PVD (Physical Vapor Deposition) vacuum coating device

Abstract

The utility model relates to the field of vacuum coating devices, and discloses a PVD (Physical Vapor Deposition) vacuum coating device which comprises a box door, the box door is rotatably connected to the front side of the outer wall of a coating box through a hinge, a partition plate is fixed in the coating box, a voltage transmitter is arranged in an adjusting voltage box, a spraying hose is fixed at the output end of a liquid pump, and the spraying hose is connected with the liquid pump. And the spraying hose penetrates through the coating box and extends into the coating box, a spraying head is fixed to one end of the spraying hose, and a first driving motor is fixed to the rear side of the fixing plate. According to the utility model, through the cooperative use of the adjusting voltage box, the voltage transmitter, the liquid collecting box, the spraying hose and the spray head, the workpiece can be coated, and meanwhile, through the cooperative use of the fixing plate, the first driving motor and the rotating frame, the angle of the spray head can be adjusted, spraying coating at different angles can be realized, and the situation that part of areas are not coated is avoided; and it is ensured that the workpieces can be coated comprehensively and evenly, and the coating efficiency and the coating quality are improved.

Description

A PVD vacuum coating apparatus Technical Field

[0001] This utility model relates to the technical field of vacuum coating equipment, specifically a PVD vacuum coating equipment. Background Technology

[0002] PVD refers to a low-voltage, high-current arc discharge technology used under vacuum conditions. It utilizes gas discharge to evaporate the target material and ionize both the evaporated material and the gas. The electric field then accelerates the ionization, causing the evaporated material and its reaction products to deposit onto the workpiece. Vacuum coating equipment is mainly divided into two types: evaporation and sputtering.

[0003] According to Chinese Patent No. CN221720912U, a vacuum coating apparatus for PVD coating includes a coating apparatus body. A vacuum pumping component is provided at the upper end of the coating apparatus body. The vacuum pumping component includes a dustproof box and a vacuum pump. An air inlet pipe and an air outlet pipe are provided on the outside of the vacuum pump. A placement plate, a reversing adjustment component, and an adjusting voltage box are provided inside the coating apparatus body. A liquid collection tank is provided at the upper end of the adjusting voltage box. A voltage transmitter is provided inside the adjusting voltage box. A spray pipe is provided at the upper end of the liquid collection tank. A nozzle is installed at the end of the spray pipe.

[0004] In the above scheme, the workpiece is sprayed with a liquid collection tank, spray pipe and nozzle to perform coating, which has the following disadvantages: the angle of the nozzle cannot be adjusted when the device is in use, which may result in some areas of the workpiece not being coated, thus reducing the coating efficiency and coating quality. Summary of the Invention

[0005] The purpose of this invention is to provide a PVD vacuum coating device to solve the problem that the nozzle angle cannot be adjusted during use, which may result in some areas of the workpiece not being coated, thus reducing coating efficiency and coating quality.

[0006] To achieve the above-mentioned utility model objectives, the present utility model adopts the following technical solution: a PVD vacuum coating device, including a door, which is rotatably connected to the front side of the outer wall of the coating box via a hinge; a partition plate is fixed inside the coating box; an adjustable voltage box is fixed on the top surface of the coating box; a voltage transmitter is provided inside the adjustable voltage box; the voltage transmitter is electrically connected to the adjustable voltage box; a liquid collection box is provided on the top surface of the adjustable voltage box; a liquid pump is fixed on the front side of the outer wall of the liquid collection box; a connecting pipe is fixed between the liquid pump and the liquid collection box; a spray hose is fixed at the output end of the liquid pump; the spray hose passes through the coating box and extends into its interior; a nozzle is fixed at one end of the spray hose; a fixing plate is fixed on the inner wall of the coating box; a first drive motor is fixed on the rear side of the fixing plate; a rotating frame is fixed on the output shaft of the first drive motor; and the front end of the rotating frame is fixedly connected to the nozzle.

[0007] Preferably, a sliding hole is provided on one side of the fixed plate, and a slider is fixed on the rear side of the rotating frame, the slider being slidably disposed in the sliding hole.

[0008] Preferably, a vacuum pump is fixed to the right side of the outer wall of the coating chamber, and a vacuum tube is fixedly connected between the vacuum pump and the coating chamber.

[0009] Preferably, the top surface of the partition plate has a rotating hole, the bottom surface of the partition plate is fixed with a second drive motor, and the output shaft of the second drive motor is fixed with a placement disk.

[0010] Preferably, a sealing ring is fixed on the right side of the door.

[0011] Preferably, an observation hole is provided on one side of the door, and tempered glass is fixed inside the observation hole.

