connected to the inner wall of the adjustment groove (6) and the outer wall of the target material (1), respectively.

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