[0012] Compared with the prior art, a PVD vacuum coating apparatus adopting the above technical solution has the following advantages:

[0013] Beneficial effects:

[0014] I. In use, the operator first opens the chamber door, then places the workpiece to be coated on the partition plate, and then closes the chamber door. Next, by adjusting the voltage transmitter inside the voltage chamber to emit an electric arc, the liquid in the collection tank is atomized. The liquid is then transported to the spray hose and nozzle through a liquid pump and connecting pipe for spraying, thus coating the workpiece. Simultaneously, the operator starts the first drive motor, causing the rotating frame to rotate, which in turn drives the nozzle to rotate, achieving spray coating at different angles. By adjusting the coordination of the voltage chamber, voltage transmitter, collection tank, spray hose, and nozzle, the workpiece can be coated effectively. Furthermore, the coordination with the fixed plate, first drive motor, and rotating frame allows for adjustment of the nozzle angle, achieving spray coating at different angles and preventing uncoated areas. This ensures comprehensive and uniform coating of the workpiece, improving coating efficiency and quality.

[0015] Second, during use, the sliding hole and slider work together to limit the rotation of the rotating frame, preventing it and the nozzle from shifting during rotation and ensuring their stability. The vacuum pump and vacuum tube work together to create a vacuum inside the coating chamber, ensuring a clean and stable internal environment.

[0016] Thirdly, during use, rotating the workpiece allows the coating liquid to cover the workpiece surface more evenly, thereby improving coating quality and product performance. The sealing ring ensures a tight seal, maintaining the required vacuum level inside the coating chamber and preventing external air from entering after the door is closed. Workers can observe the interior of the coating chamber through the observation window, while tempered glass ensures safety during observation, allowing for timely detection of problems and appropriate action. Attached Figure Description

[0017] Figure 1 is a three-dimensional schematic diagram of the embodiment.

[0018] Figure 2 is an exploded view of an embodiment.

[0019] Figure 3 is an exploded view of the fixed plate and rotating frame in the embodiment.

[0020] Figure 4 is an exploded view of the partition plate and the placement tray in the embodiment.

[0021] In the diagram: 1. Box door; 2. Coating box; 3. Divider plate; 4. Voltage regulating box; 5. Voltage transmitter; 6. Liquid collection tank; 7. Liquid pump; 8. Connecting pipe; 9. Spray hose; 10. Spray head; 11. Fixing plate; 12. First drive motor; 13. Rotating frame; 14. Sliding hole; 15. Sliding block; 16. Vacuum pump; 17. Vacuum tube; 18. Rotating hole; 19. Second drive motor; 20. Placement tray; 21. Sealing ring; 22. Observation hole; 23. Tempered glass. Detailed Implementation

[0022] The preferred embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0023] As shown in Figures 1-4, a PVD vacuum coating apparatus includes a door 1, which is rotatably connected to the front side of the outer wall of a coating chamber 2 via a hinge. A partition plate 3 is fixed inside the coating chamber 2. An adjustable voltage box 4 is fixed on the top surface of the coating chamber 2. A voltage transmitter 5 is provided inside the adjustable voltage box 4 and is electrically connected to the adjustable voltage box 4. A liquid collection box 6 is provided on the top surface of the adjustable voltage box 4. A liquid pump 7 is fixed on the front side of the outer wall of the liquid collection box 6. A connecting pipe 8 is fixed between the liquid pump 7 and the liquid collection box 6. A spray hose 9 is fixed at the output end of the liquid pump 7. The spray hose 9 passes through the coating chamber 2 and extends into its interior. A nozzle 10 is fixed at one end of the spray hose 9. A fixing plate 11 is fixed on the inner wall of the coating chamber 2. A first drive motor 12 is fixed on the rear side of the fixing plate 11. A rotating frame 13 is fixed on the output shaft of the first drive motor 12. The front end of the rotating frame 13 is fixedly connected to the nozzle 10.

[0024] In use, the operator first opens the chamber door 1, then places the workpiece to be coated on the partition plate 3, and then closes the chamber door 1. Next, by adjusting the voltage transmitter 5 inside the voltage box 4 to emit an electric arc, the liquid in the liquid collection tank 6 is atomized. Then, the liquid is transported to the spray hose 9 and the nozzle 10 through the liquid pump 7 and connecting pipe 8 for spraying, thereby coating the workpiece. At the same time, the operator starts the first drive motor 12, which makes the rotating frame 13 rotate, thereby driving the nozzle 10 to rotate, so as to achieve spray coating at different angles.

[0025] By adjusting the coordination of the voltage box 4, voltage transmitter 5, liquid collection tank 6, spray hose 9, and nozzle 10, it is beneficial to coat the workpiece. At the same time, by coordinating with the fixed plate 11, the first drive motor 12, and the rotating frame 13, it is beneficial to adjust the angle of the nozzle 10 to achieve spray coating at different angles, avoiding the situation where some areas are not coated, ensuring that the workpiece can be coated comprehensively and evenly, and improving coating efficiency and coating quality.

[0026] As shown in Figures 1-3, a sliding hole 14 is provided on one side of the fixed plate 11, and a slider 15 is fixed on the rear side of the rotating frame 13. The slider 15 is slidably disposed in the sliding hole 14.

[0027] In use, the sliding hole 14 and the slider 15 work together to limit the rotation frame 13, prevent the rotation frame 13 and the nozzle 10 from shifting when rotating, and ensure the stability of the rotation frame 13 and the nozzle 10.

[0028] As shown in Figures 1, 2 and 4, a vacuum pump 16 is fixed on the right side of the outer wall of the coating box 2. A vacuum tube 17 is fixed between the vacuum pump 16 and the coating box 2. A rotating hole 18 is opened on the top surface of the partition plate 3. A second drive motor 19 is fixed on the bottom surface of the partition plate 3. A placement plate 20 is fixed on the output shaft of the second drive motor 19.

[0029] During use, the vacuum pump 16 and vacuum tube 17 work together to create a vacuum inside the coating chamber 2, ensuring a clean and stable internal environment. The operator places the workpiece to be coated on the top surface of the placement tray 20. When the coating process begins, the second drive motor 19 starts, and its output shaft drives the placement tray 20 to rotate. This causes the workpiece to rotate evenly during the coating process, improving coating efficiency and ensuring uniform coating on the workpiece surface. By rotating the workpiece, the coating liquid can be more evenly distributed across the workpiece surface, thereby improving coating quality and product performance.

[0030] As shown in Figures 1 and 2, a sealing ring 21 is fixed on the right side of the door 1, and an observation hole 22 is opened on one side of the door 1. A tempered glass 23 is fixed inside the observation hole 22.

[0031] During use, the sealing ring 21 serves to maintain a tight seal, ensuring that the coating chamber 2 maintains the required vacuum level and prevents external air from entering after the door 1 is closed. Personnel can observe the interior of the coating chamber 2 through the observation hole 22, while the tempered glass 23 ensures safety during observation, allowing personnel to promptly identify problems and take appropriate measures.

[0032] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A PVD vacuum coating apparatus, comprising a door (1), the door (1) being rotatably connected to the front side of the outer wall of a coating chamber (2) via a hinge, characterized in that, The coating tank (2) has a partition plate (3) fixed inside. A voltage regulating box (4) is fixed to the top surface of the coating tank (2). A voltage transmitter (5) is installed inside the voltage regulating box (4). The voltage transmitter (5) is electrically connected to the voltage regulating box (4). A liquid collecting tank (6) is installed on the top surface of the voltage regulating box (4). A liquid pump (7) is fixed to the front side of the outer wall of the liquid collecting tank (6). A connecting pipe (8) is fixed between the liquid pump (7) and the liquid collecting tank (6). A spray hose (9) is fixed to the output end of the liquid pump (7). The spray hose (9) passes through the coating box (2) and extends into its interior. A nozzle (10) is fixed to one end of the spray hose (9). A fixing plate (11) is fixed to the inner wall of the coating box (2). A first drive motor (12) is fixed to the rear side of the fixing plate (11). A rotating frame (13) is fixed to the output shaft of the first drive motor (12). The front end of the rotating frame (13) is fixedly connected to the nozzle (10).

2. The PVD vacuum coating apparatus according to claim 1, characterized in that: A sliding hole (14) is provided on one side of the fixed plate (11), and a slider (15) is fixed on the rear side of the rotating frame (13). The slider (15) is slidably disposed in the sliding hole (14).

3. The PVD vacuum coating apparatus according to claim 2, characterized in that: A vacuum pump (16) is fixed on the right side of the outer wall of the coating box (2), and a vacuum tube (17) is fixed between the vacuum pump (16) and the coating box (2).

4. The PVD vacuum coating apparatus according to claim 3, characterized in that: The top surface of the partition plate (3) is provided with a rotating hole (18), and the bottom surface of the partition plate (3) is fixed with a second drive motor (19). The output shaft of the second drive motor (19) is fixed with a placement plate (20).

5. The PVD vacuum coating device of claim 1, wherein: A sealing ring (21) is fixed on the right side of the box door (1).

6. The PVD vacuum coating device according to claim 5, characterized in that: An observation hole (22) is provided on one side of the box door (1), and tempered glass (23) is fixed inside the observation hole (22).

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